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Millimeter wave dielectric loaded exponentially tapered slot antenna array using substrate integrated waveguide for gigabit wireless communications
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作者 S Ramesh T Rama Rao 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2015年第5期513-519,共7页
A new and upcoming application is the use of 60 GHz antennas for high date rate point-to-point connections to serve Gigabit(Gi-Fi)w ireless communications.The design of M illimeter w ave(M m W)antennas has to cope w i... A new and upcoming application is the use of 60 GHz antennas for high date rate point-to-point connections to serve Gigabit(Gi-Fi)w ireless communications.The design of M illimeter w ave(M m W)antennas has to cope w ith the unadorned influences of manufacturing tolerances and losses at 60 GHz.In this paper,the concept of Substrate Integrated Waveguide(SIW)and Exponentially Tapered Slot(ETS)antenna w ere used together to design a high gain,efficient planar dielectric loaded antenna for M m W Gi-Fi w ireless communications at 60 GHz.The SIW is used to feed the antenna and a dielectric is utilized in front of the antenna to increase the gain.The dielectric loaded ETS antenna and compact SIW feed w ere fabricated on a single substrate,resulting in low cost and easy fabrication.The antenna w ith elliptical shaped dielectric loaded w as fabricated using printed circuit board process.The measured gain of the single element antenna is 10.2 dB,w hile the radiation efficiency of 96.84%is obtained at 60 GHz.The Y-junction SIW pow er divider is used to form a 1×4 array structure.M easured gain of the 1×4 array antenna is 13.3 dB,w hile the measured radiation pattern and gain are almost constant w ithin the w ide bandw idth of the antenna. 展开更多
关键词 MILLIMETER WAVES 60 GHz EXPONENTIALLY tapered SLOT antenna dielectric loading substrate integrated waveguide
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Realization of Tapered Waveguide by Stretching the Rod Waveguide
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作者 XIAKe-yu YURong-jin MENGHua-mao 《Semiconductor Photonics and Technology》 CAS 2004年第2期82-85,共4页
By stretching the rod waveguide with different velocities in opposite directions,the tapered waveguide can be fabricated.In condition of taking no account of volume expansion caused by heating and under the assumption... By stretching the rod waveguide with different velocities in opposite directions,the tapered waveguide can be fabricated.In condition of taking no account of volume expansion caused by heating and under the assumptions of volume conservation,the rod waveguide can be stretched freely in the heated region without being stretched outside of the heated region. A model,which shows the relation of the transition shape and the two factors,that is the ratio of two velocity and the heated region length,is presented for the shape of the taper transition through mathematic deduction.Based on this model,a desired tapered waveguide can be fabricated.The tapered waveguide are widely used for fabricating tapered fiber couplers and sensors.In addition,the conclusion can be used for fabricating fused fiber coupler. 展开更多
关键词 光纤耦合器 锥形波导 拉伸 杆波导
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A two-stage amplifier of laser eavesdropping model based on waveguide fiber taper
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作者 Mei-ting Wang Yan Zhu Yi-ning Mu 《Defence Technology(防务技术)》 SCIE EI CAS CSCD 2019年第1期95-97,共3页
In order to improve ability of amplification about optical arrival angle in laser eavesdropping system, and enhance receiving field of view (FOV) of laser eavesdropping system, this paper presents a new multistage amp... In order to improve ability of amplification about optical arrival angle in laser eavesdropping system, and enhance receiving field of view (FOV) of laser eavesdropping system, this paper presents a new multistage amplifier laser eavesdropping model based on waveguide fiber taper. First of all, taking about four-quadrant (4QD) laser eavesdropping model as an example, from the theoretical view, analyses factors that, currently, laser eavesdropping system face many restrictive factors during practical applications. Besides, from the receiving FOV and ability of amplification about arrival angle of incoming optical axis angles, systematically analyses advantages of multi-stage amplifier model. What’s more,through constructing laser eavesdropping test platform, we demonstrate Signal to Noise Ratio(SNR) of two stage amplification model is eventually promoted to 6-10 dB compared with one amplifying model,especially in low and high audio level, the advantages is more obvious. 展开更多
关键词 LASER EAVESDROPPING waveguide FIBER taper 4QD
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大功率脉冲量子级联激光器锥形波导光学与热学仿真设计
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作者 张程程 张东亮 +5 位作者 王锐 罗明馨 林青华 郑显通 祝连庆 王伟平 《红外与激光工程》 EI CSCD 北大核心 2024年第5期35-45,共11页
针对脊形波导结构的大功率脉冲量子级联激光器面临的光束质量差和热积累严重的问题,研究了一种新型锥形波导量子级联激光器结构设计方法。通过COMSOL软件仿真优化脉冲功率60 W,重复频率10 kHz输出的锥形量子级联激光器光学和热学特性,... 针对脊形波导结构的大功率脉冲量子级联激光器面临的光束质量差和热积累严重的问题,研究了一种新型锥形波导量子级联激光器结构设计方法。通过COMSOL软件仿真优化脉冲功率60 W,重复频率10 kHz输出的锥形量子级联激光器光学和热学特性,分析了不同几何参数对波导光场模式分布、传输特性和最大内部温度的影响以及不同热沉材料、热沉温度和脉冲宽度对核心层内部温度分布的影响。结果表明,在4.6μm的波长下,直波导宽度为5μm,在锥度角为1.9°,直波导/锥形波导长度比为1∶3,可以保证直波导产生TM基模输出,整个端口的透射率、反射率、损耗、光限制因子达到最好效果。在同脊宽条件下,对于3 mm腔长,该锥形波导结构激光器核心区的面积对比条形的脊波导结构大10倍左右,更有利于大功率输出。此外,基于该结构进行了不同脉冲模式下的热学仿真分析,为器件工作模式和封装方式的选择提供有益参考。文中研究相关结论可为后续工艺设计和实验验证提供数据支持。 展开更多
关键词 量子级联激光器 脉冲 锥形波导 COMSOL光学仿真 热学仿真
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1.55μm高功率单横模半导体激光器的研制
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作者 薛正群 池炳坤 陈玉萍 《发光学报》 EI CAS CSCD 北大核心 2024年第7期1189-1195,共7页
1.55μm高功率半导体激光器广泛应用于长距离主干网光网络、无人驾驶等领域,在应用系统中更高的激光出光功率有利于提升系统的工作距离和接收端的信噪比;随着光电子集成和共封装光学的快速发展,其高光电集成密度要求激光器具备低功耗等... 1.55μm高功率半导体激光器广泛应用于长距离主干网光网络、无人驾驶等领域,在应用系统中更高的激光出光功率有利于提升系统的工作距离和接收端的信噪比;随着光电子集成和共封装光学的快速发展,其高光电集成密度要求激光器具备低功耗等性能。本文通过优化激光器外延P-InP掺杂,激光器室温下串联电阻从3.2Ω降低至2.2Ω,器件电阻性能优于相同结构对比器件,300 mA电流下器件电功耗从510 mW降低至430 mW。进一步采用锥形波导结构提高激光器增益体积,测试结果显示,锥形波导结构使激光器出光功率提升17%以上,同时器件电功耗无明显增加;室温低电流下器件最高光电转换效率接近50%,与相关研究报道结果优值相当;远场测试结果显示,激光器水平方向发散角有效降低,同时器件光束质量未发生明显变化。实验结果为面向光电子集成应用的低功耗高功率半导体激光器提供了研究基础。 展开更多
关键词 1.55μm InP/InGaAsP 高功率激光器 P型掺杂 锥形波导
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Design of a TE_(10) Taper Used in the LHCD Launcher for EAST 被引量:1
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作者 王晓洁 刘甫坤 +1 位作者 贾华 匡光力 《Plasma Science and Technology》 SCIE EI CAS CSCD 2008年第4期499-502,共4页
Calculations of the TE10 tapered waveguide, which will be used in the 4.6 GHz lower hybrid current drive (LHCD) launcher on the EAST, are presented. The calculations are performed in two ways, namely by directly sol... Calculations of the TE10 tapered waveguide, which will be used in the 4.6 GHz lower hybrid current drive (LHCD) launcher on the EAST, are presented. The calculations are performed in two ways, namely by directly solving the classical coupling wave equations, and by using the simulation code of the high frequency structure simulator (HFSS). According to the calculations, the voltage standing wave ratio (VSWR) of the designed tapered waveguide can be less than 1.01 within a bandwidth of ±100 MHz. 展开更多
关键词 tapered waveguide coupling wave theory LHCD
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Spatial separation of spectrum inside the tapered metamaterial optical waveguide 被引量:2
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作者 CHENG XiaoChao FU QuanHong ZHAO XiaoPeng 《Chinese Science Bulletin》 SCIE EI CAS 2011年第2期209-214,共6页
In this work,the optical metamaterials based on silver dendritic cells are prepared by electrochemical deposition,and its transmission and focusing behaviors are investigated.The experimental results show that the opt... In this work,the optical metamaterials based on silver dendritic cells are prepared by electrochemical deposition,and its transmission and focusing behaviors are investigated.The experimental results show that the optical metamaterials reveal a multiple pass-band transmission spectrum and a prominent focusing effect at the wavelength corresponding to the maximum transmission coefficient.Two optical metamaterial samples are combined into a tapered optical waveguide,and the spectra of transmitted light at the surface of the tapered optical waveguide is measured by using the fiber spectrometer along the light propagation direction.The results demonstrate that each frequency component of the wave packet is stopped at a different waveguide thickness,leading to the spatial separation of its spectrum.The spatial separation of spectrum can be effectively tuned by adjusting the inclination of the tapered optical waveguide,which can be used for storing photons and slow-light research. 展开更多
关键词 介质光波导 锥形波导 谱空间 分离 光纤光谱仪 频谱 传输系数 电化学沉积
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Low Loss S-Bend Structure With Tapered Curved Waveguides
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作者 Yu-Pin Liao Ruei-Chang Lu (Department of Electronic Engineering, Ching Yun Institute of Technology, 229, Chien-Hsin Rd., Jung-Li,Taoyuan, 32020,Taiwan, Tel: 886-03-4581196, Fax: 886-03-4588924, E-mail: Iyp@mail.cyit.edu.tw) ( Department of Electronic Engineering, I-Lan Institute of Technology, 1, Shen-Nung Rd., ILan, 260,Taiwan) 《光学学报》 EI CAS CSCD 北大核心 2003年第S1期301-302,共2页
A novel S-bend with tapered curved waveguides is proposed. The normalized transmitted power is greater than the conventional bend with weakly guided waveguides. Small size and low loss can be reached by the proposed S... A novel S-bend with tapered curved waveguides is proposed. The normalized transmitted power is greater than the conventional bend with weakly guided waveguides. Small size and low loss can be reached by the proposed S-bend. 展开更多
关键词 for ET in with TE Low Loss S-Bend Structure With tapered Curved waveguides of from TM THAN
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Finite Element - Artificial Transmitting Boundary Method for Acoustical Field on Tapered Waveguide
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作者 J. S. Yang G F. Fan +2 位作者 J. P. Zhu C.K. Sun Y. H. Zhu 《光学学报》 EI CAS CSCD 北大核心 2003年第S1期167-168,共2页
In earlier approach, the 2-D acoustical field profiles on the substrate region are often calculated with BPM. In this paper, we present a new approach based on the finite element -artificial transmitting boundary meth... In earlier approach, the 2-D acoustical field profiles on the substrate region are often calculated with BPM. In this paper, we present a new approach based on the finite element -artificial transmitting boundary method and calculate acoustical field on the substrate region. 展开更多
关键词 for in of AOTF on Artificial Transmitting Boundary Method for Acoustical Field on tapered waveguide Finite Element
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薄膜铌酸锂反向锥形端面耦合器 被引量:1
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作者 向美华 于硕 +1 位作者 李德阳 杨登才 《北京工业大学学报》 CAS CSCD 北大核心 2023年第7期737-745,共9页
薄膜铌酸锂波导与单模光纤在模场尺寸上存在很大差异,模场失配严重,导致两者直接耦合的效率低下。针对薄膜铌酸锂波导与超高数值孔径(ultra-high numerical aperture, UHNA)光纤的端面耦合问题,基于时域有限差分(finite difference time... 薄膜铌酸锂波导与单模光纤在模场尺寸上存在很大差异,模场失配严重,导致两者直接耦合的效率低下。针对薄膜铌酸锂波导与超高数值孔径(ultra-high numerical aperture, UHNA)光纤的端面耦合问题,基于时域有限差分(finite difference time domain, FDTD)法优化设计了反向锥形端面耦合器的结构参数,仿真实现了薄膜铌酸锂矩形波导与UHNA光纤的高效耦合。利用电子束曝光、电感耦合等离子体刻蚀等工艺,制备了反向锥形耦合器,设计并建立了端面耦合测试平台,完成了反向锥形耦合器的性能测试。实验结果表明,反向锥形耦合器近场输出光斑在水平和垂直方向的模场直径分别为3.3和3.6μm,水平和垂直方向的3 dB对准容差分别为3.0和3.2μm,单端插入损耗为6.24 dB/面,表明设计制作的反向锥形耦合器具有较好的耦合性能。该研究为大容量、高速率的集成光子器件与光纤之间的耦合提供了高耦合效率的光接口方案。 展开更多
关键词 光波导 超高数值孔径光纤 薄膜铌酸锂 时域有限差分法(FDTD) 端面耦合 反向锥形耦合器
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基于锥形渐变耦合结构的可扩展多模弯曲波导
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作者 林健 刘雨潇 +3 位作者 符强 李军 汪鹏君 陈伟伟 《光子学报》 EI CAS CSCD 北大核心 2023年第7期227-236,共10页
提出了一种基于锥形渐变耦合结构的可扩展多模弯曲波导。该器件利用模式等效折射率匹配原理,通过对称的锥形渐变耦合结构,实现高阶模式与基模的相互转化,完成多模弯曲传输功能。同时,结合时域有限差分方法和粒子群优化算法,优化锥形渐... 提出了一种基于锥形渐变耦合结构的可扩展多模弯曲波导。该器件利用模式等效折射率匹配原理,通过对称的锥形渐变耦合结构,实现高阶模式与基模的相互转化,完成多模弯曲传输功能。同时,结合时域有限差分方法和粒子群优化算法,优化锥形渐变耦合结构区域,提升器件性能。实验测试结果表明,在1520~1600 nm的波长范围内,当输入模式分别为TE_0、TE_1、TE_2、TE_(3)和TE_(4)时,该器件的插入损耗分别小于1.71 dB、3.04 dB、2.90 dB、3.16 dB和4.00 dB,对应的串扰分别小于-10.60 dB、-11.35 dB、-10.92 dB、-10.35 dB和-11.45 dB。 展开更多
关键词 集成光学 多模弯曲波导 粒子群算法 锥形耦合器 有限时域差分法
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零偏压下近红外集成单波长波导光探测器
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作者 高松 牛慧娟 +3 位作者 李真 范鑫烨 段晓峰 黄永清 《聊城大学学报(自然科学版)》 2023年第5期49-55,共7页
提出了一种基于InGaAsP材料的零偏压单片集成波导光探测器。该器件单片集成了光子晶体(Photonic Crystals,PC)滤波器、锥形耦合器、零偏压波导光探测器(Wave-Guide Photodetector,WGPD)以及直波导,形成了一个平面微纳光信号接收子系统... 提出了一种基于InGaAsP材料的零偏压单片集成波导光探测器。该器件单片集成了光子晶体(Photonic Crystals,PC)滤波器、锥形耦合器、零偏压波导光探测器(Wave-Guide Photodetector,WGPD)以及直波导,形成了一个平面微纳光信号接收子系统。集成的波导光探测器吸收峰值波长位于1.55μm处,光谱线宽仅1.6 nm。设计的波导光探测器在无外加偏压时具有良好性能,经优化,当其面积为4μm×15μm时其3 dB带宽达78 GHz@0 V,响应度为0.78 A/W。整个器件基于组分可调的InGaAsP材料,实现多功能器件的单片集成,具有高性能、小体积、低功耗、窄线宽等特性。 展开更多
关键词 单片集成 光子晶体滤波器 锥形耦合器 波导光探测器 零偏压
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Efficient adiabatic silicon-on-insulator waveguide taper 被引量:10
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作者 Yunfei Fu Tong Ye +1 位作者 Weijie Tang Tao Chu 《Photonics Research》 SCIE EI CAS 2014年第3期S0041-S0044,共4页
A silicon-on-insulator-based adiabatic waveguide taper with a high coupling efficiency and small footprint is presented.The taper was designed to reduce the incidence of mode conversion to higher-order and radiation m... A silicon-on-insulator-based adiabatic waveguide taper with a high coupling efficiency and small footprint is presented.The taper was designed to reduce the incidence of mode conversion to higher-order and radiation modes inside the waveguide.In connecting a 0.5-μm-wide output waveguide and a 12-μm-wide input waveguide of a grating coupler,a compact 120-μm-long taper was demonstrated,achieving a transmission of 98.3%.Previously,this transmission level could only be achieved using a conventional linear taper with a length of more than 300μm. 展开更多
关键词 waveguide taper ADIABATIC
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Statistical analysis on the influence of mechanical parameters in the vibration of pylons
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作者 Georgios I.Dadoulis George D.Manolis 《Earthquake Engineering and Engineering Vibration》 SCIE EI CSCD 2023年第1期263-278,共16页
We present a statistical investigation of the degree of influence that assumptions made in relation to the mechanical parameters of a pylon have on its ground-induced vibrations.The study is set up by using as a key k... We present a statistical investigation of the degree of influence that assumptions made in relation to the mechanical parameters of a pylon have on its ground-induced vibrations.The study is set up by using as a key kinematic variable the displacement at the top of a reference,a stand-alone pylon with a uniform cross-section and fixity at its base.Next,statistics are produced using a dimensionless displacement ratio defined between the‘parental’and the‘subsidiary’cases,the latter defined for the pylon(a)resting on compliant soil,(b)having an attached top mass,and(c)being non-uniform with height.Furthermore,two materials are examined,namely,steel and reinforced concrete(R/C).More specifically,this displacement ratio is independent of the excitation and plays the role of a transfer function between the base and the top of the pylon.Both horizontal and vertical motions are considered,and the equations of motion are solved in the frequency domain.The ensuing statistical analysis is conducted for the following parameter combinations:(a)pylon founded on soft,intermediate,and stiff soil;(b)low,intermediate,and high-mass ratios of the attached mass to the pylon′s mass;(c)a constant and quadratic degree of pylon tapering with height.Spearman correlation coefficients are calculated for all the above combinations to arrive at statistical results that establish validity bounds and quantify the degree of influence of each assumption on the pylon′s response. 展开更多
关键词 pylons statistical analysis spearman coefficients structural vibrations elastic waveguides attached masses soil springs taperING
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高亮度锥形半导体激光器 被引量:7
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作者 李景 邱运涛 +5 位作者 曹银花 王青 尧舜 秦文斌 刘友强 王智勇 《发光学报》 EI CAS CSCD 北大核心 2016年第8期990-995,共6页
介绍了由双量子阱非对称波导结构外延片刻蚀成的带有脊形波导结构的锥形半导体激光器。该激光器有效抑制了p型区域对激光的影响,减小了半导体激光快轴方向的发散角,同时采用脊形结构和锥形结构的组合获得了高亮度激光。实验中,在电流7 ... 介绍了由双量子阱非对称波导结构外延片刻蚀成的带有脊形波导结构的锥形半导体激光器。该激光器有效抑制了p型区域对激光的影响,减小了半导体激光快轴方向的发散角,同时采用脊形结构和锥形结构的组合获得了高亮度激光。实验中,在电流7 A时获得了中心波长963 nm、连续功率4.026 W的激光输出。测得慢轴方向和快轴方向激光光束参数乘积分别为1.593 mm·mrad和0.668 mm·mrad。 展开更多
关键词 半导体激光器 锥形波导 脊形波导 高亮度 高光束质量
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降低AWG插入损耗和串扰设计新方法(英文) 被引量:6
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作者 许英朝 张国伟 +3 位作者 鄂书林 张大明 邓文渊 唐晓辉 《光子学报》 EI CAS CSCD 北大核心 2007年第2期224-228,共5页
在AWG器件的设计中引入了抛物线型的楔形波导结构,根据过渡区理论优化了引入的抛物线型楔形结构的形状和尺寸.采用抛物线型楔形结构代替直线型楔形结构,AWG的插入损耗降低了2 dB左右.在优化参数时使输出/输入波导间距与阵列波导间距取... 在AWG器件的设计中引入了抛物线型的楔形波导结构,根据过渡区理论优化了引入的抛物线型楔形结构的形状和尺寸.采用抛物线型楔形结构代替直线型楔形结构,AWG的插入损耗降低了2 dB左右.在优化参数时使输出/输入波导间距与阵列波导间距取不同的值,并使输出/输入波导间距适当增大,而阵列波导间距取较小值,这样使得串扰降至-30 dB以下且插入损耗保持在低水平.运用光束传播方法给出器件的输出光谱并证实了理论上预想的结果. 展开更多
关键词 阵列波导光栅 楔形 插入损耗 串扰
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矩形波导管弯曲壁厚减薄特点分析 被引量:5
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作者 胡福泰 彭加耕 +1 位作者 臧新良 汪飞雪 《塑性工程学报》 CAS CSCD 北大核心 2018年第5期212-216,共5页
根据弯曲前后变形材料体积不变的原则,推导了波导管最大壁厚变化量的简化计算式,与实测数据对比证明壁厚简化计算式可对弯曲管材壁厚变化给出合理预测,能够满足生产需要。建立了波导管弯曲工艺分析模型,用有限元分析软件ANSYS对6063矩... 根据弯曲前后变形材料体积不变的原则,推导了波导管最大壁厚变化量的简化计算式,与实测数据对比证明壁厚简化计算式可对弯曲管材壁厚变化给出合理预测,能够满足生产需要。建立了波导管弯曲工艺分析模型,用有限元分析软件ANSYS对6063矩形波导管弯曲成形工艺过程进行数值分析,得出弯曲半径分别为100,80和40 mm情况下管材外侧壁厚减薄量分布曲线和弯曲半径为40 mm条件下弯曲角度不同管材外侧壁减薄量分布曲线,通过对计算曲线的分析确定了管材弯曲变形过渡区弥散分布于一个较大区域,这个区域的中性层长度约为管材侧面宽度的1. 4倍。通过分析弯曲半径为40 mm条件下弯曲角度不同管材外侧壁减薄量分布曲线,得出波导管小半径弯曲时变形过渡区可以达到30°范围。对实验管件进行了剖切测量,证实理论计算的壁厚减薄量与实测结果吻合很好,针对给定的波导管,弯曲半径为40 mm时,变形区宽度也与计算曲线描述的30°范围相符。 展开更多
关键词 波导管 弯曲 壁厚减薄 变形区
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一种基于SOI的集成光波导耦合系统的设计与制备 被引量:2
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作者 李鹏 张宇光 +5 位作者 王丽 刘正 严英占 仝晓刚 薛晨阳 闫树斌 《传感技术学报》 CAS CSCD 北大核心 2011年第6期839-842,共4页
根据锥形光纤与平面环型微腔耦合原理,使用L-Edit版图设计软件设计并优化了锥形光波导与微腔耦合系统。利用MEMS工艺对SOI圆晶片进行加工,从而实现了锥形光波导与跑道型以及环型光波导微腔的集成。其中,光波导以及微腔通过ICP刻蚀顶层... 根据锥形光纤与平面环型微腔耦合原理,使用L-Edit版图设计软件设计并优化了锥形光波导与微腔耦合系统。利用MEMS工艺对SOI圆晶片进行加工,从而实现了锥形光波导与跑道型以及环型光波导微腔的集成。其中,光波导以及微腔通过ICP刻蚀顶层硅而成,矩形槽通过RIE刻蚀衬底硅而成。光波导两侧的矩形凹槽可方便光纤接入以及对出射光的探测,从而提高了光波导微腔耦合系统的稳定性。 展开更多
关键词 锥形光波导 耦合 ICP RIE 跑道型微腔 环型微腔
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渐变共面波导馈电的新型超宽带印刷单极天线 被引量:5
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作者 延晓荣 钟顺时 梁仙灵 《电波科学学报》 EI CSCD 北大核心 2008年第5期823-827,共5页
以实现小型化超宽带印刷天线为主要目的,提出了两种超宽带印刷单极天线,分别为改进的椭圆盘单极天线和新型半椭圆盘单极天线。仿真和实验结果表明所设计天线具有期望的超宽带阻抗特性,且在工作频段内可实现较稳定的全向辐射。
关键词 椭圆盘单极天线 超宽带 小型化 渐变共面波导馈电
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锥形半导体激光芯片的光刻工艺研究 被引量:2
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作者 李景 邱运涛 +6 位作者 曹银花 王青 尧舜 许商瑞 秦文斌 刘友强 王智勇 《发光学报》 EI CAS CSCD 北大核心 2016年第12期1502-1506,共5页
针对锥形半导体激光器中的脊形波导区宽度较小的问题,对半导体激光芯片制造中的刻蚀标记及刻蚀方法进行了研究。提出对于锥形半导体刻蚀中的脊型区域和锥形区域,采用不同精度的双标记刻蚀方法,细化对脊形波导和锥形波导的刻蚀中的对准问... 针对锥形半导体激光器中的脊形波导区宽度较小的问题,对半导体激光芯片制造中的刻蚀标记及刻蚀方法进行了研究。提出对于锥形半导体刻蚀中的脊型区域和锥形区域,采用不同精度的双标记刻蚀方法,细化对脊形波导和锥形波导的刻蚀中的对准问题,并使光刻标在不同的光刻版上相错位排列,在相应光刻版中相互遮挡,反复刻蚀中保证相应的光刻标清晰、完整。刻蚀后的芯片在电流为7 A时获得了中心波长963nm、连续功率4.026 W、慢轴方向和快轴方向激光光束参数乘积分别为1.593 mm·mrad和0.668 mm·mrad的激光输出。 展开更多
关键词 锥形半导体激光器 脊形波导 光刻标 芯片刻蚀
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