We propose a substrate-free focal plane array （FPA） and the microcantilevers extend from a supporting frame. in this paper. The solid substrate is completely removed, Using finite element analysis, the thermal and m...We propose a substrate-free focal plane array （FPA） and the microcantilevers extend from a supporting frame. in this paper. The solid substrate is completely removed, Using finite element analysis, the thermal and mechanical characterizations of the substrate-free FPA are presented. Because of the large decrease in thermal conductance, the supporting frame is temperature dependent, which brings out a unique feature： the lower the thermal conductance of the supporting frame is, the higher the energy conversion efficiency in the substrate-free FPA will be. The results from the finite element analyses are consistent with our measurements： two types of substrate-free FPAs with pixel sizes of 200×200 and 60×60 um^2 are implemented in the proposed infrared detector. The noise equivalent temperature difference （NETD） values are experimentally measured to be 520 and 300 mK respectively. Further refinements are considered in various aspects, and the substrate-free FPA with a pixel size of 30×30 um^2 has a potential of achieving an NETD value of 10 mK.展开更多
On the basis of opto-mechanical effect and micro electromechanical system(MEMS)technology,a novel substrate-free focal plane array(FPA)with the thermal isolated structure for uncooled infrared imaging is developed,eve...On the basis of opto-mechanical effect and micro electromechanical system(MEMS)technology,a novel substrate-free focal plane array(FPA)with the thermal isolated structure for uncooled infrared imaging is developed,even as alternate evaporated Au on SiN cantilever is used for thermal isolation.A human thermal image is obtained successfully by using the infrared imaging system composed of the FPA and optical detecting system.The experiment results show that the realization of thermal isolation structure in substrate-free FPA increases the temperature rise of the deflecting leg effectively,whereas the noise equivalent temperature difference(NETD)is about 200 mK.展开更多
基金Project supported by the National Natural Science Foundation of China (Grant Nos. 10732080 and 10627201)the National Basic Research Program of China (Grant No. 2006CB300404)
文摘We propose a substrate-free focal plane array （FPA） and the microcantilevers extend from a supporting frame. in this paper. The solid substrate is completely removed, Using finite element analysis, the thermal and mechanical characterizations of the substrate-free FPA are presented. Because of the large decrease in thermal conductance, the supporting frame is temperature dependent, which brings out a unique feature： the lower the thermal conductance of the supporting frame is, the higher the energy conversion efficiency in the substrate-free FPA will be. The results from the finite element analyses are consistent with our measurements： two types of substrate-free FPAs with pixel sizes of 200×200 and 60×60 um^2 are implemented in the proposed infrared detector. The noise equivalent temperature difference （NETD） values are experimentally measured to be 520 and 300 mK respectively. Further refinements are considered in various aspects, and the substrate-free FPA with a pixel size of 30×30 um^2 has a potential of achieving an NETD value of 10 mK.
基金supported by the National Natural Science Foundation of China(Grant No.60236010)the National Technology Research Development Program of China(No.2005AA404210).
文摘On the basis of opto-mechanical effect and micro electromechanical system(MEMS)technology,a novel substrate-free focal plane array(FPA)with the thermal isolated structure for uncooled infrared imaging is developed,even as alternate evaporated Au on SiN cantilever is used for thermal isolation.A human thermal image is obtained successfully by using the infrared imaging system composed of the FPA and optical detecting system.The experiment results show that the realization of thermal isolation structure in substrate-free FPA increases the temperature rise of the deflecting leg effectively,whereas the noise equivalent temperature difference(NETD)is about 200 mK.
