To improve the performance of an automated material handling system (AMHS) in 300 mm semiconductor fabrication plants (FABs), an overhead-hoist-transport (OHT) vehicle dispatching problem was described for semiconduct...To improve the performance of an automated material handling system (AMHS) in 300 mm semiconductor fabrication plants (FABs), an overhead-hoist-transport (OHT) vehicle dispatching problem was described for semiconductor FABs. An original wafer lot dispatching policy was proposed. To minimize costs due to transportation logic, a dispatching rule based on an adapted Hungarian algorithm was presented, and six factors were considered. In addition to the recurring parameters, two original parameters of the vehicles utilization and wafer lot priority were considered to evaluate system performance. To obtain a balanced efficiency regarding the FAB output factors, simulation and sensitive analysis were used to find the best weight parameters of the cost matrix. In particular, a high rate of priority wafer lots (greater than 20%) and vehicles utilization (greater than 75%) are obtained without penalizing the efficiency of the FABs. The results indicate that the proposed dispatching policy is valid and practical.展开更多
As a key to improve the performance of the interbay automated material handling system （AMHS） in 300 mm semiconductor wafer fabrication system, the real- time overhead hoist transport （OHT） dispatching problem has...As a key to improve the performance of the interbay automated material handling system （AMHS） in 300 mm semiconductor wafer fabrication system, the real- time overhead hoist transport （OHT） dispatching problem has received much attention. This problem is first formu- lated as a special form of assignment problem and it is proved that more than one solution will be obtained by Hungarian algorithm simultaneously. Through proposing and strictly proving two propositions related to the char- acteristics of these solutions, a modified Hungarian algo- rithm is designed to distinguish these solutions. Finally, a new real-time OHT dispatching method is carefully designed by implementing the solution obtained by the modified Hungarian algorithm. The experimental results of discrete event simulations show that, compared with con- ventional Hungarian algorithm dispatching method, the proposed dispatching method that chooses the solution with the maximum variance respectively reduces on average 4 s of the average waiting time and average lead time of wafer lots, and its performance is rather stable in multiple dif- ferent scenarios of the interbay AMHS with different quantities of shortcuts. This research provides an efficient real-time OHT dispatching mechanism for the interbay AMHS with shortcuts and bypasses.展开更多
Bus dispatching has been studied,and also the bus dispatching model is set up.Then,Genetic Algorithm is adaptively improved in order to avoid premature problem and the slow convergence,and then the keeping optimal str...Bus dispatching has been studied,and also the bus dispatching model is set up.Then,Genetic Algorithm is adaptively improved in order to avoid premature problem and the slow convergence,and then the keeping optimal strategy is used to the Genetic Algorithm,so formed the Improved Adaptive Genetic Algorithm,namely IAGA. Finally,the IAGA is used to optimizing the bus dispatching model,and the results of the simulation indicate IAGA has the higher efficiency than simple GA and is one effective way to optimizing the bus dispatching.展开更多
基金National Natural Science Foundations of China ( No. 71071115,No. 61273035)National High-Tech R&D Program for CIMS,China ( No. 2009AA043000)
文摘To improve the performance of an automated material handling system (AMHS) in 300 mm semiconductor fabrication plants (FABs), an overhead-hoist-transport (OHT) vehicle dispatching problem was described for semiconductor FABs. An original wafer lot dispatching policy was proposed. To minimize costs due to transportation logic, a dispatching rule based on an adapted Hungarian algorithm was presented, and six factors were considered. In addition to the recurring parameters, two original parameters of the vehicles utilization and wafer lot priority were considered to evaluate system performance. To obtain a balanced efficiency regarding the FAB output factors, simulation and sensitive analysis were used to find the best weight parameters of the cost matrix. In particular, a high rate of priority wafer lots (greater than 20%) and vehicles utilization (greater than 75%) are obtained without penalizing the efficiency of the FABs. The results indicate that the proposed dispatching policy is valid and practical.
基金Supported by National Natural Science Foundation of China(Grant No.51275307)
文摘As a key to improve the performance of the interbay automated material handling system （AMHS） in 300 mm semiconductor wafer fabrication system, the real- time overhead hoist transport （OHT） dispatching problem has received much attention. This problem is first formu- lated as a special form of assignment problem and it is proved that more than one solution will be obtained by Hungarian algorithm simultaneously. Through proposing and strictly proving two propositions related to the char- acteristics of these solutions, a modified Hungarian algo- rithm is designed to distinguish these solutions. Finally, a new real-time OHT dispatching method is carefully designed by implementing the solution obtained by the modified Hungarian algorithm. The experimental results of discrete event simulations show that, compared with con- ventional Hungarian algorithm dispatching method, the proposed dispatching method that chooses the solution with the maximum variance respectively reduces on average 4 s of the average waiting time and average lead time of wafer lots, and its performance is rather stable in multiple dif- ferent scenarios of the interbay AMHS with different quantities of shortcuts. This research provides an efficient real-time OHT dispatching mechanism for the interbay AMHS with shortcuts and bypasses.
基金supported by the Research Project of "SUST Spring Bud"(2008AZZ069)Graduate Education Innovative Project of Shandong Province (SDYC08011)the "Taishan Scholarship" Construction Engineering
文摘Bus dispatching has been studied,and also the bus dispatching model is set up.Then,Genetic Algorithm is adaptively improved in order to avoid premature problem and the slow convergence,and then the keeping optimal strategy is used to the Genetic Algorithm,so formed the Improved Adaptive Genetic Algorithm,namely IAGA. Finally,the IAGA is used to optimizing the bus dispatching model,and the results of the simulation indicate IAGA has the higher efficiency than simple GA and is one effective way to optimizing the bus dispatching.
