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Water-Assisted Injection Molding System Based on Water Hydraulic Proportional Control Technique 被引量:5
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作者 ZHOU Hua ZHANG Zengmeng +1 位作者 GAO Yuan'an YANG Huayong 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2010年第4期418-427,共10页
Water-assisted injection molding(WAIM), an innovative process to mold plastic parts with hollow sections, is characterized with intermittent, periodic process and large pressure and flow rate variation. Energy savin... Water-assisted injection molding(WAIM), an innovative process to mold plastic parts with hollow sections, is characterized with intermittent, periodic process and large pressure and flow rate variation. Energy savings and injection pressure control can not be .attained based on conventional valve control system. Moreover, the injection water can not be supplied directly by water hydraulic proportional control system. Poor efficiency and control performance are presented by current trial systems, which pressurize injection water by compressed air. In this paper, a novel water hydraulic system is developed applying an accumulator for energy saving. And a new differential pressure control method is proposed by using pressure cylinder and water hydraulic proportional pressure relief valve for back pressure control. Aiming at design of linear controller for injection water pressure regulation, a linear load model is approximately built through computational fluid dynamics(CFD) simulation on two-phase flow cavity filling process with variable temperature and viscosity, and a linear model of pressure control system is built with the load model and linearization of water hydraulic components. According to the simulation, model based feedback is brought forward to compensate the pressure decrease during accumulator discharge and eliminate the derivative element of the system. Meanwhile, the steady-state error can be reduced and the capacity of resisting disturbance can be enhanced, by closed-loop control of load pressure with integral compensation. Through the developed experimental system in the State Key Lab of Fluid Power Transmission and Control, Zhejiang University, China, the static characteristic of the water hydraulic proportional relief valve was tested and output pressure control of the system in Acrylonitrile Butadiene Styrene(ABS) parts molding experiments was also studied. The experiment results show that the dead band and hysteresis of the water hydraulic proportional pressure relief valve are large, but the control precision and linearity can be improved with feed-forward compensation. With the experimental results of injection water pressure control, the applicability of this WAIM system and the effect of its linear controller are verified. The novel proposed process of WAIM pressure control and study on characteristics of control system contribute to the application of water hydraulic proportional control and WAIM technology. 展开更多
关键词 water-assisted injection molding water hydraulics proportional pressure control linear control load characteristic
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Simulation and Experiment Research on the Proportional Pressure Control of Water-assisted Injection Molding 被引量:3
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作者 ZHOU Hua CHEN Yinglong +1 位作者 ZHANG Zengmeng YANG Huayong 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2012年第3期430-438,共9页
Water-assisted injection molding(WAIM),a newly developed fluid-assisted injection molding technology has drawn more and more attentions for the energy saving,short cooling circle time and high quality of products.Ex... Water-assisted injection molding(WAIM),a newly developed fluid-assisted injection molding technology has drawn more and more attentions for the energy saving,short cooling circle time and high quality of products.Existing research for the process of WAIM has shown that the pressure control of the injecting water is mostly important for the WAIM.However,the proportional pressure control for the WAIM system is quite complex due to the existence of nonlinearities in the water hydraulic system.In order to achieve better pressure control performance of the injecting water to meet the requirements of the WAIM,the proportional pressure control of the WAIM system is investigated both numerically and experimentally.A newly designed water hydraulic system for WAIM is first modeled in AMEsim environment,the load characteristics and the nonlinearities of water hydraulic system are both considered,then the main factors affecting the injecting pressure and load flow rate are extensively studied.Meanwhile,an open-loop model-based compensation control strategy is employed to regulate the water injection pressure and a feedback proportional integrator controller is further adopted to achieve better control performance.In order to verify the AMEsim simulation results WAIM experiment for particular Acrylonitrile Butadiene Styrene(ABS) parts is implemented and the measured experimental data including injecting pressure and flow rate results are compared with the simulation.The good coincidence between experiment and simulation shows that the AMEsim model is accurate,and the tracking performance of the load pressure indicates that the proposed control strategy is effective for the proportional pressure control of the nonlinear WAIM system.The proposed proportional pressure control strategy and the conclusions drawn from simulation and experiment contribute to the application of water hydraulic proportional control and WAIM technology. 展开更多
关键词 water-assisted injection molding nonlinear modeling proportional pressure control AMEsim simulation
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A Computational Study on Water-assisted Ammonolysis of N-Methyl β-Sultam 被引量:1
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作者 HE Mao-xia FENG Da-cheng YU Ling-juan CAI Zheng-ting 《Chemical Research in Chinese Universities》 SCIE CAS CSCD 2006年第1期94-98,共5页
The ring opening of β-sultam v/a an H2O-assisted ammonolysis process was studied by using Density Functional Theory(DFT) method at the B3LYP/6-31G level as a further step in the theoretical investigation of the amm... The ring opening of β-sultam v/a an H2O-assisted ammonolysis process was studied by using Density Functional Theory(DFT) method at the B3LYP/6-31G level as a further step in the theoretical investigation of the ammonolysis reaction of β-sultams. The calculated pathways are analogous to those previously described for the non-assisted ammonolysis reaction. Solvent effects were assessed by using the polarized continuum model(PCM) method. The results show that mode 1 and pathway a in channel Ⅱ are the most favorable ones in both the cases. The energy barrier of the cleavage of C-S bonds producing P1 is the highest among all the energy barriers. The presence of a solvent in the continuum model disfavors the reaction, whereas the participation of water in the ammonolysis reaction plays a positive role and reduces the active energy greatly. The relative energies of all the transition states in the assisted ammonolysis are 20-80 kJ/mol lower than those for the non-assisted reaction. 展开更多
关键词 AMMONOLYSIS water-assisted mechanism Density Functional Theory(DFT) β-Sultam
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Laser micromachining of CNT/Fe/Al_2O_3 nanocomposites 被引量:2
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作者 Kwang-Ryul KIM Byoung-Deog CHOI +6 位作者 Jun-Sin YI Sung-Hak CHO Yong-Ho CHOA Dong-Soo SHIN Dong-Ho BAE Myung-Chang KANG Young-Keun JEONG 《中国有色金属学会会刊:英文版》 CSCD 2009年第B09期189-193,共5页
CNT/Fe/Al2O3 mixed powders were synthesized from Fe/Al2O3 nanopowders using thermal CVD for the homogeneous dispersion of carbon nanotubes CNTs. CNTs consisted of MWNT, and the diameter was approximately 20-30 nm. Aft... CNT/Fe/Al2O3 mixed powders were synthesized from Fe/Al2O3 nanopowders using thermal CVD for the homogeneous dispersion of carbon nanotubes CNTs. CNTs consisted of MWNT, and the diameter was approximately 20-30 nm. After sintering, CNTs were homogenously located throughout Al2O3 grain boundary and were buckled. A femto-second laser installed with special optical systems was used for micromachining of the nanocomposites. The relationship between material ablation rate and energy fluence was theoretically investigated and compared with experimental results from cross-sectional SEM analysis. The nanocomposites which have higher content of CNT show a fairly good machining result due to its higher thermal conductivity and smaller grain size as well as lower light transmittance. 展开更多
关键词 纳米复合材料 激光光学系统 热化学气相沉积 碳纳米管 AL2O3 扫描电镜分析 均匀分散 纳米粉体
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Finite element simulation of the micromachining of nanosized-silicon-carbide-particle reinforced composite materials based on the cohesive zone model
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作者 Hongmin Pen Jianhua Guo +2 位作者 Zizhen Cao Xianchong Wang Zhiguo Wang 《Nanotechnology and Precision Engineering》 EI CAS CSCD 2018年第4期242-247,共6页
A finite element method based on the cohesive zone model was used to study the micromachining process of nanosized silicon-carbide-particle(SiCp) reinforced aluminum matrix composites. As a hierarchical multiscale sim... A finite element method based on the cohesive zone model was used to study the micromachining process of nanosized silicon-carbide-particle(SiCp) reinforced aluminum matrix composites. As a hierarchical multiscale simulation method, the parameters for the cohesive zone model were obtained from the stress-displacement curves of the molecular dynamics simulation. The model considers the random properties of the siliconcarbide-particle distribution and the interface of bonding between the silicon carbide particles and the matrix.The machining mechanics was analyzed according to the chip morphology, stress distribution, cutting temperature, and cutting force. The simulation results revealed that the random distribution of nanosized SiCp causes non-uniform interaction between the tool and the reinforcement particles. This deformation mechanics leads to inhomogeneous stress distribution and irregular cutting force variation. 展开更多
关键词 Multiscale COHESIVE zone model NANOSIZED silicon carbide particles Composite MATERIALS micromachining
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Fabrication of Ordered Micro/Nanostructures Using Probe‑Based Force‑Controlled Micromachining System
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作者 Yanquan Geng Yuzhang Wang +2 位作者 Jianxiong Cai Jingran Zhang Yongda Yan 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2022年第6期178-193,共16页
This paper presents a probe-based force-controlled nanoindentation method to fabricate ordered micro/nanostructures.Both the experimental and finite element simulation approaches are employed to investigate the influe... This paper presents a probe-based force-controlled nanoindentation method to fabricate ordered micro/nanostructures.Both the experimental and finite element simulation approaches are employed to investigate the influence of the interval between the adjacent indentations and the rotation angle of the probe on the formed micro/nanostructures.The non-contacting part between indenter and the sample material and the height of the material pile-up are two competing factors to determine the depth relationship between the adjacent indentations.For the one array indentations,nanostructures with good depth consistency and periodicity can be formed after the depth of the indentation becoming stable,and the variation of the rotation angle results in the large difference between the morphology of the formed nanostructures at the bottom of the one array indentation.In addition,for the indentation arrays,the nanostructures with good consistency and periodicity of the shape and depth can be generated with the spacing greater than 1μm.Finally,Raman tests are also carried out based on the obtained ordered micro/nanostructures with Rhodamine probe molecule.The indentation arrays with a smaller spacing lead to better the enhancement effect of the substrate,which has the potential applications in the fields of biological or chemical molecular detection. 展开更多
关键词 Ordered micro/nanostructure Probe-based micromachining In-process force-controlled Indentation array Micro cutting
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Review of micromachining of ceramics by etching
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作者 H.T.TING K.A.ABOU-EL-HOSSEIN H.B.CHUA 《中国有色金属学会会刊:英文版》 CSCD 2009年第B09期1-16,共16页
In the last two decades, there has been an enormous surge in interest in ceramic materials and, as a result, there have been significant advances in their development and applications. Their inherent properties, such ... In the last two decades, there has been an enormous surge in interest in ceramic materials and, as a result, there have been significant advances in their development and applications. Their inherent properties, such as capability of operating at temperatures far above metals, high level of hardness and toughness, low coefficient of thermal expansion and high thermal conductivity rendered ceramics to be one of the leading engineering materials. Many research works have been conducted in the past few years on machining of advanced ceramics using different processing methods in order to obtain a better surface roughness, higher material removal rate and improved tool life. Micromachining using chemical etching is one of those methods that do not involve the problem of tool life and direct tool-work piece contact. However, only a few research works have been done on micromachining of ceramics using chemical etching. Hence, study of chemical machining of advanced ceramics is still needed as the process has found wide application in the industry because of its relative low operating costs. In this work, we summarize the recent progresses in machining of different types of advanced ceramics, material processing methods such as wet etching and dry etching, and finally the prospects for control of material removal rate and surface quality in the process of ceramic micromachining. 展开更多
关键词 陶瓷材料 化学蚀刻 表面粗糙度 机械加工过程 陶瓷加工 刀具寿命 材料去除率 高温作业
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Micro thermal shear stress sensor based on vacuum anodic bonding and bulk-micromachining
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作者 易亮 欧毅 +3 位作者 石莎莉 马瑾 陈大鹏 叶甜春 《Chinese Physics B》 SCIE EI CAS CSCD 2008年第6期2130-2136,共7页
This paper describes a micro thermal shear stress sensor with a cavity underneath, based on vacuum anodic bonding and bulk micromachined technology. A Ti/Pt alloy strip, 2μm×100μm, is deposited on the top of a ... This paper describes a micro thermal shear stress sensor with a cavity underneath, based on vacuum anodic bonding and bulk micromachined technology. A Ti/Pt alloy strip, 2μm×100μm, is deposited on the top of a thin silicon nitride diaphragm and functioned as the thermal sensor element. By using vacuum anodic bonding and bulk-si anisotropic wet etching process instead of the sacrificial-layer technique, a cavity, functioned as the adiabatic vacuum chamber, 200μm×200μm×400μm, is placed between the silicon nitride diaphragm and glass (Corning 7740). This method totally avoid adhesion problem which is a major issue of the sacrificial-layer technique. 展开更多
关键词 thermal micro shear stress sensor vacuum anodic bonding bulk-micromachined
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激光微加工技术在航空发动机维护和翻修工作中的应用
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作者 孙旭东 李霞 高明 《现代制造技术与装备》 2024年第6期155-158,共4页
航空发动机长期处于高温、高频率的工况时,发动机叶片等零部件老化速度较快,需要对发动机定期开展维护和翻修工作。使用激光微加工技术可以进行快速的表面处理,包括进行涂覆层的重构、去除表面污垢等。分析在航空发动机维护和翻修工作... 航空发动机长期处于高温、高频率的工况时,发动机叶片等零部件老化速度较快,需要对发动机定期开展维护和翻修工作。使用激光微加工技术可以进行快速的表面处理,包括进行涂覆层的重构、去除表面污垢等。分析在航空发动机维护和翻修工作中如何使用激光微加工技术进行微纳构造处理、激光清洗,以及如何使用增材制造技术,帮助维修技术人员了解激光微加工技术的特点和应用方法,提高航空发动机维护和翻修工作水平,保证发动机处于正常工作状态。 展开更多
关键词 航空发动机 维护 翻修 激光微加工技术
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短脉冲激光加工微结构及其成型技术研究 被引量:1
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作者 虞宙 崔金晔 +1 位作者 胡俊 姜振华 《Journal of Donghua University(English Edition)》 CAS 2024年第1期72-80,共9页
短脉冲激光具有高精度、非接触和高可控性等优点,可以针对各种材料进行表面精细加工。如在医用钛合金表面加工出不同形貌、尺寸的微结构,能够有效地改善植入物表面生物活性。利用短脉冲激光在材料加工上的优势,开展了纳秒激光脉冲烧蚀试... 短脉冲激光具有高精度、非接触和高可控性等优点,可以针对各种材料进行表面精细加工。如在医用钛合金表面加工出不同形貌、尺寸的微结构,能够有效地改善植入物表面生物活性。利用短脉冲激光在材料加工上的优势,开展了纳秒激光脉冲烧蚀试验,探究纳秒激光与钛合金间的相互作用。阐明钛合金表面火山坑微结构的形成机理,并开展多脉冲激光参数试验,研究激光参数对微结构成型的影响,建立参数与特征尺寸间的映射关系。该研究可以获得具有特定尺寸、高加工质量的微结构,有助于短脉冲激光微加工技术的应用,具有良好的学术和工程意义。 展开更多
关键词 短脉冲激光 微加工 火山状坑 微沟槽
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Poly-Silicon Micromachined Switch 被引量:2
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作者 张正元 温志渝 +3 位作者 徐世六 张正番 李开成 黄尚廉 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2002年第9期914-920,共7页
By using LPCVD SiO 2 and poly silicon as sacrificial layer and cantilever respectively,a poly silicon micromachined RF MEMS(radio frequency microelectronic mechanical system) switch is fabricated.During the fabrica... By using LPCVD SiO 2 and poly silicon as sacrificial layer and cantilever respectively,a poly silicon micromachined RF MEMS(radio frequency microelectronic mechanical system) switch is fabricated.During the fabrication process,the stress of poly silicon is released to prevent poly silicon membrane from bending,and the issue of compatibility between RF switch and IC process technology is also resolved.The low residual tensile stress poly silicon cantilever is obtained by the optimization.The switch is tested,and the preliminary test results show:the pull down voltage is 89V,and the switch speed is about 5μs.The switch provides the potential to build a new fully monolithic integrated RF MEMS for radar and communications applications. 展开更多
关键词 poly silicon micromachined switch CANTILEVER sacrificial layer restoring force
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表面织构电解加工技术研究进展
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作者 张庆良 刘金玲 +1 位作者 孙志光 曲宁松 《电加工与模具》 北大核心 2024年第3期1-14,53,共15页
表面织构在能源、光学、电子、信息技术、生物和摩擦学等领域具有重要应用,其加工工艺是制造技术研究的重要内容。由于所加工表面织构具有无毛刺、翻边等优点,电解加工成为表面织构的重要制造技术方法和技术研究热点,故详细介绍了五种... 表面织构在能源、光学、电子、信息技术、生物和摩擦学等领域具有重要应用,其加工工艺是制造技术研究的重要内容。由于所加工表面织构具有无毛刺、翻边等优点,电解加工成为表面织构的重要制造技术方法和技术研究热点,故详细介绍了五种典型表面织构电解加工技术在方法创新、材料去除机制、加工过程建模及加工工艺等方面的研究进展,给出了电解加工表面织构的典型结构和材料,指出提高加工效率和加工自动化程度是未来表面织构电解加工技术的发展趋势。 展开更多
关键词 表面织构 电解加工 微细电解加工 材料去除机制 加工过程模型
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使用牺牲层优化PDMS微流控芯片打孔工艺
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作者 闫婷婷 李慧 +2 位作者 孟晓帅 魏春阳 李姗姗 《传感器与微系统》 CSCD 北大核心 2024年第7期118-121,共4页
聚二甲基硅氧烷(PDMS)在微流控芯片技术中有非常广泛的应用,PDMS弹性体打孔是芯片加工中重要的工作环节,打孔质量直接影响到样品的导入导出和产物收集等,而孔的质量受到芯片厚度和打孔器规格等因素的影响。一个标准的孔应当满足以下几... 聚二甲基硅氧烷(PDMS)在微流控芯片技术中有非常广泛的应用,PDMS弹性体打孔是芯片加工中重要的工作环节,打孔质量直接影响到样品的导入导出和产物收集等,而孔的质量受到芯片厚度和打孔器规格等因素的影响。一个标准的孔应当满足以下几个要素:尺寸可控;圆度好;无裂孔。研究发现:通过在打孔目标位置的上方或下方放置牺牲层,可使孔质量有所改善。本文对影响PDMS打孔质量的4个关键因素进行了系统性研究,通过正交实验获得了一系列PDMS孔图片,进而利用MATLAB程序对孔的图像进行后处理,分析了牺牲层对孔质量的影响,确定了最优打孔工艺参数。结果表明,打孔时紧贴芯片的上下表面放置厚度2mm的软材质作为牺牲层可有效提高孔的质量。 展开更多
关键词 牺牲层 正交实验 参数优化 微加工工艺
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基于ScAlN薄膜的高频PMUT阵列的设计与制造
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作者 塔桂峰 刘建河 +5 位作者 李加东 姚术涛 刘浩杰 苗斌 商文玲 陶金燕 《压电与声光》 CAS 北大核心 2024年第4期496-504,共9页
高频压电微机械超声换能器(PMUT)应用于各种场景,如指纹识别、无损检测、医疗成像。在当前非侵入式血管成像应用中,存在换能器使用锆钛酸铅压电陶瓷(PZT)及局限于1-D PMUT阵列的问题。设计并制作了一种基于ScAlN材料压电薄膜的2D-PMUT... 高频压电微机械超声换能器(PMUT)应用于各种场景,如指纹识别、无损检测、医疗成像。在当前非侵入式血管成像应用中,存在换能器使用锆钛酸铅压电陶瓷(PZT)及局限于1-D PMUT阵列的问题。设计并制作了一种基于ScAlN材料压电薄膜的2D-PMUT阵列。为了进一步得到阵列最佳的输出性能,降低栅瓣影响,设计了间距为波长的1/2(300μm)的并联六边形阵列,增大了填充因子,降低了阻抗,提高了输出电流。采用SOI晶片作为PMUT的基本结构,设计了微机电系统(MEMS)工艺流程,并完成了晶片制作。通过扫描电子显微镜和聚焦离子束切割确定PMUT的形貌和结构尺寸,并且测得在水中的谐振频率为2.36 MHz。仿真与测试结果表明,测试误差为9.2%,位移灵敏度较好,有望满足非侵入式血管成像应用需求。 展开更多
关键词 高频压电微机械超声换能器阵列(PMUT) ScAlN薄膜 有限元仿真 器件制备 非侵入式血管成像
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基于相控阵与合成孔径聚焦方法的CMUT阵列虚拟声源成像技术
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作者 张甜 宋金沙 +3 位作者 乔冰琴 邵星灵 武洋 王智豪 《微纳电子技术》 CAS 2024年第4期147-155,共9页
对电容式微机械超声换能器(CMUT)阵列成像中的相控阵(PA)和合成孔径聚焦技术(SAFT)的综合方法进行研究,使用CMUT子阵列形成虚拟声源,并利用虚拟声源的辐射能量进行超声成像。通过对比不同孔径的超声波声束发散程度,得到CMUT阵列最佳子... 对电容式微机械超声换能器(CMUT)阵列成像中的相控阵(PA)和合成孔径聚焦技术(SAFT)的综合方法进行研究,使用CMUT子阵列形成虚拟声源,并利用虚拟声源的辐射能量进行超声成像。通过对比不同孔径的超声波声束发散程度,得到CMUT阵列最佳子孔径阵元数量为9,CMUT阵列实验通过将子孔径阵元数量从1到15依次增加,观察水中两个不同深度的钉子成像清晰度来验证最佳子孔径阵元数量。与传统全矩阵捕捉(FMC)成像技术相比,多阵元SAFT合成的虚拟声源辐射能力更强,所以有更好的探测深度,同时由于利用子阵列进行超声数据采集,因此减少了CMUT超声成像系统的硬件采集通道数。 展开更多
关键词 电容式微机械超声换能器(CMUT)阵列 合成孔径 相控阵(PA) 虚拟声源 超声成像
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超声横振辅助微细电解加工关键技术研究
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作者 蔡建洲 刘桂贤 +2 位作者 李镜 罗红平 张永俊 《机电工程技术》 2024年第8期161-166,共6页
针对深窄槽微细电解加工中存在电解产物排出困难的问题,提出了一种超声横振辅助微细电解加工方法。该方法利用工具电极产生横振使加工间隙的流场产生周期性变化,增强了电解加工间隙内电解产物传质能力,提高了深窄槽微细电解加工效率及... 针对深窄槽微细电解加工中存在电解产物排出困难的问题,提出了一种超声横振辅助微细电解加工方法。该方法利用工具电极产生横振使加工间隙的流场产生周期性变化,增强了电解加工间隙内电解产物传质能力,提高了深窄槽微细电解加工效率及加工稳定性。为研究该工艺的加工特性,研制了一套超声横振辅助微细电解加工装置,其关键技术是实现3种工作模式的超声-电解同步电源。基于研制的超声横振辅助微细电解加工装置,本文以深窄槽加工实验为研究对象,探究了电源的不同工作模式对深窄槽的影响规律。实验结果表明超声横振有利于提高深窄槽加工的传质能力,同步超声模式1有利于进一步提高工件的溶解量和微细电解加工的传质能力,同步超声模式2则有利于提高深窄槽的加工精度。最后,加工出槽宽为432.9μm,深宽比为11.9的深窄槽。 展开更多
关键词 微细电解加工 超声横振 深窄槽 流场
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Advances in femtosecond laser synthesis and micromachining of halide perovskites
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作者 Shijie Du Fangteng Zhang Lin Ma 《Light(Advanced Manufacturing)》 2024年第3期172-194,共23页
Perovskite materials have become a popular research topic because of their unique optical and electrical properties,that enable extensive applications in information storage,lasers,anti-counterfeiting,and planar lense... Perovskite materials have become a popular research topic because of their unique optical and electrical properties,that enable extensive applications in information storage,lasers,anti-counterfeiting,and planar lenses.However,the success of the application depends on accomplishing high-precision and high-quality perovskite patterning technology.Numerous methods have been proposed for perovskite production,including,a femtosecond laser with an ultrashort pulse width and ultrahigh peak power with unique advantages such as high precision and efficiency,nonlinearity,and excellent material adaptability in perovskite material processing.Furthermore,femtosecond lasers can induce precipitation of perovskite inside glass/crystals,which markedly enhances the stability of perovskite materials and promotes their application and development in various fields.This review introduces perovskite precipitation and processing via femtosecond lasers.The methods involved and advantages of femtosecond-laser-induced perovskite precipitation and patterning are systematically summarized.The review also provides an outlook for further optimization and improvement of femtosecond laser preparation and processing methods for perovskites,which may offer significant support for future research and applications of perovskite materials. 展开更多
关键词 Femtosecond laser micromachining Perovskites PRECIPITATION PROCESSING
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石英单晶微机械陀螺仪研究进展
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作者 孙卓 孙立涛 窦广彬 《微纳电子技术》 CAS 2024年第11期17-30,共14页
对Z切、ST切、AT切三种切割方式的石英单晶微机械陀螺仪的基本工作原理进行了阐述,梳理了不同类型陀螺仪的发展历程,重点介绍了三种石英单晶微机械陀螺仪的设计结构、性能特点及其应用场景,并从灵敏度、动态范围、稳定性、抗冲击性及工... 对Z切、ST切、AT切三种切割方式的石英单晶微机械陀螺仪的基本工作原理进行了阐述,梳理了不同类型陀螺仪的发展历程,重点介绍了三种石英单晶微机械陀螺仪的设计结构、性能特点及其应用场景,并从灵敏度、动态范围、稳定性、抗冲击性及工作频率等方面对三种类型石英微机械陀螺仪各自的性能优势与面临的技术挑战进行了评述,总结了当前国内外在石英单晶微机械陀螺仪研究领域的主要进展和创新点。最后,针对不同切割方式的石英单晶微机械陀螺仪的结构及工作特点,分析了其各自的优点与不足,进行了总结和对比,讨论了石英微机械陀螺仪的未来发展方向。 展开更多
关键词 石英 微机械陀螺仪 压电效应 Z切音叉微机械陀螺仪 ST切表面声波微机械陀螺仪 AT切厚度剪切振动陀螺仪 微电子机械系统(MEMS)
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基于飞秒激光刻写的微腔型波导马赫-曾德干涉器及其折射率传感性能研究
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作者 徐堃 玄成聪 +2 位作者 张燕青 姚一村 解艳茹 《聊城大学学报(自然科学版)》 2024年第5期76-83,共8页
平面光波导传感器相较于传统的光纤传感器结构,具有更好的机械性能,并且对于振动等因素具有更低的交叉响应,因此在光传感领域具有独特优势。在本研究中,我们利用飞秒激光刻写及激光辅助化学刻蚀技术,在石英玻璃中制备了微腔型波导传感... 平面光波导传感器相较于传统的光纤传感器结构,具有更好的机械性能,并且对于振动等因素具有更低的交叉响应,因此在光传感领域具有独特优势。在本研究中,我们利用飞秒激光刻写及激光辅助化学刻蚀技术,在石英玻璃中制备了微腔型波导传感器结构,该结构由对称的分支型波导马赫-曾德干涉器及在其中一路上所制备的光学微腔构成。当待测液体浸入微腔时,传感器呈现明显的干涉峰漂移,其折射率灵敏度在1.35折射率附近达到了约16311.8 nm/RIU,因此在高灵敏度的波导液体传感及生化传感领域展现出了显著的应用潜力。 展开更多
关键词 平面波导 飞秒激光微加工 微腔传感器 马赫-曾德干涉仪
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Differential mode-gain equalization via femtosecond laser micromachining-induced refractive index tailoring
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作者 Cong Zhang Senyu Zhang +5 位作者 Yan Zeng Yue Wang Meng Xiang Di Lin Songnian Fu Yuwen Qin 《Light(Advanced Manufacturing)》 2024年第2期24-32,共9页
The mode-division multiplexing technique combined with a few-mode erbium-doped fiber amplifier(FM-EDFA)demonstrates significant potential for solving the capacity limitation of standard single-mode fiber(SSMF)transmis... The mode-division multiplexing technique combined with a few-mode erbium-doped fiber amplifier(FM-EDFA)demonstrates significant potential for solving the capacity limitation of standard single-mode fiber(SSMF)transmission systems.However,the differential mode gain(DMG)arising in the FM-EDFA fundamentally limits its transmission capacity and length.Herein,an innovative DMG equalization strategy using femtosecond laser micromachining to adjust the refractive index(RI)is presented.Variable mode-dependent attenuations can be achieved according to the DMG profile of the FM-EDFA,enabling DMG equalization.To validate the proposed strategy,DMG equalization of the commonly used FM-EDFA configuration was investigated.Simulation results revealed that by optimizing both the length and RI modulation depth of the femtosecond laser-tailoring area,the maximum DMG(DMGmax)among the 3 linear-polarized(LP)mode-group was mitigated from 10 dB to 1.52 dB,whereas the average DMG(DMGave)over the C-band was reduced from 8.95 dB to 0.78 dB.Finally,a 2-LP mode-group DMG equalizer was experimentally demonstrated,resulting in a reduction of the DMGmax from 2.09 dB to 0.46 dB,and a reduction of DMGave over the C band from 1.64 dB to 0.26 dB,with only a 1.8 dB insertion loss.Moreover,a maximum range of variable DMG equalization was achieved with 5.4 dB,satisfying the requirements of the most commonly used 2-LP mode-group amplification scenarios. 展开更多
关键词 Mode-division multiplexing Few-mode Erbium-doped fiber amplifier Differential mode gain Femtosecond laser micromachining
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