WNxfilms are deposited by reactive chemical vapor deposition at different amounts of nitrogen in gas mixtures.Experimental data demonstrate that nitrogen amount has a strong effect on microstructure, phase formation,t...WNxfilms are deposited by reactive chemical vapor deposition at different amounts of nitrogen in gas mixtures.Experimental data demonstrate that nitrogen amount has a strong effect on microstructure, phase formation,texture morphology, mechanical and optical properties of the WNxfilms. With increasing nitrogen a phase transition from a single WNxphase with low crystallinity structure to a well-mixed crystallized hexagonal WNxand face-centered-cubic W2N phases appears. Relatively smooth morphology at lower N2concentration changes to a really smooth morphology and then granular with coarse surface at higher N2concentration. The SEM observation clearly shows a columnar structure at lower N2concentration and a dense nanoplates one for higher nitrogen content. The hardness of WNxthin films mainly depends on the film microstructure. The absorbance peak position shifts to shorter wavelength continuously with increasing nitrogen amount and decreasing particle size.展开更多
Pure nitrogen gas was heated with direct current arc, at input powers from several hundred Watt to over 5 kW, and then injected through a nozzle into a chamber at 1 or 10 Pa pressure, with the purpose of accelerating ...Pure nitrogen gas was heated with direct current arc, at input powers from several hundred Watt to over 5 kW, and then injected through a nozzle into a chamber at 1 or 10 Pa pressure, with the purpose of accelerating the gas to very high speed around 7 km/s. Various structures of the arc generator and gas expansion nozzle were examined. Results show that bypass exhausting of the boundary layer before it enters the nozzle divergent section can greatly increase flow speed of the jet, thus it might be possible to use nitrogen as a working gas in high speed gas dynamic test facilities.展开更多
文摘WNxfilms are deposited by reactive chemical vapor deposition at different amounts of nitrogen in gas mixtures.Experimental data demonstrate that nitrogen amount has a strong effect on microstructure, phase formation,texture morphology, mechanical and optical properties of the WNxfilms. With increasing nitrogen a phase transition from a single WNxphase with low crystallinity structure to a well-mixed crystallized hexagonal WNxand face-centered-cubic W2N phases appears. Relatively smooth morphology at lower N2concentration changes to a really smooth morphology and then granular with coarse surface at higher N2concentration. The SEM observation clearly shows a columnar structure at lower N2concentration and a dense nanoplates one for higher nitrogen content. The hardness of WNxthin films mainly depends on the film microstructure. The absorbance peak position shifts to shorter wavelength continuously with increasing nitrogen amount and decreasing particle size.
基金supported by the National Natural Science Foundation of China(Nos.11575273 and 11475239)
文摘Pure nitrogen gas was heated with direct current arc, at input powers from several hundred Watt to over 5 kW, and then injected through a nozzle into a chamber at 1 or 10 Pa pressure, with the purpose of accelerating the gas to very high speed around 7 km/s. Various structures of the arc generator and gas expansion nozzle were examined. Results show that bypass exhausting of the boundary layer before it enters the nozzle divergent section can greatly increase flow speed of the jet, thus it might be possible to use nitrogen as a working gas in high speed gas dynamic test facilities.
