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Interface and mechanical degradation mechanisms of the silicon anode in sulfide-based solid-state batteries at high temperatures
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作者 王秋辰 黄昱力 +3 位作者 许晶 禹习谦 李泓 陈立泉 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第8期117-126,共10页
Silicon(Si)is a competitive anode material owing to its high theoretical capacity and low electrochemical potential.Recently,the prospect of Si anodes in solid-state batteries(SSBs)has been proposed due to less solid ... Silicon(Si)is a competitive anode material owing to its high theoretical capacity and low electrochemical potential.Recently,the prospect of Si anodes in solid-state batteries(SSBs)has been proposed due to less solid electrolyte interphase(SEI)formation and particle pulverization.However,major challenges arise for Si anodes in SSBs at elevated temperatures.In this work,the failure mechanisms of Si-Li_(6)PS_(5)Cl(LPSC)composite anodes above 80℃are thoroughly investigated from the perspectives of interface stability and(electro)chemo-mechanical effect.The chemistry and growth kinetics of Lix Si|LPSC interphase are demonstrated by combining electrochemical,chemical and computational characterizations.Si and/or Si–P compound formed at Lix Si|LPSC interface prove to be detrimental to interface stability at high temperatures.On the other hand,excessive volume expansion and local stress caused by Si lithiation at high temperatures damage the mechanical structure of Si-LPSC composite anodes.This work elucidates the behavior and failure mechanisms of Si-based anodes in SSBs at high temperatures and provides insights into upgrading Si-based anodes for application in SSBs. 展开更多
关键词 sulfide electrolytes silicon anodes interface stability degradation kinetics all-solid-state batteries
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Adsorption of sodium polyacrylate at interface of dicalcium silicate-sodium aluminate solution 被引量:5
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作者 于海燕 潘晓林 +3 位作者 丁婷婷 张武 刘涵 毕诗文 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2011年第10期2323-2326,共4页
The adsorption isotherm of sodium polyacrylate on dicalcium silicate(2CaO-SiO2) in sodium aluminate solution at 80 ℃ was studied.The type of surface adsorption of sodium polyacrylate is saturated adsorption,and the... The adsorption isotherm of sodium polyacrylate on dicalcium silicate(2CaO-SiO2) in sodium aluminate solution at 80 ℃ was studied.The type of surface adsorption of sodium polyacrylate is saturated adsorption,and the adsorption behavior belongs to L-type,according with the monolayer adsorption model of Langmuir equation.The surface coverage of sodium polyacrylate is 1.06 mol/μm2.The relation curve between the surface pressure and the molecular area of adsorption film was obtained by Gibbs formula.The variation of interfacial energy caused by adsorption as well as the relationship between the relation curve and the type of adsorption was discussed. 展开更多
关键词 sodium aluminate solution sodium polyacrylate dicalcium silicate interface ADSORPTION
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Construction of Dynamic Alloy Interfaces for Uniform Li Deposition in Li-Metal Batteries 被引量:1
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作者 Qingwen Li Yulu Liu +7 位作者 Ziheng Zhang Jinjie Chen Zelong Yang Qibo Deng Alexander V.Mumyatov Pavel A.Troshin Guang He Ning Hu 《Energy & Environmental Materials》 SCIE EI CAS CSCD 2024年第3期64-71,共8页
It is well accepted that a lithiophilic interface can effectively regulate Li deposition behaviors,but the influence of the lithiophilic interface is gradually diminished upon continuous Li deposition that completely ... It is well accepted that a lithiophilic interface can effectively regulate Li deposition behaviors,but the influence of the lithiophilic interface is gradually diminished upon continuous Li deposition that completely isolates Li from the lithiophilic metals.Herein,we perform in-depth studies on the creation of dynamic alloy interfaces upon Li deposition,arising from the exceptionally high diffusion coefficient of Hg in the amalgam solid solution.As a comparison,other metals such as Au,Ag,and Zn have typical diffusion coefficients of 10-20 orders of magnitude lower than that of Hg in the similar solid solution phases.This difference induces compact Li deposition pattern with an amalgam substrate even with a high areal capacity of 55 mAh cm^(-2).This finding provides new insight into the rational design of Li anode substrate for the stable cycling of Li metal batteries. 展开更多
关键词 diffusion coefficient dynamic alloy interfaces Li dendrites Li solid solution uniform Li deposition
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Oscillation properties of eigenfunctions for Sturm-Liouville problems with interface conditions via Prufer transformation
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作者 LI Zhi-yu LI Kun +2 位作者 CAI Jin-ming QIN Jian-fang ZHENG Zhao-wen 《Applied Mathematics(A Journal of Chinese Universities)》 SCIE CSCD 2024年第2期191-200,共10页
A class of Sturm-Liouville problems with discontinuity is studied in this paper.The oscillation properties of eigenfunctions for Sturm-Liouville problems with interface conditions are obtained.The main method used in ... A class of Sturm-Liouville problems with discontinuity is studied in this paper.The oscillation properties of eigenfunctions for Sturm-Liouville problems with interface conditions are obtained.The main method used in this paper is based on Prufer transformation,which is different from the classical ones.Moreover,we give two examples to verify our main results. 展开更多
关键词 Sturm-Liouville problem interface condition oscillatory solution
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Theoretical investigation on axial cyclic performance of monopile in sands using interface constitutive models
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作者 Pan Zhou Jingpei Li +2 位作者 Kaoshan Dai Stefan Vogt Seyedmohsen Miraei 《Journal of Rock Mechanics and Geotechnical Engineering》 SCIE CSCD 2024年第7期2645-2662,共18页
Cyclic loads generated by environmental factors,such as winds,waves,and trains,will likely lead to performance degradation in pile foundations,resulting in issues like permanent displacement accumulation and bearing c... Cyclic loads generated by environmental factors,such as winds,waves,and trains,will likely lead to performance degradation in pile foundations,resulting in issues like permanent displacement accumulation and bearing capacity attenuation.This paper presents a semi-analytical solution for predicting the axial cyclic behavior of piles in sands.The solution relies on two enhanced nonlinear load-transfer models considering stress-strain hysteresis and cyclic degradation in the pile-soil interaction.Model parameters are calibrated through cyclic shear tests of the sand-steel interface and laboratory geotechnical testing of sands.A novel aspect involves the meticulous formulation of the shaft loadtransfer function using an interface constitutive model,which inherently inherits the interface model’s advantages,such as capturing hysteresis,hardening,degradation,and particle breakage.The semi-analytical solution is computed numerically using the matrix displacement method,and the calculated values are validated through model tests performed on non-displacement and displacement piles in sands.The results demonstrate that the predicted values show excellent agreement with the measured values for both the static and cyclic responses of piles in sands.The displacement pile response,including factors such as bearing capacity,mobilized shaft resistance,and convergence rate of permanent settlement,exhibit improvements compared to non-displacement piles attributed to the soil squeezing effect.This methodology presents an innovative analytical framework,allowing for integrating cyclic interface models into the theoretical investigation of pile responses. 展开更多
关键词 PILES Cyclic degradation Load-transfer models interface constitutive model Semi-analytical solution Model tests
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Exact solution of plane isolated crack normal to a bimaterial interface of infinite extent 被引量:4
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作者 Tianhu Hao 《Acta Mechanica Sinica》 SCIE EI CAS CSCD 2006年第5期455-468,共14页
This paper presents an exact solution for the transverse interface crack in the plane strain case. The crack is perpendicular to the interface and in one material. The exact complex stress functions are first obtained... This paper presents an exact solution for the transverse interface crack in the plane strain case. The crack is perpendicular to the interface and in one material. The exact complex stress functions are first obtained with some unknown constants. The satisfactions of all boundary conditions are then checked, the condition at infinity is considered and the unknown constants are determined. Further study may focus on the case with different shear moduli and the influence of the large deformation. 展开更多
关键词 Exact solution interface crack Plane strain problem
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Diffusion-controlled Adsorption Kinetics of Surfactant at Air/Solution Interface 被引量:3
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作者 刘俊吉 徐芸 孙红秀 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2013年第9期953-958,共6页
For the diffusion-controlled adsorption, the expression of dynamic surface adsorption P(t) was ob- tained by solving the diffusion equation. Two cases, i.e. the short and long time limits, were mainly discussed in t... For the diffusion-controlled adsorption, the expression of dynamic surface adsorption P(t) was ob- tained by solving the diffusion equation. Two cases, i.e. the short and long time limits, were mainly discussed in this paper. From the measured dynamic surface tension of aqueous surfactant sodium dodecyl sulfate (SDS) solutions at 25 ℃, the adsorption kinetics of SDS at air/solution interface was studied. It was proved that for both of the short and long time limits, the adsorption process of SDS was controlled by diffusion. 展开更多
关键词 ADSORPTION air/solution interface dynamic surface tension
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Structure and resistance of concentration polar layer on cation exchange membrane-solution interface 被引量:1
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作者 桑商斌 黄可龙 +1 位作者 李晓刚 王显 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2006年第6期1436-1441,共6页
Membrane/solution interface consists of a neutral concentration polai layer(CPL) and a charge layer(CL) under external electrical field, and the neutral CPL can be neglected under high frequency AC electrical field. T... Membrane/solution interface consists of a neutral concentration polai layer(CPL) and a charge layer(CL) under external electrical field, and the neutral CPL can be neglected under high frequency AC electrical field. The relationship of CL thickness e with electrolyte concentration C and fixed ion exchange sites density σ in membrane surface layer can be expressed as e 展开更多
关键词 ion exchange membrane AC electrical field AC impedance membrane/solution interface STRUCTURE RESISTANCE
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In-situ pH Measurement at the Electrode/Solution Interface
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作者 Jian Min ZHANG Qiu Zhi SHI +1 位作者 Chang Chun YANG Quan Feng DONG(College of Chemistry and Chemical Engineering, Zhengzhou University, ZhengZhou 450052) 《Chinese Chemical Letters》 SCIE CAS CSCD 2000年第7期617-620,共4页
In this paper a pH microprobe technique was developed to measure in-situ the pH value at the electrode/solution interface. Iridium oxide was used as a pH sensitive material with good response behavior in the measured ... In this paper a pH microprobe technique was developed to measure in-situ the pH value at the electrode/solution interface. Iridium oxide was used as a pH sensitive material with good response behavior in the measured solutions. The experimental results indicated that the interfacial pH increased with the applied potential, first jumped to a maximum, then slowly decreased at the controlled potential during the electrodeposition process of functional ceramics. 展开更多
关键词 in-situ measurement pH microprobe electrode/solution interface
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IN SITU X-RAY DIFFRACTION CHARACTERIZATION OF SILVER/SOLUTION INTERFACES
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《Chinese Chemical Letters》 SCIE CAS CSCD 1992年第4期303-304,共2页
In situ x-ray diffraction electrochemical method is used to study the activation of silver electrode in KCl solution and UPD lead on silver electrode surface. We found that the activation makes the silver crystal thic... In situ x-ray diffraction electrochemical method is used to study the activation of silver electrode in KCl solution and UPD lead on silver electrode surface. We found that the activation makes the silver crystal thicker in (111), and the arrangement of water molecules on the silver electrode surface with UPD lead is partially ordered. 展开更多
关键词 UPD CHEN IN SITU X-RAY DIFFRACTION CHARACTERIZATION OF SILVER/solution interfaceS
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COMPLEX VARIABLE-VARIATIONALMETHOD OF SOLUTION FOR BI-METALLAMINATES WITH INTERFACE CRACKSAND ITS APPLICATION IN GLUED JOINTS
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作者 Meng Qingchun and Zhang XingBeijing University of Aeronautics and Astronautics 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 1990年第3期187-193,共7页
In this paper, the eigen function expansions of displacements and stresses of bi-metal laminates with interface cracks are obtained. Furthermore, the stress intensity factors are determined by the variational method t... In this paper, the eigen function expansions of displacements and stresses of bi-metal laminates with interface cracks are obtained. Furthermore, the stress intensity factors are determined by the variational method to satisfy the boundary conditions and there are only line integrals in the variational equations due to the previous satisfaction of all basic equations. The computations show that this method of solution has the advantages of rapid convergency and time-saving. The results obtained by this method for homogeneous material agree with the known ones very well. 展开更多
关键词 line COMPLEX VARIABLE-VARIATIONALMETHOD OF solution FOR BI-METALLAMINATES WITH interface CRACKSAND ITS APPLICATION IN GLUED JOINTS BI 一夕 ITS
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Effect of atomic structure on migration characteristic and solute segregation of ordered domain interfaces formed in Ni_(75)Al_xV_(25-x) 被引量:1
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作者 张明义 陈铮 +3 位作者 王永欣 马光 卢艳丽 范晓丽 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2011年第3期604-611,共8页
Based on the microscopic phase-field model, ordered domain interfaces formed between D022 (Ni3V) phases along [001] direction in Ni75AlxV25-x alloys were simulated, and the effects of atomic structure on the migrati... Based on the microscopic phase-field model, ordered domain interfaces formed between D022 (Ni3V) phases along [001] direction in Ni75AlxV25-x alloys were simulated, and the effects of atomic structure on the migration characteristic and solute segregation of interfaces were studied. It is found that the migration ability is related to the atomic structure of interfaces, and three kinds of interfaces can migrate except the interface (001)//(002) which has the characteristic of L12 (Ni3Al) structure. V atoms jump to the nearest neighbor site and substitute for Ni, and vice versa. Because of the site selectivity behaviors of jumping atoms, the number of jumping atoms during the migration is the least and the jumping distance of atoms is the shortest among all possible modes, and the atomic structures of interfaces are unchanged before and after the migration. The preferences and degree of segregation or depletion of alloy elements are also related to the atomic structure of interface. 展开更多
关键词 atomic migration characteristic solute segregation site selectivity microscopic phase-field ordered domain interface
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One-step Fabrication of Nanoporous Black Silicon Surfaces for Solar Cells using Modified Etching Solution 被引量:2
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作者 汤叶华 周春兰 +4 位作者 周肃 赵彦 王文静 费建明 曹红彬 《Chinese Journal of Chemical Physics》 SCIE CAS CSCD 2013年第1期102-108,I0004,共8页
Currently, a conventional two-step method has been used to generate black silicon (BS) surfaces on silicon substrates for solar cell manufacturing. However, the performances of the solar cell made with such surface ... Currently, a conventional two-step method has been used to generate black silicon (BS) surfaces on silicon substrates for solar cell manufacturing. However, the performances of the solar cell made with such surface generation method are poor, because of the high surface recombination caused by deep etching in the conventional surface generation method for BS. In this work, a modified wet chemical etching solution with additives was developed. A homogeneous BS layer with random porous structure was obtained from the modified solution in only one step at room temperature. The BS layer had low reflectivity and shallow etching depth. The additive in the etch solution performs the function of pH-modulation. After 16-min etching, the etching depth in the samples was approximately 200 nm, and the spectrum-weighted-reflectivity in the range from 300 nm to 1200 nm was below 5%. BS solar cells were fabricated in the production line. The decreased etching depth can improve the electrical performance of solar cells because of the decrease in surface recombination. An efficiency of 15.63% for the modified etching BS solar cells was achieved on a large area, p- type single crystalline silicon substrate with a 624.32-mV open circuit voltage and a 77.88% fill factor. 展开更多
关键词 Modified etching solution Black silicon surface Shallower etching depth Blacksilicon solar cell
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Interfacial design of silicon/carbon anodes for rechargeable batteries:A review 被引量:4
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作者 Quanyan Man Yongling An +3 位作者 Chengkai Liu Hengtao Shen Shenglin Xiong Jinkui Feng 《Journal of Energy Chemistry》 SCIE EI CAS CSCD 2023年第1期576-600,I0014,共26页
Silicon(Si)has been studied as a promising alloying type anode for lithium-ion batteries due to its high specific capacity,low operating potential and abundant resources.Nevertheless,huge volume expansion during alloy... Silicon(Si)has been studied as a promising alloying type anode for lithium-ion batteries due to its high specific capacity,low operating potential and abundant resources.Nevertheless,huge volume expansion during alloying/dealloying processes and low electronic conductivity of Si anodes restrict their electrochemical performance.Thus,carbon(C)materials with special physical and chemical properties are applied in Si anodes to effectively solve these problems.This review focuses on current status in the exploration of Si/C anodes,including the lithiation mechanism and solid electrolyte interface formation,various carbon sources in Si/C anodes,such as traditional carbon sources(graphite,pitch,biomass),and novel carbon sources(MXene,graphene,MOFs-derived carbon,graphdiyne,etc.),as well as interfacial bonding modes of Si and C in the Si/C anodes.Finally,we summarize and prospect the selection of carbonaceous materials,structural design and interface control of Si/C anodes,and application of Si/C anodes in all-solid-state lithium-ion batteries and sodium-ion batteries et al.This review will help researchers in the design of novel Si/C anodes for rechargeable batteries. 展开更多
关键词 silicon/carbon anodes Lithium-ion batteries interfacial reaction Carbon sources interface bonding
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Improvement in IBC-silicon solar cell performance by insertion of highly doped crystalline layer at heterojunction interfaces 被引量:3
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作者 Hadi Bashiri Mohammad Azim Karami Shahramm Mohammadnejad 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第10期508-514,共7页
By inserting a thin highly doped crystalline silicon layer between the base region and amorphous silicon layer in an interdigitated back-contact (IBC) silicon solar cell, a new passivation layer is investigated. The... By inserting a thin highly doped crystalline silicon layer between the base region and amorphous silicon layer in an interdigitated back-contact (IBC) silicon solar cell, a new passivation layer is investigated. The passivation layer performance is characterized by numerical simulations. Moreover, the dependence of the output parameters of the solar cell on the additional layer parameters (doping concentration and thickness) is studied. By optimizing the additional passivation layer in terms of doping concentration and thickness, the power conversion efficiency could be improved by a factor of 2.5%, open circuit voltage is increased by 30 mV and the fill factor of the solar cell by 7.4%. The performance enhancement is achieved due to the decrease of recombination rate, a decrease in solar cell resistivity and improvement of field effect passivation at heterojunction interface. The above-mentioned results are compared with reported results of the same conventional interdigitated back-contact silicon solar cell structure. Furthermore, the effect of a-Si:H/c-Si interface defect density on IBC silicon solar cell parameters with a new passivation layer is studied. The additional passivation layer also reduces the sensitivity of output parameter of solar cell to interface defect density. 展开更多
关键词 IBC silicon solar cells interface layer recombination interface defect density
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Corrosion Resistance ofAA6063-Type AI-Mg-Si Alloy by Silicon Carbide in Sodium Chloride Solution for Marine Application 被引量:1
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作者 Ojo Sunday Isaac Fayomi Malik Abdulwahab +1 位作者 Abimbola Patricia ldowu Popoola Ferdinand Asuke 《Journal of Marine Science and Application》 CSCD 2015年第4期459-462,共4页
The present work focused on corrosion inhibition of AA6063 type Al-Mg-Si alloy in sodium chloride (NaCI) solution with a silicon carbide inhibitor, using the potentiodynamic electrochemical method. The aluminium all... The present work focused on corrosion inhibition of AA6063 type Al-Mg-Si alloy in sodium chloride (NaCI) solution with a silicon carbide inhibitor, using the potentiodynamic electrochemical method. The aluminium alloy surface morphology was examined, in the as-received and as-corroded in the un-inhibited state, with scanning electron microscopy equipped with energy dispersive spectroscopy (SEM-EDS). The results obtained via linear polarization indicated a high corrosion potential for the unprotected as-received alloy. Equally, inhibition efficiency as high as 98.82% at 10.0 g/v silicon carbide addition was obtained with increased polarization resistance fRy), while the current density reduced significantly for inhibited samples compared to the un-inhibited aluminium alloy. The adsorption mechanism of the inhibitor aluminium alloy follows the Langmuir adsorption isotherm. This shows that the corrosion rate of aluminium alloy with silicon carbide in NaCI environment decreased significantly with addition of the inhibitor. 展开更多
关键词 corrosion resistance silicon carbide sodium chloride (NaCI) aluminium alloy interface inhibition efficiency thin film adsorption isotherm potentiodynamic electrochemical method marine application
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Interface states study of intrinsic amorphous silicon for crystalline silicon surface passivation in HIT solar cell
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作者 肖友鹏 魏秀琴 周浪 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第4期489-493,共5页
Intrinsic hydrogenated amorphous silicon(a-Si:H) film is deposited on n-type crystalline silicon(c-Si) wafer by hotwire chemical vapor deposition(HWCVD) to analyze the amorphous/crystalline heterointerface pass... Intrinsic hydrogenated amorphous silicon(a-Si:H) film is deposited on n-type crystalline silicon(c-Si) wafer by hotwire chemical vapor deposition(HWCVD) to analyze the amorphous/crystalline heterointerface passivation properties.The minority carrier lifetime of symmetric heterostructure is measured by using Sinton Consulting WCT-120 lifetime tester system,and a simple method of determining the interface state density(D_(it)) from lifetime measurement is proposed.The interface state density(D_(it)) measurement is also performed by using deep-level transient spectroscopy(DLTS) to prove the validity of the simple method.The microstructures and hydrogen bonding configurations of a-Si:H films with different hydrogen dilutions are investigated by using spectroscopic ellipsometry(SE) and Fourier transform infrared spectroscopy(FTIR) respectively.Lower values of interface state density(D_(it)) are obtained by using a-Si:H film with more uniform,compact microstructures and fewer bulk defects on crystalline silicon deposited by HWCVD. 展开更多
关键词 amorphous silicon MICROSTRUCTURE hydrogen bonding configurations interface state density
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INTERFACE MORPHOLOGIES AND SOLUTE SEGREGATION OF Al-Li ALLOY 8090 DURING UNIDIRECTIONAL SOLIDIFICATION
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作者 LIU Yulin ZHANG Yun ZHAO Hong’en HU Zhuangqi SHI Changxu Institute of Metal Research,Academia Sinica,Shenyang,China Associate Professor,Institute of Metal Research,Academia Sinica,Shenyang 110015,China 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 1993年第2期73-77,共5页
The solid-liquid interface morphology and solute segregation behaviour of AI-Li alloy 8090 during unidirectional solidification were studied by the liquid metal quenehing method under varied processing conditions.When... The solid-liquid interface morphology and solute segregation behaviour of AI-Li alloy 8090 during unidirectional solidification were studied by the liquid metal quenehing method under varied processing conditions.When solidification rate,R<O.13 or>O.75 mm/min (temper- ature gradient,G_L=130℃/cm),the structure revealed of planar or dendritic interface respectively.With the increase of R,the interface morphology becomes cellular from planar gradually,within a narrow range.And the greater the R,the,finer the dendrite.Segregation of element Cu and impurity elements Fe and Si are quite severe,the interface morphology markedly influences on solute segregation.During solidification at coarse dendrite interface, their segregation ratios are rather great and solidified structure is coarse. 展开更多
关键词 Al-Li alloy unidirectional solidification interface morphology solute segregation alloy 8090
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Effects of Ca(Y)-Si modifier on interface morphology and solute segregation during directional solidification of an austenite medium Mn steel
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作者 Gaofei Liang Zhenming Xu Jianguo Li 《Journal of University of Science and Technology Beijing》 CSCD 2005年第4期335-339,共5页
The austenite medium Mn steel modified with controlled additions of Ca, Y, Si were directionally solidified using the vertical Bridgman method to study the effects of Ca(Y)-Si modifier on the solid-liquid (S-L) in... The austenite medium Mn steel modified with controlled additions of Ca, Y, Si were directionally solidified using the vertical Bridgman method to study the effects of Ca(Y)-Si modifier on the solid-liquid (S-L) interface morphology and solute segregation. The interface morphology and the C and Mn segregation of the steel directionally solidified at 6.9 μtrn/s were investigated with an image analysis and a scanning electron microscope equipped with energy dispersive X-ray analysis. The 0.5wt% Ca-Si modified steel is solidified with a planar S-L interface. The interface of the 1.0wt% Ca-Si modified steel is similar to that of the 0.5wt% Ca-Si modified steel, but with larger nodes. The 1.5wt% Ca-Si modified steel displays a cellular growth parttern. The S-L interface morphology of the 0.5wt% Ca-Si+1.0wt% Y-Si modified Mn steel appears as dendritic interface, and primary austenite dendrites reveal developed lateral branching at the quenched liquid. In the meantime, the independent austenite colonies are formed ahead of the S-L interface. A mechanism involving constitutional supercooling explains the S-L interface evolution. It depends mainly on the difference in the contents of Ca, Y, and Si ahead of the S-L interface. The segregation of C and Mn ahead of the S-L interface enhanced by the modifiers is observed. 展开更多
关键词 austenite Mn steel modification solid-liquid (S-L) interface morphology solute segregation directional solidification
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A Novel Silicon Etching Method Using Vapor of Tetramethylammonium Hydroxide Solution
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作者 Jian He Yue-fang Zhao +3 位作者 Fang-liang Xu Dong-yang Zhao Xiao-juan Hou Xiu-jian Chou 《Chinese Journal of Chemical Physics》 SCIE CAS CSCD 2020年第6期769-774,I0003,共7页
Silicon bulk etching is an important part of micro-electro-mechanical system(MEMS) technology. In this work, a novel etching method is proposed based on the vapor from tetramethylammonium hydroxide(TMAH) solution heat... Silicon bulk etching is an important part of micro-electro-mechanical system(MEMS) technology. In this work, a novel etching method is proposed based on the vapor from tetramethylammonium hydroxide(TMAH) solution heated up to boiling point. The monocrystalline silicon wafer is positioned over the solution surface and can be anisotropically etched by the produced vapor. This etching method does not rely on the expensive vacuum equipment used in dry etching. Meanwhile, it presents several advantages like low roughness, high etching rate and high uniformity compared with the conventional wet etching methods. The etching rate and roughness can reach 2.13 μm/min and 1.02 nm, respectively. Furthermore,the diaphragm structure and Al-based pattern on the non-etched side of wafer can maintain intact without any damage during the back-cavity fabrication. Finally, an etching mechanism has been proposed to illustrate the observed experimental phenomenon. It is suggested that there is a water thin film on the etched surface during the solution evaporation. It is in this water layer that the ionization and etching reaction of TMAH proceed, facilitating the desorption of hydrogen bubble and the enhancement of molecular exchange rate. This new etching method is of great significance in the low-cost and high-quality micro-electromechanical system industrial fabrication. 展开更多
关键词 silicon bulk etching Micro-electro-mechanical system Tetramethylammo-nium hydroxide solution Anisotropic etching
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