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退火工艺对射频磁控溅射Bi:YIG薄膜磁性能的影响 被引量:6
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作者 杨青慧 张怀武 +1 位作者 刘颖力 文岐业 《材料研究学报》 EI CAS CSCD 北大核心 2008年第2期187-190,共4页
对于用射频磁控溅射技术在Si基片上制备的Bi:YIG系薄膜,用快速循环退火方法对其进行晶化处理,研究了退火温度对Bi:YIG薄膜结晶状态和形貌的影响,以及退火气氛和循环周期对薄膜性能的影响.结果表明,用快速循环退火可以在Si单晶基片上得... 对于用射频磁控溅射技术在Si基片上制备的Bi:YIG系薄膜,用快速循环退火方法对其进行晶化处理,研究了退火温度对Bi:YIG薄膜结晶状态和形貌的影响,以及退火气氛和循环周期对薄膜性能的影响.结果表明,用快速循环退火可以在Si单晶基片上得到磁性能优良的薄膜(饱和磁化强度139 kA/m,矫顽力6.37 kA/m)并使薄膜形貌有较大改善,在石英基片上制备的薄膜法拉第角比常规退火的薄膜增大了约一倍. 展开更多
关键词 无机非金属材料 快速循环退火 Bi:YIG薄膜 饱和磁化强度 矫顽力
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Study of magnetic and magneto-optical properties of heavily doped bismuth substitute yttrium iron garnet (Bi∶YIG) film 被引量:2
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作者 YANG Qinghui ZHANG Huaiwu LIU Yingli 《Rare Metals》 SCIE EI CAS CSCD 2006年第z1期557-561,共5页
The magnetic and magneto-optical properties of heavily doped Bi∶YIG film were studied. The film was deposited by radio frequency magnetron sputtering method and crystallized by rapid recurrent thermal annealing (RRTA... The magnetic and magneto-optical properties of heavily doped Bi∶YIG film were studied. The film was deposited by radio frequency magnetron sputtering method and crystallized by rapid recurrent thermal annealing (RRTA). The results show that the RRTA treated film has good properties both in microwave and optical wave band. The saturation magnetization of the film on different substrates varies from 135.7 to 138.6 kA·m-1. The coercive field of the film on GGG substrate is about 0.32 kA·m-1, while about 0.8-1.43 kA·m-1 on YAG substrate and 1.75 kA·m-1 on Al2O3 substrate. The Faraday angle is about 3-5 (°)·μm-1 when optical wavelength ranges at 450-600 nm. The transmission spectra of the Bi∶YIG films on three substrates has similar change as annealing temperature below 800 ℃. Specially, when annealing temperature is above 800 ℃ a step is observed between 550 and 650 nm wavelength for the film deposited on Al2O3 substrate.Three results are very useful in magneto-optical recording application and integrated microwave devices. 展开更多
关键词 magneto-optical effect rapid recurrent thermal annealing (rrta) Faraday effect radio frequency magnetron sputtering
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Influence of Nanocrystallization on Magnetic Properties of the Co-Based Alloys Thin Films
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作者 蒋向东 张怀武 文岐业 《Journal of Electronic Science and Technology of China》 2004年第2期60-64,共5页
The rapid recurrent thermal annealing (RRTA) method has been used to amorphous Co-Nb-Zr soft magnetic thin films fabricated by DC sputtering. By using this method, in this paper, the crystalline grains with diameter o... The rapid recurrent thermal annealing (RRTA) method has been used to amorphous Co-Nb-Zr soft magnetic thin films fabricated by DC sputtering. By using this method, in this paper, the crystalline grains with diameter of about 30~90 nm are formed and the partial nanocrystallization of the films is realized. As a result, the soft magnetic properties of the Co-based nanocrystalline thin films are improved greatly after RRTA: their resistivity is a quarter decreased; the average initial permeability is enhanced from 3 500 to over 5 000; the impedance is increased form 20 ~100 ?(at 1.4 GHz); the resonance peak is moved about 200 MHz down to low frequency. The evident improvement enables the Co-based nanocrystalline thin films to be used over a much wide frequency range of 1 KHz ~1.5 GHz. 展开更多
关键词 soft magnetic thin film Co base rapid recurrent thermal annealing NANOCRYSTALLINE
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