We developed flexible and transparent thin film heaters(TFHs)with a structure of AZO/AgSnOx/AZO/polyimide(PI)which exhibited superior stability under operational conditions.Ultrathin and robust doped silver(Ag)films w...We developed flexible and transparent thin film heaters(TFHs)with a structure of AZO/AgSnOx/AZO/polyimide(PI)which exhibited superior stability under operational conditions.Ultrathin and robust doped silver(Ag)films were produced by introducing a small amount of SnOx during the sputtering process.The AZO/Ag-SnOx/AZO stacks showed the best figure of merit value of 139.9,which was higher than that of ITO counterpart(25.5)with the same thickness.In addition,it exhibited excellent durability,which showed unaffected optical and electrical properties under the heat treatment of 500℃for 30 min in air,highly-accelerated tempe ratu re and humidity stress test(HAST)at 121℃and 97%RH for 36 h,10,000 times of scratching and 1500 times of inner and outer bending test.Furthermore,the TFHs based on AZO/Ag-SnOx/AZO/PI achieved a high temperature of 438.8℃with response time in several seconds,which outperformed most previous studies.The robust high-temperature TFHs in this research hold promising commercial applications in flexible and high temperature occasions.展开更多
设计了基于微机电系统(MEMS)工艺,以镍薄膜作为加热体的新型催化传感器。通过磁控溅射沉积、刻蚀等工艺制成镍薄膜加热器,并对其进行了稳定化热处理以及防氧化聚合物涂层处理。传感器性能测试结果表明:镍薄膜加热器具有良好的抗高温氧...设计了基于微机电系统(MEMS)工艺,以镍薄膜作为加热体的新型催化传感器。通过磁控溅射沉积、刻蚀等工艺制成镍薄膜加热器,并对其进行了稳定化热处理以及防氧化聚合物涂层处理。传感器性能测试结果表明:镍薄膜加热器具有良好的抗高温氧化能力;气氛老化可缩短50%的老化时间;甲烷气体浓度与灵敏度呈良好的线性关系;对甲烷的灵敏度约为30 m V/1%Vol;传感器功耗约为150 m W,零点和灵敏度年漂移小于1. 5%LEL。展开更多
基金supported financially by the National Key R&D Program of China(No.2018YFA0209200)the National Natural Science Foundation of China(No.61774160)+3 种基金the Zhejiang Natural Science Foundation(No.LY19F040003)the Ningbo Natural Science Foundation(Nos.2018A610142 and 2017A610063)the International Cooperation Program of Ningbo(No.2017D10005)the Program for Ningbo Municipal Science and Technology Innovative Research Team(No.2016B10005)。
文摘We developed flexible and transparent thin film heaters(TFHs)with a structure of AZO/AgSnOx/AZO/polyimide(PI)which exhibited superior stability under operational conditions.Ultrathin and robust doped silver(Ag)films were produced by introducing a small amount of SnOx during the sputtering process.The AZO/Ag-SnOx/AZO stacks showed the best figure of merit value of 139.9,which was higher than that of ITO counterpart(25.5)with the same thickness.In addition,it exhibited excellent durability,which showed unaffected optical and electrical properties under the heat treatment of 500℃for 30 min in air,highly-accelerated tempe ratu re and humidity stress test(HAST)at 121℃and 97%RH for 36 h,10,000 times of scratching and 1500 times of inner and outer bending test.Furthermore,the TFHs based on AZO/Ag-SnOx/AZO/PI achieved a high temperature of 438.8℃with response time in several seconds,which outperformed most previous studies.The robust high-temperature TFHs in this research hold promising commercial applications in flexible and high temperature occasions.
文摘设计了基于微机电系统(MEMS)工艺,以镍薄膜作为加热体的新型催化传感器。通过磁控溅射沉积、刻蚀等工艺制成镍薄膜加热器,并对其进行了稳定化热处理以及防氧化聚合物涂层处理。传感器性能测试结果表明:镍薄膜加热器具有良好的抗高温氧化能力;气氛老化可缩短50%的老化时间;甲烷气体浓度与灵敏度呈良好的线性关系;对甲烷的灵敏度约为30 m V/1%Vol;传感器功耗约为150 m W,零点和灵敏度年漂移小于1. 5%LEL。
