Crystalline silicon surface passivation investigated by thermal atomic-layer-deposited aluminum oxide

Atomic-layer-deposited（ALD） aluminum oxide（Al2O3） has demonstrated an excellent surface passivation for crystalline silicon（c-Si） surfaces, as well as for highly boron-doped c-Si surfaces. In this paper, water-based thermal atomic layer deposition of Al2O3 films are fabricated for c-Si surface passivation. The influence of deposition conditions on the passivation quality is investigated. The results show that the excellent passivation on n-type c-Si can be achieved at a low thermal budget of 250℃ given a gas pressure of 0.15 Torr. The thickness-dependence of surface passivation indicates that the effective minority carrier lifetime increases drastically when the thickness of Al2O3 is larger than 10 nm. The influence of thermal post annealing treatments is also studied. Comparable carrier lifetime is achieved when Al2O3 sample is annealed for 15 min in forming gas in a temperature range from 400℃ to 450℃. In addition, the passivation quality can be further improved when a thin PECVD-SiNx cap layer is prepared on Al2O3, and an effective minority carrier lifetime of2.8 ms and implied Voc of 721 mV are obtained. In addition, several novel methods are proposed to restrain blistering.

Atomic layer deposition of Al_2O_3 on porous polypropylene hollow fibers for enhanced membrane performances

Porous polypropylene hollow fiber(PPHF) membranes are widely used in liquid purification. However, the hydrophobicity of polypropylene(PP) has limited its applications in water treatment. Herein, we demonstrate that, for the first time, atomic layer deposition(ALD) is an effective strategy to conveniently upgrade the filtration performances of PPHF membranes. The chemical and morphological changes of the deposited PPHF membranes are characterized by spectral, compositional, microscopic characterizations and protein adsorption measurements. Al_2O_3 is distributed along the cross section of the PP hollow fibers, with decreasing concentration from the outer surface to the inner surface. The pore size of the outer surface can be easily turned by altering the ALD cycles. Interestingly, the hollow fibers become much more ductile after deposition as their elongation at break is increased more than six times after deposition with 100 cycles. The deposited membranes show simultaneously enhanced water permeance and retention after deposition with moderate ALD cycle numbers.For instance, after 50 ALD cycles a 17% increase in water permeance and one-fold increase in BSA rejection are observed. Moreover, the PP membranes exhibit improved fouling-resistance after ALD deposition.