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Experimental Study on External Low Frequency Vibration Influence on SPM
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作者 陈津平 郭彤 +1 位作者 胡晓东 胡小唐 《Transactions of Tianjin University》 EI CAS 2007年第2期98-102,共5页
The influence of external low frequency (0-100 Hz) vibration on the tip-sample interaction in SPM is the main concern of this paper. A concept, vibration rejection ratio (VRR) proposed by Thompson et al, was investiga... The influence of external low frequency (0-100 Hz) vibration on the tip-sample interaction in SPM is the main concern of this paper. A concept, vibration rejection ratio (VRR) proposed by Thompson et al, was investigated theoretically and experimentally. A concise theoretical background was introduced, a vibration stimulating and measuring system for SPM was built up, and an experimental research of the influence on SPM VRR was carried out with different SPM probes, samples, tip pre-loads and open/close loops of tip-sample interaction. It was proved both in theory and experiment that SPM VRR had correlations with the spring constant, the air damping constant, the effective mass of the cantilever, the contact spring constant and the contact damping constant between tip and sample. SPM's vibration rejecting ability can be improved by longer cantilever probe, softer sample surface, greater tip pre-load, and close-loop control for tip-sample interaction. More attention should be paid to a proper combination of the above parameters. 展开更多
关键词 vibration tip-sample interaction SPM vibration rejection ratio CANTILEVER
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SPM抑振系数的理论与实验研究
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作者 陈津平 胡小唐 +1 位作者 胡晓东 郭彤 《纳米技术与精密工程》 EI CAS CSCD 2006年第4期256-260,共5页
为分析外界振动对扫描探针显微镜(SPM)针尖-样品副的影响,提出“抑振系数”的概念.围绕SPM针尖-样品副的动态力学模型,对抑振系数的物理含义、影响因素等进行了理论分析.搭建了SPM激振、测振的实验系统,对不同的SPM扫描器、探针、样品... 为分析外界振动对扫描探针显微镜(SPM)针尖-样品副的影响,提出“抑振系数”的概念.围绕SPM针尖-样品副的动态力学模型,对抑振系数的物理含义、影响因素等进行了理论分析.搭建了SPM激振、测振的实验系统,对不同的SPM扫描器、探针、样品、针尖预应力以及针尖-样品副开/闭环对SPM抑振系数的影响进行了实验研究.在理论分析上和实验研究中,都证实SPM抑振系数与悬臂梁的有效质量、弹性系数、空气阻尼系数、针尖与样品的接触弹性系数和接触阻尼系数等相关,反映在实际SPM部件参数上,则较短的扫描器、较长的悬臂探针、较软的样品表面、较大的探针预应力、闭环控制的针尖-样品副等都是提高SPM抑振性的途经. 展开更多
关键词 振动 扫描探针显微镜 针尖-样品副 抑振系数 悬臂梁
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