A retarding field energy analyzer（RFEA） is used to measure the time-averaged ion energy distributions（IEDs） on the substrate in both continuous wave（CW） and synchronous pulse modulated radio-frequency（RF） indu...A retarding field energy analyzer（RFEA） is used to measure the time-averaged ion energy distributions（IEDs） on the substrate in both continuous wave（CW） and synchronous pulse modulated radio-frequency（RF） inductively coupled Ar plasmas（ICPs）.The effects of the phase shift θ between the RF bias voltage and the RF source on the IED is investigated under various discharge conditions.It is found that as θ increases from 0 to π,the IED moves towards the low-energy side,and its energy width becomes narrower.In order to figure out the physical mechanism,the voltage waveforms on the substrate are also measured.The results show that as θ increases from 0 to π,the amplitude of the voltage waveform decreases and,meanwhile,the average sheath potential decreases as well.Specifically,the potential drop in the sheath on the substrate exhibits a maximum value at the same phase（i.e.,θ = 0） and a minimum value at the opposite phase（i.e.,θ = π）.Therefore,when ions traverse across the sheath region above the substrate,they obtain less energies at lower sheath potential drop,leading to lower ion energy.Besides,as θ increases from π to 2π,the IEDs and their energy widths change reversely.展开更多
When multiple distributed converters are integrated, the high frequency harmonics will randomly accumulate at the point of common coupling(PCC). This paper proposes a new fast global synchronous discontinuous pulse wi...When multiple distributed converters are integrated, the high frequency harmonics will randomly accumulate at the point of common coupling(PCC). This paper proposes a new fast global synchronous discontinuous pulse width modulation(GSDPWM) method of threephase inverters to effectively attenuate the high frequency current harmonics at PCC. Firstly, the basic principle and the realization method of GSDPWM for three-phase inverters are explained, which can be employed for different modulation types. Then a fast calculation method,which can equally derive the minimized total harmonic distortion(THD) of total current, is proposed to release the calculation burden. Finally, MATLAB simulations and experimental results are presented to verify the performance of GSDPWM.展开更多
基金Project supported by the Important National Science and Technology Specific Project,China(Grant No.2011ZX02403-001)the National Natural Science Foundation of China(Grand No.11675039)the Fundamental Research Funds for the Central Universities,China(Grand No.DUT16LK06)
文摘A retarding field energy analyzer（RFEA） is used to measure the time-averaged ion energy distributions（IEDs） on the substrate in both continuous wave（CW） and synchronous pulse modulated radio-frequency（RF） inductively coupled Ar plasmas（ICPs）.The effects of the phase shift θ between the RF bias voltage and the RF source on the IED is investigated under various discharge conditions.It is found that as θ increases from 0 to π,the IED moves towards the low-energy side,and its energy width becomes narrower.In order to figure out the physical mechanism,the voltage waveforms on the substrate are also measured.The results show that as θ increases from 0 to π,the amplitude of the voltage waveform decreases and,meanwhile,the average sheath potential decreases as well.Specifically,the potential drop in the sheath on the substrate exhibits a maximum value at the same phase（i.e.,θ = 0） and a minimum value at the opposite phase（i.e.,θ = π）.Therefore,when ions traverse across the sheath region above the substrate,they obtain less energies at lower sheath potential drop,leading to lower ion energy.Besides,as θ increases from π to 2π,the IEDs and their energy widths change reversely.
文摘When multiple distributed converters are integrated, the high frequency harmonics will randomly accumulate at the point of common coupling(PCC). This paper proposes a new fast global synchronous discontinuous pulse width modulation(GSDPWM) method of threephase inverters to effectively attenuate the high frequency current harmonics at PCC. Firstly, the basic principle and the realization method of GSDPWM for three-phase inverters are explained, which can be employed for different modulation types. Then a fast calculation method,which can equally derive the minimized total harmonic distortion(THD) of total current, is proposed to release the calculation burden. Finally, MATLAB simulations and experimental results are presented to verify the performance of GSDPWM.
