Characteristics of Refractory Metal Gate MOS Capacitor with Improved Sputtering Process for Gate Electrode

The technique to improve the performance of W/TiN stacked gate MOS capacitor with 3nm gate oxide is reported by optimizing the sputtering process of a refractory metal gate electrode and adopting a proper anneal temperature to eliminate the damages.Specific methods involved in the optimization of sputtering process include:selecting a proper TiN thickness to reduce stresses;using a smaller sputtering rate to suppress the damages to gate dielectric and adopting a higher N 2/Ar ratio during the TiN sputtering process to further nitride the gate dielectric.With these measures,excellent C V curves are obtained and surface state density ( N ss ) is successfully reduced to below 8×10 10 cm -2 ,which is comparable to the polysilicon gate MOS capacitor.

Phase Evolution and Magnetic Studies of La and Refractory Metals Co-substituted α-Fe/R_2Fe_(14)B-type Nanocomposites

Phase evolution and magnetic properties of (Nd_o.95La_0.05)9.5-11Febal.M_2B10.5. where M=Cr, Ti, Nb, V, Mo, Zr, Hf, Ta, Mn or W, melt spun ribbons have been investigated. Almost all the alloy ribbons. except for(Nd_0.95La_0.05)_9.5Fe_78M_2B_10.5(M=Mo and Mn),consist merely two magnetic phases, namely α-Fe and R_2Fe_14B, which display a better combination of _iH_c and magnetic energy product. Remanence (Br) and coercivity (i_H_c) values in the range of 8.0 to 9.1 kG and 9.5 to 18.9 kOe. respectively, can be achieved. Among compositions studied, the Ti and W-substitutions were found to be most effective in increasing the Br and i_H_c, respectively. For a fixed refractory metal substitution, namely, M=C_r, Ti or Nb, an increase in the total rare earth concentration resulted in nanocomposites of small grain sizes and a high volume fraction of the R_2Fe_14B phase, leading to an increase in the magnetic properties.

In-situ preparation, modulation and mechanism of refractory metal carbide gradient coating

TiC, ZrC and TaC modified layers were in-situ prepared on graphite matrix by chemical vapor infiltration method with metal salts as the activator. Taking the TiC modified layer as an example, through thermodynamic calculation and experiment, the thermal decomposition process of raw materials(Ti/K_(2)TiF_(6)) was analyzed, the formation mechanism of TiC was determined, and the distribution of TiC modified layer was modulated. The results show that activator K_(2)TiF_(6)has higher decomposition temperature than NH4Cl, which is conducive to improving the utilization rate of raw materials in the gas infiltration process. Increasing the content of Ti powder can increase the concentration of reaction gas and contribute to the formation of TiC modified layer. When the molar ratio of Ti to K_(2)TiF_(6)is 3:1, the surface thickness and infiltration depth of Ti C are 5.42 and 136.24 μm, respectively. Increasing the reaction temperature can improve the rate of in-situ reaction and the thickness of TiC surface layer. When the experimental temperature rises to 1600 °C, the TiC surface layer thickness increases to 20.27 μm.

Fine structure and phase composition of Fe–14Mn–1.2C steel:influence of a modified mixture based on refractory metals

The effect of TiO;,ZrO;and Na;AlF;ultrafine powders on the fine structure and the phase composition of Fe–14Mn–1.2C steel was investigated.The introduction of the ultrafine powders into the melt influenced the grain size,the quantity,and the character of distribution of nonmetallic inclusions in the railroad frogs.The microstructure of castings was improved significantly because of the refinement of the grain structure and an increase of the grain-boundary area.After the modifying mixture was introduced into the melt,either the microtwins of one or two intersecting systems or the precipitations of ε-martensite of different types,or simultaneously the microtwins and wafers of ε-martensite,were present in each grain.

Pressureless two-step sintering of ultrafine-grained refractory metals:Tungsten-rhenium and molybdenum

The challenge of sintering ultrafine-grained refractory metals and alloys to full density is hereby addressed by pressureless two-step sintering in tungsten-rhenium alloy and pure molybdenum. Using properly processed nano powders(~50 nm average particle size), we are able to sinter W-10Re alloy to 98.4% density below 1200 ℃ while maintaining a fine grain size of 260 nm, and sinter molybdenum to 98.3% density below 1120 ℃ while maintaining a fine grain size of 290 nm. Compared to normal sintering,two-step sintering offers record-fine grain sizes and better microstructural uniformity, which translates to better mechanical properties with higher hardness(6.3 GPa for tungsten-rhenium and 4.0 GPa for molybdenum, both being the highest in all pressurelessly sintered samples of the respective material system)and larger Weibull modulus. Together with our previous demonstration in tungsten, we believe that twostep sintering is a general effective method to produce high-quality fine-grained refractory metals and alloys, and the lessons learned here are transferable to other materials for powder metallurgy.

Effects of Al and Mo on high temperature oxidation behavior of refractory high entropy alloys

Refractory high entropy alloys have superior mechanical properties at high temperatures, and the oxidation behavior of these alloys is very important. The present work investigated the high temperature oxidation behavior of three alloys with compositions of TiNbTa0.5Zr, TiNbTa0.5ZrAl and TiNbTa0.5ZrAlMo0.5, and the effects of alloying elements were discussed. Results indicated that the oxidation rates of the TiNbTa0.5Zr and TiNbTa0.5ZrAl alloys are controlled by diffusion, and obey the exponential rule. However, the oxidation rate of the TiNbTa0.5ZrAlMo0.5 alloy is controlled by interface reaction, and obeys the linear rule. The addition of Al leads to a better oxidation resistance by forming a protective oxide scale. However, the protection of Al-rich scale is weakened by the addition of Mo. Extensive pores and cracks occur in the oxide scale of the TiNbTa0.5ZrAlMo0.5 alloy, resulting in a significant decrease in oxidation resistance.

Effects of La on microstructure and mechanical properties of NbMoTiVSi0.2 refractory high entropy alloys

To study the effects of La on the microstructure and mechanical properties of refractory high entropy alloys,NbMoTiVSi0.2 alloys with different La contents were prepared.Phase constitution,microstructure evolution,compressive properties and related mechanisms were systematically studied.Results show that the alloys with La addition are composed of BCC solid solution,eutectic structure,MSi2 disilicide phase and La-containing precipitates.Eutectic structure and most of La precipitates are formed at the grain boundaries.Disilicide phase is formed in the grains.La can change the grain morphologies from dendritic structure to near-equiaxed structure,and the average grain size decreases from 180 to 20μm with the increase of La content from 0 to 0.5 at.%.Compressive testing shows that the ultimate strength and the yield strength increase with the increase of La content,which is resulted from the grain boundary strengthening.However,they cannot be greatly improved because of the formation of MSi2 disilicide phase with low strength.The ductility decreases with the increase of La content,which is due to the La precipitates and brittle MSi2 disilicide phase.

Refractory Raw Materials

Products： tabular alumina, sintered mullite, rare earth corundum, active alumina, 99 alumina ceramic ball, ceramic lining and Zirconia ring series.

Effects of Tungsten and Boron Contents on Crystallization Temperature and Microhardness of Tungsten Based Metallic Glasses

Effects of tungsten and boron contents on the thermal properties and microhardness of W-Fe-B metallic glass system were studied. Thin foils, with thicknesses of 20 and 100 ktm, of the alloys were produced by piston and anvil method in an arc furnace. The structures of the foils were investigated by X-ray diffraction. Thermal stabilities of the alloys were examined by using differential scanning calorimetry. 20-μm- thick foils of all the alloys were determined to be fully amorphous, but crystalline phases were detected in the 100-μm-thick foils. It was found that crystallization temperatures of the alloys are between 1060 and 1177 K. Tungsten and boron content increases improve the crystallization temperature and microhardness of the alloys significantly, but deteriorate the glass forming ability of the alloys. It was also observed that for constant Fe content, increasing tungsten content to the level higher than that of boron content does not result in any further improvement in crystallization temperature, but improves glass forming ability significantly. The alloy containing highest total amount of tungsten and boron, W35Fe35B3o, has the highest crystallization temperature, 1177 K, and microhardness, 1634 HV.

Magnetron co-sputtering synthesis and nanoindentation studies of nanocrystalline(TiZrHf)_(x)(NbTa)_(1–x)high-entropy alloy thin films

Refractory high-entropy alloys(HEAs)possess many useful properties such as high strength and high-temperature stability.So far,most studies on refractory HEAs have been limited to a few well-known compositions and on their coarse-grain bulk forms.Here we fabricate nanocrystalline(TiZrHf)_(x)(NbTa)_(1−x)HEA thin films with a large range of compositions(x=0.07–0.90)by the direct current(DC)magnetron co-sputtering technique and measure their mechanical properties using the nanoindentation method.All the as-deposited HEA thin films show a solid-solution body-centered cubic(bcc)structure.As the compositional ratio(x)increases,the elastic modulus decreases from 153 to 123 GPa,following the trend of the rule of mixture.As x increases,the hardness first decreases from 6.5 GPa(x=0.07)to the lowest value(4.6 GPa,x=0.48)and then increases to the highest value(7.1 GPa,x=0.90),showing a concave trend.The change in hardness might be attributed to the combinational influence caused by the atomic size and modulus effects,as well as the texture effect.The authors also propose a few open questions for future studies on this and related HEA systems.

Effect of Ni content in Cu_(1-x)Ni_(x) coating on microstructure evolution and mechanical properties of W/Mo joint via low-temperature diffusion bonding

The 93 W and Mo1 refractory metals were bonded with different Cu_(1-x)Ni_(x) coating interlayers of various Ni content using plasma-activated sintering at 700℃.The effects of the Ni content in the Cu_(1-x)Ni_(x) coating interlayer on the interfacial microstructure evolution and mechanical properties of the W/Mo joints were studied.The maximum average shear strength of the W/Mo joint was 316.5 MPa when the Ni content of the Cu_(1-x)Ni_(x) coating interlayer was 25%.When the Ni content of the Cu_(1-x)Ni_(x) coating interlayer was below 50%,the atomic diffusion at the W/Mo joint interface was adequate without the formation of intermetallic compounds,as demonstrated by the High Resolution Transmission Electron Microscope analyses of the joints.The presence of Ni in Cu_(1-x)Ni_(x) promoted diffusion bonding at the interface,which contributed to the high mechanical properties of the W/Mo joint.With an increase in the Ni content of the Cu_(1-x)Ni_(x) coating interlayer,the Mo Ni intermetallic compound(IMC)nucleated and grew at the Cu1-xNix coating/Mo1 interface.When the Ni content of the Cu_(1-x)Ni_(x) coating interlayer was above 50%,the generation of a brittle Mo Ni IMC weakened the shear strength of the W/Mo joint dramatically.