A novel constant force feedback mechanism based on fuzzy logic for tapping mode Atomic Force Microscopes (AFM) is proposed in this paper. A mathematical model for characterizing the cantilever-sample interaction subsy...A novel constant force feedback mechanism based on fuzzy logic for tapping mode Atomic Force Microscopes (AFM) is proposed in this paper. A mathematical model for characterizing the cantilever-sample interaction subsystem which is nonlinear and contains large uncertainty is first developed. Then, a PID-like fuzzy controller, combing a PD-like fuzzy controller and a PI controller, is designed to regulate the controller efforts and schedule the applied voltage of the Z-axis of the piezoelectric tube scanner to maintain a constant tip-sample interaction force during sample-scanning. Using the PID-like fuzzy controller allows the cantilever tip to track sample surface rapidly and accurately even though the topography of the surface is arbitrary and not given in advance. This rapid tracking response facilitates us to observe samples with high aspect ratio micro structures accurately and quickly. Besides, the overshoot which will result in tip crash in commercial AFMs with a traditional PID controller could be avoided. Additionally, the controller efforts can be intelligently scheduled by using the fuzzy logic. Thus, continuous manual gain-tuning by trial and error such as those in commercial AFMs is alleviated. In final, computer simulations and experimental verifications are provided to demonstrate the effectiveness and confirm the validity of the proposed controller.展开更多
文摘A novel constant force feedback mechanism based on fuzzy logic for tapping mode Atomic Force Microscopes (AFM) is proposed in this paper. A mathematical model for characterizing the cantilever-sample interaction subsystem which is nonlinear and contains large uncertainty is first developed. Then, a PID-like fuzzy controller, combing a PD-like fuzzy controller and a PI controller, is designed to regulate the controller efforts and schedule the applied voltage of the Z-axis of the piezoelectric tube scanner to maintain a constant tip-sample interaction force during sample-scanning. Using the PID-like fuzzy controller allows the cantilever tip to track sample surface rapidly and accurately even though the topography of the surface is arbitrary and not given in advance. This rapid tracking response facilitates us to observe samples with high aspect ratio micro structures accurately and quickly. Besides, the overshoot which will result in tip crash in commercial AFMs with a traditional PID controller could be avoided. Additionally, the controller efforts can be intelligently scheduled by using the fuzzy logic. Thus, continuous manual gain-tuning by trial and error such as those in commercial AFMs is alleviated. In final, computer simulations and experimental verifications are provided to demonstrate the effectiveness and confirm the validity of the proposed controller.
