Fabrication of the surface micro-texture on the C-plane sapphire is undertaken by a355 nm Ultraviolet(UV)pulsed laser.The surface micro-textures of sapphire with different laser scanning line spacing ranging from 10 l...Fabrication of the surface micro-texture on the C-plane sapphire is undertaken by a355 nm Ultraviolet(UV)pulsed laser.The surface micro-textures of sapphire with different laser scanning line spacing ranging from 10 lm to 100 lm are obtained,where the selection range of scanning line spacing is controlled in the range of the groove width and plasma width to obtain a surface of high Peak-Valley(PV)value.A reasonable processing order is proposed to manufacture different types of surface micro-textures on sapphire by laser ablation trajectory regulation.In the multiple-passes laser ablation of sapphire by the UV nanosecond pulsed laser,the scanning lines in each direction is treated as once scanning.On this basis,the multiple processing can be carried out to avoid the influence of the subsequent scanning on the machined groove.In addition,the effect of different scanning line spacing on the PV value is quantified and different types of surface microtextures on sapphire,including the squares,the rhombuses and the hexagons,are successfully fabricated,which can be applied in the friction reduction or anti-reflection field.展开更多
基金supported by the National Natural Science Foundation of China(No.51805257)the China Postdoctoral Science Foundation(No.2019TQ0151)+3 种基金the National Natural Science Foundation of China for Creative Research Groups(No.51921003)the Foundation of Graduate Innovation Center in NUAA,China(No.KFJJ20190502)the Postgraduate Research&Practice Innovation Program of Jiangsu Province,China(No.KYCX19_0162)the Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology,China。
文摘Fabrication of the surface micro-texture on the C-plane sapphire is undertaken by a355 nm Ultraviolet(UV)pulsed laser.The surface micro-textures of sapphire with different laser scanning line spacing ranging from 10 lm to 100 lm are obtained,where the selection range of scanning line spacing is controlled in the range of the groove width and plasma width to obtain a surface of high Peak-Valley(PV)value.A reasonable processing order is proposed to manufacture different types of surface micro-textures on sapphire by laser ablation trajectory regulation.In the multiple-passes laser ablation of sapphire by the UV nanosecond pulsed laser,the scanning lines in each direction is treated as once scanning.On this basis,the multiple processing can be carried out to avoid the influence of the subsequent scanning on the machined groove.In addition,the effect of different scanning line spacing on the PV value is quantified and different types of surface microtextures on sapphire,including the squares,the rhombuses and the hexagons,are successfully fabricated,which can be applied in the friction reduction or anti-reflection field.
