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Nonlinear phase error analysis of equivalent thickness in a white-light spectral interferometer
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作者 Tong Guo Qianwen Weng +3 位作者 Bei Luo Jinping Chen Xing Fu Xiaotang Hu 《Nanotechnology and Precision Engineering》 EI CAS CSCD 2019年第2期77-82,共6页
A white light spectral interferometry based on a Linnik type system was established to accurately measure the thin film thickness through transparent medium.In practical work,the equivalent thickness of a beam splitte... A white light spectral interferometry based on a Linnik type system was established to accurately measure the thin film thickness through transparent medium.In practical work,the equivalent thickness of a beam splitter and the mismatch of the objective lens introduce nonlinear phase errors.Adding a transparent medium also increases the equivalent thickness.The simulation results showthat the equivalent thickness has a significant effect on thin film thickness measurements.Therefore,it is necessary to perform wavelength correction to provide a constant equivalent thickness for beamsplitters.In the experiments,some pieces of cover glasses as the transparent medium were added to the measured beam and then a standard thin film thickness of 1052.2±0.9 nm was tested through the transparent medium.The results demonstrate that our system has a nanometer-level accuracy for thin film thickness measurement through transparent medium with optical path compensation. 展开更多
关键词 White light spectral interferometry thin film thickness measurement Nonlinear phase Equivalent thickness Transparent medium
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