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Flat transmitted serrated-phase high-contrast-index subwavelength grating beam splitter 被引量:1
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作者 Gongqing Li Xiaofeng Duan +2 位作者 Yongqing Huang Kai Liu Xiaomin Ren 《Chinese Optics Letters》 SCIE EI CAS CSCD 2020年第11期22-26,共5页
We proposed a method to form a flat transmitted serrated-phase(SP) high-contrast-index subwavelength grating(HCG) beam splitter(HBS) for all dielectric materials, which is to alternately arrange two kinds of grating b... We proposed a method to form a flat transmitted serrated-phase(SP) high-contrast-index subwavelength grating(HCG) beam splitter(HBS) for all dielectric materials, which is to alternately arrange two kinds of grating bars with a phase difference of π. Compared to the typical linear-phase(LP) HBS, which consists of two symmetrical deflecting gratings, the SP-HBS is extensible in size, and can achieve excellent splitting ability regardless of normal incidence or small-angle oblique incidence with large deflection angles, higher diffraction efficiency,lower energy loss, and higher tolerance of fabrication accuracy. Furthermore, the incident light can be split in half at any part of the SP-HBS, and the output beams of light maintain the original shape. In this Letter, we designed an SP-HBS with a 44.8° deflection angle and a 90.28% transmissivity. 展开更多
关键词 beam splitter high-contrast-index subwavelength grating serrated-phase profile splitting ability
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偏振无关多齿谐振光栅反射镜的参数分析 被引量:1
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作者 吴华明 肖文波 +5 位作者 肖永生 黄丽贞 段军红 徐欢欢 刘宪爽 傅建平 《激光与光电子学进展》 CSCD 北大核心 2018年第4期229-234,共6页
通过严格耦合波分析方法考察了宽带偏振无关多齿谐振光栅反射镜的工艺容差性。理论分析显示,在1.62~1.76μm波段范围内,当微纳谐振光栅的周期和厚度、调制形状、中间层厚度及缓冲层厚度等关键结构参数变化20nm时,其对器件反射谱的影响... 通过严格耦合波分析方法考察了宽带偏振无关多齿谐振光栅反射镜的工艺容差性。理论分析显示,在1.62~1.76μm波段范围内,当微纳谐振光栅的周期和厚度、调制形状、中间层厚度及缓冲层厚度等关键结构参数变化20nm时,其对器件反射谱的影响几乎可以忽略不计。该结果表明此结构在现有工艺误差范围内表现出比较好的工艺容差性,从而有利于该器件的加工制备。 展开更多
关键词 集成光学 偏振无关反射镜 亚波长多齿光栅 结构参数分析
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