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Detailed Routing Algorithm with Optical Proximity Effects Constraint 被引量:1
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作者 周强 蔡懿慈 +1 位作者 张为 洪先龙 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第2期189-195,共7页
We present a detailed routing algorithm considering the optical proximity effect. The light intensity is calculated beforehand and stored in look-up tables. These costs are used as a constraint to guide the sequential... We present a detailed routing algorithm considering the optical proximity effect. The light intensity is calculated beforehand and stored in look-up tables. These costs are used as a constraint to guide the sequential routing. The routing algorithm is based on constructed force directed Steiner tree routing to enhance routing efficien- cy. Experimental results on industrial benchmark circuits show that the presented routing algorithm can obtain much improvement considering optical effects short runtime. 展开更多
关键词 optical proximity effect detailed routing Steiner tree YIELD
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Proximity effects in normal mental/spin-splitting material/superconductor junctions
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作者 郁华玲 董正超 《Chinese Physics B》 SCIE EI CAS CSCD 2007年第10期3072-3079,共8页
We extend the Blonder, Tinkham and Klapwijk (BTK) theory to the study of the coexistence between ferromagnetism and s-wave superconductivity in ferromagnet/superconductor (F/S) structures. It is found that the fer... We extend the Blonder, Tinkham and Klapwijk (BTK) theory to the study of the coexistence between ferromagnetism and s-wave superconductivity in ferromagnet/superconductor (F/S) structures. It is found that the ferromagnetism and s-wave superconductivity can coexist near the F/S interface, which is induced by proximity effects. On the F side, the density of states (DOS) exhibits some superconducting-like properties, and it displays a damped oscillation from ‘0' to ‘v' states with increasing either the thickness of F film or the exchange energy. We also study the influences of the spin-polarized exchange splitting in the F and the spin-degeneracy by Rashba spin-orbit coupling (RSOC) in the two-dimensional electron gas (2DGE) on the proximity effects. It is shown that the case of Rashba spin-degeneracy is very different from that of the spin-polarized exchange splitting. 展开更多
关键词 proximity effects ‘π' state Rashba spin-orbit coupling
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Proximity effects in topological insulator heterostructures
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作者 李晓光 张谷丰 +3 位作者 武光芬 陈铧 Dimitrie Culcer 张振宇 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第9期84-92,共9页
Topological insulators (Tls) are bulk insulators that possess robust helical conducting states along their interfaces with conventional insulators. A tremendous research effort has recently been devoted to TI-based ... Topological insulators (Tls) are bulk insulators that possess robust helical conducting states along their interfaces with conventional insulators. A tremendous research effort has recently been devoted to TI-based heterostructures, in which con- ventional proximity effects give rise to a series of exotic physical phenomena. This paper reviews our recent studies on the potential existence of topological proximity effects at the interface between a topological insulator and a normal insu- lator or other topologically trivial systems. Using first-principles approaches, we have realized the tunability of the vertical location of the topological helical state via intriguing dual-proximity effects. To further elucidate the control parameters of this effect, we have used the graphene-based heterostructures as prototypical systems to reveal a more complete phase diagram. On the application side of the topological helical states, we have presented a catalysis example, where the topo- logical helical state plays an essential role in facilitating surface reactions by serving as an effective electron bath, These discoveries lay the foundation for accurate manipulation of the real space properties of the topological helical state in TI- based heterostructures and pave the way for realization of the salient functionality of topological insulators in future device applications. 展开更多
关键词 topological insulator HETEROSTRUCTURE proximity effect CATALYSIS
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Magnetic proximity effect in the two-dimensional ε-Fe_(2)O_(3)/NbSe_(2)heterojunction
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作者 车冰玉 胡国静 +17 位作者 朱超 郭辉 吕森浩 刘轩冶 吴康 赵振 潘禄禄 祝轲 齐琦 韩烨超 林晓 李子安 申承民 鲍丽宏 刘政 周家东 杨海涛 高鸿钧 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第2期492-497,共6页
Two-dimensional(2D)magnet/superconductor heterostructures can promote the design of artificial materials for exploring 2D physics and device applications by exotic proximity effects.However,plagued by the low Curie te... Two-dimensional(2D)magnet/superconductor heterostructures can promote the design of artificial materials for exploring 2D physics and device applications by exotic proximity effects.However,plagued by the low Curie temperature and instability in air,it is hard to realize practical applications for the reported layered magnetic materials at present.In this paper,we developed a space-confined chemical vapor deposition method to synthesize ultrathin air-stable ε-Fe_(2)O_(3) nanosheets with Curie temperature above 350 K.The ε-Fe_(2)O_(3)/NbSe_(2) heterojunction was constructed to study the magnetic proximity effect on the superconductivity of the NbSe_(2) multilayer.The electrical transport results show that the subtle proximity effect can modulate the interfacial spin–orbit interaction while undegrading the superconducting critical parameters.Our work paves the way to construct 2D heterojunctions with ultrathin nonlayered materials and layered van der Waals(vdW)materials for exploring new physical phenomena. 展开更多
关键词 two-dimensional heterojunctions magnetic proximity effect non-layered magnetic nanosheet spin-orbit interaction
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Proximity Effect of Fe-Zn Bimetallic Catalysts on CO_(2) Hydrogenation Performance 被引量:4
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作者 Shengkun Liu Qiao Zhao +5 位作者 Xiaoxue Han Chongyang Wei Haoting Liang Yidan Wang Shouying Huang Xinbin Ma 《Transactions of Tianjin University》 EI CAS 2023年第4期293-303,共11页
The interaction between a promoter and an active metal crucially impacts catalytic performance.Nowadays,the influence of promoter contents and species has been intensively considered.In this study,we investigate the e... The interaction between a promoter and an active metal crucially impacts catalytic performance.Nowadays,the influence of promoter contents and species has been intensively considered.In this study,we investigate the effect of the iron(Fe)-zinc(Zn)proximity of Fe-Zn bimetallic catalysts on CO_(2)hydrogenation performance.To eliminate the size effect,Fe_(2)O_(3)and ZnO nanoparticles with uniform size are first prepared by the thermal decomposition method.By changing the loading sequence or mixing method,a series of Fe-Zn bimetallic catalysts with different Fe-Zn distances are obtained.Combined with a series of characterization techniques and catalytic performances,Fe-Zn bimetallic proximity for compositions of Fe species is discussed.Furthermore,we observe that a smaller Fe-Zn distance inhibits the reduction and carburization of the Fe species and facilitates the oxidation of carbides.Appropriate proximity of Fe and Zn(i.e.,Fe_1Zn_(1)-imp and Fe_(1)Zn_(1)-mix samples)results in a suitable ratio of the Fe_5C_(2)and Fe_(3)O_(4)phases,simultaneously promoting the reverse water-gas shift and Fischer-Tropsch synthesis reactions.This study provides insight into the proximity effect of bimetallic catalysts on CO_(2)hydrogenation performance. 展开更多
关键词 CO_(2)hydrogenation Fe-based catalyst PROMOTER proximity effect
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A New Method to Retrieve Proximity Effect Parameters in Electron-Beam Lithography 被引量:2
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作者 康晓辉 李志刚 +2 位作者 刘明 谢常青 陈宝钦 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第3期455-459,共5页
A new method for determining proximity parameters α,β ,and η in electron beam lithography is introduced on the assumption that the point exposure spread function is composed of two Gaussians.A single line i... A new method for determining proximity parameters α,β ,and η in electron beam lithography is introduced on the assumption that the point exposure spread function is composed of two Gaussians.A single line is used as test pattern to determine proximity effect parameters and the normalization approach is adopted in experimental data transaction in order to eliminate the need of measuring exposure clearing dose of the resist.Furthermore,the parameters acquired by this method are successfully used for proximity effect correction in electron beam lithography on the same experimental conditions. 展开更多
关键词 electron beam lithography proximity effect electron-beam proximity correction
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Fabrication of Sub-20nm Metal Nanogaps from Nanoconnections by the Extended Proximity Effect
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作者 孙艳 陈鑫 戴宁 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第9期1666-1669,共4页
We describe the fabrication of metal nanogaps of sub-20nm in feature size using the proximity effect in electron beam lithography (EBL). The proximity effect is extended to develop a flexible and practical method fo... We describe the fabrication of metal nanogaps of sub-20nm in feature size using the proximity effect in electron beam lithography (EBL). The proximity effect is extended to develop a flexible and practical method for preparing metal (e. g. Au or Ag) nanogaps and arrays in combination with a transfer process (e. g., deposition/lift-off). Different from the direct gap-writing process,the nanogap precursor structures (nanoconnections) were designed by GDSII software and then written by electron beam. Following a deposition and lift-off process, the metal nanogaps were obtained and the nanogap size can be lowered to -10nm by controlling the exposure dose in EBL. 展开更多
关键词 metal nanogap nanofabrication proximity effect electron beam lithography
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Controlled vapor growth of 2D magnetic Cr_(2)Se_(3)and its magnetic proximity effect in heterostructures 被引量:1
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作者 Danliang Zhang Chen Yi +5 位作者 Cuihuan Ge Weining Shu Bo Li Xidong Duan Anlian Pan Xiao Wang 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第9期25-30,共6页
Two-dimensional(2D)magnetic materials have aroused tremendous interest due to the 2D confinement of magnetism and potential applications in spintronic and valleytronic devices.However,most of the currently 2D magnetic... Two-dimensional(2D)magnetic materials have aroused tremendous interest due to the 2D confinement of magnetism and potential applications in spintronic and valleytronic devices.However,most of the currently 2D magnetic materials are achieved by the exfoliation from their bulks,of which the thickness and domain size are difficult to control,limiting the practical device applications.Here,we demonstrate the realization of thickness-tunable rhombohedral Cr_(2)Se_(3)nanosheets on different substrates via the chemical vapor deposition route.The magnetic transition temperature at about 75 K is observed.Furthermore,van der Waals heterostructures consisting of Cr_(2)Se_(3)nanosheets and monolayer WS2 are constructed.We observe the magnetic proximity effect in the heterostructures,which manifests the manipulation of the valley polarization in monolayer WS2.Our work contributes to the vapor growth and applications of 2D magnetic materials. 展开更多
关键词 Cr_(2)Se_(3) magnetic proximity effect HETEROSTRUCTURES
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Magnetic proximity effect induced spin splitting in two-dimensional antimonene/Fe_(3)GeTe_(2) van der Waals heterostructures
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作者 Xiuya Su Helin Qin +2 位作者 Zhongbo Yan Dingyong Zhong Donghui Guo 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第3期488-496,共9页
Recently, two-dimensional van der Waals(vd W) magnetic heterostructures have attracted intensive attention since they can show remarkable properties due to the magnetic proximity effect. In this work, the spin-polariz... Recently, two-dimensional van der Waals(vd W) magnetic heterostructures have attracted intensive attention since they can show remarkable properties due to the magnetic proximity effect. In this work, the spin-polarized electronic structures of antimonene/Fe_(3)GeTe_(2)vdW heterostructures were investigated through the first-principles calculations. Owing to the magnetic proximity effect, the spin splitting appears at the conduction-band minimum(CBM) and the valence-band maximum(VBM) of the antimonene. A low-energy effective Hamiltonian was proposed to depict the spin splitting. It was found that the spin splitting can be modulated by means of applying an external electric field, changing interlayer distance or changing stacking configuration. The spin splitting energy at the CBM monotonously increases as the external electric field changes from-5 V/nm to 5 V/nm, while the spin splitting energy at the VBM almost remains the same. Meanwhile,as the interlayer distance increases, the spin splitting energies at the CBM and VBM both decrease. The different stacking configurations can also induce different spin splitting energies at the CBM and VBM. Our work demonstrates that the spin splitting of antimonene in this heterostructure is not singly dependent on the nearest Sb–Fe distance, which indicates that magnetic proximity effect in heterostructures may be modulated by multiple factors, such as hybridization of electronic states and the local electronic environment. The results enrich the fundamental understanding of the magnetic proximity effect in two-dimensional vdW heterostructures. 展开更多
关键词 first-principles calculations antimonene/Fe_(3)GeTe_(2)vdW heterostructures magnetic proximity effect spin splitting
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Phase coherence of the electron and hole in a ferromagnetic film in proximity with a superconductor
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作者 郁华玲 王之国 彭菊 《Chinese Physics B》 SCIE EI CAS CSCD 2008年第12期4627-4634,共8页
The scattering matrix approach between the clean and dirty limits is developed for the study of tunnelling spectra in a ferromagnetic film in proximity to a superconductor. The minigap and the damped oscillation from ... The scattering matrix approach between the clean and dirty limits is developed for the study of tunnelling spectra in a ferromagnetic film in proximity to a superconductor. The minigap and the damped oscillation from '0' to '~' state in tunnelling conductance are attributed to the phase coherence of the electrons and the corresponding Andreev-reflected holes in the ferromagnetic film. The calculated results provide a reasonable explanation for the behaviour observed in recent experiments. 展开更多
关键词 proximity effect coherent transport sequential transport
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Magnetic Proximity Effect in an Antiferromagnetic Insulator/Topological Insulator Heterostructure with Sharp Interface
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作者 Yuxin Liu Xuefan Niu +3 位作者 Rencong Zhang Qinghua Zhang Jing Teng Yongqing Li 《Chinese Physics Letters》 SCIE CAS CSCD 2021年第5期84-88,共5页
We report an experimental study of electron transport properties of MnSe/(Bi,Sb)_2Te_3 heterostructures,in which MnSe is an antiferromagnetic insulator,and(Bi,Sb)_2Te_3 is a three-dimensional topological insulator(TI)... We report an experimental study of electron transport properties of MnSe/(Bi,Sb)_2Te_3 heterostructures,in which MnSe is an antiferromagnetic insulator,and(Bi,Sb)_2Te_3 is a three-dimensional topological insulator(TI).Strong magnetic proximity effect is manifested in the measurements of the Hall effect and longitudinal resistances.Our analysis shows that the gate voltage can substantially modify the anomalous Hall conductance,which exceeds 0.1 e^(2)/h at temperature T=1.6 K and magnetic field μ_0H=5 T,even though only the top TI surface is in proximity to MnSe.This work suggests that heterostructures based on antiferromagnetic insulators provide a promising platform for investigating a wide range of topological spintronic phenomena. 展开更多
关键词 DIRAC Magnetic proximity Effect in an Antiferromagnetic Insulator/Topological Insulator Heterostructure with Sharp Interface SHARP
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Proximity Effect in Normal-Superconductor Hybrids at the Nanoscale
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作者 Henning Soller 《Journal of Applied Mathematics and Physics》 2014年第8期745-752,共8页
We analyse the proximity effect in hybrid nanoscale junctions involving superconducting leads. We develop a general framework for the analysis of the proximity effect using the same theoretical methods typically emplo... We analyse the proximity effect in hybrid nanoscale junctions involving superconducting leads. We develop a general framework for the analysis of the proximity effect using the same theoretical methods typically employed for the analysis of conductance properties. We apply our method to a normal-superconductor tunnel contact and compare our results to previous results. 展开更多
关键词 SUPERCONDUCTORS proximity Effect Hybrid Nanoscale Junctions CONDUCTANCE
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A biocompatible Horner-Wadsworth-Emmons(HWE)reaction triggered by a bioorthogonal proximity-induced platform
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作者 Yayue Wang Haojie Yang +7 位作者 Jie Li Qiao Kong Siming Zhou Hongbao Sun Lili Pan Qiyong Gong Ping Feng Haoxing Wu 《Chinese Chemical Letters》 SCIE CAS CSCD 2024年第8期217-220,共4页
Here,we present a novel bioorthogonal platform that enables precise positioning of attached moieties in close proximity,thereby facilitating the discovery and optimization of biocompatible reactions.Using this platfor... Here,we present a novel bioorthogonal platform that enables precise positioning of attached moieties in close proximity,thereby facilitating the discovery and optimization of biocompatible reactions.Using this platform,we achieve a Horner-Wadsworth-Emmons(HWE)reaction under physiological conditions,generating a fluorophore in situ with a yield of up to 93%.This proximity platform should facilitate the discovery of various types of biocompatible reactions,making it a versatile tool for biomedical applica-tions. 展开更多
关键词 Biocompatible reactions Horner-Wadsworth-Emmons reaction Bioorthogonal reactions TETRAZINES proximity effects
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Transition-edge sensors using Mo/Au/Au tri-layer films
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作者 王沪兵 吕越 +3 位作者 李冬雪 赵越 高波 王镇 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第2期509-513,共5页
The proximity effect to reduce the transition temperature of a superconducting film is frequently used in transitionedge sensors. Here, we develop these transition-edge sensors using Mo/Au/Au tri-layer films to detect... The proximity effect to reduce the transition temperature of a superconducting film is frequently used in transitionedge sensors. Here, we develop these transition-edge sensors using Mo/Au/Au tri-layer films to detect soft x-rays. They are equipped with an overhanging photon absorber. We reduce the fabrication complexity by integrating the sensor patterning with the tri-layer film formation. We determine the electro-thermal parameters of the sensors through a series of resistance vs. temperature and current vs. voltage measurements. We also demonstrate their energy-resolving capability by using a55Fe radioactive x-ray source. The best energy resolution was approximately 6.66 eV at 5.9 keV, with a theoretical count rate of 500 Hz. 展开更多
关键词 transition-edge sensors proximity effect ELECTROPLATING
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Nanophononic metamaterials induced proximity effect in heat flux regulation
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作者 Jian Zhang Haochun Zhang Gang Zhang 《Frontiers of physics》 SCIE CSCD 2024年第2期149-156,共8页
Recent studies have shown that the construction of nanophononic metamaterials can reduce thermal conductivity without affecting electrical properties,making them promising in many fields of application,such as energy ... Recent studies have shown that the construction of nanophononic metamaterials can reduce thermal conductivity without affecting electrical properties,making them promising in many fields of application,such as energy conversion and thermal management.However,although extensive studies have been carried out on thermal conductivity reduction in nanophononic metamaterials,the local heat flux characteristic is still unclear.In this work,we construct a heat flux regulator which includes a silicon nanofilm with silicon pillars.The regulator has remarkable heat flux regulation ability,and various impacts on the regulation ability are explored.Surprisingly,even in the region without nanopillars,the local heat current is still lower than that in pristine silicon nanofilms,reduced by the neighboring nanopillars through the thermal proximity effect.We combine the analysis of the phonon participation ratio with the intensity of localized phonon modes to provide a clear explanation.Our findings not only provide insights into the mechanisms of heat flux regulation by nanophononic metamaterials,but also will open up new research directions to control local heat flux for a broad range of applications,including heat management,thermoelectric energy conversion,thermal cloak,and thermal concentrator. 展开更多
关键词 nanophononic metamaterials proximity effect
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Comparison of three formulations for eddy-current problems in a spiral coil electromagnetic acoustic transducer
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作者 石文泽 吴运新 +3 位作者 龚海 赵志然 范吉志 谭良辰 《Journal of Central South University》 SCIE EI CAS CSCD 2016年第4期817-824,共8页
Three differential equations based on different definitions of current density are compared. Formulation I is based on an incomplete equation for total current density (TCD). Formulations II and {I1 are based on inc... Three differential equations based on different definitions of current density are compared. Formulation I is based on an incomplete equation for total current density (TCD). Formulations II and {I1 are based on incomplete and complete equations for source current density (SCD), respectively. Using the weak form of finite element method (FEM), three formulations were applied in a spiral coil electromagnetic acoustic transducer (EMAT) example to solve magnetic vector potential (MVP). The input impedances calculated by Formulation III are in excellent agreement with the experimental measurements. Results show that the errors for Formulations I & II vary with coil diameter, coil spacing, lift-off distance and external excitation frequency, for the existence of eddy-current and skin & proximity effects. And the current distribution across the coil conductor also follows the same trend. It is better to choose Formulation I instead of Formulation Ili to solve MVP when the coil diameter is less than twice the skin depth for Formulation I is a low cost and high efficiency calculation method. 展开更多
关键词 electromagnetic acoustic transducer (EMAT) eddy current finite element method (FEM) skin and proximity effects spiral coil
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The stability of Majorana fermion in correlated quantum wire
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作者 张德平 田光善 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第8期208-217,共10页
In this paper, we investigate the effect of the Coulomb interaction between electrons on the stability of Majorana fermion in a heterostructure of s-wave superconductor and quantum wire. In particular, by using the bo... In this paper, we investigate the effect of the Coulomb interaction between electrons on the stability of Majorana fermion in a heterostructure of s-wave superconductor and quantum wire. In particular, by using the bosonization method and the renormalization group technique, we show that interplay between the so-called umklapp electron–electron scattering process and the superconducting proximity effect plays an extremely important role in determining the phase diagram of the system. We find that, at half-filling, the strong umklapp scattering process suppresses not only the superconducting pairing interaction and hence, destabilizes Majorana fermion in the quantum wire, but aslo results in a Mott insulating state.However, if the proximity effect is sufficiently strong, the topological superconducting phase can still survive and support Majorana fermion in the heterostructure. Furthermore, the existence of a critical Luttinger liquid phase is also found in a narrow region of parameters. 展开更多
关键词 Majorana fermion proximity effects p-wave pairing heterostructure
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Coexistence of ferromagnetism and superconductivity in normal mental/superconductor/ferromagnet structures
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作者 郁华玲 彭菊 金本喜 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第8期554-558,共5页
We extend the Blonder, Tinkham and Klapwijk theory to the study of the inverse proximity effects in the normal mental/superconductor/ferromagnet structures. In the superconducting film, there are the gapless supercond... We extend the Blonder, Tinkham and Klapwijk theory to the study of the inverse proximity effects in the normal mental/superconductor/ferromagnet structures. In the superconducting film, there are the gapless superconductivity and the spin-dependent density of states both within and without the energy gap. It indicates an appearance of the inverse-proximity-effect-induced ferromagnetism and a coexistence of ferromagnetism and superconductivity near the interface. The influence of exchange energy in the ferromagnet and barrier strength at the superconductor/ferromagnet interface on the inverse proximity effects is discussed. 展开更多
关键词 coexistence of ferromagnetism and superconductivity inverse proximity effects normal mental/superconductor/ferromagnet structures
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Regioselectivity Differentiation in Metalations of 3,5-Dichloro-Tertiary versus Secondary Benzamides
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作者 Francesca Khani Tina Fleming +3 位作者 Carleton Collins Erica Tabakin Lynn M. Bradley David A. Hunt 《International Journal of Organic Chemistry》 CAS 2016年第2期142-146,共5页
Metalation regioslectivity of 3,5-dichlorobenzamides is a function of the type of amide (secondary versus tertiary) used in the sequence. Metalation at the 2-position (adjacent to the carboxamide functional group) occ... Metalation regioslectivity of 3,5-dichlorobenzamides is a function of the type of amide (secondary versus tertiary) used in the sequence. Metalation at the 2-position (adjacent to the carboxamide functional group) occurs when the secondary benzamide is metalated with sec-butyllithium/ TMEDA mediated through complex-induced proximity effects (CIPE) process, whereas metalation with sec-butyllithium/TMEDA occurs exclusively at the 4-position when the tertiary benzamide is used under identical reaction conditions. 展开更多
关键词 Directed Ortho-Metalation Complex-Induced proximity effects (CIPE) 3 5-Dichlorobenzamides
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An All-E-Beam Lithography Process for the Patterning of 2D Photonic Crystal Waveguide Devices
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作者 余和军 余金中 陈绍武 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2006年第11期1894-1899,共6页
We present an all-e-beam lithography (EBL) process for the patterning of photonic crystal waveguides. The whole device structures are exposed in two steps. Holes constituting the photonic crystal lattice and defects... We present an all-e-beam lithography (EBL) process for the patterning of photonic crystal waveguides. The whole device structures are exposed in two steps. Holes constituting the photonic crystal lattice and defects are first exposed with a small exposure step size (less than 10nm). With the introduction of the additional proximity effect to compensate the original proximity effect, the shape, size, and position of the holes can be well controlled. The second step is the exposure of the access waveguides at a larger step size (about 30nm) to improve the scan speed of the EBL. The influence of write-field stitching error can be alleviated by replacing the original waveguides with tapered waveguides at the joint of adjacent write-fields. It is found experimentally that a higher exposure efficiency is achieved with a larger step size;however,a larger step size requires a higher dose. 展开更多
关键词 photonic crystal e-beam lithography stitching problem proximity effect correction
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