To improve the processing efficiency and extend the tuning range of 3D isotropic fabrication,we apply the simultaneous spatiotemporal focusing(SSTF)technique to a high-repetition-rate femtosecond(fs)fiber laser system...To improve the processing efficiency and extend the tuning range of 3D isotropic fabrication,we apply the simultaneous spatiotemporal focusing(SSTF)technique to a high-repetition-rate femtosecond(fs)fiber laser system.In the SSTF scheme,we propose a pulse compensation scheme for the fiber laser with a narrow spectral bandwidth by building an extra-cavity pulse stretcher.We further demonstrate truly 3D isotropic microfabrication in photosensitive glass with a tunable resolution ranging from 8μm to 22μm using the SSTF of fs laser pulses.Moreover,we systematically investigate the influences of pulse energy,writing speed,processing depth,and spherical aberration on the fabrication resolution.As a proof-of-concept demonstration,the SSTF scheme was further employed for the fs laser-assisted etching of complicated glass microfluidic structures with 3D uniform sizes.The developed technique can be extended to many applications such as advanced photonics,3D biomimetic printing,micro-electromechanical systems,and lab-on-a-chips.展开更多
基金supported by the National Key Research and Development Program of China(2019YFA0705000,2022YFA1404800)National Natural Science Foundation of China(12004221,12174107,12192254,11734009,12192251,92250304,11974218)+4 种基金Postdoctoral Innovation Talents Support Program of Shandong Province(No.SDBX2019005)Science and Technology Commission of Shanghai Municipality(21DZ1101500)Local science and technology development project of the central government(YDZX20203700001766)Shanghai Municipal Science and Technology Major ProjectNatural Science Foundation of Shandong Province(ZR2021ZD02).
文摘To improve the processing efficiency and extend the tuning range of 3D isotropic fabrication,we apply the simultaneous spatiotemporal focusing(SSTF)technique to a high-repetition-rate femtosecond(fs)fiber laser system.In the SSTF scheme,we propose a pulse compensation scheme for the fiber laser with a narrow spectral bandwidth by building an extra-cavity pulse stretcher.We further demonstrate truly 3D isotropic microfabrication in photosensitive glass with a tunable resolution ranging from 8μm to 22μm using the SSTF of fs laser pulses.Moreover,we systematically investigate the influences of pulse energy,writing speed,processing depth,and spherical aberration on the fabrication resolution.As a proof-of-concept demonstration,the SSTF scheme was further employed for the fs laser-assisted etching of complicated glass microfluidic structures with 3D uniform sizes.The developed technique can be extended to many applications such as advanced photonics,3D biomimetic printing,micro-electromechanical systems,and lab-on-a-chips.
