To improve the efficiency and consistency of machined microlens array using single-point diamond turning technology,a theoretical model of surface form error is proposed in this paper.Then,a compensation method for th...To improve the efficiency and consistency of machined microlens array using single-point diamond turning technology,a theoretical model of surface form error is proposed in this paper.Then,a compensation method for this model is studied.In the proposed tool equivalent tilt angle model,the microlens array is regarded as a freeform surface.The corresponding curvature radius of the surface at each cutting point along the cutting direction is calculated by establishing a slow slide servo cutting model.In the spatial form error model,the assumption is that surface form error has a linear relationship with z-axis maximum speed vz.An empirical linear equation is obtained and verified,with a maximum deviation of 0.4μm.Then,after machining,the surface form error is measured and processed using on-machine measurement.The theoretical and measured surface form errors are consistent.The surface form error is compensated in the machining program.The peak-to-valley value is reduced from 5.4 to 0.6μm after compensation.Findings show that the single-point diamond turning and compensation method for the microlens array presented in this paper can predict the surface form error and significantly improve machining accuracy and consistency.展开更多
基金the National Natural Science Foundation of China(Grant No.52075332)the Strategic Priority Research Program of the Chinese Academy of Sciences(Grant No.XDA25040000,XDA25040200,and XDA25040202).
文摘To improve the efficiency and consistency of machined microlens array using single-point diamond turning technology,a theoretical model of surface form error is proposed in this paper.Then,a compensation method for this model is studied.In the proposed tool equivalent tilt angle model,the microlens array is regarded as a freeform surface.The corresponding curvature radius of the surface at each cutting point along the cutting direction is calculated by establishing a slow slide servo cutting model.In the spatial form error model,the assumption is that surface form error has a linear relationship with z-axis maximum speed vz.An empirical linear equation is obtained and verified,with a maximum deviation of 0.4μm.Then,after machining,the surface form error is measured and processed using on-machine measurement.The theoretical and measured surface form errors are consistent.The surface form error is compensated in the machining program.The peak-to-valley value is reduced from 5.4 to 0.6μm after compensation.Findings show that the single-point diamond turning and compensation method for the microlens array presented in this paper can predict the surface form error and significantly improve machining accuracy and consistency.
