Super-resolution imaging with superlens has been one of the fundamental research topics. Unfortunately, the resolution of superlens is inevitably restrained by material loss. To address the problem, we introduce the s...Super-resolution imaging with superlens has been one of the fundamental research topics. Unfortunately, the resolution of superlens is inevitably restrained by material loss. To address the problem, we introduce the solid immersion mechanism into the slab superlens and the cylindrical superlens. The proposed solid immersion slab superlens(SISSL) and the solid immersion cylindrical superlens(SICSL) can improve the resolution by converting evanescent wave to propagating wave using high refractive index materials. From the perspective of applications, the cylindrical superlens with finite cross section and the ability of magnification or demagnification has more advantages than the slab superlens. Therefore,we focus on demonstrating analytically the super-resolution imaging of SICSL. Due to the impedance mismatching caused by solid immersion mechanism, the whispering gallery modes(WGMs) are excited between SICSL and the air interface.We clarify the excitation conditions of WGMs and analyze their influence on the imaging quality of SICSL. The SISSL and SICSL may pave a way to apply in lithography technique and real-time biomolecular imaging in future.展开更多
The imaging capability of conventional lenses is mainly limited by the diffraction of light,and the so-called superlens has been developed allowing the recovery of evanescent waves in the focal plane.However,the remar...The imaging capability of conventional lenses is mainly limited by the diffraction of light,and the so-called superlens has been developed allowing the recovery of evanescent waves in the focal plane.However,the remarkable focusing behavi-or of the superlens is greatly confined in the near-field regime due to the exponential decay of evanescent waves.To tackle this issue,we design a waveguide metasurface-based superlens with an extraordinary quasi-far-field focusing capability beyond the diffraction limit in the present work.Specifically,we analyze the underlying physical mechanism and provide experimental verification of the proposed superlens.The metasurface superlens is formed by an array of gradient nanoslits perforated in a gold slab,and supports transverse-electric(TE)waveguide modes under linearly polar-ized illumination along the long axis of the slits.Numerical results illustrate that exciting such TE waveguide modes can modulate not only optical phase but also evanescent waves.Consequently,some high-spatial-frequency waves can con-tribute to the focusing of the superlens,leading to the quasi-far-field super-resolution focusing of light.Under 405 nm illu-mination and oil immersion,the fabricated superlens shows a focus spot of 98 nm(i.e.λ/4.13)at a focal distance of 1.49μm(i.e.3.68λ)using an oil immersion objective,breaking the diffraction limit ofλ/2.38 in the quasi-far field regime.The developed metasurface optical superlens with such extraordinary capabilities promises exciting avenues to nanolitho-graphy and ultra-small optoelectronic devices.展开更多
A far-field optical lithography is developed in this paper. By designing the structure of a far-field optical superlens, lithographical resolution can be improved by using a conventional UV light source. The finite di...A far-field optical lithography is developed in this paper. By designing the structure of a far-field optical superlens, lithographical resolution can be improved by using a conventional UV light source. The finite different time domain numerical studies indicate that the lithographic resolution at 50 nm line width is achievable with the structure shown in this paper by using 365 nm wavelength light, and the light can be transferred to a far distance in the photoresist.展开更多
The refractive-lens technique has been well developed over a long period of evolution,offering powerful imaging functionalities,such as microscopes,telescopes,and spectroscopes.Nevertheless,the ever-growing requiremen...The refractive-lens technique has been well developed over a long period of evolution,offering powerful imaging functionalities,such as microscopes,telescopes,and spectroscopes.Nevertheless,the ever-growing requirements continue to urge further enhanced imaging capabilities and upgraded devices that are more compact for convenience.Metamaterial as a fascinating concept has inspired unprecedented new explorations in physics,material science,and optics,not only in fundamental researches but also novel applications.Along with the imaging topic,this paper reviews the progress of the flat lens as an important branch of metamaterials,covering the early superlens with super-diffraction capability and current hot topics of metalenses including a paralleled strategy of multilevel diffractive lenses.Numerous efforts and approaches have been dedicated to areas ranging from the new fascinating physics to feasible applications.This review provides a clear picture of the flat-lens evolution from the perspective of metamaterial design,elucidating the relation and comparison between a superlens and metalens,and addressing derivative designs.Finally,application scenarios that favor the ultrathin lens technique are emphasized with respect to possible revolutionary imaging devices,followed by conclusive remarks and prospects.展开更多
We theoretically demonstrate the imaging properties of a complex two-dimensional(2D) face-centered square lattice photonic crystal(PC) made from germanium cylinders in air background. The finitedifference time-domain(...We theoretically demonstrate the imaging properties of a complex two-dimensional(2D) face-centered square lattice photonic crystal(PC) made from germanium cylinders in air background. The finitedifference time-domain(FDTD) method is employed to calculate the band structure and simulate image construction. The band diagram of the complex structure is significantly compressed. Negative refraction occurs in the second energy band with negative phase velocity at a frequency of 0.228(2πc/a), which is lower than results from previous studies. Lower negative refraction frequency leads to higher image resolution. Numerical results show that the spatial resolution of the system reaches 0.7296λ, which is lower than the incident wavelength.展开更多
This work has demonstrated that with silver superlens, the resolution of conventional optical lithography can be improved significantly. Experimental and simulative results are given to verify the facts that the resol...This work has demonstrated that with silver superlens, the resolution of conventional optical lithography can be improved significantly. Experimental and simulative results are given to verify the facts that the resolution and the pattern fidelity are sensitive to the contact tightness between layers.展开更多
In this Letter,a Gabor superlens with variable focus is presen ted.This configuration uses tunable liquid lenses in the third microlens array of the Gabor superlens.By applying voltage,the radius of curvature of the m...In this Letter,a Gabor superlens with variable focus is presen ted.This configuration uses tunable liquid lenses in the third microlens array of the Gabor superlens.By applying voltage,the radius of curvature of the microtunable doublet arrays changes,and the Gabor conditions are fulfilled at different focal planes.As a consequence,the magnification of the image at the focal planes changes,and a zoom effect is observed.The marginal depth plane for this system goes from 0.86 to 0.89 mm.The optical simulation,calculations,and results of the simulated optical system performance are presented.展开更多
基金Project supported by the National Key Research and Development Program of China (Grant No. 2020YFA0710100)the National Natural Science Foundation of China (Grant Nos. 92050102 and 11874311)the Fundamental Research Funds for the Central Universities (Grant Nos. 20720220033 and 20720200074)。
文摘Super-resolution imaging with superlens has been one of the fundamental research topics. Unfortunately, the resolution of superlens is inevitably restrained by material loss. To address the problem, we introduce the solid immersion mechanism into the slab superlens and the cylindrical superlens. The proposed solid immersion slab superlens(SISSL) and the solid immersion cylindrical superlens(SICSL) can improve the resolution by converting evanescent wave to propagating wave using high refractive index materials. From the perspective of applications, the cylindrical superlens with finite cross section and the ability of magnification or demagnification has more advantages than the slab superlens. Therefore,we focus on demonstrating analytically the super-resolution imaging of SICSL. Due to the impedance mismatching caused by solid immersion mechanism, the whispering gallery modes(WGMs) are excited between SICSL and the air interface.We clarify the excitation conditions of WGMs and analyze their influence on the imaging quality of SICSL. The SISSL and SICSL may pave a way to apply in lithography technique and real-time biomolecular imaging in future.
基金support by the National Natural Science Foundation of China(52075410,51975483,51622509)the Fundamental Research Funds for the Central Universities(31020190504001)+3 种基金the 111 Project(B13044),the Dean Fund(2019GDYJY05)the Collaborative Innov-ation Center Project of Shaanxi Provincial Department of Education(20JY031)the Natural Science Basic Research Plan in Shaanxi Province of China(2018JQ6012)the Hong Kong Polytechnic University through the“Life Science Research”project(1-ZVH9),and the City University of Hong Kong(9610456).
文摘The imaging capability of conventional lenses is mainly limited by the diffraction of light,and the so-called superlens has been developed allowing the recovery of evanescent waves in the focal plane.However,the remarkable focusing behavi-or of the superlens is greatly confined in the near-field regime due to the exponential decay of evanescent waves.To tackle this issue,we design a waveguide metasurface-based superlens with an extraordinary quasi-far-field focusing capability beyond the diffraction limit in the present work.Specifically,we analyze the underlying physical mechanism and provide experimental verification of the proposed superlens.The metasurface superlens is formed by an array of gradient nanoslits perforated in a gold slab,and supports transverse-electric(TE)waveguide modes under linearly polar-ized illumination along the long axis of the slits.Numerical results illustrate that exciting such TE waveguide modes can modulate not only optical phase but also evanescent waves.Consequently,some high-spatial-frequency waves can con-tribute to the focusing of the superlens,leading to the quasi-far-field super-resolution focusing of light.Under 405 nm illu-mination and oil immersion,the fabricated superlens shows a focus spot of 98 nm(i.e.λ/4.13)at a focal distance of 1.49μm(i.e.3.68λ)using an oil immersion objective,breaking the diffraction limit ofλ/2.38 in the quasi-far field regime.The developed metasurface optical superlens with such extraordinary capabilities promises exciting avenues to nanolitho-graphy and ultra-small optoelectronic devices.
基金Project supported by the Shanghai Committee of Science and Technology of China (Grant No. 0852nm06600)the National Natural Science Foundation of China(Grant No. 60808014)
文摘A far-field optical lithography is developed in this paper. By designing the structure of a far-field optical superlens, lithographical resolution can be improved by using a conventional UV light source. The finite different time domain numerical studies indicate that the lithographic resolution at 50 nm line width is achievable with the structure shown in this paper by using 365 nm wavelength light, and the light can be transferred to a far distance in the photoresist.
基金the financial support from the National Key R&D Program of China(2022YFA1404300)National Natural Science Foundation of China(91850204,92250304,62288101).
文摘The refractive-lens technique has been well developed over a long period of evolution,offering powerful imaging functionalities,such as microscopes,telescopes,and spectroscopes.Nevertheless,the ever-growing requirements continue to urge further enhanced imaging capabilities and upgraded devices that are more compact for convenience.Metamaterial as a fascinating concept has inspired unprecedented new explorations in physics,material science,and optics,not only in fundamental researches but also novel applications.Along with the imaging topic,this paper reviews the progress of the flat lens as an important branch of metamaterials,covering the early superlens with super-diffraction capability and current hot topics of metalenses including a paralleled strategy of multilevel diffractive lenses.Numerous efforts and approaches have been dedicated to areas ranging from the new fascinating physics to feasible applications.This review provides a clear picture of the flat-lens evolution from the perspective of metamaterial design,elucidating the relation and comparison between a superlens and metalens,and addressing derivative designs.Finally,application scenarios that favor the ultrathin lens technique are emphasized with respect to possible revolutionary imaging devices,followed by conclusive remarks and prospects.
文摘We theoretically demonstrate the imaging properties of a complex two-dimensional(2D) face-centered square lattice photonic crystal(PC) made from germanium cylinders in air background. The finitedifference time-domain(FDTD) method is employed to calculate the band structure and simulate image construction. The band diagram of the complex structure is significantly compressed. Negative refraction occurs in the second energy band with negative phase velocity at a frequency of 0.228(2πc/a), which is lower than results from previous studies. Lower negative refraction frequency leads to higher image resolution. Numerical results show that the spatial resolution of the system reaches 0.7296λ, which is lower than the incident wavelength.
基金the National Basic Research Program under Grant No.2004CB719801
文摘This work has demonstrated that with silver superlens, the resolution of conventional optical lithography can be improved significantly. Experimental and simulative results are given to verify the facts that the resolution and the pattern fidelity are sensitive to the contact tightness between layers.
文摘In this Letter,a Gabor superlens with variable focus is presen ted.This configuration uses tunable liquid lenses in the third microlens array of the Gabor superlens.By applying voltage,the radius of curvature of the microtunable doublet arrays changes,and the Gabor conditions are fulfilled at different focal planes.As a consequence,the magnification of the image at the focal planes changes,and a zoom effect is observed.The marginal depth plane for this system goes from 0.86 to 0.89 mm.The optical simulation,calculations,and results of the simulated optical system performance are presented.
