By combination of DC reactive magnetron sputter i ng with multiple arcplating, the alternating C 3 N 4 /TiN compo und film is deposited onto HSS. The core level binding energy and the contents o f carbon and n...By combination of DC reactive magnetron sputter i ng with multiple arcplating, the alternating C 3 N 4 /TiN compo und film is deposited onto HSS. The core level binding energy and the contents o f carbon and nitrogen are characterized by X\|ray photoelectron spectrum. X\|ray diffraction(XRD) shows that compound thin film contains hard crystalline phases of α \|C 3 N 4 and β \|C 3 N 4 . The Knoop microhardne ss in the load range of 50.5\|54.1 GPa is measured. According to acoustic emissi on scratch test, the critical load values for the coatings on HSS substrates are in the range of 40\|80 N. The metal coated with C 3 N 4 /TiN compound f ilms has a great improvement in the resistance against corrosion. Many tests sho w that such a coating has a very high wearability. Compared with the uncoated an d TiN coated tools, the C 3 N 4 /TiN coated tools have a much longer cut ting life.展开更多
The TiB2 thin films were deposited on steel substrates using RF magnetron sputtering technique with the low normalized substrate temperature （0.1〈Ts/Tm〈0.2）. Microstructure of these films was obtained by field emi...The TiB2 thin films were deposited on steel substrates using RF magnetron sputtering technique with the low normalized substrate temperature （0.1〈Ts/Tm〈0.2）. Microstructure of these films was obtained by field emission scanning electron microscope （FESEM） and the grazing incidence X-ray diffraction （GIXRD） characterization, while the composition of films was obtained using Auger emission spectroscopy （AES） analysis. It was found that the TiB2 thin films were overstoichiometric with the B/Ti ratio at 2.33 and the diffusion of Ti and B atoms on the substrate surface was greatly improved at 350 ℃. Moreover, a new dense structure, named ＂equiaxed＂ grain structure was observed by FESEM at this substrate temperature, Combined with FESEM and AES analysis, it was suggested that the ＂equiaxed＂ grain structure was located in Zone 2 at the normalized substrate temperature as low as 0.18.展开更多
文摘By combination of DC reactive magnetron sputter i ng with multiple arcplating, the alternating C 3 N 4 /TiN compo und film is deposited onto HSS. The core level binding energy and the contents o f carbon and nitrogen are characterized by X\|ray photoelectron spectrum. X\|ray diffraction(XRD) shows that compound thin film contains hard crystalline phases of α \|C 3 N 4 and β \|C 3 N 4 . The Knoop microhardne ss in the load range of 50.5\|54.1 GPa is measured. According to acoustic emissi on scratch test, the critical load values for the coatings on HSS substrates are in the range of 40\|80 N. The metal coated with C 3 N 4 /TiN compound f ilms has a great improvement in the resistance against corrosion. Many tests sho w that such a coating has a very high wearability. Compared with the uncoated an d TiN coated tools, the C 3 N 4 /TiN coated tools have a much longer cut ting life.
基金the Scientific Research-special Funds of Dongguan City in Guangdong Province (No. 2003D1011)
文摘The TiB2 thin films were deposited on steel substrates using RF magnetron sputtering technique with the low normalized substrate temperature （0.1〈Ts/Tm〈0.2）. Microstructure of these films was obtained by field emission scanning electron microscope （FESEM） and the grazing incidence X-ray diffraction （GIXRD） characterization, while the composition of films was obtained using Auger emission spectroscopy （AES） analysis. It was found that the TiB2 thin films were overstoichiometric with the B/Ti ratio at 2.33 and the diffusion of Ti and B atoms on the substrate surface was greatly improved at 350 ℃. Moreover, a new dense structure, named ＂equiaxed＂ grain structure was observed by FESEM at this substrate temperature, Combined with FESEM and AES analysis, it was suggested that the ＂equiaxed＂ grain structure was located in Zone 2 at the normalized substrate temperature as low as 0.18.
