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A Kind of Biomolecular Probe Sensor Based on TFBG Surface Plasma Resonance 被引量:1
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作者 Mengwei XUE Qi JIANG +1 位作者 Chengjia ZHANG Jianqiang LIN 《Photonic Sensors》 SCIE EI CAS CSCD 2015年第2期102-108,共7页
This paper reports the application of the biomolecular probe sensor based on the tilted fiber Bragg grating (TFBG) surface plasma resonance (SPR) which can recognize the specificity of the specific molecule by dep... This paper reports the application of the biomolecular probe sensor based on the tilted fiber Bragg grating (TFBG) surface plasma resonance (SPR) which can recognize the specificity of the specific molecule by depositing sensitive biological membrane outside the active golden layer. The method of self-assembly was used to make the fixed sensitive biological membrane to achieve the best effect in the experiment. To illustrate the specific recognition of the DNA molecule, the TFBG-SPR biosensor was exposed to complementary DNA solutions with the concentration of 0.1 mmol/L and 0.05 mmol/L, respectively. The resonance wavelength of the TFBG-SPR biosensor increased gradually, indicating that the hybridization with the complementary DNA molecules changed the effective refractive index in the vicinity of the golden layer. Furthermore, the results illustrated the feasibility of the biomolecular probe sensor based on the TFBG surface plasma resonance for detecting the specific molecule. 展开更多
关键词 TFBG nanostructure golden layer surface plasma resonance BIOSENSOR
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Electrostatic Surface Modes in Magnetized Quantum Electron-Hole Plasma
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作者 Bahaa F. Mohamed Abrar A. Salah 《Journal of Modern Physics》 2021年第11期1518-1526,共9页
The excitation of electrostatic surface waves on a semibounded quantum plasma-vacuum interface parallel to an applied magnetic field with electron-hole degeneracy is investigated. The wave equations of the electrostat... The excitation of electrostatic surface waves on a semibounded quantum plasma-vacuum interface parallel to an applied magnetic field with electron-hole degeneracy is investigated. The wave equations of the electrostatic potential and both of the perturbed electron and hole plasma densities have been solved analytically. By using quantum hydrodynamic (QHD) model and the Poisson’s equation with appropriate boundary conditions, the general dispersion relation of these surface modes has been obtained. It is also solved and studied numerically for different cases of plasmas (magnetized or unmagnetized, classical or quantum). We have found that the density ratio of hole-electron plasma plays essential role on the dispersion of the modes along the wavelength beside the quantum and magnetic field. 展开更多
关键词 surface plasma Waves Beam-plasma Interaction Quantum plasma
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A numerical simulation of surface wave excitation in a rectangular planar-type plasma source 被引量:4
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作者 陈兆权 刘明海 +6 位作者 蓝朝晖 陈伟 唐亮 罗志清 燕保荣 吕建红 胡希伟 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第8期3484-3489,共6页
The principle of surface wave plasma discharge in a rectangular cavity is introduced simply based on surface plasmon polariton theory. The distribution of surface-wave electric field at the interface of the plasma-die... The principle of surface wave plasma discharge in a rectangular cavity is introduced simply based on surface plasmon polariton theory. The distribution of surface-wave electric field at the interface of the plasma-dielectric slab is investigated by using the three-dimensional finite-difference time-domain method (3D-FDTD) with different slotantenna structures. And the experimental image of discharge with a novel slot antenna array and the simulation of the electric field with this slot antenna array are both displayed. Combined with the distribution of surface wave excitation and experimental results, the numerical simulation performed by using 3D-FDTD is shown to be a useful tool in the computer-aided antenna design for large area planar-type surface-wave plasma sources. 展开更多
关键词 surface wave plasma numerical simulation three-dimensional finite-difference time domain method surface plasmons polaritons
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Self-consistent three-dimensional modeling and simulation of large-scale rectangular surface-wave plasma source 被引量:3
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作者 蓝朝晖 蓝朝桢 +2 位作者 胡希伟 陈兆权 刘明海 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第6期2412-2419,共8页
A self-consistent and three-dimensional (3D) model of argon discharge in a large-scale rectangular surface-wave plasma (SWP) source is presented in this paper, which is based on the finite-difference time-domain ... A self-consistent and three-dimensional (3D) model of argon discharge in a large-scale rectangular surface-wave plasma (SWP) source is presented in this paper, which is based on the finite-difference time-domain (FDTD) approximation to Maxwell's equations self-consistently coupled with a fluid model for plasma evolution. The discharge characteristics at an input microwave power of 1200 W and a filling gas pressure of 50 Pa in the SWP source are analyzed. The simulation shows the time evolution of deposited power density at different stages, and the 3D distributions of electron density and temperature in the chamber at steady state. In addition, the results show that there is a peak of plasma density approximately at a vertical distance of 3 cm from the quartz window. 展开更多
关键词 FDTD method surface wave plasma fluid model
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Electromagnetic interaction between local surface plasmon polaritons and an atmospheric surface wave plasma jet 被引量:2
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作者 陈兆权 胡东 +7 位作者 刘明海 夏广庆 郑晓亮 胡业林 叶秋波 陈明功 祝龙记 胡希伟 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第3期404-411,共8页
We analyze the electromagnetic interaction between local surface plasmon polaritons (SPPs) and an atmospheric surface wave plasma jet (ASWPJ) in combination with our designed discharge device. Before discharge, th... We analyze the electromagnetic interaction between local surface plasmon polaritons (SPPs) and an atmospheric surface wave plasma jet (ASWPJ) in combination with our designed discharge device. Before discharge, the excitation of the SPPs and the spatial distribution of the enhanced electric field are analyzed. During discharge, the critical breakdown electric field of the gases at atmospheric gas pressure and the surface wave of the SPPs converted into electron plasma waves at resonant points are studied. After discharge, the ionization development process of the ASWPJ is simulated using a two- dimensional fluid model. Our results suggest that the local enhanced electric field of SPPs is merely the precondition of gas breakdown, and the key mechanism in maintaining the discharge development of a low-power ASWPJ is the wave-mode conversion of the local enhanced electric field at the resonant point. 展开更多
关键词 surface wave plasma surface plasmon polaritons numerical simulation electromagnetic interac-tion
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Effect of Low-Pressure Nitrogen DC Plasma Treatment on the Surface Properties of Biaxially Oriented Polypropylene, Poly (Methyl Methacrylate) and Polyvinyl Chloride Films 被引量:2
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作者 S. Hamideh MORTAZAVI Mahmood GHORANNEVISS +4 位作者 Soheil PILEHVAR Sina ESMAEILI Shamim ZARGHAM S. Ebrahim HASHEMI Hamzeh JODAT 《Plasma Science and Technology》 SCIE EI CAS CSCD 2013年第4期362-367,共6页
In this study, commercial biaxially oriented polypropylene (BOPP), polyvinyl chlo- ride (PVC) and poly (methyl methacrylate) (PMMA) films were treated with nitrogen plasma over different exposure times in a Py... In this study, commercial biaxially oriented polypropylene (BOPP), polyvinyl chlo- ride (PVC) and poly (methyl methacrylate) (PMMA) films were treated with nitrogen plasma over different exposure times in a Pyrex tube surrounded by a DC variable magnetic field. The chemi- cal changes that appeared on the surface of the samples were investigated using Fourier transform infrared (FT4R) spectroscopy and attenuated total reflectance Fourier transform infrared (ATR- FTIR) spectroscopy after treatment for 2 min, 4 min and 6 rain in a nitrogen plasma chamber. Effects of the plasma treatment on the surface topographies and contact angles of the untreated and plasma treated films were also analyzed by atomic force microscopy (AFM) and a contact angle measuring system. The results show that the plasma treated films become more hydrophilic with an enhanced wettability due to the formation of some new polar groups on the surface of the treated films. Moreover, at higher exposure times, the total surface energy in all treated films increased while a reduction in contact angle occurred. The behavior of surface roughness in each sample was completely different at higher exposure times. 展开更多
关键词 plasma surface treatment biaxially oriented polypropylene polyvinyl chlo-ride poly (methyl methacrylate) wettability
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Large area planar plasma sustained by surface microwave 被引量:1
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作者 梁波 欧琼荣 +1 位作者 梁以资 梁荣庆 《Chinese Physics B》 SCIE EI CAS CSCD 2007年第12期3732-3737,共6页
In this paper, we show theoretically and experimentally that the large-area planar plasma with high density and good uniformity can be sustained by a surface microwave when the electron density is over-dense. From the... In this paper, we show theoretically and experimentally that the large-area planar plasma with high density and good uniformity can be sustained by a surface microwave when the electron density is over-dense. From the experimental results we find that the nonuniformities in azimuthal plasma density and electron temperature have been greatly improved and in particular the nonuniformity is less than 10% when the gas pressure is 30 Pa. By improving the antenna shape, enhancing the microwave power and choosing the appropriate gas pressure, the large area planar plasma with high density can be produced. 展开更多
关键词 MICROWAVE skin depth surface wave surface wave plasma
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Plasma Limiter Based on Surface Wave Plasma Excited by Microwave 被引量:1
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作者 杨耿 谭吉春 沈本剑 《Plasma Science and Technology》 SCIE EI CAS CSCD 2008年第4期480-483,共4页
A novel plasma limiter, in which the plasma is excited by surface wave, is presented. The breakdown time of some gases filled in the limiter were calculated as a function of gas pres- sure, ionization degree and densi... A novel plasma limiter, in which the plasma is excited by surface wave, is presented. The breakdown time of some gases filled in the limiter were calculated as a function of gas pres- sure, ionization degree and density of seed electrons under low pressure (0.01 -1 Torr) and high pressure (10 -1000 Torr) cases. The results show that the limiter filled with Xe with a pressure of 0.9 Torr, seed electron density of 10^16 m^-3, and ionization degree of 10^-4, has a breakdown time of approximate 19.6 ns. 展开更多
关键词 high power microwave surface wave plasma LIMITER breakdown time
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Plasma Niobium Surface Alloying of Pure Titanium and its Oxidation at 900 ℃ 被引量:1
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作者 WANG Wen-bo ZHONG Xu +2 位作者 HE Zhi-yong WANG Zhen-xia ZHANG Ping-ze 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2007年第2期111-114,共4页
A niobium-modified layer on pure titanium surface was obtained by means of double glow plasma surface alloying technique. The modified layer was uniform, continuous, compact and well adhered to the substrate. The niob... A niobium-modified layer on pure titanium surface was obtained by means of double glow plasma surface alloying technique. The modified layer was uniform, continuous, compact and well adhered to the substrate. The niobium composition in the modified layer decreased gradually from the surface to the substrate. The oxidation behavior of the niobium-modified layer was investigated and com- pared with the untreated surface at 900 ~C for 100 h. Characterization of the layers was performed using X-ray diffraction and scanning electron microscope, respectively. The test results show that the oxidation behavior of pure titanium was improved by niobium alloying process. Niobium has a positive influence on the oxidation resistance. 展开更多
关键词 NIOBIUM pure titanium plasma surface alloying OXIDATION
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Three-Dimensional Modeling of Argon Discharge Characteristics of a Large-Scale Rectangular Surface-Wave Plasma Source 被引量:1
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作者 蓝朝晖 胡希伟 +1 位作者 王文斗 刘明海 《Plasma Science and Technology》 SCIE EI CAS CSCD 2010年第2期129-133,共5页
A three-dimensional fluid model for surface-wave plasma (SWP), to investigate the discharge characteristics of a rectangular SWP source working in a steady state, was presented. The simulation is performed for diffe... A three-dimensional fluid model for surface-wave plasma (SWP), to investigate the discharge characteristics of a rectangular SWP source working in a steady state, was presented. The simulation is performed for different gas pressures in argon and different deposited powers. The results showed that there is a peak of plasma density at a distance of 2 cm to 3 cm from the plasma-quartz interface whose position depends mainly on the gas pressure but not the deposited power. The spatial distributions of plasma parameters and their dependence on the gas pressure and deposited power are also presented and discussed. Using this model a good agreement between the simulation results and the available experimental data is obtained. 展开更多
关键词 surface wave plasma electron density distribution electron temperature distribution
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The Effect of Plasma Surface Treatment on a Porous Green Ceramic Film with Polymeric Binder Materials 被引量:1
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作者 Jeong Woo YUN 《Plasma Science and Technology》 SCIE EI CAS CSCD 2013年第6期521-527,共7页
To reduce time and energy during thermal binder removal in the ceramic process, plasma surface treatment was applied before the lamination process.The adhesion strength in the lamination films was enhanced by oxidativ... To reduce time and energy during thermal binder removal in the ceramic process, plasma surface treatment was applied before the lamination process.The adhesion strength in the lamination films was enhanced by oxidative plasma treatment of the porous green ceramic film with polymeric binding materials.The oxygen plasma characteristics were investigated through experimental parameters and weight loss analysis.The experimental results revealed the need for parameter analysis,including gas material,process time,flow rate,and discharge power,and supported a mechanism consisting of competing ablation and deposition processes.The weight loss analysis was conducted for cyclic plasma treatment rather than continuous plasma treatment for the purpose of improving the film’s permeability by suppressing deposition of the ablated species.The cyclic plasma treatment improved the permeability compared to the continuous plasma treatment. 展开更多
关键词 plasma surface treatment oxidative plasma green ceramic film ablation DEPOSITION
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Anti-oxidation characteristics of Cr-coating on surface of Ti-45Al-8.5Nb alloy by plasma surface metallurgy technique 被引量:1
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作者 周兵 王亚榕 +4 位作者 郑可 马永 王永胜 于盛旺 吴玉程 《Chinese Physics B》 SCIE EI CAS CSCD 2020年第12期386-395,共10页
TiAl-based alloys have received extensive attention recently due to their excellent properties. However, the weak oxidation resistance at temperatures higher than 800℃ can limit their further high-temperature structu... TiAl-based alloys have received extensive attention recently due to their excellent properties. However, the weak oxidation resistance at temperatures higher than 800℃ can limit their further high-temperature structural applications.To improve the oxidation resistance of a high-Nb-content γ-TiAl alloy(Ti-45 Al-8.5 Nb, in units of at.%), a chromium(Cr)coating is prepared by using the plasma surface alloying technique, separately, at 800℃ and 1000℃. The x-ray diffraction(XRD) patterns reveal that an oxide surface layer consisting of Cr2O3, Al2O3, and TiO2 is produced on the Cr-coated Nb containing γ-TiAl substrates during the initial oxidation. However, the Cr2O3 is dominated in the oxide surface layer after being isothermally oxidized for 300 h. The oxidation kinetic curves are composed of a parabolic law stage(≤ 90 h) and a biquadratic law stage(≥ 90 h), fit by weight–gain curves. Due to diffusion in the fabrication process and oxidation process,the Cr-coated specimens have an adhesion force after being isothermally oxidized, specifically 69 N for a specimen after oxidation for 300 h. These results demonstrate that the Cr coating enhances the oxidation resistance and adhesion of a Ti-45 Al-8.5 Nb alloy, which may provide a new feasible scheme for designing oxidation protection layers. 展开更多
关键词 titanium aluminum alloy coating isothermal oxidation plasma surface alloying technique
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Effect of RE on Cracking Resistance and Microstructure of Coatings Formed by Plasma Jet Surface Metallurgy 被引量:1
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作者 陈颢 李惠琪 孙玉宗 《Journal of Rare Earths》 SCIE EI CAS CSCD 2005年第S1期383-386,共4页
Metallurgical coatings of iron-based alloy with RE oxide were prepared on low-carbon steel using a home-made DC-plasma jet surface metallurgy equipment. Scanning electron microscope (SEM), energy dispersive X-ray (EDX... Metallurgical coatings of iron-based alloy with RE oxide were prepared on low-carbon steel using a home-made DC-plasma jet surface metallurgy equipment. Scanning electron microscope (SEM), energy dispersive X-ray (EDX) microanalysis and X-ray diffraction analysis (XRD) were employed to observe the microstructure and analyze the chemical compositions of coatings. And the cracking susceptibility of coatings was studied in terms of RE addition. Experimental results show that addition of RE oxide (La_2O_3 and CeO_2) can refine and purify the microstructure, and can reduce the cracking susceptibility of coatings. 展开更多
关键词 plasma jet surface metallurgy cracking resistance MICROSTRUCTURE rare earths
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Effects of C,N-Codoped on the Corrosion Resistance of TiO_2 Films Prepared by Plasma Surface Alloying and Thermal Oxidation Duplex Process 被引量:1
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作者 王鹤峰 唐宾 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2011年第3期495-498,共4页
C,N-codoped TiO 2 films have been deposited onto stainless steel substrates using plasma surface alloying and thermal oxidation duplex process.Composition analysis shows that the films shield the substrates entirely.T... C,N-codoped TiO 2 films have been deposited onto stainless steel substrates using plasma surface alloying and thermal oxidation duplex process.Composition analysis shows that the films shield the substrates entirely.The TiO 2 films are anatase in structure as characterized by X-ray diffraction.The electrochemical measurements show that the equilibrium corrosion potential positively shifts from-0.275 eV for bare stainless steel to-0.267 eV for C,N-codoped TiO 2 coated stainless steel,and the corrosion current density decreases from 1.3×10-5 A/cm2 to 4.1×10-6 A/cm2.The corrosion resistance obtained by electrochemistry noise also reveals that the C,N-codoped TiO 2 films provide good protection for stainless steel against corrosion in stimulated body fluid.The above results indicate that C,N-codoped TiO 2 films deposited by plasma surface alloying and thermal oxidation duplex process are effective in protecting stainless steel from corrosion. 展开更多
关键词 plasma surface alloying titanium dioxide C N-codoped corrosion stainless steel electrochemistry noise
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Catalyst-Free Growth of Graphene by Microwave Surface Wave Plasma Chemical Vapor Deposition at Low Temperature 被引量:2
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作者 Sudip Adhikari Hare Ram Aryal +1 位作者 Hideo Uchida Masayoshi Umeno 《Journal of Materials Science and Chemical Engineering》 2016年第3期10-14,共5页
Catalyst-free graphene films has been synthesized by microwave (MW) surface wave plasma (SWP) chemical vapor deposition (CVD) using hydrogenated carbon source on silicon substrates at low temperature (500℃). The synt... Catalyst-free graphene films has been synthesized by microwave (MW) surface wave plasma (SWP) chemical vapor deposition (CVD) using hydrogenated carbon source on silicon substrates at low temperature (500℃). The synthesized process is simple, low-cost and possible for application on transparent electrodes, gas sensors and thin film resistors. Analytical methods such as Raman spectroscopy, transmission electron microscopy (TEM) and four points prove resistivity measurement and UV-VIS-NIR spectroscopy were employed to characterize properties of the graphene films. The formation of multilayer of graphene on silicon substrate was confirmed by Raman spectroscopy and TEM. It is possible to grow graphene directly on silicon substrate (without using catalyst) due to high radical density of MW SWP CVD. In addition, we also observed that the hydrogen had significant role for quality of graphene. 展开更多
关键词 Graphene Films Direct Synthesis H2 Flow Rate Silicon Substrate Microwave surface Wave plasma CVD
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The Aging Study on Polyethylene Terephthalate with Surface Modification by Water Vapor Plasma 被引量:1
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作者 敖玲 钮金真 +2 位作者 刘裕明 胡建芳 陈慧英 《Plasma Science and Technology》 SCIE EI CAS CSCD 2001年第3期761-764,共4页
The aging effects of the contact angle and surface energy on polyethylene terephthalate (PET) have been investigated with surface modification by water vapor plasma. The experimental results show that the contact ang... The aging effects of the contact angle and surface energy on polyethylene terephthalate (PET) have been investigated with surface modification by water vapor plasma. The experimental results show that the contact angle of water and PET decreases obviously and surface energy increases. However, with the increase of the aging time, the contact angle and surface energy change back gradually to original state. 展开更多
关键词 The Aging Study on Polyethylene Terephthalate with surface Modification by Water Vapor plasma PET
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Conditions for laser-induced plasma to effectively remove nano-particles on silicon surfaces 被引量:1
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作者 韩敬华 罗莉 +2 位作者 张玉波 胡锐峰 冯国英 《Chinese Physics B》 SCIE EI CAS CSCD 2016年第9期423-428,共6页
Particles can be removed from a silicon surface by means of irradiation and a laser plasma shock wave.The particles and silicon are heated by the irradiation and they will expand differently due to their different exp... Particles can be removed from a silicon surface by means of irradiation and a laser plasma shock wave.The particles and silicon are heated by the irradiation and they will expand differently due to their different expansion coefficients,making the particles easier to be removed.Laser plasma can ionize and even vaporize particles more significantly than an incident laser and,therefore,it can remove the particles more efficiently.The laser plasma shock wave plays a dominant role in removing particles,which is attributed to its strong burst force.The pressure of the laser plasma shock wave is determined by the laser pulse energy and the gap between the focus of laser and substrate surface.In order to obtain the working conditions for particle removal,the removal mechanism,as well as the temporal and spatial characteristics of velocity,propagation distance and pressure of shock wave have been researched.On the basis of our results,the conditions for nano-particle removal are achieved. 展开更多
关键词 laser-induced plasma shock wave nano-particles surface cleaning
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Influence of low ambient pressure on the performance of a high-energy array surface arc plasma actuator
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作者 唐冰亮 郭善广 +1 位作者 梁华 唐孟潇 《Chinese Physics B》 SCIE EI CAS CSCD 2020年第10期380-387,共8页
In order to solve the problem of single arc plasma actuator's failure to suppress the boundary layer separation, the effectiveness of the array surface arc plasma actuator to enhance the excitation intensity is ve... In order to solve the problem of single arc plasma actuator's failure to suppress the boundary layer separation, the effectiveness of the array surface arc plasma actuator to enhance the excitation intensity is verified by experiment. In this study, an electrical parameter measurement system and high-speed schlieren technology were adopted to delve into the electrical, flow field, and excitation characteristics of the high-energy array surface arc plasma actuator under low ambient pressure. The high-energy array surface arc discharge released considerable heat rapidly;as a result, two characteristic structures were generated, i.e., the precursor shock wave and thermal deposition area. The duration increased with the increase in environmental pressure. The lower the pressure, the wider the thermal deposition area's influence range. The precursor shock wave exhibited a higher propagation speed at the initial phase of discharge;it tended to decay over time and finally remained at 340 m/s. The lower the environmental pressure, the higher the speed would be at the initial phase. High-energy array surface arc plasma actuator can be employed to achieve effective high-speed aircraft flow control. 展开更多
关键词 low ambient pressure HIGH-ENERGY ARRAY surface arc plasma actuator
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Experimental Investigation of Surface Wave Plasma Excited by a Cylindrical Dielectric Rod
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作者 吴忠航 李泽斌 +6 位作者 居家奇 何孔多 杨曦露 颜航 陈枕流 区琼荣 梁荣庆 《Plasma Science and Technology》 SCIE EI CAS CSCD 2014年第2期118-122,共5页
An improved surface wave plasma source equipped with a cylindrical quartz rod has been developed, which has great potential in processing inner wall of cylindrical workpieces. A cylindrical quartz rod not only excites... An improved surface wave plasma source equipped with a cylindrical quartz rod has been developed, which has great potential in processing inner wall of cylindrical workpieces. A cylindrical quartz rod not only excites the plasma around the rod, but also guides surface wave plasma along the rod. The distributions of plasma density and plasma temperature under different incident microwave powers and pressures are diagnosed by a Langmuir probe. The electron density near the rod is around the order of 10^11cm^-3. When the incident power is 450 W, the length of surface wave plasma column can reach up to 420 mm at 20 Pa. 展开更多
关键词 surface wave plasma dielectric rod electron density electron temperature
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The Characteristics of Columniform Surface Wave Plasma Excited Around a Quartz Rod by 2.45 GHz Microwaves
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作者 吴忠航 梁荣庆 +1 位作者 永津雅章 昌锡江 《Plasma Science and Technology》 SCIE EI CAS CSCD 2016年第10期987-991,共5页
A novel surface wave plasma (SWP) source excited with cylindrical Teflon waveguide has been developed in our previous work. The plasma characteristics have been simply studied. In this work, our experimental device ... A novel surface wave plasma (SWP) source excited with cylindrical Teflon waveguide has been developed in our previous work. The plasma characteristics have been simply studied. In this work, our experimental device has been significantly improved by replacing the Teflon waveguide with a quartz rod, and then better microwave coupling and higher gas purity can be obtained during plasma discharge. The plasma spatial distributions, both in radial and axial directions, have been measured and the effect of gas pressure has been investigated. Plasma density profiles indicate that this plasma source can produce uniform plasma in an axial direction at low pressure, which shows its potential in plasma processing on a curved surface such as an inner tube wall. A simplified circular waveguide model has been used to explain the principle of plasma excitation. The distinguishing features and potential application of this kind of plasma source with a hardware improvement have been shown. 展开更多
关键词 2.45 GHz microwave surface wave plasma circular waveguide plasmadiagnosis
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