Novel construction of a resonant-cavity-enhanced photodetector(RCE-PD) with monolithic high-contrast grating(HCG)is proposed to overcome the difficulty of fabricating a high reflective mirror of RCE-PD at 1 550 nm. In...Novel construction of a resonant-cavity-enhanced photodetector(RCE-PD) with monolithic high-contrast grating(HCG)is proposed to overcome the difficulty of fabricating a high reflective mirror of RCE-PD at 1 550 nm. In this structure,HCG serves as the top mirror of the RCE-PD, whereas InGaAs serves as a sacrificial layer to achieve monolithic integration.During the bandwidth optimization, the ratio of the thickness of the total intrinsic region and the absorption layer is introduced to realize the simultaneous optimization of the thickness of spacing layers and absorption layer. After structural optimization, the quantum efficiency of the device with diameter of 20 μm is 82% at 1 550 nm, and the 3-dB bandwidth is 34 GHz at a bias of 3 V.展开更多
本文报道了一种能够实现高速、高灵敏度的 In P基谐振腔增强型 (RCE)光电探测器。它采用衬底入光方式 ,解决了在 In P衬底上外延生长的 In P/In Ga As P介质膜分布布拉格反射镜 (DBR)反射率低的问题 ,该探测器的吸收层厚度为 0 .2 μm,...本文报道了一种能够实现高速、高灵敏度的 In P基谐振腔增强型 (RCE)光电探测器。它采用衬底入光方式 ,解决了在 In P衬底上外延生长的 In P/In Ga As P介质膜分布布拉格反射镜 (DBR)反射率低的问题 ,该探测器的吸收层厚度为 0 .2 μm,在波长 1.5 83μm处获得了 80 %的峰值量子效率。同时为了降低探测器的固有电容 ,利用质子注入技术使得器件的部分电极绝缘 。展开更多
基金supported by the National Natural Science Foundation of China(Nos.61674018,61574019 and 61674020)the Specialized Research Fund for the Doctoral Program of Higher Education of China(No.20130005130001)the Beijing Municipality Natural Science Foundation(No.4132069)
文摘Novel construction of a resonant-cavity-enhanced photodetector(RCE-PD) with monolithic high-contrast grating(HCG)is proposed to overcome the difficulty of fabricating a high reflective mirror of RCE-PD at 1 550 nm. In this structure,HCG serves as the top mirror of the RCE-PD, whereas InGaAs serves as a sacrificial layer to achieve monolithic integration.During the bandwidth optimization, the ratio of the thickness of the total intrinsic region and the absorption layer is introduced to realize the simultaneous optimization of the thickness of spacing layers and absorption layer. After structural optimization, the quantum efficiency of the device with diameter of 20 μm is 82% at 1 550 nm, and the 3-dB bandwidth is 34 GHz at a bias of 3 V.
文摘本文报道了一种能够实现高速、高灵敏度的 In P基谐振腔增强型 (RCE)光电探测器。它采用衬底入光方式 ,解决了在 In P衬底上外延生长的 In P/In Ga As P介质膜分布布拉格反射镜 (DBR)反射率低的问题 ,该探测器的吸收层厚度为 0 .2 μm,在波长 1.5 83μm处获得了 80 %的峰值量子效率。同时为了降低探测器的固有电容 ,利用质子注入技术使得器件的部分电极绝缘 。
