This paper investigates the effects of material and dimension parameters on the frequency splitting,frequency drift,and quality factor(Q)of aluminium nitride(AlN)-on-n-doped/pure silicon(Si)microelectromechanical syst...This paper investigates the effects of material and dimension parameters on the frequency splitting,frequency drift,and quality factor(Q)of aluminium nitride(AlN)-on-n-doped/pure silicon(Si)microelectromechanical systems(MEMS)disk resonators through analysis and simulation.These parameters include the crystallographic orientation,dopant,substrate thickness,and temperature.The resonators operate in the elliptical,higher order,and flexural modes.The simulation results show that i)the turnover points of the resonators exist at 55°C,-50°C,40°C,and-10°C for n-doped silicon with the doping concentration of 2×1019 cm-3 and the Si thickness of 3.5μm,and these points are shifted with the substrate thickness and mode variations;ii)compared with pure Si,the modal-frequency splitting for n-doped Si is higher and increases from 5%to 10%for all studied modes;iii)Q of the resonators depends on the temperature and dopant.Therefore,the turnover,modal-frequency splitting,and Q of the resonators depend on the thickness and material of the substrate and the temperature.This work offers an analysis and design platform for high-performance MEMS gyroscopes as well as oscillators in terms of the temperature compensation by n-doped Si.展开更多
近年来随着微波通讯技术与微波集成电路(microwave integratecircuits,MICs)的发展,用于移动通讯、智能运输系统(Intelligent transport system,ITS)、GPS天线的低介电常数低介电损耗的微波介质陶瓷引起了广泛的关注,其中最具代表性的即...近年来随着微波通讯技术与微波集成电路(microwave integratecircuits,MICs)的发展,用于移动通讯、智能运输系统(Intelligent transport system,ITS)、GPS天线的低介电常数低介电损耗的微波介质陶瓷引起了广泛的关注,其中最具代表性的即为Al2O3陶瓷。本文总结了近几年Al2O3陶瓷微波介电性能的研究情况,系统介绍了Al2O3陶瓷微波介电性能的影响因素和目前研究的Al2O3陶瓷体系,希望对于研究AlO陶瓷的微波介电性能提供有益的参考,使其在微波通讯等方面得到更广泛的应用。展开更多
文摘This paper investigates the effects of material and dimension parameters on the frequency splitting,frequency drift,and quality factor(Q)of aluminium nitride(AlN)-on-n-doped/pure silicon(Si)microelectromechanical systems(MEMS)disk resonators through analysis and simulation.These parameters include the crystallographic orientation,dopant,substrate thickness,and temperature.The resonators operate in the elliptical,higher order,and flexural modes.The simulation results show that i)the turnover points of the resonators exist at 55°C,-50°C,40°C,and-10°C for n-doped silicon with the doping concentration of 2×1019 cm-3 and the Si thickness of 3.5μm,and these points are shifted with the substrate thickness and mode variations;ii)compared with pure Si,the modal-frequency splitting for n-doped Si is higher and increases from 5%to 10%for all studied modes;iii)Q of the resonators depends on the temperature and dopant.Therefore,the turnover,modal-frequency splitting,and Q of the resonators depend on the thickness and material of the substrate and the temperature.This work offers an analysis and design platform for high-performance MEMS gyroscopes as well as oscillators in terms of the temperature compensation by n-doped Si.
文摘近年来随着微波通讯技术与微波集成电路(microwave integratecircuits,MICs)的发展,用于移动通讯、智能运输系统(Intelligent transport system,ITS)、GPS天线的低介电常数低介电损耗的微波介质陶瓷引起了广泛的关注,其中最具代表性的即为Al2O3陶瓷。本文总结了近几年Al2O3陶瓷微波介电性能的研究情况,系统介绍了Al2O3陶瓷微波介电性能的影响因素和目前研究的Al2O3陶瓷体系,希望对于研究AlO陶瓷的微波介电性能提供有益的参考,使其在微波通讯等方面得到更广泛的应用。
基金supported by SciTech Found of the CAEP Key Laboratory of Precision Manufacturing Technology(2012CJMZZ00009,2014ZA001)Visiting Scholar Found of the State Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology(Chongqing University)(2013MS04)+1 种基金IEE CAEP SciTech Innovation Found(S20141203)SWUST Postgraduate Innovation Found(13YCJJ36,14YCX107,14YCX109,14YCX111)
