A High Performance Sub-100nm Nitride/Oxynitride Stack Gate Dielectric CMOS Device with Refractory W/TiN Metal Gates

By complementing the equivalent oxide thickness （EOT） of a 1.7nm nitride/oxynitride （N/O） stack gate dielectric （EOT- 1.7nm） with a W/TiN metal gate electrode,metal gate CMOS devices with sub-100nm gate length are fabricated in China for the first time. The key technologies adopted to restrain SCE and to improve drive ability include a 1.7nm N/O stack gate dielectric, non-CMP planarization technology, a T-type refractory W/TiN metal stack gate electrode, and a novel super steep retrograde channel doping using heavy ion implantation and a double sidewall scheme. Using these optimized key technologies, high performance 95nm metal gate CMOS devices with excellent SCE and good driving ability are fabricated. Under power supply voltages of VDS ± 1.5V and VGS± 1.8V,drive currents of 679μA/μm for nMOS and - 327μA/μm for pMOS are obtained. A subthreshold slope of 84.46mV/dec, DIBL of 34.76mV/V, and Vth of 0.26V for nMOS, and a subthreshold slope of 107.4mV/dec,DIBL of 54.46mV/V, and Vth of 0.27V for pMOS are achieved. These results show that the combined technology has indeed thoroughly eliminated the boron penetration phenomenon and polysilicon depletion effect ,effectively reduced gate tunneling leakage, and improved device reliability.

Dual-function protective layer for highly reversible Zn anode

The thermodynamic instability of zinc anodes in aqueous electrolytes leads to issues such as corrosion,hydrogen evolution reactions(HER), and dendrite growth, severely hindering the practical application of zinc-based aqueous energy storage devices. To address these challenges, this work proposes a dualfunction zinc anode protective layer, composed of Zn-Al-In layered double oxides(ILDO) by rationally designing Zn-Al layered double hydroxides(Zn-Al LDHs) for the first time. Differing from previous works on the LDHs coatings, firstly, the ILDO layer accelerates zinc-ion desolvation and also captures and anchors SO_(4)^(2-). Secondly, the in-situ formation of the Zn-In alloy phase effectively lowers the nucleation energy barrier, thereby regulating zinc nucleation. Consequently, the zinc anode with the ILDO protective layer demonstrates long-term stability exceeding 1900 h and low voltage hysteresis of 7.5 m V at 0.5 m A cm^(-2) and 0.5 m A h cm^(-2). Additionally, it significantly enhances the rate capability and cycling performance of Zn@ILDO//MnO_(2) full batteries and Zn@ILDO//activated carbon zinc-ion hybrid capacitors.This simple and effective dual-function protective layer strategy offers a promising approach for achieving high-performance zinc-ion batteries.

Preparation and characterization of conductive antimony-doped tin oxide (ATO) nanoparticles

In this paper, conductive antimony-doped tin oxide (ATO) composite particles is prepared by hydroxylation method of metal alcoxides. This method has many advantages such as little pollution, low-cost, simple sheet and equipment. The synthesis processing and the ATO nanoparticles are characterized by means of transmission electron microscope (TEM), X-ray diffraction (XRD), thermal gravimetric and differential thermal analysis, and BET. The results show that the ATO nanoparticles is tetragonal rutile crystal structure. TEM show that the particles are monodispersed with weak aggromation. The size of the particles calcinated at 700 is about 8nm. The specific areas are 153 m^2·g~ -1 . In addition to, ATO nanoparticles have good electric

Stabilization of Nanoscale Tin（IV） Oxide on the Surface of Carbon Nanotubes

Surface of oxidized multiwalled carbon nanotubes was investigated for stabilization of nanosized tin（IV） oxide. The synthesis of nanosized tin（IV） oxide on the surface of carbon nanotubes was carried out with the use of three soft chemical methods： sol-gel, precipitation, and thermal. The synthesized tin（IV） oxide particles on the surface of carbon nanotubes were studied by thermal analysis, X-ray diffraction and electron microscopy. The lattice parameters of tin（IV） oxide on the surface of multiwalled carbon nanotubes were calculated.

银-金属氧化物触头材料电弧侵蚀产物的研究

针对电寿命试验后AgSnO2触头周围出现黑色侵蚀产物的现象,通过光学显微镜、扫描电镜观察和能谱成分分析等手段,对比研究了AgCdO及AgSnO2触头电弧侵蚀产物的形貌及组成。结果表明:AgSnO2周围沉积物呈现黑色是由于电弧侵蚀后产物为须状形貌所致,而该形貌与AgSnO2的电弧侵蚀时以"蒸发"为主有关。另一方面,AgCdO的电弧侵蚀以"喷溅"为主,其产物呈菜花状。研究结果还表明:对电弧侵蚀产物的深入研究,有助于对触头材料电弧侵蚀机理的探讨。

丙烷在负载型催化剂上脱氢反应的研究 Ⅳ.丙烷在氧化铝负载的金属-氧化态锡催化剂上脱氢

依据各种金属对烃类及氢吸附的特性,认为可以用Ni,Co,Rh,Pd,Ir,Cu,Au等金属替代Pt-Sn/Al_2O_3催化剂中金属铂组分而与氧化态锡组分构成一系列具有良好催化性能的负载型双组分催化剂。文中对Al_2O_3负载的Ni-Sn,Co-Sn,Rh-Sn,Pd-Sn,Ir-Sn,Cu-Sn及Au-Sn等催化剂进行了实验验证。结果表明,负载型双组分催化剂脱氢反应性能均优于相应单金属催化剂。从而进一步说明了负载型双组分催化剂中金属组分与氧化态组分间普遍存在着协同催化作用。

多孔纳米Mg-Sn金属复合氧化物的制备及性能表征

采用液相沉淀法制备Mg-Sn金属复合氢氧化物前驱体,在不同温度下加热分解,得到一系列Mg-Sn金属复合氧化物;通过差热及热重分析仪(TG/DTA)、X-射线衍射仪(XRD)和透射电子显微镜(TEM),分析了其前驱物、产物的结构、组成及形貌等特征。结果表明:Mg-Sn金属复合氢氧化物前驱体热分解得到的是多孔纳米材料,且低温(400,600,700℃)热分解得到的是非晶态的MgSnO3复合氧化物,高温(750,850℃)热分解得到的是四方相的MgSnO3和少量尖晶石型Mg2SnO4,900℃热分解得到的是MgO和SnO2的混合物。所得Mg-Sn金属复合氧化物均为多孔材料,而且孔径、结晶度及电化学性能均依赖于分解温度。若从容量和循环寿命折中考虑,850℃热分解试样的电化学性能最优。

高纯溅射靶材回收研究现状

高纯溅射靶材在晶圆代工企业和液晶面板企业作为耗材使用。高纯溅射靶材利用率低,一般平面靶利用率低于30%,旋转靶难超过70%,回收溅射后的残靶具有非常高的经济价值和环保意义。本文综述了贵金属、ITO、钛、钽、铝、铜等高纯靶材的回收研究现状,总结了靶材回收过程中面临的共同问题。目前在高纯靶材的残靶回收中还存在金属回收率低、回收的纯度不高、工艺流程长等问题需要攻克和改善,作者展望了开发较短的流程、环境友好的工艺、探索高价值的用途,是未来高纯残靶回收技术改进和发展的方向。

SnO_2-Sb_2O_3超细复合粉末的制备和结构特性(英文)

本文由金属醇化物的羟基化法制备了导电性SnO_2-Sb_2O_3复合粉末。这一技术具有许多优点:流程和设备简单;成本低、污染小;适于制造粒度均匀且粒径小的粉末。由X射线衍射法鉴定SnO_2-Sb_2O_3明显为无定形粉末。

Complementary multicolor electrochromic devices with excellent stability based on porous tin oxide nanosheet scaffold

Electrochromic devices(ECDs)have been extensively investigated as promising candidates in broad cutting-edge applications,such as smart windows,electronic labels,adaptive camouflage,etc.However,they have suffered from either inadequate color variations or poor cycling stability for a long time.Herein,we developed a general strategy to boost the cyclic stability and enrich the color variations of ECDs by scrupulous design of the composition and nanostructure of electrodes,in which porous tin oxide(SnO_(2))nanosheets serve as the scaffold and typical metal oxides or conducting polymers as the active electrochromic materials.Various electrochromic composite materials,including polyaniline(PANI)@SnO_(2),V2O5@SnO_(2),and WO_(3)@SnO_(2) heterostructured nanoarrays were prepared by the facile wet-chemical method.These composite electrodes exhibit remarkable electrochromic performances,e.g.,superior cycling stability(more than 2000 cycles),rich color variations(more than 5 colors for PANI@SnO_(2)),and enlarged optical modulation.These excellent performances account for the heterogenous porous nanoarrays,which not only facilitate the intercalation/extraction of ions but also relieve the stress generated during the electrochemical process.In addition,diverse prototypes of complementary multicolor ECD with excellent cycling stability(over thousands of cycles)and rich color variations(8 colors)were realized for the first time.We believe that our work put forward a general strategy for developing high-quality multicolor complementary electrochromic devices.

Co-Sn金属复合氧化物的制备及电化学性能研究

采用液相沉淀法制备Co-Sn金属复合氢氧化物前驱体,在不同温度下加热分解,得到一系列Co-Sn金属复合氧化物。对前驱物和产物进行差热和热重分析(TG/DTA)、X射线衍射(XRD)分析,结果表明,Co-Sn金属复合氢氧化物前驱体低温(350,500℃)热分解得到的是非晶态CoSnO3复合物氧化物,高温(600,700,800℃)热分解得到的是四方相CoSnO3和少量尖晶石型Co2SnO4,所得Co-Sn金属复合氧化物电化学性能依赖于分解温度和结晶度。从容量和循环寿命综合考虑,相转变温度在600℃热分解所得试样的电化学性能较差。

仲钨酸铵对Ag-Sn合金粉末的氧化作用

本文采用氧化增重法(TGA),研究了添加少量仲钨酸铵(APT)对Ag-Sn合金粉末的氧化作用,用X射线衍射仪、电子探针和金相观察分析了粉末氧化前后相的转变、氧化物的分布、形貌。结果表明,Ag-Sn+APT混合粉末的氧化规律服从Wagner理论;APT的分解产物及形成的新相Ag_2WO_4作为活性氧原子源,促进Sn的氧化;添加剂APT在0～2.26wt-％成分范围内和相同温度、相同氧化时间条件下,氧化速率随添加量增加而加快;随氧化温度的提高,氧化速率加大,如在800℃下的氧化速率大于700℃下的氧化速率。

仲钨酸铵对Ag-Sn合金粉末的氧化作用

本文采用氧化增重法 (TGA) ,研究了添加少量仲钨酸铵 (APT)对 Ag- Sn合金粉末的氧化作用。用 X射线衍射仪、电子探针和金相观察分析了粉末氧化前后相的转变、氧化物的分布、形貌。结果表明 ,Ag- Sn+ APT混合粉末的氧化规律服从 Wagner理论 ;APT的分解产物及形成的新相 Ag2 WO4作为活性氧原子源 ,促进 Sn的氧化 ;添加剂 APT在 0～ 2 .2 6 wt%成分范围内和相同温度、相同氧化时间条件下 ,氧化速率随添加量增加而加快 ;随氧化温度的提高 ,氧化速率加大 ,如在 80 0℃下的氧化速率大于70

锡-金属氧化物多相复合储锂负极材料的研究进展

金属锡(Sn)作为锂离子电池负极材料具有比石墨负极更高的比容量和更可靠的安全性,得到了广泛关注研究。首先简述了Sn基负极的储锂特性及要实现大规模应用仍需解决的关键基础问题;其次指出了将锡与其他相材料进行多相复合、合理调控电极材料的物相组成与尺度和分布是一种提高锡基负极材料循环性能的重要措施。主要综述了Sn与金属氧化物(包括嵌锂活性相、非活性相等)多相复合体系负极材料的研究进展,重点介绍了微纳金属氧化物与Sn的协同作用对复合电极材料电化学性能的改善作用。最后强调如何进一步提高Sn-金属氧化物多相复合材料的首次库伦效率仍是需要深入研究的重要方向。

One-pot synthesis and optical properties of In- and Sn-doped ZnO nanoparticles

Colloidal indium-doped zinc oxide (IZO) and tin-doped zinc oxide (ZTO) nanoparticles were successfully prepared in organic solution, with metal acetylacetonate as the precursor and oleylamine as the solvent. The crystal and optical properties were characterized by X-ray diffraction, UV−visible spectrophotometry, and fluorescence spectroscopy, respectively; the surface and structure morphologies were observed by scanning electron microscopy and transmission electron microscopy. The XRD patterns of the IZO and ZTO nanoparticles all exhibited similar diffraction peaks consistent with the standard XRD pattern of ZnO, although the diffraction peaks of the IZO and ZTO nanoparticles were slightly shifted with increasing dopant concentration. With increasing dopant concentration, the fluorescent emission peaks of the IZO nanoparticles exhibited an obvious red shift because of the difference in atomic radii of indium and zinc, whereas those of the ZTO nanoparticles exhibited almost no shift because of the similarity in atomic radii of tin and zinc. Furthermore, the sizes of the IZO and ZTO nanoparticles distributed in the ranges 20–40 and 20–25 nm, respectively, which is attributed to the difference in ionic radii of indium and tin. © 2017, University of Science and Technology Beijing and Springer-Verlag Berlin Heidelberg.

Two-dimensional oxide derived from high-temperature liquid metals via bubble templating

Two-dimensional(2D)oxide can be continuously produced by bubbling oxygen into liquid metals and the harvesting of these oxide relies on the proper choice of dispersion solvents.The mass-production of ligand-free 2D materials from high melting-point metals will not be possible if the limited stability of the traditional dispersion solvents is not circumvented.Herein,liquid tin was used for the first time in the bubbling protocol and 2D tin oxide was obtained in molten salts.The nanosheets were studied with combined microscopic and spectroscopic techniques,and high-density grain boundaries was identified between the sub-5-nm nano-crystallites in the nanosheets.It gives rise to the high performance in electrocatalytic CO_(2) reduction reaction.Density-functional-theory based calculation was applied to achieve a deeper understanding of the relationship between the activity,selectivity,and the grain-boundary features.The molten-salt based protocol could be explored for the synthesis of a library of functional 2D oxides.

Spray Pyrolysis Deposition of Single and Mixed Oxide Thin Films

The influence of processing parameters is investigated on the structural characteristics of single and mixed oxides produced by spray pyrolysis technique. The films were synthesized by spraying precursor solutions through a noz-zle onto a heated alumina substrate. The precursor consisted separately of aqueous solutions of tin chloride for SnO2 and zinc chloride for ZnO for single oxide cases, and aqueous solutions of tin chloride and indium nitrate for SnO2 + In2O3 and zinc chloride and indium nitrate solutions for ZnO + In2O3 for mixed oxide cases. The substrate temperature was varied accordingly for each single and mixed case. The films produced were characterized by X-ray Photoelectron Spectroscopy and Scanning Electron Microscopy. The results indicate that a non-homogenous film is formed at low temperature for both single oxides considered. The temperature has significant effect on the composition of the synthesized films of both single oxides below 450℃. The results for mixed oxides show that the best homogeneous films are obtained for 80 wt% ZnO + 20 wt% In2O3, and 80 wt% SnO2 + 20 wt% In2O3.

Electrochemical Behavior and Its Electrocatalytic Activity of A P-Mo Heteropolyanion Modified ITO Electrode

s: A new method for the preparation of an organic-inorganic composite film of the heteropolyanion has been developed by modifying P(Mo2O7)6-7 to the indium tin oxide (ITO) electrode surface. The modified electrode displayed a strong catalytic activity towards the reduction of IO3-. In the range of 1.0?0-6~5?0-4mol/L, the catalytic current was linear proportional to the IO3- concentration.

High-temperature liquid Sn-air energy storage cell

A new type of a high temperature liquid metal-air energy storage cell based on solid oxide electrolyte has been successfully demonstrated at 750 ℃ by feeding metal Sn. In order to understanding the initial size effect of metal as a liquid fuel, we report here the impact of the thermal and electrochemical oxidation behavior of nano Sn （-100 nm）, comparing with micro-sized （-5 μm） and macro-sized （4350 μm） Sn. The thermogravimetric analysis and the monitoring OCV test indicate that the distinct property of nano-sized Sn results in a favorable thermal oxidation behavior near the melting point and a promising power performance due to enhanced fuel transport to the anode. However, the accumulated Sn oxide at the reaction interface during a discharge test towards the limitation of further electrochemical oxidation.

N-乙酰半胱氨酸通过调节NF-κB信号通路减轻纳米氧化铟锡诱导的大鼠肺毒性效应

目的评估N-乙酰半胱氨酸(NAC)通过调节核因子-κB(NF-κB)信号通路对氧化铟锡纳米颗粒(Nano-ITO)诱导的大鼠肺泡蛋白沉积症(PAP)的可能保护作用。方法于2019年10月,将50只成年雄性SD大鼠随机分为5组(每组10只),分别为空白对照组、生理盐水对照组、NAC对照组(200 mg/kg,腹腔注射)、Nano-ITO组(6 mg/kg Nano-ITO,非暴露式气管灌注)和NAC干预组(大鼠腹腔注射20 mg/kg NAC,1.5 h后气管内灌注6 mg/kg Nano-ITO)。每周染毒2次,共染毒12周。大鼠麻醉下实施处死,取出肺脏进行组织病理学和免疫组化分析。各组间反映氧化应激和肺部炎症的指标比较采用单因素方差分析(ANOVA)和Bonferroni的事后检验进行,并分析NAC对Nano-ITO诱导的大鼠NF-κB信号通路的影响。结果Nano-ITO暴露大鼠的组织病理学检查显示弥漫性肺泡损伤,包括PAP、胆固醇晶体、肺泡纤维化、肺纤维化和肺泡肺气肿。Nano-ITO暴露大鼠的免疫组织化学结果显示,在细支气管和肺泡上皮细胞的细胞核中,核因子κB p65(NF-κB p65)和核因子Kappa B抑制物激酶(IKK-β)呈强阳性,核因子κB抑制蛋白α(IκB-α)呈弱阳性。与空白对照组、生理盐水对照组和NAC对照组比较,Nano-ITO组大鼠支气管肺泡灌洗液中总蛋白(TP)水平明显升高(P<0.05),乳酸脱氢酶(LDH)、超氧化物歧化酶(SOD)活力、丙二醛(MDA)含量以及总抗氧化能力(T-AOC)明显增加(P<0.05),促炎细胞因子白细胞介素1β(IL-1β)、白细胞介素6(IL-6)、肿瘤坏死因子α(TNF-α)的水平明显升高(P<0.05),大鼠肺组织中NF-κB p65、IKK-β、诱导型一氧化氮合成酶(iNOS)和活性氧(ROS)水平明显升高(P<0.05)。与Nano-ITO组比较,NAC干预组大鼠支气管肺泡灌洗液中TP水平、T-AOC、MDA含量和TNF-α水平明显降低(P<0.05),大鼠肺组织中NF-κB p65和ROS水平均明显降低(P<0.05)。Western blot结果显示,与各对照组比较,Nano-ITO组大鼠肺组织中NF-κB p65和IKK-β的蛋白表达增加,IκB-α的蛋白表达降低(P<0.05);与Nano-ITO组比较,NAC干预组大鼠肺组织NF-κB p65和IKK-β的蛋白表达降低,IκB-α的蛋白表达升高(P<0.05)。结论Nano-ITO可能通过激活NF-κB信号通路对肺脏产生毒性作用,且NAC可能通过抑制NF-κB信号通路来拮抗Nano-ITO的肺毒性。