Micro thermal shear stress sensor based on vacuum anodic bonding and bulk-micromachining

This paper describes a micro thermal shear stress sensor with a cavity underneath, based on vacuum anodic bonding and bulk micromachined technology. A Ti/Pt alloy strip, 2μm×100μm, is deposited on the top of a thin silicon nitride diaphragm and functioned as the thermal sensor element. By using vacuum anodic bonding and bulk-si anisotropic wet etching process instead of the sacrificial-layer technique, a cavity, functioned as the adiabatic vacuum chamber, 200μm×200μm×400μm, is placed between the silicon nitride diaphragm and glass （Corning 7740）. This method totally avoid adhesion problem which is a major issue of the sacrificial-layer technique.

Experimental Study on the Bed Shear Stress Under Breaking Waves

The object of present study is to investigate the bed shear stress on a slope under regular breaking waves by a novel instrument named Micro-Electro-Mechanical System （MEMS） flexible hot-film shear stress sensor. The sensors were calibrated before application, and then a wave flume experiment was conducted to study the bed shear stress for the case of regular waves spilling and plunging on a 1 ： 15 smooth PVC slope. The experiment shows that the sensor is feasible for the measurement of the bed shear stress under breaking waves. For regular incident waves, the bed shear stress is mainly periodic in both outside and inside the breaking point. The fluctuations of the bed shear stress increase significantly after waves breaking due to the turbulence and vortexes generated by breaking waves. For plunging breaker, the extreme value of the mean maximum bed shear stress appears after the plunging point, and the more violent the wave breaks, the more dramatic increase of the maximum bed shear stress will occur. For spilling breaker, the increase of the maximum bed shear stress along the slope is gradual compared with the plunging breaker. At last, an empirical equation about the relationship between the maximum bed shear stress and the surf similarity parameter is given, which can be used to estimate the maximum bed shear stress under breaking waves in practice.

Experimental Research on Boundary Shear Stress in Typical Meandering Channel

A novel instrument named Micro-Electro-Mechanical System(MEMS) flexible hot-film shear stress sensor was used to study the boundary shear stress distribution in the generalized natural meandering open channel, and the mean sidewall shear stress distribution along the meandering channel, and the lateral boundary shear stress distribution in the typical cross-section of the meandering channel was analysed. Based on the measurement of the boundary shear stress, a semi-empirical semi-theoretical computing approach of the boundary shear stress was derived including the effects of the secondary flow, sidewall roughness factor, eddy viscosity and the additional Reynolds stress, and more importantly, for the first time, it combined the effects of the cross-section central angle and the Reynolds number into the expressions. Afterwards, a comparison between the previous research and this study was developed. Following the result, we found that the semi-empirical semi-theoretical boundary shear stress distribution algorithm can predict the boundary shear stress distribution precisely. Finally, a single factor analysis was conducted on the relationship between the average sidewall shear stress on the convex and concave bank and the flow rate, water depth, slope ratio,or the cross-section central angle of the open channel bend. The functional relationship with each of the above factors was established, and then the distance from the location of the extreme sidewall shear stress to the bottom of the open channel was deduced based on the statistical theory.

表贴式矿用FBG传感器应力传感特性分析研究

本文重点对表贴式矿用光纤布拉格光栅(FBG)传感器应力传感特性进行了分析研究,针对表贴式FBG传感器应力传感特性受基体剪切模量进行系统性的分析,建立表贴式FBG应变三层结构理论分析模型,推导表贴式FBG的应变传递数学表达式,从基体的剪切模量角度分析矿用FBG传感器应力传感特性。通过试验分析总结,得出铜基体材料应变和波长线性关系最佳,可达99.89%,表贴式FBG基体剪切模量越大,应力与波长线性度越好,为矿用FBG传感器结构设计和灵敏度优化提供理论研究基础。

Analytical Higher-Order Model for Flexible and Stretchable Sensors

The stretchable sensor wrapped around a foldable airfoil or embedded inside of it has great potential for use in the monitoring of the structural status of the foldable airfoil.The design methodology is important to the development of the stretchable sensor for status monitoring on the foldable airfoil.According to the requirement of mechanical flexibility of the sensor,the combined use of a layered flexible structural formation and a strain isolation layer is implemented.An analytical higher-order model is proposed to predict the stresses of the strain-isolation layer based on the shear-lag model for the safe design of the flexible and stretchable sensors.The normal stress and shear stress equations in the constructed structure of the sensors are obtained by the proposed model.The stress distribution in the structure is investigated when bending load is applied to the structures.The numerical results show that the proposed model can predict the variation of normal stress and shear stress along the thickness of the strain-isolation（polydimethylsiloxane）layer accurately.The results by the proposed model are in good agreement with the finite element method,in which the normal stress is variable while the shear stress is invariable along the thickness direction of strain-isolation layer.The high-order model is proposed to predict the stresses of the layered structure of the flexible and stretchable sensor for monitoring the status of the foldable airfoil.

免标定壁面剪应力测量技术研究

剪应力传感器的标定是一个极其复杂且易受环境影响的过程。因此,免标定壁面剪应力测量技术是一个很有前景的研究方向。该文介绍这种无需标定即可测量局部壁面剪应力大小和方向的技术的研究状况。该技术使用2个尺寸相同的双层热膜传感器,彼此靠近并垂直放置,形成V形。实验证明,该方法能够以合理的精度测量壁面剪应力矢量,且无需标定。

正弦余弦算法支持向量回归在MEMS剪应力传感器温度补偿中的应用

为解决电容式微机电系统(Micro-electromechanical system,MEMS)剪应力传感器输出信号随工作环境温度变化产生漂移的问题,提出了基于正弦余弦算法的支持向量回归(Sine cosine algorithm-support vector regression,SCA-SVR)温度补偿算法。首先,利用SVR对传感器温漂进行补偿;其次,基于SCA对SVR的超参数进行优化;最后,将所提出的SCA-SVR温度补偿算法与广泛应用的粒子群支持向量回归(Partical swarm optimization-support vector regression,PSO-SVR)算法进行实物实验对比。结果表明,基于SCA-SVR的温度补偿算法能够有效地对电容式MEMS剪应力传感器的输出温漂进行补偿,SCA-SVR算法补偿后的传感器输出信号与整定值间的相关系数提高至0.9996,均方根误差降低至0.0099 mV,比PSO-SVR算法补偿后的结果降低了一个数量级。

浮动元件壁面剪切应力传感器研究进展

介绍了浮动元件的类型和浮动元件壁面剪切应力测量的方法,阐述了基于浮动元件的电容式、压阻式和光学式壁面剪切应力传感器的基本原理和研究现状,分析了上述3种类型的浮动元件壁面剪切应力传感器的优缺点,指出可通过优化浮动元件与传感器封装件之间的移动间隙以及浮动元件与被测面间的平齐度来提升浮动元件壁面剪切应力传感器的性能。展望了浮动元件壁面剪切应力传感器在湍流测量、判断边界层转捩、维护飞行器安全和优化飞行器结构等领域的发展方向,提出未来可通过发展MEMS技术、优化传感器后端处理电路和温度补偿方式、采用一体化设计加工方式等,进一步提升浮动元件壁面剪切应力传感器的小型化程度、检测壁面剪切应力极低值时的灵敏度和精度、测量的可靠性和准确性。

基于微型剪应力传感器阵列的边界层分离点测定方法研究

结合边界层分离点附近的剪应力变化规律,提出了针对在飞行器外表面贴附微型传感器的分离点检测方法,并给出了相应微型剪应力传感器阵列的设计方案。研究了2种针对一维剪应力传感器阵列输出电压信号的处理方法,即均值差极大值方法和均方根差分极大值方法,并结合实验数据对上述2种判别算法进行了仿真计算和抗干扰性分析,结果验证了其有效性和准确性。

用于壁面切应力测量的微传感器设计

壁面切应力的测量是流体动力学领域中一项非常重要的测试任务,采用MEMS技术设计、加工的微型切应力传感器能够为壁面切应力的测量提供新的手段。微传感器设计过程中推导其浮动单元线性位移与弹性梁宽度的关系,通过限位装置提高了微传感器的抗过载能力。有限元仿真结果与试验模态分析的最大偏差为8.2%,表明仿真过程中对结构进行的简化以及单元的选取是合理的。加工过程中,采用等离子刻蚀工艺形成传感器的结构,湿法刻蚀工艺完成浮动单元的释放,所加工传感器的整体尺寸为3.4 mm×2.5 mm×0.6 mm。开发了一种封装结构实现传感器与壁面的平齐安装。风洞试验结果说明在0～30 m/s风速范围内传感器的灵敏度为51.2 mV/Pa,该传感器可以用于壁面切应力的测量。

微型柔性剪切应力传感器的制作研究

利用微机电系统(MEMS)技术,制作了一种新型传感器阵列。首先,在刚性衬底上制作了一种8×8切应力传感器阵列,然后,利用硅岛阵列技术制作了一种柔性结构。试验结果表明:所制作的柔性传感器阵列经多次弯扭循环后,电阻值基本没有变化,柔性传感器在经过弯扭3300次后,传感器本身的柔性材料并没有断。

MEMS壁面剪应力传感器阵列水下标定实验研究

壁面剪应力的精确测量对于研究水下物体边界层流动、寻求有效的减阻增效措施至关重要。MEMS壁面剪应力传感器的标定首先是最基本的静态标定,其决定了其测量的精度和数据的可信度。本文在分析已有标定方法的基础上研发1种新型水下壁面剪应力给定装置,并采用数值方法计算分析不同流速下的壁面剪应力给定条件,进而设计壁面剪应力传感器静态标定方案,开展了一种MEMS热膜式壁面剪应力传感器阵列的水下静态标定实验,获得了各传感单元的标定系数。

水下MEMS壁面剪应力传感器标定方案仿真分析与实验验证

壁面剪应力的精确测量对于研究水下物体边界层流动、寻求有效的减阻增效措施至关重要。MEMS壁面剪应力传感器的标定,首先是最基本的静态标定,决定了其测量的精度和数据的可信度。为辅助实现水下MEMS壁面剪应力传感器的精确标定,本文对采用槽道流法的精密标定装置流动条件进行数值仿真及激光多普勒测速仪测速实验,确定了标定试验段中流场从槽道入口处充分发展至稳定所需长度、压力分布情况及所能给定标定使用的壁面剪应力范围,进而设计标定方案;壁面剪应力的实验结果与数值计算和理论分析对比吻合较好,验证了标定方案的合理性,为下一步开展MEMS剪应力传感器阵列水下标定试验提供技术基础。

混凝土嵌入式压电动态剪应力传感器研发

制作了一种利用剪切型压电陶瓷片作为传感元件的可用于混凝土内部动态剪应力测量的传感器,提出了一种标定试验方法,即将动态剪应力传感器嵌入混凝土空心薄壁空心圆筒中,并利用小型落锤试验机,对空心薄壁圆筒施加冲击荷载根据剪力计算值与传感器的输出信号对传感器灵敏度进行标定。试验结果表明,传感器输出与剪应力的线性相关性好,不同传感器之间的灵敏度个体差异小。

微管道内剪应力传感器的研制与优化

基于微机电系统(MEMS)微加工工艺,开发了一种能够测量微管道内壁面剪应力的热式传感器,以多晶硅为热敏元件,在低阻硅衬底上形成多孔硅膜隔离硅衬底损耗.利用水浴加热方法测量得到电阻温度系数为0.21%/℃.采用数值模拟的方法对剪应力传感器进行了热分析,探讨了提高剪应力传感器灵敏度和线性度的方法,为优化其设计和使用提供了理论基础.数值模拟结果表明:随着微管道深度的增加,传感器灵敏度提高,但线性度下降.

微型剪应力传感器的热特性分析

研究不同结构、不同热敏元件温度和不同工作介质等情况下剪应力传感器的性能差异.通过实验和数值模拟相结合的方法对剪应力传感器进行了热特性分析.数值模拟结果发现:采用热敏元件下部埋置真空空腔的结构,隔热效果最佳;选择相对较高的热敏元件温度和较高热物性系数的工作气体有助于获得较高的灵敏度.该结果对优化设计微型剪应力传感器具有通用的指导意义.

微型热式剪应力传感器的热特性建模

为了提高微机电系统(MEMS)微型热式剪应力传感器的灵敏度,分析了MEMS微型热式剪应力传感器的热平衡机理,建立其相应的数学物理模型.从理论上分析了传感器的热膜、绝缘层及硅基底上的空腔尺寸等结构参数对其灵敏度的影响,并将研究结果与基于Fluent软件的数值模拟结果进行对比.结果表明,所建立的数学模型是合理的.

波浪作用下床面切应力测量初探

在前人研究基础上,进行了波浪水槽实验。采用新型热敏传感器直接测量波浪作用下床面切应力分布情况。通过分析输出电压与理论切应力之间的关系,得出传感器电压值与理论计算切应力均随时间而周期性变化,充分验证了热敏传感器在测量床面切应力时的可行性,为进一步直接测量床面切应力奠定了基础。

柔性热膜剪应力传感器水下测量温度修正

柔性热膜微传感器应用于流体壁面剪应力测量时,流体温度对传感器输出有很大影响,因此有必要对工作在非标定温度下的传感器输出信号进行修正补偿。重点研究了水下测量时传感器输出与水温的关系以及温度修正方法。通过分析传感器过热比和流体物理性质与温度的相关性,建立了流体温度与传感器过热比和标定系数的函数关系。在此基础上,提出了一种用于水下剪应力测量的温度修正方法,可以有效减小水温对传感器输出的影响。经实验验证,该方法可以使工作在25℃、28℃水温环境下的传感器输出值与其20℃标定值的相对误差从23.7%和37.1%回落到0.82%和0.83%。

MEMS热膜式壁面剪应力传感器微弱信号检测

MEMS热膜式壁面剪应力传感器的输出信号是带有基础电压的微弱电压信号,无法通过放大器直接放大的方法实现高精度测量。文章提出在输出信号放大前增加信号平衡环节,在保留有效信号的前提下减小基础电压,再通过放大的方法实现其高精度测量,有效解决了MEMS热膜式壁面剪应力传感器微弱信号检测的难题。文章介绍了MEMS热膜式壁面剪应力传感器微弱信号检测的技术方案、关键技术、测试检验及试验应用实例。