We demonstrate and introduce here a pyramidally patterned metal reflector into wafer-bonding AlGaInP light emitting diodes （LEDs） to improve the light extraction efficiency by using a photo-assisted chemical etched ...We demonstrate and introduce here a pyramidally patterned metal reflector into wafer-bonding AlGaInP light emitting diodes （LEDs） to improve the light extraction efficiency by using a photo-assisted chemical etched GaP：Mg layer. The pyramid patterns were fabricated employing a HF and H202 mixed solution in combination with a 532 nm laser on a GaP：Mg surface firstly, and then a gold reflector layer was evaporated onto the patterned GaP：Mg surface. After the whole chip process, the patterned gold reflector structure was confirmed to be efficient for light extraction and a 18.55% enhancement of the electroluminescent flux has been obtained by an integrating sphere, compared to the surface textured LEDs with flat reflectors.展开更多
基金Project supported by the Post Doctoral Innovation Fund of Shandong Province(No.201303002)the Shandong Province Young and MiddleAged Scientists Research Awards Fund(No.BS2013DX007)the the National Basic Research Program of China(No.6131550102)
文摘We demonstrate and introduce here a pyramidally patterned metal reflector into wafer-bonding AlGaInP light emitting diodes （LEDs） to improve the light extraction efficiency by using a photo-assisted chemical etched GaP：Mg layer. The pyramid patterns were fabricated employing a HF and H202 mixed solution in combination with a 532 nm laser on a GaP：Mg surface firstly, and then a gold reflector layer was evaporated onto the patterned GaP：Mg surface. After the whole chip process, the patterned gold reflector structure was confirmed to be efficient for light extraction and a 18.55% enhancement of the electroluminescent flux has been obtained by an integrating sphere, compared to the surface textured LEDs with flat reflectors.
