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Preparation of Scratch-Resistant Nano-Porous Silica Films Derived by Sol-Gel Process and Their Anti-reflective Properties 被引量:1
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作者 Guangming WU, Jun SHEN, Tianhe YANG, Bin ZHOU and Jue WANGPohl Institute of Solid State Physics, Tongji University, Shanghai 200092, China 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2003年第4期299-302,共4页
Structural strengthening of the nano porous silica films has been reported. The films were prepared with a base/acid two-step catalyzed TEOS-based sol-gel processing and dip-coating, and then baked in the mixed gas of... Structural strengthening of the nano porous silica films has been reported. The films were prepared with a base/acid two-step catalyzed TEOS-based sol-gel processing and dip-coating, and then baked in the mixed gas of ammonia and water vapor. The silica films were characterized with TEM, AFM, FTIR, spectrophotometer, ellipsometer, and abrasion test, respectively. The experimental results have shown that the films have a nanostructure with a low refractive index and can form an excellent scratch-resistant broadband anti-reflectance. The two-step catalysis noticeably strengthens the films, and the mixed gas treatment further improves mechanical strength of the silica network. Finally the strengthening mechanism has been discussed. 展开更多
关键词 Sol-gel process silica films Anti-reflectance Nano porous structure
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Annealing Temperature dependence of Photoluminescence from Silicon-rich silica Films 被引量:1
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作者 吴雪梅 诸葛兰剑 +3 位作者 汤乃云 叶春暖 宁兆元 姚伟国 《Plasma Science and Technology》 SCIE EI CAS CSCD 2001年第4期891-895,共5页
The silicon-rich silica films were prepared by a dual-ion-beam co-sputtering method from a composite Target in an argon atmosphere. The structure of the films studied by the aid of TEM and XRD is amorphous. The photol... The silicon-rich silica films were prepared by a dual-ion-beam co-sputtering method from a composite Target in an argon atmosphere. The structure of the films studied by the aid of TEM and XRD is amorphous. The photoluminescence (PL) spectra were found to have a 4- luminescent band peak at 320 nm, 410 nm, 560 nm, and 630 nm, respectively, at room temperature. The intensity and the wavelength position of PL are dependent on annealing temperature (Ta), and the luminescent mechanism is analyzed. 展开更多
关键词 Annealing Temperature dependence of Photoluminescence from Silicon-rich silica films SIO
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Microstructure Control of Nanoporous Silica Thin Film Prepared by Sol-gel Process 被引量:4
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作者 Yiqun XIAO Jun SHEN Zhiyong XIE Bin ZHOU Guangming WU 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2007年第4期504-508,共5页
Nanoporous silica films were prepared by sol-gel process with base, acid and base/acid two-step catalysis.Transmission electron microscope (TEM) and particle size analyzer were used to characterize the microstructur... Nanoporous silica films were prepared by sol-gel process with base, acid and base/acid two-step catalysis.Transmission electron microscope (TEM) and particle size analyzer were used to characterize the microstructure and the particle size distribution of the sols. Scanning electron microscopy (SEM), atomic force microscopy (AFM) and spectroscopic ellipsometer were used to characterize the surface microstructure and the optical properties of the silica films. Stability of the sols during long-term storage was investigated. Moreover,the dispersion relation of the optical constants of the silica films, and the control of the microstructure and properties of the films by changing the catalysis conditions during sol-gel process were also discussed. 展开更多
关键词 SOL-GEL NANOPOROUS MICROSTRUCTURE Optical constants silica Thin Film
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Helium Plasma Damage of Low-k Carbon Doped Silica Film:the Effect of Si Dangling Bonds on the Dielectric Constant
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作者 李海玲 王庆 巴德纯 《Plasma Science and Technology》 SCIE EI CAS CSCD 2014年第11期1050-1053,共4页
The low-k carbon doped silica film has been modified by radio frequency helium plasma at 5 Pa pressure and 80 W power with subsequent XPS, FTIR and optical emission spec- troscopy analysis. XPS data indicate that heli... The low-k carbon doped silica film has been modified by radio frequency helium plasma at 5 Pa pressure and 80 W power with subsequent XPS, FTIR and optical emission spec- troscopy analysis. XPS data indicate that helium ions have broken Si-C bonds, leading to Si-C scission with C(1s) lost seriously. The Si(2p), O(ls), peak obviously shifted to higher binding en- ergies, indicating an increasingly oxidized Si(2p). FTIR data also show that the silanol formation increased with longer exposure time up to a week. Contrarily, the CHa stretch, Si-C stretching bond and the ratio of the Si-O-Si cage and Si-O-Si network peak sharply decreased upon exposure to helium plasma. The OES result indicates that monovalent helium ions in plasma play a key role in damaging carbon doped silica film. So it can be concluded that the monovalent helium ions besides VUV photons can break the weak Si-C bonds to create Si dangling bonds and free methyl radicals, and the latter easily reacts with O_2 from the atmosphere to generate CO_2 and H_2O. The bonds change is due to the Si dangling bonds combining with H_2O, thereby, increasing the dielectric constant k value. 展开更多
关键词 carbon doped silica film helium plasma BONDS damage dielectric constant
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FABRICATION AND CHARACTERATION OF NANOPOROUS SILICA FILM
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作者 殷明志 张良莹 姚熹 《Journal of Pharmaceutical Analysis》 SCIE CAS 2003年第2期152-156,161,共6页
Colloidal silica sol is formed by a novel hydrolyzing procedure of tetraethyl orthosilicate(TEOS) catalyzing with NH 3 ·H 2 O in aqueous mediums. Glycerol, combining with the hydrolyzed intermediates of ... Colloidal silica sol is formed by a novel hydrolyzing procedure of tetraethyl orthosilicate(TEOS) catalyzing with NH 3 ·H 2 O in aqueous mediums. Glycerol, combining with the hydrolyzed intermediates of TEOS, controls growing of the silica particles; poly(vinyl vinyl alcohol makes the colloidal silica sol with polymeric structure and spinning, thermal strain makes the gel silica film changed into a nanoporous structure with diameter ranging 50-150 nm. Morphologies of the nanoporous silica film have been characterized; the porosities (%) is 32-64; the average dielectric constant at 1MHz region is 2.0 and 2.1; the thermal conductivity is less than 0.8. Chemical mechanism of the sol gel process is discussed. 展开更多
关键词 TETRAETHYLORTHOsilicaTE sol gel technique nanoporous silica film thermal conductivity
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A novel fabrication of meso-porous silica film by sol-gol of TEOS
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作者 殷明志 姚熹 张良莹 《Journal of Zhejiang University Science》 CSCD 2004年第4期422-427,共6页
A homogeneous crack-free nano- or meso-porous silica films on silicon was fabricated by colloidal silica sol derived by hydrolyzing tetraethyl orthosilicate (TEOS) catalyzing with (C4H9)4N+OH- in water medium. The sol... A homogeneous crack-free nano- or meso-porous silica films on silicon was fabricated by colloidal silica sol derived by hydrolyzing tetraethyl orthosilicate (TEOS) catalyzing with (C4H9)4N+OH- in water medium. The solution with ratio of H2O/TEOS15, R4N+ and glycerol as templates, combining with the hydrolyzed intermediate, controlled the silica aggregating; the templated silica film with heterostructure was developed into homogeneous nano-porous then meso-porous silica films after being annealed from 750 C to 850 C; the formation mechanism of the porous silica films was discussed; morphologies of the silica films were characterized. The refractive indexes of the porous silica films were 1.2561.458, the thermal conductivity < 0.7 W/m/K. The fabricating procedure and the sequence had not been reported before. 展开更多
关键词 Tetraethyl orthosilicate (TEOS) Sol-gel technique Porous silica film Thermal conductivity
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Highly impermeable and flexible silica encapsulation films synthesized by sol-gel process 被引量:1
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作者 Si-Hoon Kim Gyeong-Seok Hwang +6 位作者 Donghwan Koo Dong-Hyun Seo Ye-Pil Kwon Hansuek Lee Hyesung Park Eun-chae Jeon Ju-Young Kim 《Nano Research》 SCIE EI CSCD 2022年第8期7476-7483,共8页
Silica thin films synthesized sol–gel process are proposed as flexible encapsulation materials.A sol–gel process provides a dense and stable amorphous silica structure,yielding an extremely high elastic deformation ... Silica thin films synthesized sol–gel process are proposed as flexible encapsulation materials.A sol–gel process provides a dense and stable amorphous silica structure,yielding an extremely high elastic deformation limit of 4.9%and extremely low water vapor transmission rate(WVTR)of 2.90×10^(−4)g/(m^(2)∙day)at 60℃and relative humidity of 85%.The WVTR is not degraded by cyclic bending deformations for the bending radius corresponding to a tensile strain of 3.3%in the silica encapsulation film,implying that the silica thin film is robust against the formation of pinhole-type defects by cyclic bending deformations.Flexible organic solar cells encapsulated with the silica films operate without degradation in power conversion efficiency for 50,000 bending cycles for a bending radius of 6 mm. 展开更多
关键词 silica thin film SOL-GEL flexible encapsulation mechanical reliability flexible organic solar cell
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Deterioration Process of the Hybrid Films during Wear Test--Polyacrylate Emulsion Modified by Silica Particles 被引量:1
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作者 YANG Mingjun DENG Binbin YUAN Feifei 《Wuhan University Journal of Natural Sciences》 CAS CSCD 2017年第3期191-196,共6页
The hybrid materials are widely used in various fields for excellent performance. However, there are few researches studying their failure process. In order to prepare the hybrid materials with better performance, the... The hybrid materials are widely used in various fields for excellent performance. However, there are few researches studying their failure process. In order to prepare the hybrid materials with better performance, the failure process needs to be well studied. Two kinds of silica/polyacrylate films are successfully prepared to study the effect of organic-inorganic interaction on performance. The average diameter of silica particles is measured to be around 342 nm by scanning electron microscope(SEM). Wear test demonstrates the hybrid film, which is obtained by grafting polyacrylate onto silica particles, possesses more excellent properties than the one filled directly with silica particles. The stronger interaction between organic and inorganic components leads to a better distribution of inorganic particles within the polymer matrix. In this work, a model is presented to illustrate the deterioration process of the hybrid films, which allows us to further understand the hybrid materials. 展开更多
关键词 hybrid materials deterioration mechanism silica/polyacrylate films
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The Structure and Emission Properties of SiO_2 Nanometer Film Containing Ag
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作者 张兆艳 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2001年第2期34-37,共4页
Colloidal silver particles are formed on float glass by heat treatment with coated silica film containing Ag by sol-gel process . The Sn2+ on surface of float glass influences the formation of colloidal Ag particles .... Colloidal silver particles are formed on float glass by heat treatment with coated silica film containing Ag by sol-gel process . The Sn2+ on surface of float glass influences the formation of colloidal Ag particles . The microstructure of the film and the granularity of silver particles were studied by TEM and HEED. The emission property of the samples was measured. The results show that aggregation of metal particles degrades emission intensity , and that content of Ag, withdrawing speed and heat treatment temperature of samples has a greater effect on photoluminescence. 展开更多
关键词 silica film SILVER emission intensity
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Photoluminescence from Er^(3+) ion and SnO_2 nanocrystal co-doped silica thin films
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作者 张晓伟 林涛 +4 位作者 江小帆 徐骏 刘建峰 徐岭 陈坤基 《Chinese Optics Letters》 SCIE EI CAS CSCD 2012年第9期72-75,共4页
Er3+ ions embedded in silica thin films co-doped by SnO2 nanocrystals are fabricated by sol-gel and spin coating methods. Uniformly distributed 4-am SnO2 nanocrystals are fabricated, and the nanocrystals showed tetra... Er3+ ions embedded in silica thin films co-doped by SnO2 nanocrystals are fabricated by sol-gel and spin coating methods. Uniformly distributed 4-am SnO2 nanocrystals are fabricated, and the nanocrystals showed tetragonal rutile crystalline structures confirmed by transmission electron microscope and X-ray diffraction measurements. A strong characteristic emission located at 1.54 〉m from the Era+ ions is iden- tified, and the influences of Sn doping concentrations on photoluminescence properties are systematically evaluated. The emission at 1.54 #m from Era+ ions is enhanced by more than three orders of magnitude, which can be attributed to the effective energy transfer from the defect states of SnO2 nanocrystals to nearby Er3+ ions, as revealed by the selective excitation experiments. 展开更多
关键词 SNO ion and SnO2 nanocrystal co-doped silica thin films Photoluminescence from Er
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Growing vertical aligned mesoporous silica thin film on nanoporous substrate for enhanced degradation,drug delivery and bioactivity 被引量:5
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作者 Zhe Li Yide He +6 位作者 Lasse Hyldgaard Klausen Ning Yan Jing Liu Fanghao Chen Wen Song Mingdong Dong Yumei Zhang 《Bioactive Materials》 SCIE 2021年第5期1452-1463,共12页
Mesoporous silica thin film has been widely used in various fields,particularly the medical implant coating for drug delivery.However,some drawbacks remain with the films produced by traditional method(evaporation-ind... Mesoporous silica thin film has been widely used in various fields,particularly the medical implant coating for drug delivery.However,some drawbacks remain with the films produced by traditional method(evaporation-induced self-assembly,EISA),such as the poor permeability caused by their horizontal aligned mesochannels.In this study,the vertical aligned mesoporous silica thin film(VMSTF)is uniformly grown alongside the walls of titania nanotubes array via a biphase stratification growth method,resulting in a hierarchical two-layered nanotubular structure.Due to the exposure of opened mesopores,VMSTF exhibits more appealing performances,including rapid degradation,efficient small-molecular drug(dexamethasone)loading and release,enhanced early adhesion and osteogenic differentiation of MC3T3-E1 cells.This is the first time successfully depositing VMSTF on nanoporous substrate and our findings suggest that the VMSTF may be a promising candidate for bone implant surface coating to obtain bioactive performances. 展开更多
关键词 Mesoporous silica film Vertical aligned mesochannels Titania nanotubes array Drug delivery OSTEOBLASTS
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Solution-processable precursor route for fabricating ultrathin silica film for high performance and low voltage organic transistors 被引量:1
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作者 Shujing Guo Zhongwu Wang +7 位作者 Zeyang Xu Shuguang Wang Kunjie Wu Shufeng Chen Zongbo Zhang Caihong Xu Wenfeng Qiu Liqiang Li 《Chinese Chemical Letters》 SCIE CAS CSCD 2017年第11期2143-2146,共4页
Silica is one of the most commonly used materials for dielectric layer in organic thin-film transistors due to its excellent stability, excellent electrical properties, mature preparation process, and good compatibili... Silica is one of the most commonly used materials for dielectric layer in organic thin-film transistors due to its excellent stability, excellent electrical properties, mature preparation process, and good compatibility with organic semiconductors. However, most of conventional preparation methods for silica film are generally performed at high temperature and/or high vacuum. In this paper, we introduce a simple solution spin-coating method to fabricate silica thin film from precursor route, which possesses a low leakage current, high capacitance, and low surface roughness. The silica thin film can be produced in the condition of low temperature and atmospheric environment. To meet various demands, the thickness of film can be adjusted by means of preparation conditions such as the speed of spin-coating and the concentration of solution. The p-type and n-type organic field effect transistors fabricated by using this film as gate electrodes exhibit excellent electrical performance including low voltage and high performance. This method shows great potential for industrialization owing to its characteristic of low consumption and energy saving, time-saving and easy to operate. 展开更多
关键词 silica Spin coating Thin film Transistor
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