Petroleum coke and lignite are two important fossil fuels that have not been widely used in China. Petroleum coke-lignite slurry (PCLS), a mixture of petro- leum coke, lignite, water, and additives, efficiently util...Petroleum coke and lignite are two important fossil fuels that have not been widely used in China. Petroleum coke-lignite slurry (PCLS), a mixture of petro- leum coke, lignite, water, and additives, efficiently utilizes the two materials. In this study, we investigate the effects of the proportion (7) of petroleum coke on slurryability, rheo- logical behavior, stability, and increasing temperature characteristics of PCLSs. The results show that the fixed- viscosity solid concentration (COo) increases with increasing 7. The ~Oo of lignite-water slurry (LWS, ~ = 0) is 46.7 %, compared to 71.3 % for the petroleum coke-water slurry (PCWS, c~ --- i00 %), while that of PCLS is in between the two values. The rheological behavior of PCLS perfectly fits the power-law model. The PCWS acts as a dilatant fluid. As decreases, the slurry behaves first as an approximate Newtonian fluid, and then turns into a pseudo-plastic fluid that exhibits shear-thinning behavior. With increasing ct, the rigid sedimentation and water separation ratio (WSR) increase, indicating a decrease in the stability of PCLS. When α is 60-70 %, the result is a high-quality slurry fuel for industrial applications, which has high slurryability (ω0 = 57-60 %), good stability (WSR 〈 2 %), and superior pseudo-plastic behavior (n = 0.9).展开更多
Chemical mechanical polishing(CMP) is one of the important machining procedures of multilayered copper interconnection for GLSI, meanwhile polishing slurry is a critical factor for realizing the high polishing perfo...Chemical mechanical polishing(CMP) is one of the important machining procedures of multilayered copper interconnection for GLSI, meanwhile polishing slurry is a critical factor for realizing the high polishing performance such as high planarization efficiency, low surface roughness. The effect of slurry components such as abrasive(colloidal silica), complexing agent(glycine), inhibitor(BTA) and oxidizing agent(H_2O_2) on the stability of the novel weakly alkaline slurry of copper interconnection CMP for GLSI was investigated in this paper. First, the synergistic and competitive relationship of them in a peroxide-based weakly alkaline slurry during the copper CMP process was studied and the stability mechanism was put forward. Then 1 wt% colloidal silica, 2.5 wt% glycine,200 ppm BTA, 20 m L/L H_2O_2 had been selected as the appropriate concentration to prepare copper slurry, and using such slurry the copper blanket wafer was polished. From the variations of copper removal rate, root-mean square roughness(Sq) value with the setting time, it indicates that the working-life of the novel weakly alkaline slurry can reach more than 7 days, which satisfies the requirement of microelectronics further development.展开更多
Two different grinding processes were examined to determine the effect grinding has on the quality of a CWS. A series of slurries was prepared from Australian (Au) and Chinese (YZ) coals. Both types of coal were groun...Two different grinding processes were examined to determine the effect grinding has on the quality of a CWS. A series of slurries was prepared from Australian (Au) and Chinese (YZ) coals. Both types of coal were ground by a Chinese (CUMT) and an Australian (JK) grinding process. The performance tests of the prepared CWS showed that fluidity of all slurries was acceptable. The concentration of the CWS from YZ coal ground by the CUMT grinding process was higher than when the JK grinding process was used. The highest concentration was 70.14% in this case. The concentration of the CWS prepared from Au coal by the JK grinding process was higher than when the CUMT grinding process was used. The highest con- centration in this case was 70.97%. These differences are caused by the particle size distribution devel- oped during the different grinding processes.展开更多
Two coal samples of similar rank were chosen from Australia and China to investigate the differences in Coal-Water Slurry (CWS) made from them. The effect of ash content and particle size gradation on these properti...Two coal samples of similar rank were chosen from Australia and China to investigate the differences in Coal-Water Slurry (CWS) made from them. The effect of ash content and particle size gradation on these properties was also studied. Different grinding times were used when grinding the two coals and particle size analysis of these ground coals was used to select samples with a "double-peak" particle size distri- bution. All the "double-peak" samples were used to prepare a CWS. The concentration, viscosity, fluidity, and stability of each CWS were measured. The results show that the properties ofa CWS prepared from a coal sample with a "double-peak" size distribution are better than those CWS prepared from samples with a mono-modal particle distribution. The ash content of Australian coal is 21.72g higher than the ash content of Shenhua coal. The highest coal concentration in slurry from the Australia coal is 11.01% higher than in CWS from the Shenhua coat. The fluidity and stability of the CWS prepared from the Australian coal are both better than the fluidity and stability of slurry prepared from Shenhua coal. High ash content in the Australian coal imnroves the nulning results of a CWS made from it.展开更多
基金the National Basic Research Program of China (Grant No. 2010CB227001)
文摘Petroleum coke and lignite are two important fossil fuels that have not been widely used in China. Petroleum coke-lignite slurry (PCLS), a mixture of petro- leum coke, lignite, water, and additives, efficiently utilizes the two materials. In this study, we investigate the effects of the proportion (7) of petroleum coke on slurryability, rheo- logical behavior, stability, and increasing temperature characteristics of PCLSs. The results show that the fixed- viscosity solid concentration (COo) increases with increasing 7. The ~Oo of lignite-water slurry (LWS, ~ = 0) is 46.7 %, compared to 71.3 % for the petroleum coke-water slurry (PCWS, c~ --- i00 %), while that of PCLS is in between the two values. The rheological behavior of PCLS perfectly fits the power-law model. The PCWS acts as a dilatant fluid. As decreases, the slurry behaves first as an approximate Newtonian fluid, and then turns into a pseudo-plastic fluid that exhibits shear-thinning behavior. With increasing ct, the rigid sedimentation and water separation ratio (WSR) increase, indicating a decrease in the stability of PCLS. When α is 60-70 %, the result is a high-quality slurry fuel for industrial applications, which has high slurryability (ω0 = 57-60 %), good stability (WSR 〈 2 %), and superior pseudo-plastic behavior (n = 0.9).
基金supported by the Major National Science and Technology Special Projects(No.2016ZX02301003-004-007)the Professional Degree Teaching Case Foundation of Hebei Province,China(No.KCJSZ2017008)+1 种基金the Natural Science Foundation of Hebei Province,China(No.F2015202267)the Natural Science Foundation of Tianjin,China(No.16JCYBJC16100)
文摘Chemical mechanical polishing(CMP) is one of the important machining procedures of multilayered copper interconnection for GLSI, meanwhile polishing slurry is a critical factor for realizing the high polishing performance such as high planarization efficiency, low surface roughness. The effect of slurry components such as abrasive(colloidal silica), complexing agent(glycine), inhibitor(BTA) and oxidizing agent(H_2O_2) on the stability of the novel weakly alkaline slurry of copper interconnection CMP for GLSI was investigated in this paper. First, the synergistic and competitive relationship of them in a peroxide-based weakly alkaline slurry during the copper CMP process was studied and the stability mechanism was put forward. Then 1 wt% colloidal silica, 2.5 wt% glycine,200 ppm BTA, 20 m L/L H_2O_2 had been selected as the appropriate concentration to prepare copper slurry, and using such slurry the copper blanket wafer was polished. From the variations of copper removal rate, root-mean square roughness(Sq) value with the setting time, it indicates that the working-life of the novel weakly alkaline slurry can reach more than 7 days, which satisfies the requirement of microelectronics further development.
基金This project received funding from the Australian governmentas part of the Asia-Pacific Partnership on Clean Development and Climate
文摘Two different grinding processes were examined to determine the effect grinding has on the quality of a CWS. A series of slurries was prepared from Australian (Au) and Chinese (YZ) coals. Both types of coal were ground by a Chinese (CUMT) and an Australian (JK) grinding process. The performance tests of the prepared CWS showed that fluidity of all slurries was acceptable. The concentration of the CWS from YZ coal ground by the CUMT grinding process was higher than when the JK grinding process was used. The highest concentration was 70.14% in this case. The concentration of the CWS prepared from Au coal by the JK grinding process was higher than when the CUMT grinding process was used. The highest con- centration in this case was 70.97%. These differences are caused by the particle size distribution devel- oped during the different grinding processes.
基金received funding from the Australian Government as part of the Asia-Pacific Partnership on Clean Development and Climate
文摘Two coal samples of similar rank were chosen from Australia and China to investigate the differences in Coal-Water Slurry (CWS) made from them. The effect of ash content and particle size gradation on these properties was also studied. Different grinding times were used when grinding the two coals and particle size analysis of these ground coals was used to select samples with a "double-peak" particle size distri- bution. All the "double-peak" samples were used to prepare a CWS. The concentration, viscosity, fluidity, and stability of each CWS were measured. The results show that the properties ofa CWS prepared from a coal sample with a "double-peak" size distribution are better than those CWS prepared from samples with a mono-modal particle distribution. The ash content of Australian coal is 21.72g higher than the ash content of Shenhua coal. The highest coal concentration in slurry from the Australia coal is 11.01% higher than in CWS from the Shenhua coat. The fluidity and stability of the CWS prepared from the Australian coal are both better than the fluidity and stability of slurry prepared from Shenhua coal. High ash content in the Australian coal imnroves the nulning results of a CWS made from it.