Multiplexing technologies based on superconducting quantum interference devices(SQUIDs) are crucial to cryogenic readout of superconducting transition-edge sensor(TES) arrays. Demands for large-scale TES arrays promot...Multiplexing technologies based on superconducting quantum interference devices(SQUIDs) are crucial to cryogenic readout of superconducting transition-edge sensor(TES) arrays. Demands for large-scale TES arrays promote the development of multiplexing technologies towards large multiplexing factors and low readout noise. The development of multiplexing technologies also facilitates new applications of TES arrays in a wide range of frequencies. Here we summarize different types of SQUID-based multiplexing technologies including time-division multiplexing, code-division multiplexing, frequency-division multiplexing and microwave SQUID multiplexing. The advances and parameter constraints of each multiplexing technology are also discussed.展开更多
Optical superconducting transition-edge sensor(TES)has been widely used in quantum information,biological imaging,and fluorescence microscopy owing to its high quantum efficiency,low dark count,and photon number resol...Optical superconducting transition-edge sensor(TES)has been widely used in quantum information,biological imaging,and fluorescence microscopy owing to its high quantum efficiency,low dark count,and photon number resolving capability.The temperature sensitivity(α_(I))and current sensitivity(β_(I))are important parameters for optical TESs,which are generally extracted from the complex impedance.Here we present a method to extractα_(I)andβ_(I)based on a two-fluid model and compare the calculated current-voltage curves,pulse response,and theoretical energy resolution with the measured ones.This method shows qualitative agreement that is suitable for further optimization of optical TESs.展开更多
We develop an x-ray Ti/Au transition-edge sensor(TES)with an Au absorber deposited on the center of TES and improved its energy resolution using the K-means clustering algorithm in combination with Wiener filter.We fi...We develop an x-ray Ti/Au transition-edge sensor(TES)with an Au absorber deposited on the center of TES and improved its energy resolution using the K-means clustering algorithm in combination with Wiener filter.We firstly extract the main parameters of each recorded pulse trace,which are adopted to classify these traces into several clusters in the K-means clustering algorithm.Then real traces are selected for energy resolution analysis.Following the baseline correction,the Wiener filter is used to improve the signal-to-noise ratio.Although the silicon underneath the TES has not been etched to reduce the thermal conductance,the energy resolution of the developed x-ray TES is improved from 94 eV to 44 eV at 5.9 keV.展开更多
The proximity effect to reduce the transition temperature of a superconducting film is frequently used in transitionedge sensors. Here, we develop these transition-edge sensors using Mo/Au/Au tri-layer films to detect...The proximity effect to reduce the transition temperature of a superconducting film is frequently used in transitionedge sensors. Here, we develop these transition-edge sensors using Mo/Au/Au tri-layer films to detect soft x-rays. They are equipped with an overhanging photon absorber. We reduce the fabrication complexity by integrating the sensor patterning with the tri-layer film formation. We determine the electro-thermal parameters of the sensors through a series of resistance vs. temperature and current vs. voltage measurements. We also demonstrate their energy-resolving capability by using a55Fe radioactive x-ray source. The best energy resolution was approximately 6.66 eV at 5.9 keV, with a theoretical count rate of 500 Hz.展开更多
For photon detection, superconducting transition-edge sensor(TES) micro-calorimeters are excellent energy-resolving devices. In this study, we report our recent work in developing Ti-/Au-based TES. The Ti/Au TES devic...For photon detection, superconducting transition-edge sensor(TES) micro-calorimeters are excellent energy-resolving devices. In this study, we report our recent work in developing Ti-/Au-based TES. The Ti/Au TES devices were designed and implemented with a thickness ratio of 1:1 and different suspended structures using micromachining technology. The characteristics were evaluated and analyzed, including surface morphology, 3 D deformation of suspended Ti/Au TES device structure, I–V characteristics, and low-temperature superconductivity. The results showed that the surface of Ti/Au has good homogeneity and the surface roughness of Ti/Au is significantly increased compared with the substrate. The structure of Ti/Au bilayer film significantly affects the deformation of suspended devices, but the deformation does not affect the I–V characteristics of the devices. For devices with the Ti/Au bilayer(150 μm × 150 μm) and beams(100 μm × 25 μm), the transition temperature(T;) is 253 m K with a width of 6 m K, and the value of the temperature sensitivity α is 95.1.展开更多
Superconducting transition edge sensor(TES)bolometers require superconducting films to have controllable transition temperatures T_(c)in different practical applications.The value of T_(c)strongly affects thermal cond...Superconducting transition edge sensor(TES)bolometers require superconducting films to have controllable transition temperatures T_(c)in different practical applications.The value of T_(c)strongly affects thermal conductivity and thermal noise performance of TES detectors.Al films doped with Mn(Al-Mn)of different concentrations can accomplish tunable T_(c)A magnetron sputtering machine is used to deposit the Al-Mn films in this study.Fabrication parameters including sputtering pressure and annealing process are studied and their influences on T_(c)and superconducting transition widthΔT_(c)are optimized.The Al-Mn films withΔT_(c)below 1.0 mK for T_(c)in a range of 520 mK-580 mK are successfully fabricated.展开更多
We report the optical response characteristics of A1/Ti bilayer transition edge sensors （TESs）, which are mainly comprised of A1/Ti bilayer thermometers and suspended SiN membranes for thermal isolation. The measure...We report the optical response characteristics of A1/Ti bilayer transition edge sensors （TESs）, which are mainly comprised of A1/Ti bilayer thermometers and suspended SiN membranes for thermal isolation. The measurement was performed in a 3He sorption refrigerator and the device＇s response to optical pulses was investigated using a pulsed laser source. Based on these measurements, we obtained the effective recovery time （τeff） of the devices at different biases and discussed the dependence of Veff on the bias. The device with a 940 μm × 940 μm continuous suspended SiN membrane demonstrated a fast response speed with τeff = 3.9 μs, which indicates a high temperature sensitivity （a = T/R·dR/dT = 326）. The results also showed that the TES exhibits good linearity under optical pulses of variable widths.展开更多
The accurate analysis of the elemental composition plays a crucial role in the research of functional materials.The emitting characteristic x-ray fluorescence(XRF)photons can be used for precisely discriminating the s...The accurate analysis of the elemental composition plays a crucial role in the research of functional materials.The emitting characteristic x-ray fluorescence(XRF)photons can be used for precisely discriminating the specified element.The detection accuracy of conventional XRF methodology using semiconductor detector is limited by the energy resolution,thus posing a challenge in accurately scaling the actual energy of each XRF photon.We adopt a novel high-resolution x-ray spectrometer based on the superconducting transition-edge sensor(TES)for the XRF spectroscopy measurement of different elements.Properties including high energy resolution,high detection efficiency and precise linearity of the new spectrometer will bring significant benefits in analyzing elemental composition via XRF.In this paper,we study the Ledge emission line profiles of three adjacent rare earth elements with the evenly mixed sample of their oxide components:terbium,dysprosium and holmium.Two orders of magnitude better energy resolution are obtained compared to a commercial silicon drift detector.With this TES-based spectrometer,the spectral lines overlapped or interfered by background can be clearly distinguished,thus making the chemical component analysis more accurate and quantitative.A database of coefficient values for the line strength of the spectrum can then be constructed thereafter.Equipped with the novel XRF spectrometer and an established coefficient database,a direct analysis of the composition proportion of a certain element in an unknown sample can be achieved with high accuracy.展开更多
Superconducting quantum interference devices(SQUIDs) are low-noise amplifiers that are essential for the readouts of translation edge sensors(TESs). The linear flux range is an important parameter for SQUID amplifiers...Superconducting quantum interference devices(SQUIDs) are low-noise amplifiers that are essential for the readouts of translation edge sensors(TESs). The linear flux range is an important parameter for SQUID amplifiers, especially those controlled by high-bandwidth digital flux-locked-loop circuits. A large linear flux range conduces to accurately measuring the input signal and also increasing the multiplexing factor in the time-division multiplexed(TDM) readout scheme of the TES array. In this work, we report that the linear flux range of an SQUID can be improved by using self-feedback effect. When the SQUID loop is designed to be asymmetric, a voltage-biased SQUID shows an asymmetric current–flux(I–Φ) response curve. The linear flux range is improved along the I–Φ curve with a shallow slope. The experimental results accord well with the numerical simulations. The asymmetric SQUID will be able to serve as a building block in the development of the TDM readout systems for large TES arrays.展开更多
We successfully designed and fabricated TES bolometers utilizing Al/Ti bilayer TESs as sensitive thermometers.To reduce the intrinsic noise level and tune the saturation power of a bolometer,the TES thermometer is pla...We successfully designed and fabricated TES bolometers utilizing Al/Ti bilayer TESs as sensitive thermometers.To reduce the intrinsic noise level and tune the saturation power of a bolometer,the TES thermometer is placed on a suspended SiN platform which is thermally coupled to the heat bath by four long SiN beams with different geometries.The measurement results show that the detectors have background limited noise performance,with a low noise equivalent power(NEP)on the order of10-17W/Hz1/2and have a saturation power of several tens pW at a bath temperature of 320 mK.These detectors are suitable for applications in ground-based astrophysics experiments by integrating absorbers for specific wavelengths.展开更多
基金Project supported by the National Science Foundation of China (Grant Nos. 11653001 and 11653004)。
文摘Multiplexing technologies based on superconducting quantum interference devices(SQUIDs) are crucial to cryogenic readout of superconducting transition-edge sensor(TES) arrays. Demands for large-scale TES arrays promote the development of multiplexing technologies towards large multiplexing factors and low readout noise. The development of multiplexing technologies also facilitates new applications of TES arrays in a wide range of frequencies. Here we summarize different types of SQUID-based multiplexing technologies including time-division multiplexing, code-division multiplexing, frequency-division multiplexing and microwave SQUID multiplexing. The advances and parameter constraints of each multiplexing technology are also discussed.
基金Project supported by the National Key Basic Research and Development Program of China(Grant No.2017YFA0304003)the National Natural Science Foundation of China(Grant Nos.U1831202,U1731119,U1931123,11773083,and 11873099)+1 种基金the Chinese Academy of Sciences(Grant Nos.QYZDJ-SSW-SLH043 and GJJSTD20180003)Jiangsu Province,China(Grant No.BRA2020411).
文摘Optical superconducting transition-edge sensor(TES)has been widely used in quantum information,biological imaging,and fluorescence microscopy owing to its high quantum efficiency,low dark count,and photon number resolving capability.The temperature sensitivity(α_(I))and current sensitivity(β_(I))are important parameters for optical TESs,which are generally extracted from the complex impedance.Here we present a method to extractα_(I)andβ_(I)based on a two-fluid model and compare the calculated current-voltage curves,pulse response,and theoretical energy resolution with the measured ones.This method shows qualitative agreement that is suitable for further optimization of optical TESs.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.12293032,120101002,12173097,and U1931123)the National Key Basic Research and Development Program of China(Grant Nos.2020YFC2201703 and 2018YFA0404701)Chinese Academy of Sciences(Grant No.GJJSTD20210002)。
文摘We develop an x-ray Ti/Au transition-edge sensor(TES)with an Au absorber deposited on the center of TES and improved its energy resolution using the K-means clustering algorithm in combination with Wiener filter.We firstly extract the main parameters of each recorded pulse trace,which are adopted to classify these traces into several clusters in the K-means clustering algorithm.Then real traces are selected for energy resolution analysis.Following the baseline correction,the Wiener filter is used to improve the signal-to-noise ratio.Although the silicon underneath the TES has not been etched to reduce the thermal conductance,the energy resolution of the developed x-ray TES is improved from 94 eV to 44 eV at 5.9 keV.
基金supported by the National Key Research and Development Program of China (Grant No. 2017YFA0304000)the Shanghai Municipal Science and Technology Major Project (Grant No. 2017SHZDZX02)+2 种基金China National Space Administration (CNSA) (Grant No. D050104)the grant for low energy gamma-ray detection research based on SQUID techniquesupported by the Superconducting Electronics Facility (SELF) of Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences。
文摘The proximity effect to reduce the transition temperature of a superconducting film is frequently used in transitionedge sensors. Here, we develop these transition-edge sensors using Mo/Au/Au tri-layer films to detect soft x-rays. They are equipped with an overhanging photon absorber. We reduce the fabrication complexity by integrating the sensor patterning with the tri-layer film formation. We determine the electro-thermal parameters of the sensors through a series of resistance vs. temperature and current vs. voltage measurements. We also demonstrate their energy-resolving capability by using a55Fe radioactive x-ray source. The best energy resolution was approximately 6.66 eV at 5.9 keV, with a theoretical count rate of 500 Hz.
文摘For photon detection, superconducting transition-edge sensor(TES) micro-calorimeters are excellent energy-resolving devices. In this study, we report our recent work in developing Ti-/Au-based TES. The Ti/Au TES devices were designed and implemented with a thickness ratio of 1:1 and different suspended structures using micromachining technology. The characteristics were evaluated and analyzed, including surface morphology, 3 D deformation of suspended Ti/Au TES device structure, I–V characteristics, and low-temperature superconductivity. The results showed that the surface of Ti/Au has good homogeneity and the surface roughness of Ti/Au is significantly increased compared with the substrate. The structure of Ti/Au bilayer film significantly affects the deformation of suspended devices, but the deformation does not affect the I–V characteristics of the devices. For devices with the Ti/Au bilayer(150 μm × 150 μm) and beams(100 μm × 25 μm), the transition temperature(T;) is 253 m K with a width of 6 m K, and the value of the temperature sensitivity α is 95.1.
基金the National Natural Science Foundation of China(Grant Nos.11653001 and 11653004)。
文摘Superconducting transition edge sensor(TES)bolometers require superconducting films to have controllable transition temperatures T_(c)in different practical applications.The value of T_(c)strongly affects thermal conductivity and thermal noise performance of TES detectors.Al films doped with Mn(Al-Mn)of different concentrations can accomplish tunable T_(c)A magnetron sputtering machine is used to deposit the Al-Mn films in this study.Fabrication parameters including sputtering pressure and annealing process are studied and their influences on T_(c)and superconducting transition widthΔT_(c)are optimized.The Al-Mn films withΔT_(c)below 1.0 mK for T_(c)in a range of 520 mK-580 mK are successfully fabricated.
基金supported by the National Basic Research Program of China(Grant No.2011CBA00304)Tsinghua University Initiative Scientific Research Program,China(Grant No.20131089314)the National Natural Science Foundation of China(Grant Nos.60836001 and 11273023)
文摘We report the optical response characteristics of A1/Ti bilayer transition edge sensors （TESs）, which are mainly comprised of A1/Ti bilayer thermometers and suspended SiN membranes for thermal isolation. The measurement was performed in a 3He sorption refrigerator and the device＇s response to optical pulses was investigated using a pulsed laser source. Based on these measurements, we obtained the effective recovery time （τeff） of the devices at different biases and discussed the dependence of Veff on the bias. The device with a 940 μm × 940 μm continuous suspended SiN membrane demonstrated a fast response speed with τeff = 3.9 μs, which indicates a high temperature sensitivity （a = T/R·dR/dT = 326）. The results also showed that the TES exhibits good linearity under optical pulses of variable widths.
基金the National Major Scientific Research Instrument Development Project(Grant No.11927805)the National Key Research and Development Program of China(Grant No.2022YFF0608303)+2 种基金the NSFC Young Scientists Fund(Grant No.12005134)the Shanghai-XFEL Beamline Project(SBP)(Grant No.31011505505885920161A2101001)the Shanghai Municipal Science and Technology Major Project(Grant No.2017SHZDZX02)。
文摘The accurate analysis of the elemental composition plays a crucial role in the research of functional materials.The emitting characteristic x-ray fluorescence(XRF)photons can be used for precisely discriminating the specified element.The detection accuracy of conventional XRF methodology using semiconductor detector is limited by the energy resolution,thus posing a challenge in accurately scaling the actual energy of each XRF photon.We adopt a novel high-resolution x-ray spectrometer based on the superconducting transition-edge sensor(TES)for the XRF spectroscopy measurement of different elements.Properties including high energy resolution,high detection efficiency and precise linearity of the new spectrometer will bring significant benefits in analyzing elemental composition via XRF.In this paper,we study the Ledge emission line profiles of three adjacent rare earth elements with the evenly mixed sample of their oxide components:terbium,dysprosium and holmium.Two orders of magnitude better energy resolution are obtained compared to a commercial silicon drift detector.With this TES-based spectrometer,the spectral lines overlapped or interfered by background can be clearly distinguished,thus making the chemical component analysis more accurate and quantitative.A database of coefficient values for the line strength of the spectrum can then be constructed thereafter.Equipped with the novel XRF spectrometer and an established coefficient database,a direct analysis of the composition proportion of a certain element in an unknown sample can be achieved with high accuracy.
基金Project supported by the Fund from China National Space Administration (CNSA) (Grant No. D050104)the Fund for Low Energy Gamma Ray Detection Research Based on SQUID Techniquethe Superconducting Electronics Facility (SELF) of Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences。
文摘Superconducting quantum interference devices(SQUIDs) are low-noise amplifiers that are essential for the readouts of translation edge sensors(TESs). The linear flux range is an important parameter for SQUID amplifiers, especially those controlled by high-bandwidth digital flux-locked-loop circuits. A large linear flux range conduces to accurately measuring the input signal and also increasing the multiplexing factor in the time-division multiplexed(TDM) readout scheme of the TES array. In this work, we report that the linear flux range of an SQUID can be improved by using self-feedback effect. When the SQUID loop is designed to be asymmetric, a voltage-biased SQUID shows an asymmetric current–flux(I–Φ) response curve. The linear flux range is improved along the I–Φ curve with a shallow slope. The experimental results accord well with the numerical simulations. The asymmetric SQUID will be able to serve as a building block in the development of the TDM readout systems for large TES arrays.
基金supported by the National Basic Research Program of China (2011CBA00304)Tsinghua University Initiative Scientific Research Program (20131089314) the National Natural Science Foundation of China (60836001 and 11273023)
文摘We successfully designed and fabricated TES bolometers utilizing Al/Ti bilayer TESs as sensitive thermometers.To reduce the intrinsic noise level and tune the saturation power of a bolometer,the TES thermometer is placed on a suspended SiN platform which is thermally coupled to the heat bath by four long SiN beams with different geometries.The measurement results show that the detectors have background limited noise performance,with a low noise equivalent power(NEP)on the order of10-17W/Hz1/2and have a saturation power of several tens pW at a bath temperature of 320 mK.These detectors are suitable for applications in ground-based astrophysics experiments by integrating absorbers for specific wavelengths.
