Spatial-temporal Patterns and Driving Forces of Water Retention Service in China

Overwhelming water-deficiency conditions and an unbalanced water supply and demand have been major concerns of both the Chinese government and the general public during recent decades. Studying the spatial-temporal patterns and impact factors that influence water retention in China is important to enhance the management of water resources in China and other similar countries. We employed a revised Integrated Valuation of Ecosystem Services and Tradeoffs(InVEST) model and regression analyses to investigate the water retention service in China. The results showed that the southeastern China generally performed much better than Northwest China in terms of the spatial distribution of water retention. In general, the efficacy of the water retention service in China increased from 2000 to 2014; although some areas still had a downward trend. Water retention service increased significantly(P < 0.05) in aggregate in the Qinghai-Tibet Plateau, and the Da Hinggan Mountains and Xiao Hinggan Mountains. However, the service in southwestern China showed a decreasing trend(P < 0.05), which would have significant negative impact on the downstream population. This study also showed that in China the changes in water retention service were primarily due to climate change(which could explain 83.49% of the total variance), with anthropogenic impact as a secondary influence(likewise the ecological programs and socioeconomic development could explain 9.47% and 1.06%, respectively). Moreover, the identification of water retention importance indicated that important areas conservation and selection based on downstream beneficiaries is vital for optimization protection of ecosystem services, and has practical significance for natural resources and ecosystem management.

Characterizing urban expansion of Korla City and its spatial-temporal patterns using remote sensing and GIS methods

Cities provide spatial contexts for populations and economic activities. Determining the spatial-temporal patterns of urban expansion is of particular significance for regional sustainable development. To achieve a better understanding of the spatial-temporal patterns of urban expansion of Korla City, we explore the urban expansion characteristics of Korla City over the period 1995-2015 by employing Landsat TM/ETM＋ images of 1995, 2000, 2005, 2010, and 2015. Urban land use types were classified using the supervised classification method in ENVI 4.5. Urban expansion indices, such as expansion area, expansion proportion, expansion speed, expansion intensity, compactness, and fractal dimension, were calculated. The spatial-temporal patterns and evolution process of the urban expansion （e.g., urban gravity center and its direction of movement） were then quantitatively analyzed. The results indicated that, over the past 25 years, the area and proportion of urban land increased substantially with an average annual growth rate of 15.18%. Farmland and unused land were lost greatly due to the urban expansion. This result might be attributable to the rapid population growth and the dramatic economic development in this area. The city extended to the southeast, and the urban gravity center shifted to the southeast as well by about 2118 m. The degree of urban compactness tended to decrease and the fractal dimension index tended to increase, indicating that the spatial pattern of Korla City was becoming loose, complex, and unstable. This study could provide a scientific reference for the studies on urban expansion of oasis cities in arid land.

Spatial-temporal Patterns and Evolution History of Rural Settlements from the Perspective of Inheritance——A Case Study of Lianzhou City,Guangdong Province

Formation and evolution of rural settlement patterns in Lianzhou City,Guangdong Province were analyzed from the perspective of space and time,on the basis of its gazetteer and relevant historical data.The results show that Lianzhou was first founded in the sixth year of Yuanding Period of the Western Han Dynasty,and its development could be roughly classified into 6 stages according to the construction of south–north traffic lines and regional development progress,and it witnessed the fastest development in the Ming and Qing Dynasty.In terms of spatial distribution,rural settlements in the local area show spatial continuity,Lianzhou Town is the core of rural settlement growth in the city,and towns with the most concentrated rural settlements in all stages are located in central-west and northeast parts of the city,and those with lower density of rural settlements are mostly located in minority regions in the north and mountainous areas in the east.On the basis of the above facts,the paper studies the influence of natural geological conditions,immigrant,traffic,economic development and ethnic composition on the establishment and development of rural settlements in Lianzhou City.

Spatial-temporal patterns and evolution of carbon storage in China's terrestrial ecosystems from 1980 to 2020

Analyzing the changes in carbon storage in terrestrial ecosystems caused by land use changes is a crucial part of exploring the carbon cycle. In addition, enhancing carbon storage in terrestrial ecosystems is an effective and environmentally friendly measure to sequester anthropogenic carbon emissions, which is significant for achieving carbon neutrality and curbing global climate change. This paper uses land use data and carbon density tables with the In VEST model to obtain a carbon storage distribution map of China. It further applies land use response elasticity coefficients, Theil index multi-stage nested decomposition, and spatial autocorrelation analysis to examine the spatial-temporal patterns, causes of changes, and evolution characteristics of carbon storage in terrestrial ecosystems from 1980 to 2020. The results show that the temporal changes in China's carbon storage generally present an inverted S-curve, with an initial rapid decline followed by a slower decrease. Spatially, it features high levels in the northeast, low levels in the northwest, and a uniform distribution in the central and southern regions.The disturbance of land use type changes on terrestrial ecosystem carbon storage has been effectively mitigated. The significant reduction in grassland area in the Southwest region is the main source of carbon storage loss during the study period, and the encroachment of construction land on arable land in large urban agglomerations is one of the important causes of carbon storage loss. The Theil index multi-stage nested decomposition results indicate that the overall difference in carbon storage in China has decreased, while differences among cities within provinces and among counties within cities have increased. The influence of natural factors on the distribution of carbon storage is weakening, whereas the impact of human activities is becoming more profound, enhancing its influence on the spatial distribution of carbon storage in China. From 1980 to 2000, the carbon density in coastal metropolises generally showed a declining trend. From 2000 to 2020, the carbon density in the central urban areas of eastern coastal city clusters gradually showed an upward trend and continued to expand outward, revealing to some extent the“Environmental Kuznets Curve” characteristic in the development process of urban carbon storage. Therefore, in future ecological construction, the government should fully consider the impact of land management planning on carbon storage in different regions, promote the efficient use and standardized management of land, and strive to cross the “Environmental Kuznets Curve” inflection point of carbon storage as soon as possible.

Clinical manifestation,lifestyle,and treatment patterns of chronic erosive gastritis:A multicenter real-world study in China

BACKGROUND Although chronic erosive gastritis(CEG)is common,its clinical characteristics have not been fully elucidated.The lack of consensus regarding its treatment has resulted in varied treatment regimens.AIM To explore the clinical characteristics,treatment patterns,and short-term outcomes in CEG patients in China.METHODS We recruited patients with chronic non-atrophic or mild-to-moderate atrophic gastritis with erosion based on endoscopy and pathology.Patients and treating physicians completed a questionnaire regarding history,endoscopic findings,and treatment plans as well as a follow-up questionnaire to investigate changes in symptoms after 4 wk of treatment.RESULTS Three thousand five hundred sixty-three patients from 42 centers across 24 cities in China were included.Epigastric pain(68.0%),abdominal distension(62.6%),and postprandial fullness(47.5%)were the most common presenting symptoms.Gastritis was classified as chronic non-atrophic in 69.9%of patients.Among those with erosive lesions,72.1%of patients had lesions in the antrum,51.0%had multiple lesions,and 67.3%had superficial flat lesions.In patients with epigastric pain,the combination of a mucosal protective agent(MPA)and proton pump inhibitor was more effective.For those with postprandial fullness,acid regurgitation,early satiety,or nausea,a MPA appeared more promising.CONCLUSION CEG is a multifactorial disease which is common in Asian patients and has non-specific symptoms.Gastroscopy may play a major role in its detection and diagnosis.Treatment should be individualized based on symptom profile.

Venous Doppler flow patterns,venous congestion,heart disease and renal dysfunction:A complex liaison

The World Journal of Cardiology published an article written by Kuwahara et al that we take the pleasure to comment on.We focused our attention on venous congestion.In intensive care settings,it is now widely accepted that venous congestion is an important clinical feature worthy of investigation.Evaluating venous Doppler profile abnormalities at multiple sites could suggest adequate treatment and monitor its efficacy.Renal dysfunction could trigger or worsen fluid overload in heart disease,and cardio-renal syndrome is a well-characterized spectrum of disorders describing the complex interactions between heart and kidney diseases.Fluid overload and venous congestion,including renal venous hypertension,are major determinants of acute and chronic renal dysfunction arising in heart disease.Organ congestion from venous hypertension could be involved in the development of organ injury in several clinical situations,such as critical diseases,congestive heart failure,and chronic kidney disease.Ultrasonography and abnormal Doppler flow patterns diagnose clinically significant systemic venous congestion.Cardiologists and nephrologists might use this valuable,noninvasive,bedside diagnostic tool to establish fluid status and guide clinical choices.

Multivariate Time Series Anomaly Detection Based on Spatial-Temporal Network and Transformer in Industrial Internet of Things

In the Industrial Internet of Things(IIoT),sensors generate time series data to reflect the working state.When the systems are attacked,timely identification of outliers in time series is critical to ensure security.Although many anomaly detection methods have been proposed,the temporal correlation of the time series over the same sensor and the state(spatial)correlation between different sensors are rarely considered simultaneously in these methods.Owing to the superior capability of Transformer in learning time series features.This paper proposes a time series anomaly detection method based on a spatial-temporal network and an improved Transformer.Additionally,the methods based on graph neural networks typically include a graph structure learning module and an anomaly detection module,which are interdependent.However,in the initial phase of training,since neither of the modules has reached an optimal state,their performance may influence each other.This scenario makes the end-to-end training approach hard to effectively direct the learning trajectory of each module.This interdependence between the modules,coupled with the initial instability,may cause the model to find it hard to find the optimal solution during the training process,resulting in unsatisfactory results.We introduce an adaptive graph structure learning method to obtain the optimal model parameters and graph structure.Experiments on two publicly available datasets demonstrate that the proposed method attains higher anomaly detection results than other methods.

Comprehensive evaluation and spatial-temporal evolution characteristics of urban resilience in Chengdu-Chongqing Economic Circle

To clarify the connotations and extensions of urban resilience,this study focuses on the Chengdu-Chongqing Economic Circle with 16 cities as research subjects.A comprehensive evaluation index system was constructed to measure the resilience of each city from 2003 to 2020.The spatial-temporal evolution characteristics were analyzed using Kernel density estimation,standard deviation ellipse,and spatial Markov chain analysis,and the spatial Tobit model was introduced to discover the influencing factors.The results indicate the following:①Urban resilience in the Chengdu-Chongqing Economic Circle displays an upward trend,with the center of gravity moving to the southwest,and the polarization phenomenon intensifying.②The urban resilience level in a region has certain spatial and geographical dependence,while the probability of urban resilience transfer differs in adjacent cities with different resilience levels.③Urban centrality,economic scale,openness level,and financial development promote urban resilience,whereas government scale significantly inhibits it.Finally,this paper proposes countermeasures and suggestions to improve the urban resilience of the Chengdu-Chongqing Economic Circle.

AFSTGCN:Prediction for multivariate time series using an adaptive fused spatial-temporal graph convolutional network

The prediction for Multivariate Time Series(MTS)explores the interrelationships among variables at historical moments,extracts their relevant characteristics,and is widely used in finance,weather,complex industries and other fields.Furthermore,it is important to construct a digital twin system.However,existing methods do not take full advantage of the potential properties of variables,which results in poor predicted accuracy.In this paper,we propose the Adaptive Fused Spatial-Temporal Graph Convolutional Network(AFSTGCN).First,to address the problem of the unknown spatial-temporal structure,we construct the Adaptive Fused Spatial-Temporal Graph(AFSTG)layer.Specifically,we fuse the spatial-temporal graph based on the interrelationship of spatial graphs.Simultaneously,we construct the adaptive adjacency matrix of the spatial-temporal graph using node embedding methods.Subsequently,to overcome the insufficient extraction of disordered correlation features,we construct the Adaptive Fused Spatial-Temporal Graph Convolutional(AFSTGC)module.The module forces the reordering of disordered temporal,spatial and spatial-temporal dependencies into rule-like data.AFSTGCN dynamically and synchronously acquires potential temporal,spatial and spatial-temporal correlations,thereby fully extracting rich hierarchical feature information to enhance the predicted accuracy.Experiments on different types of MTS datasets demonstrate that the model achieves state-of-the-art single-step and multi-step performance compared with eight other deep learning models.

Study on Epidemiological Profile, Clinical Profile, and Angiographic Patterns in Acute Coronary Syndrome Patients in a Tertiary Health Care Center in Haryana

Background: Cardiovascular diseases are the leading cause of death in India, with coronary artery disease (CAD) accounting for a majority of the deaths. There are few large registries on acute coronary syndrome (ACS) from India. Our aim is to study the clinical and epidemiological profile of ACS PATIENTS presenting to our institute, including their angiographic features. Methods: This hospital-based observational, single tertiary care center, prospective study was conducted on patients admitted in the Department of Cardiology at a tertiary care center in Haryana. The study included 400 patients aged greater than 18 years who were admitted with the diagnosis of ACS, and it was carried out for 1 year. The epidemiological profile, clinical history, risk factors, electrocardiogram findings, and angiographic pattern were studied and analyzed with appropriate statistical tools. Results: The mean age of the study population was 55.12 ± 11.78 years. Male and female ratio was 2.4:1. The majority of the patients came from rural background (80%);24% of the patients were illiterate. Smoking was the most common risk factor (51.5%) in our study population followed by hypertension (40%) and diabetes (28%). Unstable angina was the most common type of ACS, which was found in 68.25% of patients. Premature CAD was found in 27.8% of patients and obstructive CAD was found in 63% of patients. Coronary angiography revealed that 39% had single vessel disease (SVD), 23.5% had double vessel disease (DVD), and 27.5% had triple vessel disease (TVD). LAD was more commonly involved, followed by RCA and LCX. Within the first 24 hours, 67% of patients sought medical assistance and only 38.5% received definitive treatment, suggesting a delay in seeking definitive treatment in our study population. Conclusion: The study suggests that unstable angina is the most common form of ACS in the study population, which is mostly of rural background with significant delay in seeking medical help. Smoking is the most common risk factor in the study population.

Tuning the diffusion constant to optimize the readout of positional information of spatial concentration patterns

Positional information encoded in spatial concentration patterns is crucial for the development of multicellular organisms.However,it is still unclear how such information is affected by the physically dissipative diffusion process.Here we study one-dimensional patterning systems with analytical derivation and numerical simulations.We find that the diffusion constant of the patterning molecules exhibits a nonmonotonic effect on the readout of the positional information from the concentration patterns.Specifically,there exists an optimal diffusion constant that maximizes the positional information.Moreover,we find that the energy dissipation due to the physical diffusion imposes a fundamental upper limit on the positional information.

Temporal and spatial evolution of global major grain trade patterns

The complex and volatile international landscape has significantly impacted global grain supply security. This study uses a complex network analysis model to examine the evolution and trends of the global major grain trade from 1990 to 2020, focusing on network topology, centrality ranking, and community structure. There are three major findings. First, the global major grain trade network has expanded in scale, with a growing emphasis on diversification and balance. During the study period, the United States, Canada, China, and Brazil were the core nodes of the network. Grain-exporting countries were mainly situated in Asia, the Americas, and Europe, and importing countries in Asia, Africa, and Europe. Second, a significant increase in the number of high centrality countries with high export capacity occurred, benefiting from natural advantages such as fertile land and favorable climates. Third, the main global grain trade network is divided into four communities, with the Americas-Europe community being the largest and most widespread. The formation of the community pattern was influenced by geographic proximity, driven by the core exporting countries. Therefore, the world needs to enhance the existing trade model, promote the multi-polarization of the grain trade network, and establish a global vision for the future community. Countries and regions should participate actively in global grain trade security governance and institutional reform, expand trade links with other countries, and optimize import and export policies to reduce trade risks.

Memristors-coupled neuron models with multiple firing patterns and homogeneous and heterogeneous multistability

Memristors are extensively used to estimate the external electromagnetic stimulation and synapses for neurons.In this paper,two distinct scenarios,i.e.,an ideal memristor serves as external electromagnetic stimulation and a locally active memristor serves as a synapse,are formulated to investigate the impact of a memristor on a two-dimensional Hindmarsh-Rose neuron model.Numerical simulations show that the neuronal models in different scenarios have multiple burst firing patterns.The introduction of the memristor makes the neuronal model exhibit complex dynamical behaviors.Finally,the simulation circuit and DSP hardware implementation results validate the physical mechanism,as well as the reliability of the biological neuron model.

Intravitreal injection practice patterns among Chinese ophthalmologists

AIM:To describe the practice patterns of intravitreal injections(IVIs)among ophthalmologists in China.METHODS:This was a cross-sectional online survey.Ophthalmologists who had performed accumulated more than 100 injections were contacted by the Brightness Center,a hospital-based national network,to complete an anonymous,24-question,internet-based survey.They were surveyed on practices in injection techniques,pre-,and post-injections procedures.RESULTS:A total of 333 ophthalmologists from 28 provinces/municipalities/autonomous regions responded to the survey(50.68%response rate).The 91.29%of the respondents evaluated systemic risk factors by medical history,electrocardiogram(ECG)and blood test.All the respondents used pre-injection prophylactic antibiotics.Most checked intraocular pressure(IOP,99.1%)and blood pressure(96.1%)before injections.A majority of the respondents performed injections in the operating room(98.8%),wore masks(99.7%),gloves(99.4%)and sterile surgical clothing(96.1%),performed topical anesthetics(97.9%),and applied povidone-iodine(95.8%)pre-injection.The 61.26%of the respondents dilated pupil.About half of the respondents(51.05%)performed bilateral injections in the same setting.Superior temporal quadrant(40.54%)was the most frequent site of injection.Around three quarters used 30-gauge needles.Most respondents(97.9%)measured the site of injection from limbus.More than half(53.45%)performed conjunctiva displacement prior to injection.The 32.43%of the respondents checked IOP post-injection and 87.99%physicians checked hand motion(HM)or counting fingers(CF)after injection,while 36.94%observed optic nerve perfusion.All participants used topical antibiotics post-injections.Most physicians(91.89%)reviewed patients on the following day.CONCLUSION:This study provides a description of the real-world practice patterns in IVIs in China and offers critical information regarding education and training of ophthalmologists and amendment of local society guidelines.

Plant-based dietary patterns and risk of esophageal cancer:A prospective cohort study spanning 17 years

Objective: Plant-based diets have multiple health benefits for cancers;however, little is known about the association between plant-based dietary patterns and esophageal cancer(EC).This study presents an investigation of the prospective associations among three predefined indices of plant-based dietary patterns and the risk of EC.Methods: We performed endoscopic screening for 15,709 participants aged 40-69 years from two high-risk areas of China from January 2005 to December 2009 and followed the cohort until December 31, 2022. The overall plant-based diet index(PDI), healthful plant-based diet index(h PDI), and unhealthful plant-based diet index(u PDI), were calculated using survey responses to assess dietary patterns. We applied Cox proportional hazard regression to estimate the multivariable hazard ratios(HRs) and 95% confidence intervals(95% CIs) of EC across 3plant-based diet indices and further stratified the analysis by subgroups.Results: The final study sample included 15,184 participants in the cohort. During a follow-up of 219,365person-years, 176 patients with EC were identified. When the highest quartile was compared with the lowest quartile, the pooled multivariable-adjusted HR of EC was 0.50(95% CI, 0.32-0.77) for h PDI. In addition, the HR per 10-point increase in the h PDI score was 0.42(95% CI, 0.27-0.66) for ECs. Conversely, u PDI was positively associated with the risk of EC, and the HR was 1.80(95% CI, 1.16-2.82). The HR per 10-point increase in the u PDI score was 1.90(95% CI, 1.26-2.88) for ECs. The associations between these scores and the risk of EC were consistent in most subgroups. These results remained robust in sensitivity analyses.Conclusions: A healthy plant-based dietary pattern was associated with a reduced risk of EC. Emphasizing the healthiness and quality of plant-based diets may be important for preventing the development of EC.

Elevational and temporal patterns of pollination success in distylous and homostylous buckwheats(Fagopyrum)in the Hengduan Mountains

Reproductive strategies of sexually dimorphic plants vary in response to the environment.Here,we ask whether the sexual systems of Fagopyrum species(i.e.,selfing homostylous and out-crossing distylous)represent distinct adaptive strategies to increase reproductive success in changing alpine environments.To answer this question,we determined how spatial and temporal factors(e.g.,elevation and peak flowering time)affect reproductive success(i.e.,stigmatic pollen load)in nine wild Fagopyrum species(seven distylous and two homostylous)among 28 populations along an elevation gradient of 1299-3315 m in the Hengduan Mountains,southwestern China.We also observed pollinators and conducted hundreds of hand pollinations to investigate inter/intra-morph compatibility,self-compatibility and pollen limitation in four Fagopyrum species(two distylous and two homostylous).We found that Fagopyrum species at higher elevation generally had bigger flowers and more stigmatic pollen loads;lateflowering individuals had smaller flowers and lower pollen deposition.Stigmatic pollen deposition was more variable in distylous species than in homostylous species.Although seed set was not pollenlimited in all species,we found that fruit set was much lower in distylous species,which rely on frequent pollinator visits,than in homostylous species capable of autonomous self-pollination.Our findings that pollination success increases at high elevations and decreases during the flowering season suggest that distylous and homostylous species have spatially and temporally distinct reproductive strategies related to environment-dependent pollinator activity.

Maternal dietary patterns associated with bone density in Chinese lactating women and infants at 6 months postpartum:a prospective study using data from 2018-2019

This cohort study was designed to explore the relationship between maternal dietary patterns(DPs)and bone health in Chinese lactating mothers and infants.We recruited 150 lactating women at 1-month postpartum.The estimated bone mineral density(eBMD)of subjects’calcanei and the information on dietary intake were collected.After 5-month follow-up,the eBMD of mothers and their infants were measured again.Factor analysis was applied to determine maternal DPs.General linear models were used to evaluate the association between maternal DPs and maternal eBMD loss or infants’eBMD.With all potential covariates adjusted,Factor 2(high intake of whole grains,tubers,mixed beans,soybeans and soybean products,seaweeds,and nuts)showed a positive association with the changes of maternal eBMD(β=0.16,95%CI:0.005,0.310).Factor 3(high intake of soft drinks,fried foods,and puffed foods)was inversely correlated with the changes of maternal eBMD(β=-0.22,95%CI:-0.44,0.00).The changes of maternal eBMD were positively associated with 6-month infants’eBMD(β=0.34,95%CI:0.017,0.652).In conclusion,Factor 2 might contribute to the maintenance of eBMD in lactating women,while Factor 3 could exacerbate maternal eBMD loss.Additionally,the changes of maternal eBMD presented a positive correlation with 6-month infants’eBMD.

From furnace up to freezer:Elevational patterns of plant diversity in Mount Palvar,a semi-arid Irano-Turanian mountain range of southwest Asia

Much of the world's biodiversity lies in heterogeneous mountain areas with their diverse environments.As an example,Iranian montane ranges are highly diverse,particularly in the Irano-Turanian phytogeographical region.Understanding plant diversity patterns with increasing elevation is of high significance,not least for conservation planning.We studied the pattern of species richness,Shannon diversity,endemic richness,endemics ratio,and richness of life forms along a 3900 m elevational transect in Mount Palvar,overlooking the Lut Desert in Southeast Iran.We also analyzed the effect of environmental variables on species turnover along the vertical gradient.A total of 120 vegetation plots(10 m×10 m)were sampled along the elevational transect containing species and environmental data.To discover plant diversity pattern along the elevational gradient,generalized additive model(GAM)was used.Non-metric multidimensional scaling(NMDS)was applied for illustrating the correlation between species composition and environmental variables.We found hump-shaped pattern for species richness,Shannon diversity,endemic richness,and species richness of different life forms,but a monotonic increasing pattern for ratio of endemic species from low to high elevations.Our study confirms the humped pattern of species richness peaking at intermediate elevations along a complete elevational gradient in a semi-arid mountain.The monotonic increase of endemics ratio with elevation in our area as a case study is consistent with global increase of endemism with elevation.According to our results,temperature and precipitation are two important climatic variables that drive elevational plant diversity,particularly in seasonally dry areas.Our study suggests that effective conservation and management are needed for this low latitude mountain area along with calling for long-term monitoring for species redistribution.

A Non-Stationary Beam-Enabled Stochastic Channel Model and Characterization over Non-Reciprocal Beam Patterns

The multiple-input multiple-output(MIMO)-enabled beamforming technology offers great data rate and channel quality for next-generation communication.In this paper,we propose a beam channel model and enable it with time-varying simulation capability by adopting the stochastic geometry theory.First,clusters are generated located within transceivers'beam ranges based on the Mate?rn hardcore Poisson cluster process.The line-of-sight,singlebounce,and double-bounce components are calculated when generating the complex channel impulse response.Furthermore,we elaborate on the expressions of channel links based on the propagation-graph theory.A birth-death process consisting of the effects of beams and cluster velocities is also formulated.Numerical simulation results prove that the proposed model can capture the channel non-stationarity.Besides,the non-reciprocal beam patterns yield severe channel dispersion compared to the reciprocal patterns.

Real-time generation of circular patterns in electron beam lithography

Electron beam lithography(EBL)involves the transfer of a pattern onto the surface of a substrate byfirst scanning a thin layer of organicfilm(called resist)on the surface by a tightly focused and precisely controlled electron beam(exposure)and then selectively removing the exposed or nonexposed regions of the resist in a solvent(developing).It is widely used for fabrication of integrated cir-cuits,mask manufacturing,photoelectric device processing,and otherfields.The key to drawing circular patterns by EBL is the graphics production and control.In an EBL system,an embedded processor calculates and generates the trajectory coordinates for movement of the electron beam,and outputs the corresponding voltage signal through a digital-to-analog converter(DAC)to control a deflector that changes the position of the electron beam.Through this procedure,it is possible to guarantee the accuracy and real-time con-trol of electron beam scanning deflection.Existing EBL systems mostly use the method of polygonal approximation to expose circles.A circle is divided into several polygons,and the smaller the segmentation,the higher is the precision of the splicing circle.However,owing to the need to generate and scan each polygon separately,an increase in the number of segments will lead to a decrease in the overall lithography speed.In this paper,based on Bresenham’s circle algorithm and exploiting the capabilities of afield-programmable gate array and DAC,an improved real-time circle-producing algorithm is designed for EBL.The algorithm can directly generate cir-cular graphics coordinates such as those for a single circle,solid circle,solid ring,or concentric ring,and is able to effectively realizes deflection and scanning of the electron beam for circular graphics lithography.Compared with the polygonal approximation method,the improved algorithm exhibits improved precision and speed.At the same time,the point generation strategy is optimized to solve the blank pixel and pseudo-pixel problems that arise with Bresenham’s circle algorithm.A complete electron beam deflection system is established to carry out lithography experiments,the results of which show that the error between the exposure results and the preset pat-terns is at the nanometer level,indicating that the improved algorithm meets the requirements for real-time control and high precision of EBL.