An Efficient Approach to Rules-Based Optical Proximity Correction

A new approach for rules-based optical proximity correction is presented.The discussion addresses on how to select and construct more concise and practical rules-base as well as how to apply that rules-base.Based on those ideas,several primary rules are suggested.The v-support vector regression method is used to generate a mathematical expression according to rule data.It enables to make correction according to any given rules parameters.Experimental results demonstrate applying rules calculated from the expression match well with that from the rule table.

Traffic flow of connected and automated vehicles at lane drop on two-lane highway: An optimization-based control algorithm versus a heuristic rules-based algorithm

This paper investigates traffic flow of connected and automated vehicles at lane drop on two-lane highway. We evaluate and compare performance of an optimization-based control algorithm(OCA) with that of a heuristic rules-based algorithm(HRA). In the OCA, the average speed of each vehicle is maximized. In the HRA, virtual vehicle and restriction of the command acceleration caused by the virtual vehicle are introduced. It is found that(i) capacity under the HRA(denoted as C_(H)) is smaller than capacity under the OCA;(ii) the travel delay is always smaller under the OCA, but driving is always much more comfortable under the HRA;(iii) when the inflow rate is smaller than C_(H), the HRA outperforms the OCA with respect to the fuel consumption and the monetary cost;(iv) when the inflow rate is larger than C_(H), the HRA initially performs better with respect to the fuel consumption and the monetary cost, but the OCA would become better after certain time. The spatiotemporal pattern and speed profile of traffic flow are presented, which explains the reason underlying the different performance. The study is expected to help for better understanding of the two different types of algorithm.

Does China's Belt and Road Initiative Challenge the Liberal,Rules-Based Order?

Rising powers like China are frequently depicted as posing a significant challenge to prevailing,Western-designed norms of global governance.Unsurprisingly,Chinas Belt and Road Initiative(BRI)has been described as an assertive grand strategy bent on reconstituting regional or even global order with new governance ideas,norms and rules.Conversely,this paper argues that BRFs challenge to existing global norms will mostly be unintentional.Through an analysis of key policy documents,it demonstrates that the BRFs normative content is pro-market and pluralist,failing to attack or present anything like a systematic alternative to the existing liberal order.Nonetheless,aspects of BRFs implementation will challenge prevailing global governance norms,particularly those relating to investment,aid,and social and environmental protection-but mostly by accident,not design.This is due to the fragmented governance of BRI inside China.Accordingly,BRI will likely erode established norms without offering any coherent alternative.

On the “International Law-Based International Order”

In recent years,some countries have advocated a“rules-based international order.”However,they have not explicitly defined the“rules”here as“international law”and thereupon elaborated on their view of the rules for the international order.In fact,a series of legal practices implemented by these countries indicate that what they pursue is largely a view of rules that prioritizes domestic law over international law and regional international law over universal international law,and that politicizes international law.This view of rules undermines the role of international law in the international order and violates the requirements of the times for improving global governance and promoting the establishment of a more just and reasonable international order.To correct the view of rules pursued by these countries through the advocacy of a“rules-based international order,”China proposes an“international law-based international order.”The view of rules embodied in the“international law-based international order”recognizes that international law based and centered on the UN Charter is the authoritative system of rules governing international relations,while not excluding the role in the international order of other rules that do not violate international law.

Application of optical proximity correction technology

As process technology scales down to very deep sub-micron （VDSM） in semiconductor manufacturing technology, intrinsic size becomes close to or even shorter than the wavelength used for optical lithography. Thus, some distortions and deformations are introduced by optical proximity effects （OPE） mainly caused by the diffraction and interference of exposure light when layout patterns on a mask are transcribed to a wafer, which influence on the yield and performance of IC circuit. In order to compensate for the deformations, optical proximity correction （OPC） is the most commonly used methodology. Presently, the OPC method is to use a unitary toleration on the whole chip layer, which makes the run time of OPC algorithm longer, causes the size of GDSII files to follow exponential growth, and results in the cost of making mask grow immensely. Firstly, this paper proposes a selfadaptation OPC method with preprocessing function of patterns classification. According to the need of the correction precision, the OPC system divides patterns corrected into two groups with different toleration： critical patterns and general patterns, which enhance the efficiency of the OPC approach. Secondly, a model-based OPC method is presented based on pattern subsection and classifi- cation, which keeps the precision of the correction as well as enhances the efficiency. We also propose a rule-based OPC method with general, concise and complete correction rules, and achieve automatic-built rules-based and its looking-up. Thirdly, we also implement an OPC system, called MR-OPC; the MR-OPC system integrates both rule-based OPC and model-based OPC into a whole, so it can solve the confliction between the efficiency and precision. Experimental results show that the MR-OPC system we suggested has advantages of the efficiency and expansibility.