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Scanning Measurement Method of Dispersion Mini-spot by Quadrant Photodetector
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作者 DANG Li-ping LIU Jun-hua TANG Shu-gang 《Semiconductor Photonics and Technology》 CAS 2006年第1期61-66,共6页
Quadrant photodetector is a new type position detector, which has already been applied to many fields such as measurement, target tracking, control, laser collimation, guidance, etc. System performance is related to l... Quadrant photodetector is a new type position detector, which has already been applied to many fields such as measurement, target tracking, control, laser collimation, guidance, etc. System performance is related to laser spot area received by the quadrant photodetector. The optimum linear output signal of system is gotten only when the size of laser dispersion spot is well-proportioned to the detector photosensitive area. A method to measure the mini-spot received by detector and to adjust it in real time is presented, which is based on the quadrant geometrical and optical structure, making use of tilting mirror scanning, the sequence output signal of detector is gotten, then measurement model is built with rate of signal change as characteristic variable, the radius of the laser dispersion spot and adjustable value of dispersion are calculated. The experiment result shows that the maximum error is 0.58μm in measurement range of 0.5mm±0.1mm. 展开更多
关键词 quadrant photodetector Dispersion spot Defocusing amount
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