High-temperature thin-film thermocouples(TFTCs)have attracted significant attention in the aerospace and steel metallurgy industry.However,previous studies on TFTCs have primarily focused on the two-dimensional planar...High-temperature thin-film thermocouples(TFTCs)have attracted significant attention in the aerospace and steel metallurgy industry.However,previous studies on TFTCs have primarily focused on the two-dimensional planar-type,whose thermal sensitive area has to be perpendicular to the test environment,and therefore affects the thermal fluids pattern or loses accuracy.In order to address this problem,recent studies have developed three-dimensional probe-type TFTCs,which can be set parallel to the test environment.Nevertheless,the probe-type TFTCs are limited by their measurement threshold and poor stability at high temperatures.To address these issues,in this study,we propose a novel probe-type TFTC with a sandwich structure.The sensitive layer is compounded with indium oxide doped zinc oxide and fabricated using screen-printing technology.With the protection of sandwich structure on electrode film,the sensor demonstrates robust high-temperature stability,enabling continuous working at 1200℃ above 5 h with a low drift rate of 2.3℃·h^(−1).This sensor exhibits a high repeatability of 99.3% when measuring a wide range of temperatures,which is beyond the most existing probe-type TFTCs reported in the literature.With its excellent high-temperature performance,this temperature sensor holds immense potentials for enhancing equipment safety in the aerospace engineering and ensuring product quality in the steel metallurgy industry.展开更多
Submicron scale temperature sensors are crucial for a range of applications,particularly in micro and na-noscale environments.One promising solution involves the use of active whispering gallery mode(WGM)microresonato...Submicron scale temperature sensors are crucial for a range of applications,particularly in micro and na-noscale environments.One promising solution involves the use of active whispering gallery mode(WGM)microresonators.These resonators can be remotely excited and read out using free-space structures,simplifying the process of sensing.In this study,we present a submicron-scale temperature sensor with a remarkable sensitivity up to 185 pm/℃based on a trian-gular MAPbI3 nanoplatelet(NPL)laser.Notably,as temperature changes,the peak wavelength of the laser line shifts lin-early.This unique characteristic allows for precise temperature sensing by tracking the peak wavelength of the NPL laser.The optical modes are confined within the perovskite NPL,which measures just 85 nm in height,due to total internal reflec-tion.Our NPL laser boasts several key features,including a high Q of~2610 and a low laser threshold of about 19.8μJ·cm^(−2).The combination of exceptional sensitivity and ultra-small size makes our WGM device an ideal candidate for integration into systems that demand compact temperature sensors.This advancement paves the way for significant prog-ress in the development of ultrasmall temperature sensors,opening new possibilities across various fields.展开更多
A novel temperature sensor is developed and presented especially for the purpose of on-line thermal monitoring of VLSI chips.This sensor requires very small silicon area and low power consumption,and the simulation re...A novel temperature sensor is developed and presented especially for the purpose of on-line thermal monitoring of VLSI chips.This sensor requires very small silicon area and low power consumption,and the simulation results show that its accuracy is in the order of 0.8℃.The proposed sensor can be easily implemented using regular CMOS process technologies,and can be easily integrated to any VLSI circuits to increase their reliability.展开更多
Polythiophene (PTP) was prepared by a chemical oxidative polymerization and nanosized WO3 was prepared by a colloidal chemical method. The organic-inorganic PTP/WO3 hybrids with different mass fractions of PTP were ...Polythiophene (PTP) was prepared by a chemical oxidative polymerization and nanosized WO3 was prepared by a colloidal chemical method. The organic-inorganic PTP/WO3 hybrids with different mass fractions of PTP were obtained by a simple mechanically mixing the prepared PTP and WO3. The as-prepared PTP/WO3 hybrids have a higher thermal stability than the pure PTP. The gas sensing measurements demonstrate that the PTP/WO3 hybrid sensors exhibit higher response for detecting NO2 at low temperature than the pure PTP and WO3 sensor. The sensing mechanism is suggested to be related to the existence of p-n heterojunctions in the PTP/WO3 hybrids. The response of the PTP/WO3 hybrids is markedly influenced by the PTP mass fraction. The 20% PTP/WO3 hybrid shows high response and good selectivity to NO2 at low temperature (〈90℃). Therefore, the PTP/WO3 hybrids can be expected to be potentially used as gas sensor material for detecting NO2 at low temperature.展开更多
A silicon temperature sensor with a conventional resistor structure is fabricated on thin-film silicon-on-insulator (SOI) substrate.The sensor has very promising characteristics.The maximum operating temperature ca...A silicon temperature sensor with a conventional resistor structure is fabricated on thin-film silicon-on-insulator (SOI) substrate.The sensor has very promising characteristics.The maximum operating temperature can reach 550℃ even at a low current of 0.1mA.Experimental results support that the minority-carrier exclusion effect can be strong in the conventional resistor structure when the silicon film is sufficiently thin,thus significantly raising the maximum operating temperature.Moreover,since the structure of the device on thin-film SOI wafer is not crucial in controlling the maximum operating temperature,device layout can be varied according to the requirements of applications.展开更多
Based on attenuated total reflection (ATR) and thermo-optic effect, the polymeric thin film planar optical waveguide is used as the temperature sensor, and the factors influencing the sensitivity of the temperature ...Based on attenuated total reflection (ATR) and thermo-optic effect, the polymeric thin film planar optical waveguide is used as the temperature sensor, and the factors influencing the sensitivity of the temperature sensor are comprehensively analyzed. Combined with theoretical analysis and experimental investigation, the sensitivity of the temperature sensor is related to the thicknesses of the upper cladding layer, the waveguide layer, the optical loss of the polymer material and the guided wave modes. The results show that the slope value about reflectivity and temperature, which stands for the sensitivity of the polymer thin film temperature sensor, is associated with the waveguide film thickness and the guided wave modes, and the slope value is the highest in the zero reflectance of a certain transverse electric (TE) mode. To improve the sensitivity of the temperature sensor, the sensor's working incident light exterior angle α should be chosen under a certain TE mode with the reflectivity to be zero. This temperature sensor is characterized by high sensitivity and simple structure and it is easily fabricated.展开更多
In high-speed cutting, natural thermocouple, artificial thermocouple and infrared radiation temperature measurement are usually adopted for measuring cutting temperature, but these methods have difficulty in measuring...In high-speed cutting, natural thermocouple, artificial thermocouple and infrared radiation temperature measurement are usually adopted for measuring cutting temperature, but these methods have difficulty in measuring transient temperature accurately of cutting area on account of low response speed and limited cutting condition. In this paper, NiCr/NiSi thin-film thermocouples(TFTCs) are fabricated according to temperature characteristic of cutting area in high-speed cutting by means of advanced twinned microwave electro cyclotron resonance(MW-ECR) plasma source enhanced radio frequency(RF) reaction non-balance magnetron sputtering technique, and can be used for transient cutting temperature measurement. The time constants of the TFTCs with different thermo-junction film width are measured at four kinds of sampling frequency by using Ultra-CFR short pulsed laser system that established. One-dimensional unsteady heat conduction model is constructed and the dynamic performance is analyzed theoretically. It can be seen from the analysis results that the NiCr/NiSi TFTCs are suitable for measuring transient temperature which varies quickly, the response speed of TFTCs can be obviously improved by reducing the thickness of thin-film, and the area of thermo-junction has little influence on dynamic response time. The dynamic calibration experiments are made on the constructed dynamic calibration system, and the experimental results confirm that sampling frequency should be larger than 50 kHz in dynamic measurement for stable response time, and the shortest response time is 0.042 ms. Measurement methods and devices of cutting heat and cutting temperature measurement are developed and improved by this research, which provide practical methods and instruments in monitoring cutting heat and cutting temperature for research and production in high-speed machining.展开更多
This paper reports a novel technique for fabrication of a flexible skin with a temperature sensor array (40×1 sensors). A simplified MEMS technology using platinum resistors as sensing materials, which are sandwi...This paper reports a novel technique for fabrication of a flexible skin with a temperature sensor array (40×1 sensors). A simplified MEMS technology using platinum resistors as sensing materials, which are sandwiched between two polyimide layers as flexible substrates is developed. The two polyimide layers are deposited on top of a thin aluminum layer, which serves as a sacrificial layer such that the flexible skin can be released by metal etching and peeled off easily. The flexible skin with a temperature sensor array has a high mechanical flexibility and can be handily attached on a highly curved surface to detect tiny temperature distribution inside a small area. The sensor array shows a linear output and has a sensitivity of 7.5 mV/°C (prior to amplifiers) at a drive current of 1 mA. To demonstrate its applications, two examples have been demonstrated, including measurement of temperature distribution around a micro heater of a micro PCR (polymerase chain reaction) chip for DNA amplification and detection of separation point for flow over a circular cylinder. The development of the flexible skin with a temperature sensor array may be crucial for measuring temperature distribution on any curved surface in the fields of aerodynamics, space exploration, auto making and biomedical applications etc.展开更多
Metal-coated fiber Bragg grating(FBG)temperature sensors were prepared via electroless nickel(EN)plating and tin electroplating methods on the surface of normal bare FBG.The surface morphologies of the metal-coate...Metal-coated fiber Bragg grating(FBG)temperature sensors were prepared via electroless nickel(EN)plating and tin electroplating methods on the surface of normal bare FBG.The surface morphologies of the metal-coated layers were observed under a metallographic microscope.The effects of pretreatment sequence,pH value of EN plating solution and current density of electroplating on the performance of the metal-coated layers were analyzed.Meanwhile, the Bragg wavelength shift induced by temperature was monitored by an optical spectrum analyzer.Sensitivity of the metal-coated FBG(MFBG)sensor was almost two times that of normal bare FBG sensor.The measuring temperature of the MFBG sensor could be up to 280℃,which was much better than that of conventional FBG sensor.展开更多
Room-temperature gas sensors have aroused great attention in current gas sensor technology because of deemed demand of cheap,low power consumption and portable sensors for rapidly growing Internet of things applicatio...Room-temperature gas sensors have aroused great attention in current gas sensor technology because of deemed demand of cheap,low power consumption and portable sensors for rapidly growing Internet of things applications.As an important approach,light illumination has been exploited for room-temperature operation with improving gas sensor's attributes including sensitivity,speed and selectivity.This review provides an overview of the utilization of photoactivated nanomaterials in gas sensing field.First,recent advances in gas sensing of some exciting different nanostructures and hybrids of metal oxide semiconductors under light illumination are highlighted.Later,excellent gas sensing performance of emerging two-dimensional materialsbased sensors under light illumination is discussed in details with proposed gas sensing mechanism.Originated impressive features from the interaction of photons with sensing materials are elucidated in the context of modulating sensing characteristics.Finally,the review concludes with key and constructive insights into current and future perspectives in the light-activated nanomaterials for optoelectronic gas sensor applications.展开更多
A high temperature displacement sensor based on the principle of eddy-current is investigated. A new temperature compensation technique by using eddy-current effect is presented to satisfy the special requirement at h...A high temperature displacement sensor based on the principle of eddy-current is investigated. A new temperature compensation technique by using eddy-current effect is presented to satisfy the special requirement at high temperature up to 550℃. The experiment shows that the temperature compensation technique leads to good temperature stability for the sensors. The variation of the sensitivity as well as the temperature drift of the sensor with temperature compensation technique is only about 7.4% and 90-350 mV at 550 ℃ compared with that at room temperature, and that of the sensor without temperature compensation technique is about 31.2% and 2-3 V at 550 ℃ compared with that at room temperature. A new dynamic calibration method for the eddy-current displacement sensor is presented, which is very easy to be realized especially in high frequency and at high temperatures. The high temperature displacement sensors developed are successfully used at temperature up to 550 ℃ in a magnetic bearing system for more than 100 h.展开更多
Flexible temperature sensors have been extensively investigated due to their prospect of wide application in various flexible electronic products.However,most of the current flexible temperature sensors only work well...Flexible temperature sensors have been extensively investigated due to their prospect of wide application in various flexible electronic products.However,most of the current flexible temperature sensors only work well in a narrow temperature range,with their application at high or low temperatures still being a big challenge.This work proposes a flexible thermocouple temperature sensor based on aerogel blanket substrate,the temperature-sensitive layer of which uses the screen-printing technology to prepare indium oxide and indium tin oxide.It has good temperature sensitivity,with the test sensitivity reaching 226.7μV℃^(−1).Most importantly,it can work in a wide temperature range,from extremely low temperatures down to liquid nitrogen temperature to high temperatures up to 1200℃,which is difficult to be achieved by other existing flexible temperature sensors.This temperature sensor has huge application potential in biomedicine,aerospace and other fields.展开更多
yb^3+:Er^3+ co-doped oxy-fluoride ceramics glass has been prepared. The mechanism of up-conversion emissions about Er^3+ was discussed, and the temperature properties of green up-conversion fluorescence between 30...yb^3+:Er^3+ co-doped oxy-fluoride ceramics glass has been prepared. The mechanism of up-conversion emissions about Er^3+ was discussed, and the temperature properties of green up-conversion fluorescence between 303 and 823 K were investigated. The results show that the sensitivity of this sample reaches its maximum value, about 0.0047 K^-1, when the temperature is 383 K, indicating that this kind of sample can be used as high temperature and high sensitivity optical temperature sensor.展开更多
With the rapid development of the Internet of Things,there is a great demand for portable gas sensors.Metal oxide semiconductors(MOS)are one of the most traditional and well-studied gas sensing materials and have been...With the rapid development of the Internet of Things,there is a great demand for portable gas sensors.Metal oxide semiconductors(MOS)are one of the most traditional and well-studied gas sensing materials and have been widely used to prepare various commercial gas sensors.However,it is limited by high operating temperature.The current research works are directed towards fabricating high-performance flexible room-temperature(FRT)gas sensors,which are effective in simplifying the structure of MOS-based sensors,reducing power consumption,and expanding the application of portable devices.This article presents the recent research progress of MOS-based FRT gas sensors in terms of sensing mechanism,performance,flexibility characteristics,and applications.This review comprehensively summarizes and discusses five types of MOS-based FRT gas sensors,including pristine MOS,noble metal nanoparticles modified MOS,organic polymers modified MOS,carbon-based materials(carbon nanotubes and graphene derivatives)modified MOS,and two-dimensional transition metal dichalcogenides materials modified MOS.The effect of light-illuminated to improve gas sensing performance is further discussed.Furthermore,the applications and future perspectives of FRT gas sensors are also discussed.展开更多
The Internet of things for environment monitoring requires high performance with low power-consumption gas sensors which could be easily integrated into large-scale sensor network.While semiconductor gas sensors have ...The Internet of things for environment monitoring requires high performance with low power-consumption gas sensors which could be easily integrated into large-scale sensor network.While semiconductor gas sensors have many advantages such as excellent sensitivity and low cost,their application is limited by their high operating temperature.Two-dimensional(2D)layered materials,typically molybdenum disulfide(MoS2)nanosheets,are emerging as promising gas-sensing materials candidates owing to their abundant edge sites and high in-plane carrier mobility.This work aims to overcome the sluggish and weak response as well as incomplete recovery of MoS2 gas sensors at room temperature by sensitizing MoS2 nanosheets with PbS quantum dots(QDs).The huge amount of surface dangling bonds of QDs enables them to be ideal receptors for gas molecules.The sensitized MoS2 gas sensor exhibited fast and recoverable response when operated at room temperature,and the limit of NO2 detection was estimated to be 94 ppb.The strategy of sensitizing 2D nanosheets with sensitive QD receptors may enhance receptor and transducer functions as well as the utility factor that determine the sensor performance,offering a powerful new degree of freedom to the surface and interface engineering of semiconductor gas sensors.展开更多
An electronic-nose is developed based on eight quartz-crystal-microbalance (QCM) gas sensors in a sensor box, and is used to detect Chinese liquors at room temperature. Each sensor is a highly-accurate and highly-sens...An electronic-nose is developed based on eight quartz-crystal-microbalance (QCM) gas sensors in a sensor box, and is used to detect Chinese liquors at room temperature. Each sensor is a highly-accurate and highly-sensitive oscillator that has experienced airflow disturbances under the condition of varying room temperatures due to unstable flow-induced forces on the sensors surfaces. The three-dimensional (3D) nature of the airflow inside the sensor box and the interactions of the airflow on the sensors surfaces at different temperatures are studied by computational fluid dynamics (CFD) tools. Higher simulation accuracy is achieved by optimizing meshes, meshing the computational domain using a fine unstructural tetrahedron mesh. An optimum temperature, 30 ℃, is obtained by analyzing the distributions of velocity streamlines and the static pressure, as well as the flow-induced forces over time, all of which may be used to improve the identification accuracy of the electronic-nose for achieving stable and repeatable signals by removing the influence of temperature.展开更多
Ammonia detection possesses great potential in atmosphere environmental protection,agriculture,industry,and rapid medical diagnosis.However,it still remains a great challenge to balance the sensitivity,selectivity,wor...Ammonia detection possesses great potential in atmosphere environmental protection,agriculture,industry,and rapid medical diagnosis.However,it still remains a great challenge to balance the sensitivity,selectivity,working temperature,and response/recovery speed.In this work,Berlin green(BG)framework is demonstrated as a highly promising sensing material for ammonia detection by both density functional theory simulation and experimental gas sensing investigation.Vacancy in BG framework offers abundant active sites for ammonia absorption,and the absorbed ammonia transfers sufficient electron to BG,arousing remarkable enhancement of resistance.Pristine BG framework shows remarkable response to ammonia at 50–110°C with the highest response at 80°C,which is jointly influenced by ammonia’s absorption onto BG surface and insertion into BG lattice.The sensing performance of BG can hardly be achieved at room temperature due to its high resistance.Introduction of conductive Ti3CN MXene overcomes the high resistance of pure BG framework,and the simply prepared BG/Ti3CN mixture shows high selectivity to ammonia at room temperature with satisfying response/recovery speed.展开更多
In this paper,ultra-long and large-scaled ZnO microwire arrays are grown by the chemical vapor deposition method,and a single ZnO microwire-based non-balanced electric bridge ethanol gas sensor is fabricated.The exper...In this paper,ultra-long and large-scaled ZnO microwire arrays are grown by the chemical vapor deposition method,and a single ZnO microwire-based non-balanced electric bridge ethanol gas sensor is fabricated.The experimental results show that the gas sensor has good repeatability,high response rate,short response,and recovery time at room temperature(25℃).The response rate of the gas sensor exposed to 90-ppm ethanol is about 93%,with a response time and recovery time are 0.3 s and 0.7 s respectively.As a contrast,the traditional resistive gas sensor of a single ZnO microwire shows very small gas response rate.Therefore,ethanol gas sensor based on non-balanced electric bridge can obviously enhance gas sensing characteristics,which provides a feasible method of developing the high performance ZnO-based gas sensor.展开更多
An E-type high-precision temperature sensor, which is adopted for upper air meteorology, was proposed in this paper. A computational fluid dynamics(CFD) method was implemented to analyze temperature rise induced by so...An E-type high-precision temperature sensor, which is adopted for upper air meteorology, was proposed in this paper. A computational fluid dynamics(CFD) method was implemented to analyze temperature rise induced by solar radiation at different altitudes and solar radiation intensities. A temperature rise correction equation was obtained by fitting the CFD results using a Broyden-Fletcher-Goldfarb-Shanno(BFGS) method. To verify the performance of the temperature sensor, an experimental platform was constructed. Through simulations and experiments, the relationship among the altitude, solar radiation intensity and radiation temperature rise was obtaned. The root-mean-square error(RMSE) between the temperature rise derived from the correction equation and that derived from the experiments is 0.013 K. The sample determination coefficient r2 of the solar radiation error correction equation is 0.9975.展开更多
This study presents a silicon-based pressure sensor with temperature compensation. The eight piezoresistors were designed on the polycrystalline silicon membrane and constructed by two concentric Wheatstone-bridge cir...This study presents a silicon-based pressure sensor with temperature compensation. The eight piezoresistors were designed on the polycrystalline silicon membrane and constructed by two concentric Wheatstone-bridge circuits to perform two sets of sensors. The sensor in the central circuit measures the membrane deflection caused by the combined effects of pressure and temperature, while the outer one measures only the deflection caused by the working temperature. From this arrangement, it is reliable and accurate to measure the pressure by comparing the output signals from the two concentric Wheatstone-bridge circuits. The optimal positions of the eight piezoresistors were simulated by simulation software ANSYS. The investigated pressure sensor was fabricated by the micro electro-mechanical systems (MEMS) techniques. The measuring performance and an indication of the conventional single Wheatstone-bridge pressure sensor is easily affected under variation of different working temperature and causes a maximum absolute error up to 45.5%, while the double Wheatstone-bridge pressure sensor is able to compensate the error, and reduces it down to 1.13%. The results in this paper demonstrate an effective temperature compensation performance, and have a great performance and stability in the pressure measuring system as well.展开更多
基金supports from the National Key Research and Development Program of China(2022YFB3207502).
文摘High-temperature thin-film thermocouples(TFTCs)have attracted significant attention in the aerospace and steel metallurgy industry.However,previous studies on TFTCs have primarily focused on the two-dimensional planar-type,whose thermal sensitive area has to be perpendicular to the test environment,and therefore affects the thermal fluids pattern or loses accuracy.In order to address this problem,recent studies have developed three-dimensional probe-type TFTCs,which can be set parallel to the test environment.Nevertheless,the probe-type TFTCs are limited by their measurement threshold and poor stability at high temperatures.To address these issues,in this study,we propose a novel probe-type TFTC with a sandwich structure.The sensitive layer is compounded with indium oxide doped zinc oxide and fabricated using screen-printing technology.With the protection of sandwich structure on electrode film,the sensor demonstrates robust high-temperature stability,enabling continuous working at 1200℃ above 5 h with a low drift rate of 2.3℃·h^(−1).This sensor exhibits a high repeatability of 99.3% when measuring a wide range of temperatures,which is beyond the most existing probe-type TFTCs reported in the literature.With its excellent high-temperature performance,this temperature sensor holds immense potentials for enhancing equipment safety in the aerospace engineering and ensuring product quality in the steel metallurgy industry.
文摘Submicron scale temperature sensors are crucial for a range of applications,particularly in micro and na-noscale environments.One promising solution involves the use of active whispering gallery mode(WGM)microresonators.These resonators can be remotely excited and read out using free-space structures,simplifying the process of sensing.In this study,we present a submicron-scale temperature sensor with a remarkable sensitivity up to 185 pm/℃based on a trian-gular MAPbI3 nanoplatelet(NPL)laser.Notably,as temperature changes,the peak wavelength of the laser line shifts lin-early.This unique characteristic allows for precise temperature sensing by tracking the peak wavelength of the NPL laser.The optical modes are confined within the perovskite NPL,which measures just 85 nm in height,due to total internal reflec-tion.Our NPL laser boasts several key features,including a high Q of~2610 and a low laser threshold of about 19.8μJ·cm^(−2).The combination of exceptional sensitivity and ultra-small size makes our WGM device an ideal candidate for integration into systems that demand compact temperature sensors.This advancement paves the way for significant prog-ress in the development of ultrasmall temperature sensors,opening new possibilities across various fields.
文摘A novel temperature sensor is developed and presented especially for the purpose of on-line thermal monitoring of VLSI chips.This sensor requires very small silicon area and low power consumption,and the simulation results show that its accuracy is in the order of 0.8℃.The proposed sensor can be easily implemented using regular CMOS process technologies,and can be easily integrated to any VLSI circuits to increase their reliability.
基金Foundation item: Project (21171099) supported by the National Natural Science Foundation of ChinaProjects (09JCYBJC03600,10JCYBJC03900) supported by Technology Commission Foundation of Tianjin,China
文摘Polythiophene (PTP) was prepared by a chemical oxidative polymerization and nanosized WO3 was prepared by a colloidal chemical method. The organic-inorganic PTP/WO3 hybrids with different mass fractions of PTP were obtained by a simple mechanically mixing the prepared PTP and WO3. The as-prepared PTP/WO3 hybrids have a higher thermal stability than the pure PTP. The gas sensing measurements demonstrate that the PTP/WO3 hybrid sensors exhibit higher response for detecting NO2 at low temperature than the pure PTP and WO3 sensor. The sensing mechanism is suggested to be related to the existence of p-n heterojunctions in the PTP/WO3 hybrids. The response of the PTP/WO3 hybrids is markedly influenced by the PTP mass fraction. The 20% PTP/WO3 hybrid shows high response and good selectivity to NO2 at low temperature (〈90℃). Therefore, the PTP/WO3 hybrids can be expected to be potentially used as gas sensor material for detecting NO2 at low temperature.
文摘A silicon temperature sensor with a conventional resistor structure is fabricated on thin-film silicon-on-insulator (SOI) substrate.The sensor has very promising characteristics.The maximum operating temperature can reach 550℃ even at a low current of 0.1mA.Experimental results support that the minority-carrier exclusion effect can be strong in the conventional resistor structure when the silicon film is sufficiently thin,thus significantly raising the maximum operating temperature.Moreover,since the structure of the device on thin-film SOI wafer is not crucial in controlling the maximum operating temperature,device layout can be varied according to the requirements of applications.
基金The National Natural Science Foundation of China(No.60977038)the Specialized Research Fund for the Doctoral Program of Higher Education(No.20110092110016)+1 种基金the National Basic Research Program of China(973Program)(No.2011CB302004)the Foundation of Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology of Ministry of Education of China(No.201204)
文摘Based on attenuated total reflection (ATR) and thermo-optic effect, the polymeric thin film planar optical waveguide is used as the temperature sensor, and the factors influencing the sensitivity of the temperature sensor are comprehensively analyzed. Combined with theoretical analysis and experimental investigation, the sensitivity of the temperature sensor is related to the thicknesses of the upper cladding layer, the waveguide layer, the optical loss of the polymer material and the guided wave modes. The results show that the slope value about reflectivity and temperature, which stands for the sensitivity of the polymer thin film temperature sensor, is associated with the waveguide film thickness and the guided wave modes, and the slope value is the highest in the zero reflectance of a certain transverse electric (TE) mode. To improve the sensitivity of the temperature sensor, the sensor's working incident light exterior angle α should be chosen under a certain TE mode with the reflectivity to be zero. This temperature sensor is characterized by high sensitivity and simple structure and it is easily fabricated.
基金supported by National Natural Science Foundation of China(Grant No.50775210)Liaoning Provincial Natural Science Foundation of China(Grant No.20062143)Liaoning Provincial Universities Science and Technology Program of China(Grant No.05L023)
文摘In high-speed cutting, natural thermocouple, artificial thermocouple and infrared radiation temperature measurement are usually adopted for measuring cutting temperature, but these methods have difficulty in measuring transient temperature accurately of cutting area on account of low response speed and limited cutting condition. In this paper, NiCr/NiSi thin-film thermocouples(TFTCs) are fabricated according to temperature characteristic of cutting area in high-speed cutting by means of advanced twinned microwave electro cyclotron resonance(MW-ECR) plasma source enhanced radio frequency(RF) reaction non-balance magnetron sputtering technique, and can be used for transient cutting temperature measurement. The time constants of the TFTCs with different thermo-junction film width are measured at four kinds of sampling frequency by using Ultra-CFR short pulsed laser system that established. One-dimensional unsteady heat conduction model is constructed and the dynamic performance is analyzed theoretically. It can be seen from the analysis results that the NiCr/NiSi TFTCs are suitable for measuring transient temperature which varies quickly, the response speed of TFTCs can be obviously improved by reducing the thickness of thin-film, and the area of thermo-junction has little influence on dynamic response time. The dynamic calibration experiments are made on the constructed dynamic calibration system, and the experimental results confirm that sampling frequency should be larger than 50 kHz in dynamic measurement for stable response time, and the shortest response time is 0.042 ms. Measurement methods and devices of cutting heat and cutting temperature measurement are developed and improved by this research, which provide practical methods and instruments in monitoring cutting heat and cutting temperature for research and production in high-speed machining.
文摘This paper reports a novel technique for fabrication of a flexible skin with a temperature sensor array (40×1 sensors). A simplified MEMS technology using platinum resistors as sensing materials, which are sandwiched between two polyimide layers as flexible substrates is developed. The two polyimide layers are deposited on top of a thin aluminum layer, which serves as a sacrificial layer such that the flexible skin can be released by metal etching and peeled off easily. The flexible skin with a temperature sensor array has a high mechanical flexibility and can be handily attached on a highly curved surface to detect tiny temperature distribution inside a small area. The sensor array shows a linear output and has a sensitivity of 7.5 mV/°C (prior to amplifiers) at a drive current of 1 mA. To demonstrate its applications, two examples have been demonstrated, including measurement of temperature distribution around a micro heater of a micro PCR (polymerase chain reaction) chip for DNA amplification and detection of separation point for flow over a circular cylinder. The development of the flexible skin with a temperature sensor array may be crucial for measuring temperature distribution on any curved surface in the fields of aerodynamics, space exploration, auto making and biomedical applications etc.
基金the National Natural Science Foundation of China(No.60777038).
文摘Metal-coated fiber Bragg grating(FBG)temperature sensors were prepared via electroless nickel(EN)plating and tin electroplating methods on the surface of normal bare FBG.The surface morphologies of the metal-coated layers were observed under a metallographic microscope.The effects of pretreatment sequence,pH value of EN plating solution and current density of electroplating on the performance of the metal-coated layers were analyzed.Meanwhile, the Bragg wavelength shift induced by temperature was monitored by an optical spectrum analyzer.Sensitivity of the metal-coated FBG(MFBG)sensor was almost two times that of normal bare FBG sensor.The measuring temperature of the MFBG sensor could be up to 280℃,which was much better than that of conventional FBG sensor.
基金the financial support of the Department of Science and Engineering Research Board (SERB) (Sanction Order No. CRG/2019/000112)。
文摘Room-temperature gas sensors have aroused great attention in current gas sensor technology because of deemed demand of cheap,low power consumption and portable sensors for rapidly growing Internet of things applications.As an important approach,light illumination has been exploited for room-temperature operation with improving gas sensor's attributes including sensitivity,speed and selectivity.This review provides an overview of the utilization of photoactivated nanomaterials in gas sensing field.First,recent advances in gas sensing of some exciting different nanostructures and hybrids of metal oxide semiconductors under light illumination are highlighted.Later,excellent gas sensing performance of emerging two-dimensional materialsbased sensors under light illumination is discussed in details with proposed gas sensing mechanism.Originated impressive features from the interaction of photons with sensing materials are elucidated in the context of modulating sensing characteristics.Finally,the review concludes with key and constructive insights into current and future perspectives in the light-activated nanomaterials for optoelectronic gas sensor applications.
基金This project is supported by European Community Project, National NaturalScience Foundation of China (No.50437010) and Aviation Science Founda-tion of China (No.99C52072).
文摘A high temperature displacement sensor based on the principle of eddy-current is investigated. A new temperature compensation technique by using eddy-current effect is presented to satisfy the special requirement at high temperature up to 550℃. The experiment shows that the temperature compensation technique leads to good temperature stability for the sensors. The variation of the sensitivity as well as the temperature drift of the sensor with temperature compensation technique is only about 7.4% and 90-350 mV at 550 ℃ compared with that at room temperature, and that of the sensor without temperature compensation technique is about 31.2% and 2-3 V at 550 ℃ compared with that at room temperature. A new dynamic calibration method for the eddy-current displacement sensor is presented, which is very easy to be realized especially in high frequency and at high temperatures. The high temperature displacement sensors developed are successfully used at temperature up to 550 ℃ in a magnetic bearing system for more than 100 h.
基金supported by The National Key Research and Development Program of China(2020YFB2009100)Natural Science Basic Research Program of Shaanxi(Program No.2022JQ-508)National Science and Technology Major Project(Grant No.J2019-V-0006-0100),Open research fund of SKLMS(Grant No.sklms2021009).
文摘Flexible temperature sensors have been extensively investigated due to their prospect of wide application in various flexible electronic products.However,most of the current flexible temperature sensors only work well in a narrow temperature range,with their application at high or low temperatures still being a big challenge.This work proposes a flexible thermocouple temperature sensor based on aerogel blanket substrate,the temperature-sensitive layer of which uses the screen-printing technology to prepare indium oxide and indium tin oxide.It has good temperature sensitivity,with the test sensitivity reaching 226.7μV℃^(−1).Most importantly,it can work in a wide temperature range,from extremely low temperatures down to liquid nitrogen temperature to high temperatures up to 1200℃,which is difficult to be achieved by other existing flexible temperature sensors.This temperature sensor has huge application potential in biomedicine,aerospace and other fields.
基金Project supported by the National Natural Science Foundation of China (Grant No. 10804015 )the Science Foundation of the Education Department of Liaoning Province of China (Grant No. 2009A417)
文摘yb^3+:Er^3+ co-doped oxy-fluoride ceramics glass has been prepared. The mechanism of up-conversion emissions about Er^3+ was discussed, and the temperature properties of green up-conversion fluorescence between 303 and 823 K were investigated. The results show that the sensitivity of this sample reaches its maximum value, about 0.0047 K^-1, when the temperature is 383 K, indicating that this kind of sample can be used as high temperature and high sensitivity optical temperature sensor.
基金This work is supported by This work was supported by the National Key R&D Program of China(Nos.2020YFB2008604 and 2021YFB3202500)the National Natural Science Foundation of China(Nos.61874034 and 51861135105)+1 种基金the International Science and Technology Cooperation Program of Shanghai Science and Technology Innovation Action Plan(No.21520713300)Fudan University-CIOMP Joint Fund(E02632Y7H0).
文摘With the rapid development of the Internet of Things,there is a great demand for portable gas sensors.Metal oxide semiconductors(MOS)are one of the most traditional and well-studied gas sensing materials and have been widely used to prepare various commercial gas sensors.However,it is limited by high operating temperature.The current research works are directed towards fabricating high-performance flexible room-temperature(FRT)gas sensors,which are effective in simplifying the structure of MOS-based sensors,reducing power consumption,and expanding the application of portable devices.This article presents the recent research progress of MOS-based FRT gas sensors in terms of sensing mechanism,performance,flexibility characteristics,and applications.This review comprehensively summarizes and discusses five types of MOS-based FRT gas sensors,including pristine MOS,noble metal nanoparticles modified MOS,organic polymers modified MOS,carbon-based materials(carbon nanotubes and graphene derivatives)modified MOS,and two-dimensional transition metal dichalcogenides materials modified MOS.The effect of light-illuminated to improve gas sensing performance is further discussed.Furthermore,the applications and future perspectives of FRT gas sensors are also discussed.
基金National Natural Science Foundation of China(Nos.61861136004 and 61922032).
文摘The Internet of things for environment monitoring requires high performance with low power-consumption gas sensors which could be easily integrated into large-scale sensor network.While semiconductor gas sensors have many advantages such as excellent sensitivity and low cost,their application is limited by their high operating temperature.Two-dimensional(2D)layered materials,typically molybdenum disulfide(MoS2)nanosheets,are emerging as promising gas-sensing materials candidates owing to their abundant edge sites and high in-plane carrier mobility.This work aims to overcome the sluggish and weak response as well as incomplete recovery of MoS2 gas sensors at room temperature by sensitizing MoS2 nanosheets with PbS quantum dots(QDs).The huge amount of surface dangling bonds of QDs enables them to be ideal receptors for gas molecules.The sensitized MoS2 gas sensor exhibited fast and recoverable response when operated at room temperature,and the limit of NO2 detection was estimated to be 94 ppb.The strategy of sensitizing 2D nanosheets with sensitive QD receptors may enhance receptor and transducer functions as well as the utility factor that determine the sensor performance,offering a powerful new degree of freedom to the surface and interface engineering of semiconductor gas sensors.
基金Project supported by the National Natural Science Foundation of China(Nos.61876059 and U1501251)
文摘An electronic-nose is developed based on eight quartz-crystal-microbalance (QCM) gas sensors in a sensor box, and is used to detect Chinese liquors at room temperature. Each sensor is a highly-accurate and highly-sensitive oscillator that has experienced airflow disturbances under the condition of varying room temperatures due to unstable flow-induced forces on the sensors surfaces. The three-dimensional (3D) nature of the airflow inside the sensor box and the interactions of the airflow on the sensors surfaces at different temperatures are studied by computational fluid dynamics (CFD) tools. Higher simulation accuracy is achieved by optimizing meshes, meshing the computational domain using a fine unstructural tetrahedron mesh. An optimum temperature, 30 ℃, is obtained by analyzing the distributions of velocity streamlines and the static pressure, as well as the flow-induced forces over time, all of which may be used to improve the identification accuracy of the electronic-nose for achieving stable and repeatable signals by removing the influence of temperature.
基金The research was supported by the National Natural Science Foundation of China(Grant Nos.61435010,61675135,and 62005177)the National Natural Science Foundation for Young Scientists of China(Grant No.61905161)the Science and Technology Innovation Commission of Shenzhen(JCYJ20190808142415003).Authors also acknowledge the support from Instrumental Analysis Center of Shenzhen University(Xili Campus).
文摘Ammonia detection possesses great potential in atmosphere environmental protection,agriculture,industry,and rapid medical diagnosis.However,it still remains a great challenge to balance the sensitivity,selectivity,working temperature,and response/recovery speed.In this work,Berlin green(BG)framework is demonstrated as a highly promising sensing material for ammonia detection by both density functional theory simulation and experimental gas sensing investigation.Vacancy in BG framework offers abundant active sites for ammonia absorption,and the absorbed ammonia transfers sufficient electron to BG,arousing remarkable enhancement of resistance.Pristine BG framework shows remarkable response to ammonia at 50–110°C with the highest response at 80°C,which is jointly influenced by ammonia’s absorption onto BG surface and insertion into BG lattice.The sensing performance of BG can hardly be achieved at room temperature due to its high resistance.Introduction of conductive Ti3CN MXene overcomes the high resistance of pure BG framework,and the simply prepared BG/Ti3CN mixture shows high selectivity to ammonia at room temperature with satisfying response/recovery speed.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.61574026 and 11405017)the Liaoning Provincial Natural Science Foundation,China(Grant No.201602453)
文摘In this paper,ultra-long and large-scaled ZnO microwire arrays are grown by the chemical vapor deposition method,and a single ZnO microwire-based non-balanced electric bridge ethanol gas sensor is fabricated.The experimental results show that the gas sensor has good repeatability,high response rate,short response,and recovery time at room temperature(25℃).The response rate of the gas sensor exposed to 90-ppm ethanol is about 93%,with a response time and recovery time are 0.3 s and 0.7 s respectively.As a contrast,the traditional resistive gas sensor of a single ZnO microwire shows very small gas response rate.Therefore,ethanol gas sensor based on non-balanced electric bridge can obviously enhance gas sensing characteristics,which provides a feasible method of developing the high performance ZnO-based gas sensor.
文摘An E-type high-precision temperature sensor, which is adopted for upper air meteorology, was proposed in this paper. A computational fluid dynamics(CFD) method was implemented to analyze temperature rise induced by solar radiation at different altitudes and solar radiation intensities. A temperature rise correction equation was obtained by fitting the CFD results using a Broyden-Fletcher-Goldfarb-Shanno(BFGS) method. To verify the performance of the temperature sensor, an experimental platform was constructed. Through simulations and experiments, the relationship among the altitude, solar radiation intensity and radiation temperature rise was obtaned. The root-mean-square error(RMSE) between the temperature rise derived from the correction equation and that derived from the experiments is 0.013 K. The sample determination coefficient r2 of the solar radiation error correction equation is 0.9975.
文摘This study presents a silicon-based pressure sensor with temperature compensation. The eight piezoresistors were designed on the polycrystalline silicon membrane and constructed by two concentric Wheatstone-bridge circuits to perform two sets of sensors. The sensor in the central circuit measures the membrane deflection caused by the combined effects of pressure and temperature, while the outer one measures only the deflection caused by the working temperature. From this arrangement, it is reliable and accurate to measure the pressure by comparing the output signals from the two concentric Wheatstone-bridge circuits. The optimal positions of the eight piezoresistors were simulated by simulation software ANSYS. The investigated pressure sensor was fabricated by the micro electro-mechanical systems (MEMS) techniques. The measuring performance and an indication of the conventional single Wheatstone-bridge pressure sensor is easily affected under variation of different working temperature and causes a maximum absolute error up to 45.5%, while the double Wheatstone-bridge pressure sensor is able to compensate the error, and reduces it down to 1.13%. The results in this paper demonstrate an effective temperature compensation performance, and have a great performance and stability in the pressure measuring system as well.