A novel low-cost and high-speed via filling method using Cu-cored solder balls was investigated for through-silicon via manufacture.Cu-cored solder balls with a total diameter of 100μm were used to fill 150μm deep,...A novel low-cost and high-speed via filling method using Cu-cored solder balls was investigated for through-silicon via manufacture.Cu-cored solder balls with a total diameter of 100μm were used to fill 150μm deep,110μm wide vias in silicon.The wafer-level filling process can be completed in a few seconds,which is much faster than using the traditional electroplating process.Thermo-mechanical analysis of via filling using solder,Cu and Cu-cored solder was carried out to assess the thermo-mechanical properties of the different filling materials.It was found that the vias filled with Cu-cored solder exhibit less thermal-mechanical stresses than solder-filled vias, but more than Cu-filled vias.展开更多
以某公司电镀填盲孔的电镀液体系为研究对象,在500 m L哈林槽中模拟电镀线,系统地考察了电镀液配方(硫酸铜、硫酸、湿润剂、光亮剂、整平剂和氯离子的浓度以及添加剂相互作用)、电镀参数(电流密度和电镀时间)以及盲孔几何尺寸(深径比0.6...以某公司电镀填盲孔的电镀液体系为研究对象,在500 m L哈林槽中模拟电镀线,系统地考察了电镀液配方(硫酸铜、硫酸、湿润剂、光亮剂、整平剂和氯离子的浓度以及添加剂相互作用)、电镀参数(电流密度和电镀时间)以及盲孔几何尺寸(深径比0.6∶1和1.07∶1)等化学和物理因素对FR-4基材盲孔电镀填孔的影响。以盲孔填孔率、凹陷度、表层镀铜厚度等指标综合评价盲孔填孔效果并用金相显微镜观察孔的横截面。结果表明,在适宜的电镀条件下,该电镀液体系对印制电路板盲孔的填孔效果良好。但是,适宜的电镀参数和电镀液配方与盲孔几何尺寸显著相关。展开更多
基金Project supported by the National S & T Major Projects(Nos.2009ZX02038,2011ZX02709)the 100 Talents Programme of the Chinese Academy of Sciences
文摘A novel low-cost and high-speed via filling method using Cu-cored solder balls was investigated for through-silicon via manufacture.Cu-cored solder balls with a total diameter of 100μm were used to fill 150μm deep,110μm wide vias in silicon.The wafer-level filling process can be completed in a few seconds,which is much faster than using the traditional electroplating process.Thermo-mechanical analysis of via filling using solder,Cu and Cu-cored solder was carried out to assess the thermo-mechanical properties of the different filling materials.It was found that the vias filled with Cu-cored solder exhibit less thermal-mechanical stresses than solder-filled vias, but more than Cu-filled vias.
基金financially supported by the Guangdong Basic and Applied Basic Research Foundation(Grant No.2022A1515011485)National Natural Science Foundation of China(Grant No.62104243)SIAT Innovation Program for Excellent Young Researchers and Shenzhen Post-doctoral Funding.
文摘以某公司电镀填盲孔的电镀液体系为研究对象,在500 m L哈林槽中模拟电镀线,系统地考察了电镀液配方(硫酸铜、硫酸、湿润剂、光亮剂、整平剂和氯离子的浓度以及添加剂相互作用)、电镀参数(电流密度和电镀时间)以及盲孔几何尺寸(深径比0.6∶1和1.07∶1)等化学和物理因素对FR-4基材盲孔电镀填孔的影响。以盲孔填孔率、凹陷度、表层镀铜厚度等指标综合评价盲孔填孔效果并用金相显微镜观察孔的横截面。结果表明,在适宜的电镀条件下,该电镀液体系对印制电路板盲孔的填孔效果良好。但是,适宜的电镀参数和电镀液配方与盲孔几何尺寸显著相关。
