We present an accurate through silicon via （TSV） thermal mechanical stress analytical model which is verified by using finite element method （FEM）. The results show only a very small error. By using the proposed a...We present an accurate through silicon via （TSV） thermal mechanical stress analytical model which is verified by using finite element method （FEM）. The results show only a very small error. By using the proposed analytical model, we also study the impacts of the TSV radius size, the thickness, the material of Cu diffusion barrier, and liner on the stress. It is found that the liner can absorb the stress effectively induced by coefficient of thermal expansion mismatch. The stress decreases with the increase of liner thickness. Benzocyclobutene （BCB） as a liner material is better than SiO2. However, the Cu diffusion barrier has little effect on the stress. The stress with a smaller TSV has a smaller value. Based on the analytical model, we explore and validate the linear superposition principle of stress tensors and demonstrate the accuracy of this method against detailed FEM simulations. The analytic solutions of stress of two TSVs and three TSVs have high precision against the finite element result.展开更多
In order to fabricate porous ceramics with good properties and proper production cost,SiC-Al2 O3 porous ceramics were prepared at 1 450 ℃ for 2 h from the powders of commercial silicon carbide and white fused corundu...In order to fabricate porous ceramics with good properties and proper production cost,SiC-Al2 O3 porous ceramics were prepared at 1 450 ℃ for 2 h from the powders of commercial silicon carbide and white fused corundum via a polymeric replication method. Effects of the mass ratio of SiC powder to white fused corundum powder（ 1 ∶ 3,1 ∶ 1 and 3 ∶ 1） on the appearance,phase composition,sintering properties and thermal shock resistance were investigated. The research results indicate that the as-prepared Si C-Al2 O3 porous ceramics have uniform pores,and their linear shrinkage ratio,apparent porosity and bulk density reach 4. 70%,67. 17%and 0. 83 g·cm-3,respectively. The thermal shock cycles from 1 400 ℃ to room temperature reach 23 including 15 cycles in air cooling condition and then 8 cycles in water cooling condition. Their main phases areα-Al2 O3 and Al6 Si2 O13 as well as a small amount of SiC and free SiO2. The as-prepared porous ceramic with the ratio of m（ SiC） ∶ m（ Al2 O3） = 1∶ 1 possesses prior comprehensive properties.展开更多
基金supported by the National Natural Science Foundation of China(Grant No.61334003)the Kunshan Innovation Institute of Xidian University
文摘We present an accurate through silicon via （TSV） thermal mechanical stress analytical model which is verified by using finite element method （FEM）. The results show only a very small error. By using the proposed analytical model, we also study the impacts of the TSV radius size, the thickness, the material of Cu diffusion barrier, and liner on the stress. It is found that the liner can absorb the stress effectively induced by coefficient of thermal expansion mismatch. The stress decreases with the increase of liner thickness. Benzocyclobutene （BCB） as a liner material is better than SiO2. However, the Cu diffusion barrier has little effect on the stress. The stress with a smaller TSV has a smaller value. Based on the analytical model, we explore and validate the linear superposition principle of stress tensors and demonstrate the accuracy of this method against detailed FEM simulations. The analytic solutions of stress of two TSVs and three TSVs have high precision against the finite element result.
文摘In order to fabricate porous ceramics with good properties and proper production cost,SiC-Al2 O3 porous ceramics were prepared at 1 450 ℃ for 2 h from the powders of commercial silicon carbide and white fused corundum via a polymeric replication method. Effects of the mass ratio of SiC powder to white fused corundum powder（ 1 ∶ 3,1 ∶ 1 and 3 ∶ 1） on the appearance,phase composition,sintering properties and thermal shock resistance were investigated. The research results indicate that the as-prepared Si C-Al2 O3 porous ceramics have uniform pores,and their linear shrinkage ratio,apparent porosity and bulk density reach 4. 70%,67. 17%and 0. 83 g·cm-3,respectively. The thermal shock cycles from 1 400 ℃ to room temperature reach 23 including 15 cycles in air cooling condition and then 8 cycles in water cooling condition. Their main phases areα-Al2 O3 and Al6 Si2 O13 as well as a small amount of SiC and free SiO2. The as-prepared porous ceramic with the ratio of m（ SiC） ∶ m（ Al2 O3） = 1∶ 1 possesses prior comprehensive properties.
