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Outgassing from internal adhesive joints of vacuum devices
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作者 Boris S Lunin Valerii A Kreisberg +3 位作者 Yurii N Zhitnev Evgenia A Tveritinova Mikhail A Basarab Robert A Zakharyan 《Journal of Measurement Science and Instrumentation》 CAS CSCD 2017年第4期347-353,共7页
Kinetics of the formation of residual atmosphere in vacuum devices with internal adhesive joints and the application of the mass spectral and chromatographic methods to measure the specific outgassing rate of volatile... Kinetics of the formation of residual atmosphere in vacuum devices with internal adhesive joints and the application of the mass spectral and chromatographic methods to measure the specific outgassing rate of volatile compounds from the cured adhesives are considered in this paper.The outgassing comparison data for the various types of adhesives are given and the effectiveness of the outgassing of adhesive joints is demonstrated.The possible options to provide vacuum in the various devices are considered.At moderate requirements to the residual pressure(about10-2Pa),it is enough to degass the adhesive joints during a few hours.It is much more difficult to provide vacuum in devices with internal adhesive joints at the level of about10-4Pa.This requires the use of the built-in getter and the high temperature degassing.It is expedient to provide deep vacuum(10-5-10-4Pa)in the rare-used or once-used devices by short(a few minutes)activation the built-in getters before operating the vacuum devices.This allows to remove the main residual gas hydrocarbons component from the vacuum house and provide the necessary level of vacuum for a certain interval of time. 展开更多
关键词 OUTGASSING ADHESIVE vacuum device
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5-28 Interlock of Vacuum Devices in SSC-Linac
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作者 Liu Xiaojun Zhang Wei +3 位作者 Gu Kewei An Shi Chang Jianjun Wang Pengpeng 《IMP & HIRFL Annual Report》 2014年第1期238-239,共2页
The architecture of SSC-Linac vacuum control system is based on EPICS. The interlock of vacuum devices inSSC-Linac was introduced. We use C-RIO as an EPICS IOC to acquire data from vacuum gauges and controlvacuum valv... The architecture of SSC-Linac vacuum control system is based on EPICS. The interlock of vacuum devices inSSC-Linac was introduced. We use C-RIO as an EPICS IOC to acquire data from vacuum gauges and controlvacuum valves. The software is programmed by Labview.The interlock of vacuum devices is very important for the whole system. If the pressure of the vacuum gauge islarger than the value we preset, the vacuum valve will be pushed in automatically and it can't be operated. If thepressure is smaller than the present value, we can operate the vacuum valve to be in or to be out[1]. 展开更多
关键词 INTERLOCK vacuum deviceS
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Emission Current Characteristics of Triggered Device of Vacuum Switch
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作者 姚学玲 陈景亮 胡上茂 《Plasma Science and Technology》 SCIE EI CAS CSCD 2014年第4期380-384,共5页
The characteristics of the triggered vacuum switch (TVS) are obviously influenced by the emission current ie and emission charge of the trigger device. In this paper, an RC charge collector is designed, and the char... The characteristics of the triggered vacuum switch (TVS) are obviously influenced by the emission current ie and emission charge of the trigger device. In this paper, an RC charge collector is designed, and the characteristics of emission current ie and collecting charge Qc of the trigger device are studied. The experimental results indicate that the emission current ie which is produced by the initial plasma has both positive and negative components, and the polarity of the emission current ie depends mainly on the polarity of the bias voltage UBias. The emission current ie and collecting charge Qe increase with the increase of the trigger voltage Utr and the bias voltage UBias. The emission efficient r] increases linearly with the increase of the bias voltage UBias. When the gap distance is 15 mm and bias voltage UBias is 160 V and trigger voltage Utr is 2.6 kV, the emission efficiency r/reaches 6% 展开更多
关键词 emission current~ collecting charge triggered device~ vacuum switch
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Study of the Solar Energy Drying Device and Its Application in Traditional Chinese Medicine in Drying 被引量:1
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作者 Mingle Liu Shuangyan Wang Kerong Li 《International Journal of Clinical Medicine》 2015年第4期271-280,共10页
Background: We referred to nearly 40 years of development and application progress of solar dryer in China literature, especially its application in the field of Chinese herbal medicine drying. Objective: We explored ... Background: We referred to nearly 40 years of development and application progress of solar dryer in China literature, especially its application in the field of Chinese herbal medicine drying. Objective: We explored the development direction of China’s development and application of solar dryers, especially focusing on its development and application in traditional Chinese medicine drying. Method: Five types of solar dryers including the greenhouse type solar dryer, the collector type solar dryer, the collector-greenhouse type hybrid solar dryer, the integrated solar dryer and the focusing type solar dryer accounted for the development and application of solar dryers up to 95% in China. The first three types of solar dryers are low temperature dryer (less than or equal to 70°C), while the latter two kinds of solar dryers are high temperature dryer (more than 70°C). In this paper, we respectively introduced and compared the structure, working principle, applications, advantages and disadvantages, and the research status of these five dryer. Results: The integrated solar dryer and the focusing type solar dryer belong to the high temperature dryer types are the future direction of development. Among them, the integrated solar dryer is relatively simple structure and has more promotion prospects. These two kinds of key drying device used in the dryer is the development direction of high efficient vacuum tube. On the other hand, because of their low cost, simple structure and the dry material requirements etc., the three types of low temperature dryers at low temperature for drying materials are also indispensable in the practical application. In contrast, the collector-greenhouse type hybrid solar dryer has more advantages, is the development direction of low temperature drying category. Conclusion: The collector tube which is the key element of the dryer was the core technology of solar dryer. Our country develops more successful of the all-glass vacuum solar thermal collectors and heat pipe-glass vacuum tube. Efficient vacuum tube collector technology is the future developed direction and is equally important to improve the quality of traditional Chinese medicine and dried. 展开更多
关键词 The Solar Energy DRYING device vacuum Tube COLLECTOR Traditional Chinese MEDICINE DRYING
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Particle flux characteristics of a compact high-field cascaded arc plasma device
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作者 Xiaogang YUAN Haishan ZHOU +7 位作者 Haodong LIU Bo LI Yong WANG Lei CHANG Xin YANG Chuang WANG Lupeng ZHANG Guangnan LUO 《Plasma Science and Technology》 SCIE EI CAS CSCD 2021年第11期59-65,共7页
A new compact cascaded arc device for plasma-wall interaction study is developed at the Institute of Plasma Physics,Chinese Academy of Sciences.A magnetic field up to 0.8 T is achieved to confine plasmas in a 1.2 m lo... A new compact cascaded arc device for plasma-wall interaction study is developed at the Institute of Plasma Physics,Chinese Academy of Sciences.A magnetic field up to 0.8 T is achieved to confine plasmas in a 1.2 m long and 0.1 m diameter vacuum chamber.Gas fluid type analysis in this compact vacuum system was done under high particle flux condition.The gas pressure obtained by calculation was consistent with the measurement result.Continuous argon plasma discharge with ion flux of~0.5×10^(24)m^(-2)s^(-1)is successfully sustained for more than 1h.The effects of magnetic field configuration,gas flow rate,and discharge arc current on the ion flux to target were studied in detail. 展开更多
关键词 cascaded arc plasma plasma-wall interaction ion flux vacuum design linear plasma device
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Methods for Increasing the Efficiency of Cleaning the Transfer Device
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作者 Salokhiddinova Makhliyo Muradov Rustam 《Engineering(科研)》 2022年第1期54-61,共8页
The article improves the quality of raw cotton by creating a new transfer device structure for the transportation of cotton in long-distance riots, located in the main building of the ginnery. Both foreign and domesti... The article improves the quality of raw cotton by creating a new transfer device structure for the transportation of cotton in long-distance riots, located in the main building of the ginnery. Both foreign and domestic separator cleaners have been studied. Experiments were carried out on prototype transfer device and the results were obtained. The cleaning efficiency was determined by sampling the cotton entering the separator in the moving device and exiting after the inclined vibrating mesh surface installed after the separator. 展开更多
关键词 COTTON Cotton Seeds Fiber Separation SEPARATOR Transfer device Fine Impurities SCRAPER vacuum Valve Mesh Surface Cotton Cleaning
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Test research and mechanism analysis of vacuum fluxless laser soldering for SMD
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作者 冯武锋 王春青 +1 位作者 李明雨 孙福江 《China Welding》 EI CAS 1998年第2期62-70,共9页
Fluxless soldering can solve a series of problems caused by side-effects afflux essentially. Feasibility research on vacuum fluxless laser soldering and mechanism analysis on fluxless action of vacuum were carried out... Fluxless soldering can solve a series of problems caused by side-effects afflux essentially. Feasibility research on vacuum fluxless laser soldering and mechanism analysis on fluxless action of vacuum were carried out. Fluxless soldering succeeded in spreading and wetting on Cu pad with laser heating source in vacuum surroundings. What' s more, this fluxless technology was applied in surface mounting of chip resistance successfully. 展开更多
关键词 vacuum fluxless soldering LASER SMD (Surface Mount device)
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Vacuum Preparation, Optimization of Cylinder Length and Postoperative Daily Inflation Reduces Complaints of Shortened Penile Length Following Implantation of Inflatable Penile Prosthesis
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作者 Tom Sellers Martin Dineen +1 位作者 Emad A. Salem Steven K. Wilson 《Advances in Sexual Medicine》 2013年第1期14-18,共5页
Introduction: The inflatable penile prosthesis (IPP) has been used to treat erectile dysfunction for 40 years. Loss of penile length following IPP remains the single biggest patient complaint. We describe a preoperati... Introduction: The inflatable penile prosthesis (IPP) has been used to treat erectile dysfunction for 40 years. Loss of penile length following IPP remains the single biggest patient complaint. We describe a preoperative and postoperative patient preparation protocol to assist in setting realistic patient expectations and decreasing the complaint of reduced penile length. Materials & Methods: 750 Patients are instructed to use a vacuum erection device for 10 minutes each day for up to 2 months prior to IPP implant. After two months, maximization of cylinder length is accomplished regardless of IPP manufacturer. Cylinders are left partially inflated in the post-operative period and daily inflation for 3 months immediately upon patient tolerance. The average implanted cylinder length has increased dramatically with the preoperative vacuum usage when compared to the authors’ previous implantations and when compared to the national average of implanted cylinders obtained from one manufacturer. Results: Preoperative use of the vacuum device has allowed maximization of cylinder length. After the vacuum program, patients tend to experience less pain following implantation allowing earlier device instruction cycling and use. The average implanted cylinder length continued to increase annually for the first 5 years as the protocol evolved and seems to have remained stable for the last five years. Conclusions: Preoperative vacuum usage and postoperative capsule management has nearly eliminated patient complaints of reduced penile length. We believe this to be the result of larger size cylinders being implanted when compared to our previous implantations absent of the patient participation protocol. 展开更多
关键词 INFLATABLE PENILE PROSTHESIS vacuum device Satisfaction
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Intermetallic Getters Reactants for Vacuum Applications
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作者 Konstantin Chuntonov 《Materials Sciences and Applications》 2023年第3期222-239,共18页
The present work continues a series of publications devoted to the study of the sorption properties of reactive alloys based on IIA metals and the development of advanced getter materials for gas and vacuum technologi... The present work continues a series of publications devoted to the study of the sorption properties of reactive alloys based on IIA metals and the development of advanced getter materials for gas and vacuum technologies. This publication attempts to answer the current challenges in the field of gas sorption associated with the emergence of new vacuum products such as vacuum insulated glasses, electronic systems, cryogenic devices, etc. An analysis of the problems that arise here, as well as the results of sorption measurements, carried out with the participation of intermetallic phases of the composition CaLi<sub>2</sub> and Ca<sub>0.33</sub>Li<sub>0.48</sub>Mg<sub>0.19</sub>, show that the best getter support for these new hermetically sealed products can be provided by intermetallic compounds formed in systems Li-IIA metals. Intermetallic phases of this family are easy to manufacture and demonstrate outstanding service characteristics: their specific sorption capacity is recorded high, exceeding traditional gas sorbents in this respect by at least an order of magnitude;the kinetics of gas capturing is set at the stage of alloy production, i.e., is adjustable;the temporary resistance of these phases to atmospheric gases allows to install the getter at its workplace in air, without further thermal activation. The sorption superiority of reactive intermetallics is explained by their special sorption mechanism: the gas/metal interaction is formed here as a combination of two processes, continuous growth of reaction products on a metallic surface and corrosion decay of brittle intermetallic phase under mechanical forces, which feeds the chemical reaction with a fresh surface. The advantages of sorption processes of this new type are undoubted and significant: compared with the conventional sorbents, an intermetallic getter reactant solves two important problems;it reduces production costs and increases the sorption yield. 展开更多
关键词 vacuum devices Gas Sorption GETTERS Intermetallic Phases CORROSION
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真空纳米二极管和三极管综述
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作者 李兴辉 冯进军 《真空科学与技术学报》 CAS CSCD 北大核心 2024年第9期749-758,共10页
真空纳米二极管和真空纳米三极管具有与传统真空管相似的基本功能,但却可以通过现有先进的微加工工艺线制造,以实现尺寸小、重量轻和高度集成,这使得它们在最近十年发展迅速。综述了真空纳米二极管和三极管的起源、发展历史和最新技术... 真空纳米二极管和真空纳米三极管具有与传统真空管相似的基本功能,但却可以通过现有先进的微加工工艺线制造,以实现尺寸小、重量轻和高度集成,这使得它们在最近十年发展迅速。综述了真空纳米二极管和三极管的起源、发展历史和最新技术状态。介绍了典型的横向结构、垂直结构和环栅结构器件,并分析了各自优缺点。硅基器件对于成熟微加工工艺兼容性最好,但基于金属和一些宽带隙半导体材料,如碳化硅和氮化镓的真空纳米器件显示更好的电性能、耐温性和耐辐射性。尽管当今最发达的真空纳米二极管和三极管在大多数常规应用中仍然无法和固态集成电路抗衡,但它们正得到更多关注,并有望首先在高温或强辐射等恶劣环境实现应用。 展开更多
关键词 真空电子器件 纳米二极管 纳米三极管 耐温性 耐辐射性
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复杂结构共形全电磁粒子模拟技术研究进展
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作者 陈再高 唐泽华 《电波科学学报》 CSCD 北大核心 2024年第5期808-817,共10页
全电磁粒子模拟方法可准确模拟强电磁场与电子束之间的非线性相互作用,被广泛应用于真空电子器件的数值模拟研究及参数的优化设计。传统全电磁粒子模拟方法采用电磁场时域有限差分(finite-difference time-domain,FDTD)方法计算器件内... 全电磁粒子模拟方法可准确模拟强电磁场与电子束之间的非线性相互作用,被广泛应用于真空电子器件的数值模拟研究及参数的优化设计。传统全电磁粒子模拟方法采用电磁场时域有限差分(finite-difference time-domain,FDTD)方法计算器件内电磁场随时间的变化,但FDTD方法采用正六面体单元的结构网格,会带来阶梯误差;电磁场时域有限元(finite-element time-domain,FETD)方法采用非结构网格能准确描述复杂模型,可用于复杂结构的电磁场数值模拟,但需求解大型逆矩阵,无法适用于电大尺寸结构的数值模拟。为准确模拟复杂真空电子器件内电磁场与电子束之间的非线性相互作用,国内外学者在复杂结构共形全电磁粒子模拟技术方面取得了突破性研究进展,实现了基于共形FDTD方法的全电磁粒子模拟技术,开展了基于FETD方法的全电磁粒子模拟技术研究,并研制了数值模拟软件。为促进国内复杂结构共形全电磁粒子模拟技术研究及应用,本文首先对基于共形FDTD方法的全电磁粒子模拟技术研究中的关键技术进行了详细介绍,包括共形结构网格生成技术、电磁场共形FDTD技术、共形电子束发射技术;然后对基于FETD方法的全电磁粒子模拟技术中的关键技术进行了详细介绍,包括所采用的基函数、电磁场方程的求解、计算过程中满足的电荷守恒和高斯守恒定律;同时给出了两种模拟技术对典型真空电子器件的模拟结果。 展开更多
关键词 等离子体模拟 共形时域有限差分(FDTD) 时域有限元方法 全电磁粒子模拟方法 真空电子器件
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新型真空耙式干燥机优化设计与蒸发性能研究
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作者 林海波 王国君 +2 位作者 曹博涵 何才富 徐安 《石油化工设备技术》 CAS 2024年第3期52-55,I0003,I0004,共6页
针对现有耙式干燥机运行中存在的蒸汽消耗大、干燥效率不高、传热不均匀等技术难题,以及筒内残余滤渣层造成较大的物料损失,难以满足安全、环保和GMP(良好生产规范)要求等技术难点,通过查阅文献并进行大量的实验研究,设计了一种高效、... 针对现有耙式干燥机运行中存在的蒸汽消耗大、干燥效率不高、传热不均匀等技术难题,以及筒内残余滤渣层造成较大的物料损失,难以满足安全、环保和GMP(良好生产规范)要求等技术难点,通过查阅文献并进行大量的实验研究,设计了一种高效、节能耙式干燥机,自主提出一种轻量化的内、外筒与浆叶复合加热搅拌轴结构。该结构中心转轴、连接轴和搅拌桨叶均为空心设计,桨叶刮擦部距离筒壁间隙3~5 mm,达到了所需搅拌动力显著降低、换热面积大、传热效率高的效果,实现了不留残余物料、降低生产成本、保证人和物料的完全隔离的目的,可满足制药行业的GMP要求。实际试验研究结果表明,干化减量比例达19.9%,蒸汽单耗32.8%,能耗明显减少,说明该方法与设备具有较高的推广应用价值。 展开更多
关键词 真空耙式干燥机 复合加热 搅拌装置 节能 GMP
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时域间断伽辽金-粒子模拟方法研究进展
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作者 陈再高 齐红新 +1 位作者 李炎培 任泽平 《电波科学学报》 CSCD 北大核心 2024年第5期818-826,共9页
时域间断伽辽金-粒子模拟(discontinuous Galerkin time-domain particle-in-cell,DGTD-PIC)方法采用非结构网格能准确描述复杂结构,采用高阶基函数进一步提高了计算的精度,同时避免了求解大型逆矩阵,在等离子体和高功率电磁学相关数值... 时域间断伽辽金-粒子模拟(discontinuous Galerkin time-domain particle-in-cell,DGTD-PIC)方法采用非结构网格能准确描述复杂结构,采用高阶基函数进一步提高了计算的精度,同时避免了求解大型逆矩阵,在等离子体和高功率电磁学相关数值模拟方面具有广泛的用途。近年来国内外报道了大量DGTD-PIC方面的研究工作,该方法在核心关键技术方面已取得了许多突破性进展。为促进DGTD-PIC方法的发展及应用,本文对该方法在修正势的DGTD电磁场计算方法、复频移完全匹配层边界、非结构网格中带电粒子定位与电荷和电流分配等关键技术方面所取得的研究成果进行了详细介绍。 展开更多
关键词 等离子体模拟 时域间断伽辽金(DGTD)方法 有限元方法 全电磁粒子模拟算法 真空电子器件
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高空低温低气压模拟试验装置研制
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作者 李国强 吴霖鑫 +3 位作者 姜裕标 易仕和 张鑫 王亚伦 《低温工程》 CAS CSCD 北大核心 2024年第1期1-11,30,共12页
面向飞行器高空环境相关气动基础问题研究需求,由低温模拟库嵌套低压模拟舱构建了海拔40 km以上高空大气环境模拟试验装置,采用双回路控制算法实现了低气压参数的精确快速模拟,系统工作真空度10 min内可达200 Pa以下;通过开发的制冷系... 面向飞行器高空环境相关气动基础问题研究需求,由低温模拟库嵌套低压模拟舱构建了海拔40 km以上高空大气环境模拟试验装置,采用双回路控制算法实现了低气压参数的精确快速模拟,系统工作真空度10 min内可达200 Pa以下;通过开发的制冷系统无级调节技术和冷热双回路PID自适应技术,实现了温度的稳定节能输出,温度控制精度为±0.5℃,温度均匀性优于±1℃。设计配套了环形回流风洞、螺旋桨带动力及翼型试验子系统,为开展高空环境飞行器气动性能测试提供了可靠的试验平台和技术保障。 展开更多
关键词 高空 制冷 真空度 双回路控制 试验装置
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Spindt阴极研究进展和面临的问题
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作者 韩攀阳 姜琪 +2 位作者 冯进军 李兴辉 蔡军 《真空科学与技术学报》 CAS CSCD 北大核心 2024年第9期768-778,共11页
基于先进的微纳加工技术制备的Spindt阴极相比于热阴极具有可以瞬时启动、工作电压低、可在常温下工作等优势。尽管Spindt阴极性能优越,但很难实现真正的实用化,归根结底在于Spindt阴极的低可靠性。近几十年来,国内外研究者致力于从结... 基于先进的微纳加工技术制备的Spindt阴极相比于热阴极具有可以瞬时启动、工作电压低、可在常温下工作等优势。尽管Spindt阴极性能优越,但很难实现真正的实用化,归根结底在于Spindt阴极的低可靠性。近几十年来,国内外研究者致力于从结构、材料以及工艺技术方面提高Spindt阴极的场发射特性以及耐用性,除了不断提高Spindt阴极的性能以满足高功率和高频率真空电子器件的需求,也在寻找和探索其它小电流、低能量、高可靠性的应用新领域,以更好地发挥Spindt阴极的优势。文章对Spindt阴极的最新研究进展进行了综述。 展开更多
关键词 Spindt 阴极 微纳加工技术 真空电子器件
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船舶自动系泊装置真空吸盘流场分析及改进设计
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作者 张璐琦 李楷 +2 位作者 夏华波 吴昊 王运龙 《大连理工大学学报》 CAS CSCD 北大核心 2024年第6期615-623,共9页
自动系泊装置是实现船舶系泊自动化和智能化的关键,真空吸盘是真空吸附式自动系泊装置的核心部件,对于能否提供稳定的系泊力有着至关重要的影响.以现有的一种真空吸附式自动系泊装置为基础,通过数值模拟对真空吸盘进行流场分析,考察了... 自动系泊装置是实现船舶系泊自动化和智能化的关键,真空吸盘是真空吸附式自动系泊装置的核心部件,对于能否提供稳定的系泊力有着至关重要的影响.以现有的一种真空吸附式自动系泊装置为基础,通过数值模拟对真空吸盘进行流场分析,考察了不同泄漏情况下真空吸盘的压力,并研究了风速对于吸盘真空度的影响.在此基础上,为了提高真空吸盘的可靠性,提出采用多种小吸盘的设计方案,研究了不同吸盘形状的吸附效果,并且对真空吸盘作业时船体外板产生的等效应力和变形进行分析.结果表明,采用直边椭圆形小吸盘的方案综合性能最优.研究成果可为真空吸附式自动系泊装置设计提供一定参考. 展开更多
关键词 真空吸盘 流场分析 船体外板变形 自动系泊装置
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与硅微器件集成的MEMS皮拉尼计
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作者 秦宜峰 刘振华 +2 位作者 施志贵 张青芝 熊壮 《太赫兹科学与电子信息学报》 2024年第9期1038-1043,共6页
针对圆片级真空封装现有的检测难、易泄漏等问题,提出一种可与硅微器件工艺兼容、并行加工于同一腔体的皮拉尼(Pirani)计设计与加工方法,用于圆片级真空封装后腔体的真空度检测。采用SOI硅片对皮拉尼计结构进行加工,通过金硅键合方式对... 针对圆片级真空封装现有的检测难、易泄漏等问题,提出一种可与硅微器件工艺兼容、并行加工于同一腔体的皮拉尼(Pirani)计设计与加工方法,用于圆片级真空封装后腔体的真空度检测。采用SOI硅片对皮拉尼计结构进行加工,通过金硅键合方式对器件进行圆片级封装,同时采用硅通孔(TSV)的纵向电极引出方式,改善气密封装问题。测试结果表明,皮拉尼计电阻在线性区间的温度系数为1.58Ω/℃,检测敏感区间约为1~100 Pa,灵敏度达到61.67Ω/ln(Pa)。提出的皮拉尼计可与硅微器件并行加工,为圆片级真空封装腔体的真空度在片测试提供了一种简单可行的方案。 展开更多
关键词 真空检测 皮拉尼计 硅微器件 圆片级真空封装
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毫米波功率应用研究进展(特邀)
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作者 鲁钝 傅文杰 +3 位作者 Mikhail Glyavin 唐相伟 胡旻 刘盛纲 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2024年第4期503-519,共17页
微波功率应用是一种直接利用微波的功率和能量与物质互作用的应用。近年来,随着毫米波功率源技术的发展,微波功率应用逐渐向毫米波频段发展。由于毫米波波长较短,在功率应用中展现出诸多独特特性,并发展出一系列独特应用。本文对毫米波... 微波功率应用是一种直接利用微波的功率和能量与物质互作用的应用。近年来,随着毫米波功率源技术的发展,微波功率应用逐渐向毫米波频段发展。由于毫米波波长较短,在功率应用中展现出诸多独特特性,并发展出一系列独特应用。本文对毫米波在物理科学、材料科学、生物医学等领域的研究工作进行了评述,主要包括聚变等离子体加热与诊断、材料加工与分析、生物效应应用等,对目前研究和发展中的主要瓶颈问题进行了介绍,并对未来发展进行了展望。 展开更多
关键词 真空电子器件 毫米波 功率应用 聚变等离子体 材料加工与分析 生物效应 研究进展
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氧化硅水平隧穿结电子源及其应用
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作者 朱韬远 李志伟 +2 位作者 詹芳媛 杨威 魏贤龙 《真空科学与技术学报》 CAS CSCD 北大核心 2024年第9期737-748,共12页
电子源是真空电子设备的核心部件,片上微型电子源是实现微型化、片上化真空电子器件的关键和基础。氧化硅水平隧穿结电子源是本课题组近几年发展的一种新型片上微型电子源,其具有发射效率高、发射电流密度大、工作电压低、能耐受粗真空... 电子源是真空电子设备的核心部件,片上微型电子源是实现微型化、片上化真空电子器件的关键和基础。氧化硅水平隧穿结电子源是本课题组近几年发展的一种新型片上微型电子源,其具有发射效率高、发射电流密度大、工作电压低、能耐受粗真空和时间响应快等优点,展现出较大的应用潜力。文章将从电子发射微观过程及理论模型、阵列化集成以及在真空电子器件中的应用三个方面系统介绍氧化硅水平隧穿结电子源,并对本课题组在该方向上所做的工作进行梳理与总结。 展开更多
关键词 氧化硅水平隧穿结电子源 片上微型电子源 微型真空电子器件
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太赫兹真空器件中超深金属慢波结构的微加工技术
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作者 姜琪 李兴辉 +2 位作者 冯进军 蔡军 潘攀 《真空科学与技术学报》 CAS CSCD 北大核心 2024年第9期759-767,共9页
太赫兹真空电子器件物理结构尺寸变化随着波长的减小而减小,对微小结构的尺寸精度与表面粗糙度要求也大大增加。随着器件频率进入到太赫兹频段,慢波结构的深度达到几十微米或者百微米量级,加工的难点主要有:材料为金属,结构超深,表面粗... 太赫兹真空电子器件物理结构尺寸变化随着波长的减小而减小,对微小结构的尺寸精度与表面粗糙度要求也大大增加。随着器件频率进入到太赫兹频段,慢波结构的深度达到几十微米或者百微米量级,加工的难点主要有:材料为金属,结构超深,表面粗糙度要求达到几十纳米量级,微电铸后金属含氧量极小,结构密度大不漏气,经得起后续近千摄氏度的高温处理工艺等。文章介绍了太赫兹频段下器件慢波结构的加工方式,着重讨论利用深反应离子刻蚀(DRIE)技术和紫外−光刻、电铸(UV-LIGA)技术加工超深金属慢波结构的技术和和特点,并介绍了本实验室利用UV-LIGA加工折叠波导的研究进展。 展开更多
关键词 太赫兹真空电子器件 微机电系统 深反应离子刻蚀 紫外−光刻、电铸 慢波结构
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