Petroleum coke and lignite are two important fossil fuels that have not been widely used in China. Petroleum coke-lignite slurry （PCLS）, a mixture of petro- leum coke, lignite, water, and additives, efficiently util...Petroleum coke and lignite are two important fossil fuels that have not been widely used in China. Petroleum coke-lignite slurry （PCLS）, a mixture of petro- leum coke, lignite, water, and additives, efficiently utilizes the two materials. In this study, we investigate the effects of the proportion （7） of petroleum coke on slurryability, rheo- logical behavior, stability, and increasing temperature characteristics of PCLSs. The results show that the fixed- viscosity solid concentration （COo） increases with increasing 7. The ~Oo of lignite-water slurry （LWS, ~ = 0） is 46.7 %, compared to 71.3 % for the petroleum coke-water slurry （PCWS, c~ --- i00 %）, while that of PCLS is in between the two values. The rheological behavior of PCLS perfectly fits the power-law model. The PCWS acts as a dilatant fluid. As decreases, the slurry behaves first as an approximate Newtonian fluid, and then turns into a pseudo-plastic fluid that exhibits shear-thinning behavior. With increasing ct, the rigid sedimentation and water separation ratio （WSR） increase, indicating a decrease in the stability of PCLS. When α is 60-70 %, the result is a high-quality slurry fuel for industrial applications, which has high slurryability （ω0 = 57-60 %）, good stability （WSR 〈 2 %）, and superior pseudo-plastic behavior （n = 0.9）.展开更多
Chemical mechanical polishing（CMP） is one of the important machining procedures of multilayered copper interconnection for GLSI, meanwhile polishing slurry is a critical factor for realizing the high polishing perfo...Chemical mechanical polishing（CMP） is one of the important machining procedures of multilayered copper interconnection for GLSI, meanwhile polishing slurry is a critical factor for realizing the high polishing performance such as high planarization efficiency, low surface roughness. The effect of slurry components such as abrasive（colloidal silica）, complexing agent（glycine）, inhibitor（BTA） and oxidizing agent（H_2O_2） on the stability of the novel weakly alkaline slurry of copper interconnection CMP for GLSI was investigated in this paper. First, the synergistic and competitive relationship of them in a peroxide-based weakly alkaline slurry during the copper CMP process was studied and the stability mechanism was put forward. Then 1 wt% colloidal silica, 2.5 wt% glycine,200 ppm BTA, 20 m L/L H_2O_2 had been selected as the appropriate concentration to prepare copper slurry, and using such slurry the copper blanket wafer was polished. From the variations of copper removal rate, root-mean square roughness（Sq） value with the setting time, it indicates that the working-life of the novel weakly alkaline slurry can reach more than 7 days, which satisfies the requirement of microelectronics further development.展开更多
基金the National Basic Research Program of China (Grant No. 2010CB227001)
文摘Petroleum coke and lignite are two important fossil fuels that have not been widely used in China. Petroleum coke-lignite slurry （PCLS）, a mixture of petro- leum coke, lignite, water, and additives, efficiently utilizes the two materials. In this study, we investigate the effects of the proportion （7） of petroleum coke on slurryability, rheo- logical behavior, stability, and increasing temperature characteristics of PCLSs. The results show that the fixed- viscosity solid concentration （COo） increases with increasing 7. The ~Oo of lignite-water slurry （LWS, ~ = 0） is 46.7 %, compared to 71.3 % for the petroleum coke-water slurry （PCWS, c~ --- i00 %）, while that of PCLS is in between the two values. The rheological behavior of PCLS perfectly fits the power-law model. The PCWS acts as a dilatant fluid. As decreases, the slurry behaves first as an approximate Newtonian fluid, and then turns into a pseudo-plastic fluid that exhibits shear-thinning behavior. With increasing ct, the rigid sedimentation and water separation ratio （WSR） increase, indicating a decrease in the stability of PCLS. When α is 60-70 %, the result is a high-quality slurry fuel for industrial applications, which has high slurryability （ω0 = 57-60 %）, good stability （WSR 〈 2 %）, and superior pseudo-plastic behavior （n = 0.9）.
基金supported by the Major National Science and Technology Special Projects(No.2016ZX02301003-004-007)the Professional Degree Teaching Case Foundation of Hebei Province,China(No.KCJSZ2017008)+1 种基金the Natural Science Foundation of Hebei Province,China(No.F2015202267)the Natural Science Foundation of Tianjin,China(No.16JCYBJC16100)
文摘Chemical mechanical polishing（CMP） is one of the important machining procedures of multilayered copper interconnection for GLSI, meanwhile polishing slurry is a critical factor for realizing the high polishing performance such as high planarization efficiency, low surface roughness. The effect of slurry components such as abrasive（colloidal silica）, complexing agent（glycine）, inhibitor（BTA） and oxidizing agent（H_2O_2） on the stability of the novel weakly alkaline slurry of copper interconnection CMP for GLSI was investigated in this paper. First, the synergistic and competitive relationship of them in a peroxide-based weakly alkaline slurry during the copper CMP process was studied and the stability mechanism was put forward. Then 1 wt% colloidal silica, 2.5 wt% glycine,200 ppm BTA, 20 m L/L H_2O_2 had been selected as the appropriate concentration to prepare copper slurry, and using such slurry the copper blanket wafer was polished. From the variations of copper removal rate, root-mean square roughness（Sq） value with the setting time, it indicates that the working-life of the novel weakly alkaline slurry can reach more than 7 days, which satisfies the requirement of microelectronics further development.
