This paper mainly describes a research of fabrication-technology of silicon magnetic-sensitive transistor (SMST) with rectangle-plank-cubic structure fabricated on silicon wafer by MEMS technique.An experiment researc...This paper mainly describes a research of fabrication-technology of silicon magnetic-sensitive transistor (SMST) with rectangle-plank-cubic structure fabricated on silicon wafer by MEMS technique.An experiment research on basic characteristic of the silicon magnetic-sensitive transistor was done.Anisotropic etching and reliable technique project were provided and applied in order to fabricate SMST with rectangle-plank-cubic construction.This means that a new kind of fabrication technology for silicon magnetic-sensitive transistor was provided.The result shows that the technique can be not only compatible with IC technology but also integrated easily,and has a wide application field.展开更多
文摘This paper mainly describes a research of fabrication-technology of silicon magnetic-sensitive transistor (SMST) with rectangle-plank-cubic structure fabricated on silicon wafer by MEMS technique.An experiment research on basic characteristic of the silicon magnetic-sensitive transistor was done.Anisotropic etching and reliable technique project were provided and applied in order to fabricate SMST with rectangle-plank-cubic construction.This means that a new kind of fabrication technology for silicon magnetic-sensitive transistor was provided.The result shows that the technique can be not only compatible with IC technology but also integrated easily,and has a wide application field.
