Radio-frequency(RF)micro-electro-mechanical-system(MEMS)switches are widely used in communication devices and test instruments.In this paper,we demonstrate the structural design and optimization of a novel RF MEMS swi...Radio-frequency(RF)micro-electro-mechanical-system(MEMS)switches are widely used in communication devices and test instruments.In this paper,we demonstrate the structural design and optimization of a novel RF MEMS switch with a straight top electrode.The insertion loss,isolation,actuator voltage,and stress distribution of the switch are optimized and explored simultaneously by HFSS and COMSOL software,taking into account both its RF and mechanical properties.Based on the optimized results,a switch was fabricated by a micromachining process compatible with conventional IC processes.The RF performance in the DC to 18 GHz range was measured with a vector network analyzer,showing isolation of more than 21.28 dB over the entire operating frequency range.Moreover,the required actuation voltage was about 9.9 V,and the switching time was approximately 33μs.A maximum lifetime of 109 switching cycles was obtained.Additionally,the dimension of the sample is 1.8 mm×1.8 mm×0.3 mm,which might find application in the current stage.展开更多
基金supported by the Equipment Development Department of the New Product Project,the Shanxi Province Postgraduate Education Reform Project,the Double First-Class Disciplines,the National First-class Curriculum Construction,and the Province Future Technology Project (Grant Nos.2019XW0010,11012103,11012133,11013168,and 11013169).
文摘Radio-frequency(RF)micro-electro-mechanical-system(MEMS)switches are widely used in communication devices and test instruments.In this paper,we demonstrate the structural design and optimization of a novel RF MEMS switch with a straight top electrode.The insertion loss,isolation,actuator voltage,and stress distribution of the switch are optimized and explored simultaneously by HFSS and COMSOL software,taking into account both its RF and mechanical properties.Based on the optimized results,a switch was fabricated by a micromachining process compatible with conventional IC processes.The RF performance in the DC to 18 GHz range was measured with a vector network analyzer,showing isolation of more than 21.28 dB over the entire operating frequency range.Moreover,the required actuation voltage was about 9.9 V,and the switching time was approximately 33μs.A maximum lifetime of 109 switching cycles was obtained.Additionally,the dimension of the sample is 1.8 mm×1.8 mm×0.3 mm,which might find application in the current stage.
