Vol.43,No.3,2007 NEXT GENERATION LITHOGRAPHY——IMPRINT LITHOGRAPHY DING Yucheng LIU Hongzhong LU Bingheng LI Dichen (State Key Laboratory of Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 71004...Vol.43,No.3,2007 NEXT GENERATION LITHOGRAPHY——IMPRINT LITHOGRAPHY DING Yucheng LIU Hongzhong LU Bingheng LI Dichen (State Key Laboratory of Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China) 1展开更多
文摘Vol.43,No.3,2007 NEXT GENERATION LITHOGRAPHY——IMPRINT LITHOGRAPHY DING Yucheng LIU Hongzhong LU Bingheng LI Dichen (State Key Laboratory of Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China) 1