行波管电子注测量系统探头的热分析

本文介绍了一台行波管电子注测量分析系统,并且对其中关键的法拉第筒探头进行了热分析。通过理论和仿真计算探头的脉冲以及稳态温度分布。探头只在每个脉冲电子束团轰击期间产生一个较高的脉冲峰值温度,探头的稳态温度较低。通过测试结果表明,探头的稳态温度要比仿真结果高,但是远低于探头损坏的温度,探头适用于测量系统。

Study of laser-induced plasma shock waves by the probe beam deflection technique

Laser probe beam deflection technique is used for the analysis of laser-induced plasma shock waves in air and distilled water. The temporal and spatial variations of the parameters on shock fronts are studied as functions of focal lens position and laser energy. The influences of the characteristics of media are investigated on the well-designed experimental setup. It is found that the shock wave in distilled water attenuates to an acoustic wave faster than in air under the same laser energy. Good agreement is obtained between our experimental results and those attained with other techniques. This technique is versatile, economic, and simple to implement, being a promising diagnostic tool for pulsed laser processing.

热波探针在离子注入表征上的应用

离子注入工艺稳定性的多个表征方法中,热波探针法快速、灵敏且无损,可用于离子注入工艺角度、注入剂量及均一性的表征。介绍了热波探针应用的理论依据和数据实例,并结合数据实例研究了热波探针法的应用特点和规律。当热波探针应用于离子注入角度表征时,需要保证前期机械校准的有效性及隧穿效应敏感区角度的选用。当应用于剂量准确性和均一性表征时,则需要将注入剂量控制在中、低等剂量范围内,避开隧穿效应敏感区,还需有效规避热晶圆效应。

热波检测及热波成像系统的实验研究

介绍制成的热波检测及成像系统的原理、结构和实验结果。这种系统的基本特征是能对试件材料热性质（例如热传导系数）的差异作出响应，并能将扫描过程中逐点测得的结果表现为一幅反映热性质分布的高分辨率图像。因此，凡引起试件热性质发生变化的因素均可用这种系统来发现和评估。这种以热过程为基础的方法是对光学、声学、电磁、辐射等材料检测评估方法的重要补充，并在某些情况下有其独特的优点。