主要研究了SiC雪崩光电二极管(APD)阵列对微弱紫外光的探测均匀性问题,设计并制备了1×128 SiC APD探测阵列,通过表征各像素点的电流-电压曲线,提取出APD阵列的击穿电压波动在±0.1 V;通过被动淬灭电路表征各像素点的微弱紫外...主要研究了SiC雪崩光电二极管(APD)阵列对微弱紫外光的探测均匀性问题,设计并制备了1×128 SiC APD探测阵列,通过表征各像素点的电流-电压曲线,提取出APD阵列的击穿电压波动在±0.1 V;通过被动淬灭电路表征各像素点的微弱紫外光探测能力,提取出APD阵列的暗计数率波动在±0.5 Hz/μm^(2),单光子探测效率波动在±0.4%,良率达到91%,结果表明本工作设计的SiC APD探测阵列能够为微弱紫外光成像技术提供可行的技术方案。展开更多
In this paper,high-uniformity 2×64 silicon avalanche photodiode[APD]arrays are reported.Silicon multiple epitaxy technology was used,and the high performance APD arrays based on double-layer epiwafers are achieve...In this paper,high-uniformity 2×64 silicon avalanche photodiode[APD]arrays are reported.Silicon multiple epitaxy technology was used,and the high performance APD arrays based on double-layer epiwafers are achieved for the first time,to the best of our knowledge.A high-uniformity breakdown voltage with a fluctuation of smaller than 3.5 V is obtained for the fabricated APD arrays.The dark currents are below 90 pA for all 128 pixels at unity gain voltage.The pixels in the APD arrays show a gain factor of larger than 300 and a peak responsivity of 0.53 A/W@M=1 at 850 nm[corresponding to maximum external quantum efficiency of 81%]at room temperature.Quick optical pulse response time was measured,and a corresponding cutoff frequency up to 100 MHz was obtained.展开更多
InP-based photonics integration is becoming a competi- tive candidate for realizing optical modules with enhanced functionality at a reduced cost, especially in optical com- munication systems, since the proposal of w...InP-based photonics integration is becoming a competi- tive candidate for realizing optical modules with enhanced functionality at a reduced cost, especially in optical com- munication systems, since the proposal of wavelength division multiplexing （WDM）. In recent years, network traffic has raised demands for high capacity, high speed transmission systems.展开更多
基金supported by the National Science and Technology Major Project(No.2018YFE0200900)。
文摘In this paper,high-uniformity 2×64 silicon avalanche photodiode[APD]arrays are reported.Silicon multiple epitaxy technology was used,and the high performance APD arrays based on double-layer epiwafers are achieved for the first time,to the best of our knowledge.A high-uniformity breakdown voltage with a fluctuation of smaller than 3.5 V is obtained for the fabricated APD arrays.The dark currents are below 90 pA for all 128 pixels at unity gain voltage.The pixels in the APD arrays show a gain factor of larger than 300 and a peak responsivity of 0.53 A/W@M=1 at 850 nm[corresponding to maximum external quantum efficiency of 81%]at room temperature.Quick optical pulse response time was measured,and a corresponding cutoff frequency up to 100 MHz was obtained.
基金supported by the National High-Tech Research and Development Program of China(No.2015AA016902)the National Natural Science Foundation of China(Nos.61635010,61674136,and 61435002)
文摘InP-based photonics integration is becoming a competi- tive candidate for realizing optical modules with enhanced functionality at a reduced cost, especially in optical com- munication systems, since the proposal of wavelength division multiplexing （WDM）. In recent years, network traffic has raised demands for high capacity, high speed transmission systems.
