The temperature field in MgO single crystal furnace is crucial to grow high-purity MgO single crystals with large sizes. In order to build proper temperature gradient, firstly finite element method （FEM） was used to...The temperature field in MgO single crystal furnace is crucial to grow high-purity MgO single crystals with large sizes. In order to build proper temperature gradient, firstly finite element method （FEM） was used to study the temperature field distributions, and then a temperature controller with adaptive neuro- fuzzy inference system （ANFIS） was developed based on the result of FEM and practical experiences. When the temperature in MgO single crystal furnace was changed, the controller would regulate the positions of three- phase electrodes and the voltage of the power simultaneously. The experimental results indicate that using the adaptive neuro-fuzzy control system can improve the quality and the quantity of the MgO single crystal production.展开更多
基金Funded by the National High-Tech R&D Program(Nos.2008AA03A325, 2011AA06103)
文摘The temperature field in MgO single crystal furnace is crucial to grow high-purity MgO single crystals with large sizes. In order to build proper temperature gradient, firstly finite element method （FEM） was used to study the temperature field distributions, and then a temperature controller with adaptive neuro- fuzzy inference system （ANFIS） was developed based on the result of FEM and practical experiences. When the temperature in MgO single crystal furnace was changed, the controller would regulate the positions of three- phase electrodes and the voltage of the power simultaneously. The experimental results indicate that using the adaptive neuro-fuzzy control system can improve the quality and the quantity of the MgO single crystal production.
