The multi-SCCO2 （supercritical carbon dioxide） release and dry process based on our specialized SCCO2 semiconductor process equipment is investigated and the releasing mechanism is discussed. The experiment results ...The multi-SCCO2 （supercritical carbon dioxide） release and dry process based on our specialized SCCO2 semiconductor process equipment is investigated and the releasing mechanism is discussed. The experiment results show that stuck cantilever beams were held up again under SCCO2 high pressure treatment and the repeatability of this process is nearly 100%.展开更多
基金Project supported by the National Natural Science Foundation of China(No.60976017)
文摘The multi-SCCO2 （supercritical carbon dioxide） release and dry process based on our specialized SCCO2 semiconductor process equipment is investigated and the releasing mechanism is discussed. The experiment results show that stuck cantilever beams were held up again under SCCO2 high pressure treatment and the repeatability of this process is nearly 100%.
