A double toroidal analyzer for scanning probe electron energy spectrometer

An ultra-high vacuum （UHV） compatible electron spectrometer employing a double toroidal analyzer has been de- veloped. It is designed to be combined with a custom-made scanning tunneling microscope （STM） to study the spatially localized electron energy spectrum on a surface. A tip-sample system composed of a piezo-driven field-emission tungsten tip and a sample of highly ordered pyrolytic graphite （HOPG） is employed to test the performance of the spectrometer. Two-dimensional images of the energy-resolved and angle-dispersed electrons backscattered from the surface of HOPG are obtained, the performance is optimized and the spectrometer is calibrated. A complete electron energy loss spectrum covering the elastic peak to the secondary electron peaks for the HOPG surface, acquired at a tip voltage of -140 V and a sample current of 0.5 pA, is presented, demonstrating the viability of the spectrometer.

Detection of distribution of copper inside and outside of lysosomes in cultured hepatolenticular degeneration fibroblasts by electron probe X-ray microanalysis

OBJECTIVE: To observe the distribution of copper in the subcellular structure for the understanding of primary pathogenesis of hepatolenticular degeneration (HLD). METHODS: Skin fibroblasts taken from HLD patients were cultured as an in vitro model of HLD, and the control cells taken from healthy volunteers were clutured in the same way. The distribution of copper inside and outside of lysosomes in fibroblasts was detected by quantitative electron probe X-ray microanalysis. The relationship between the subcellular location of copper and the genotype of the patients, and relationship between the distribution of copper and the course of the disease were analyzed. RESULTS: The content of Cu^(2+) inside lysosomes of HLD cells (14.6±2.1 mmol/kg) and of heterozygote cells (11.6±0.6 mmol/kg) was higher than that of normal cells (4.5±1.2 mmol/kg) (P<0.01). The content of Cu^(2+) outside lysosomes of HLD cells (17.5±4.2 mmol/kg) and of heterozygote cells (12.0±0.9 mmol/kg) was higher than that of normal cells (4.7±1.2 mmol/kg) (P<0.01). The distribution of copper in the subcellular structure was correlated with disease courses of HLD patients. With the progression of the disease, more copper was deposited in lysosomes (r=0.85, P<0.01). The content of copper in the diffused cytoplasmic compartment in HLD cells was correlated with that of sulfur (r=0.86, P<0.05), but not in heterozygote and normal cells. CONCLUSIONS: In the early stage of HLD, copper is accumulated outside lysosome, which is paralleled with increase of metallothionein-like proteins (copper and sulfur-binding proteins). With the development of the disease, more copper is deposited inside lysosome than outside lysosome. We conclude that the up-regulation expression of copper and sulfur-binding proteins and copper accumulation in lysosomes may play an important role in lowering the ATP7B gene mutation-induced toxic effects of free copper on the cell.

Electron probe microanalysis оf experimentally stimulated osteoarthrosis in dogs

AIM To develop methods of articular cartilage preparation for X-ray-electron probe microanalysis and to study its elements content in experimental osteoarthrosis.METHODS Twenty dogs aged 2-8 years were divided in research(aged 2 years, induction of osteoarthrosis-IOA) and intact group. Intact group included three subgroups(aged 2, 5 and 8 years). Samples of cartilage after araldite saturation and pouring were partially cut into semithin sections stained with methylene blue and with methylene blue-basic fuchsin. Their smooth surfaces were investigated by X-ray-electron probe microanalysis. Spatial distribution of sulfur, calcium and phosphorus and their concentrations(weight %) were investigated.RESULTS X-ray electron probe microanalysis revealed non-uniformsulfur distribution in cartilage of intact animals: Its content increases from superficial zone to deep one, this regularity was preserved in animals with IOA. Differences of IOA with spontaneous chondropathy were revealed. Spontaneous aging was characterized by calcium and phosphorus storage in deep and calcified zones and compensatory increase of sulfated glycosaminoglycans in intermediate and deep cartilage zones as evidenced by the metachromatic reaction and microanalysis data. Unlike spontaneous chondropathy connected with aging in experimentally stimulated osteoarthrosis more intensive storage of calcium but minor phosphorus in intermediate zone were marked. In IOA the calcified cartilage thinning and osteoclastic resorption are apparent with few changes of elements composition; the only difference from control is minority phosphorus content.CONCLUSION The obtained results demonstrate specific tricks of X-ray electron probe microanalysis and its possibility in the research of mechanisms of articular cartilage alterations in osteoarthrosis.

Frequency dependence of electron temperature in hollow cathode-type discharge as measured by several different floating probe methods

We measured electron temperatures through a hollow cathode-type discharge tube using several different floating probe methods. This method detected a shift in the floating potential when an AC voltage was applied to a probe through an intermediary blocking capacitor. The shift in the floating potential is described as a function of the electron temperature and the applied AC voltage. In this study, the effects of the frequency and waveform on the electron temperatures were systematically investigated. The electron temperature measured when using the floating probe method with applied sinusoidal and triangular voltages was lower than that measured with an applied rectangular voltage.The value in the high frequency range was close to that of the tail electron temperature.

Electron Temperature Measurement by Floating Probe Method Using AC Voltage

This study presents a novel floating probe method to measure electron temperatures using a hollow cathode-type discharge tube. The proposed method detects a shift in the floating potential when an AC voltage is applied to a probe through an intermediary blocking capacitor. The shift in the floating potential is described as a function of the electron temperature and the applied AC voltage. The floating probe method is simpler than the Langmuir probe method because it does not require the measurement of volt-ampere characteristics. As the input AC voltage increases, the electron temperature converges. The electron temperature measured using the floating probe method with an applied sinusoidal voltage shows a value close to the first （tail） electron temperature in the range of the floating potential.

东昆仑大格勒富铌碳酸岩矿物学特征

东昆仑大格勒地区新发现一套碱性岩-碳酸岩杂岩体,具有很好的铌等稀有金属成矿潜力。本文在岩相学研究基础上,结合背散射电子图像,应用电子探针能谱半定量分析和波谱定量分析技术,对东昆仑大格勒富铌碳酸岩中的铌矿物进行了原位微区成分分析。岩相学观察表明,铌矿物主要为铌铁矿族、铌钙矿、烧绿石、褐铈铌矿、铌易解石,含铌矿物为含铌钛铁矿、斜锆石。铌矿物嵌布粒度较细,嵌布关系紧密而复杂。其中,铌铁矿族常与磁铁矿、铌钙矿、褐铈铌矿和磷灰石紧密共生,多以细粒状集合体呈浸染状、星散型沿磁铁矿裂纹与边部进行交代。铌钙矿、烧绿石和褐铈铌矿常与铌铁矿、磁铁矿和磷灰石紧密共生,铌钙矿局部与铌铁矿呈不规则状接触分布,烧绿石呈不规则状沿铌铁矿边部分布,褐铈铌矿多以团块状沿铌铁矿边部分布。铌易解石与磁铁矿紧密共生,呈不规则状接触。初步推断铌矿物包括岩浆期形成的烧绿石和铌易解石,热液期形成的铌铁矿、铌钙矿、烧绿石和褐铈铌矿。矿物组合初步显示,大格勒富铌碳酸岩中的铌至少经过了岩浆和热液两个时期的富集。电子探针分析结果表明,主要铌矿物的Nb_(2)O_(5)平均含量分别为:铌铁矿族69.92%,铌钙矿59.55%,烧绿石59.14%,褐铈铌矿43.12%,铌易解石41.55%;含铌矿物的Nb_(2)O_(5)平均含量分别为:含铌钛铁矿1.33%,斜锆石1.22%。其中,铌铁矿族和铌钙矿、烧绿石为可选且具有工业价值的铌矿物。

Electron Density and Optical Emission Measurements of SF_6/O_2 Plasmas for Silicon Etch Processes

This work investigates internal plasma process parameters using a hairpin resonance probe and optical emission spectroscopy. The dependence of electron density and atomic fluorine on the percentage of oxygen in an SF6/O2 discharge was measured using these methods. An RIE Oxford Instruments 80 plus chamber was used for the experiments. Two different process powers （100 W and 300 W） at a constant pressure （100 mTorr） were used, and it was found that the optical emission intensity of the 703.7 nm and 685.6 nm lines of atomic fluorine increased rapidly as oxygen was added to the SF6 discharge, reached their maximum at an O2 fraction of 20% and then decreased with further addition of oxygen. The plasma electron density was also strongly influenced by the addition of O2.

Spatial distribution of electron characteristic in argon rf glow discharges

The spatial distributions of the electron density and the mean electron energy of argon radio frequency （rf） glow discharge plasma in a plasma-enhanced chemical vapour deposition （PECVD） system have been investigated using an established movable Langmuir probe. The results indicate that in the axial direction the electron density tends to peak at midway between the two electrodes while the axial variation trend of mean electron energy is different from that of the electron density, the mean electron energy is high near the electrodes. And the mean electron energy near the cathode is much higher than that near the anode. This article focuses on the radial distribution of electron density and mean electron energy. A proposed theoretical model distribution agrees well with the experimental one： the electron density and the mean electron energy both increase from the centre of the glow to the edge of electrodes. This is useful for better understanding the discharge mechanism and searching for a better deposition condition to improve thin film quality.

Electron Energy Spectroscopic Mapping of Surface Plasmon by Parallel Scanning Method

In this work,electron energy spectroscopic mapping of surface plasmon of Ag nanostructures on highly oriented pyrolytic graphite is reported.Benefitting from the angular dispersive feature of the present scanning probe electron energy spectrometer,a multi-channel detection mode is developed.By scanning along one direction,the two-dimensional intensity distribution of Ag surface plasmon excitation due to the collision of electron emitted from the tip can be obtained in parallel.The spectroscopic spatial resolution is determined to be around 80 nm.

Web-Based Data Management and Sharing System for Electron Proke Micro-analysis

This paper proposes a useful web-based system for the management and sharing of electron probe micro-analysis( EPMA)data in geology. A new web-based architecture that integrates the management and sharing functions is developed and implemented.Earth scientists can utilize this system to not only manage their data,but also easily communicate and share it with other researchers.Data query methods provide the core functionality of the proposed management and sharing modules. The modules in this system have been developed using cloud GIS technologies,which help achieve real-time spatial area retrieval on a map. The system has been tested by approximately 263 users at Jilin University and Beijing SHRIMP Center. A survey was conducted among these users to estimate the usability of the primary functions of the system,and the assessment result is summarized and presented.

ArcGIS^TMand Principal Component Analysis of Probe Data to Micro-Map Minerals in Round Top Rare Earth Deposit

Rare earth elements (REEs), especially heavy rare earth elements (HREEs), are in demand for their current and emerging applications in advanced technologies. Here we perform computer-driven micro-mapping at the millimeter scale of the minerals that comprise Round Top Mountain, in west Texas, USA. This large rhyolite deposit is enriched in HREEs and such other critical elements as Li, Be, and U. Electron probe microanalysis of 2 × 2 mm areas of thin sections of the rhyolite produced individual maps of 16 elements. These were superimposed to generate a 16-element composition at each pixel. Principal components analysis of elements at each pixel identified the specific mineral at that site. The pixels were then relabeled as the appropriate minerals, thereby producing a single mineral map. The overall mineral composition of the 7 studied samples compared favorably with prior analyses of the Round Top deposit available in the literature. Likewise the range of porosity in the maps was consistent with that of previous direct measurements by water saturation. This new statistical and GIS-based technique provides a robust and unbiased approach to electron microprobe mapping. The study further showed that the high-value yttrofluorite grains exhibited little tendency to cluster with other late-stage trace minerals and that the samples extended the previously documented overall homogeneity of the deposit at field scale to this microscopic scale.

Optimization of Langmuir Probe System Parameters in a Stationary Laboratory Plasma

In order to obtain creditable data an applicable method to optimize parameters of the Langmuir probes and circuits in a stationary laboratory device is investigated and an experimental criterion of the probe dimension is developed. To obtain the electron temperature and density the Electron Energy Distribution Function （EEDF） approach with less computing time and more accurate results is applied, instead of the conventional slope approach. Moreover the influence of the vessel wall materials on the plasma density is discussed briefly, indicating that the dielectric wall is helpful to enhancing the electron density.

Application of Electrostatic Probe in Wool Fabric LTP Finishing

By using a double electron probe the electron density and electron temperature were measured during the low temperature plasma （LTP） treatment of wool fabrics. The dependences of the electron density upon the power, pressure and the plasma-treating time was studied. The effects on the wool fabrics＇ shrinkage were studied. The results showed that the angle of the double electrostatic probe and the area of the treated fabrics had a strong impact on the density measurement. The felt-proof property of wool fabrics treated with an argon plasma was better than that with a nitrogen plasma. The gas, power and pressure of the LTP treatment all affected the electron density. The electron density increased with the increase in power and pressure. The electron density did not change significantly with treating time, in a certain range of both power and pressure of the LTP treatment.

Effect of E × B electron drift and plasma discharge in dc magnetron sputtering plasma

Study of electron drift velocity caused by E ×B motion is done with the help of a Mach probe in a dc cylindrical magnetron sputtering system at different plasma discharge parameters like discharge voltage, gas pressure and applied magnetic field strength. The interplay of the electron drift with the different discharge parameters has been investi- gated. Strong radial variation of the electron drift velocity is observed and is found to be maximum near the cathode and it decreases slowly with the increase of radial distance from the cathode. The sheath electric field, E measured experimentally from potential profile curve using an emissive probe is contributed to the observed radial variation of the electron drift velocity. The measured values of the drift velocities are also compared with the values from the con- ventionM theory using the experimental values of electric and magnetic fields. This study of the drift velocity variation is helpful in providing a useful insight for determining the discharge conditions and parameters for sputter deposition of thin film.

Correlation ofⅢ/Ⅴsemiconductor etch results with physical parameters of high-density reactive plasmas excited by electron cyclotron resonance

Reactive ion etching is the interaction of reactive plasmas with surfaces. To obtain a detailed understanding of this process, significant properties of reactive composite low-pressure plasmas driven by electron cyclotron resonance（ECR） were investigated and compared with the radial uniformity of the etch rate. The determination of the electronic properties of chlorine-and hydrogen-containing plasmas enabled the understanding of the pressure-dependent behavior of the plasma density and provided better insights into the electronic parameters of reactive etch gases. From the electrical evaluation of I（V） characteristics obtained using a Langmuir probe,plasmas of different compositions were investigated. The standard method of Druyvesteyn to derive the electron energy distribution functions by the second derivative of the I（V）characteristics was replaced by a mathematical model which has been evolved to be more robust against noise, mainly, because the first derivative of the I（V） characteristics is used. Special attention was given to the power of the energy dependence in the exponent. In particular, for plasmas that are generated by ECR with EM modes, the existence of Maxwellian distribution functions is not to be taken as a self-evident fact, but the bi-Maxwellian distribution was proven for Ar-and Kr-stabilized plasmas. In addition to the electron temperature, the global uniform discharge model has been shown to be useful for calculating the neutral gas temperature. To what extent the invasive method of using a Langmuir probe could be replaced with the noninvasive optical method of emission spectroscopy, particularly actinometry, was investigated,and the resulting data exhibited the same relative behavior as the Langmuir data. The correlation with etchrate data reveals the large chemical part of the removal process—most striking when the data is compared with etching in pure argon. Although the relative amount of the radial variation of plasma density and etch rate is approximately ？5%, the etch rate shows a slightly concave shape in contrast to the plasma density.

Monopole Antenna Probe for Density Measurements in Cold Plasmas

A simple diagnostic tool for density measurements in plasma with a certain spatial resolution is proposed in this paper. It uses the emission characteristics of monopole antenna to determine the dielectic property of plasma c = 1 - fp^2/f^2, with the fp electron plasma frequency related to plasma density. We immersed a inonopole antenna probe into plasma and introduced a microwave signal via a network analyzer. When the emitted power is maximized, the reflected power is minimized and there occurs a resonance. Since can be derived from the resonant frequency, this is actually a method to measure the absolute electron density. Validated by a comparison with the amended Langmuir double-probe method, the monopole antenna probe is valuable. In addition, it is free from the difficulties, such as fluctuation in plasma potential.

Mapping an on-chip terahertz antenna by a scanning near-field probe and a fixed field-effect transistor

In the terahertz（THz） regime,the active region for a solid-state detector usually needs to be implemented accurately in the near-field region of an on-chip antenna.Mapping of the near-field strength could allow for rapid verification and optimization of new antenna/detector designs.Here,we report a proof-of-concept experiment in which the field mapping is realized by a scanning metallic probe and a fixed AlGaN/GaN field-effect transistor.Experiment results agree well with the electromagnetic-wave simulations.The results also suggest a field-effect THz detector combined with a probe tip could serve as a high sensitivity THz near-field sensor.

Sweep Langmuir Probe and Triple Probe Diagnostics for Transient Plasma Produced by Hypervelocity Impact

Two techniques are applied to diagnose characteristic parameters of plasma created by hypervelocity impact, such as electron temperature and electron density. The first technique is a sweep Langmuir probe （SLP）, which is a new apparatus based on a dual channel circuit that can compensate for stray capacitance and obtain a good synchronicity, so that electrostatic turbulence with a good temporal resolution can be acquired. The second technique is a triple Langmuir probe （TLP）, which is an electrostatic triple Langmuir probe diagnostic system, in which no voltage and frequency sweep is required. This technique allows to measure electron temperature, electron density as a function of time. Moreover, the triple Langmuir probe diagnostic system allows the direct display of electron temperature and semidirect display of electron density by an appropriate display system, the system permits us to eliminate almost all data processing procedures. SLP and TLP were applied to obtain fluctuations of the characteristic parameters of plasma generated by hypervelocity impact. As an example of their application to time-dependent plasma measure- ment, the electron temperature and electron density of plasmas were acquired in hypervelocity impact experiments. Characteristic parameters of plasma generated by hypervelocity impact were compared by the two kinds of diagnostic techniques mentioned above.

Experimental and Simulational Studies on the Theoretical Model of the Plasma Absorption Probe

Plasma absorption probe （PAP） was developed for measuring the electron density in plasmas processing based on the surface-wave characteristics. In order to diagnose the plasma with lower density and higher pressure, a sensitive PAP was also developed. Both types of PAP were analyzed theoretically under the quasi-static approximation, which is highly problematic when a conductor exists in the resonance region of the probe. For this reason, a theoretical model for the PAP is presented in this paper. The model is derived from the electromagnetic wave equation. Its principle is then verified via experiments and numerical simulations. Both experimental and numerical results show that the electromagnetic theoretical model is valid as compared with the quasi-static model. Consequently, a new type of PAP, named as the electromagnetic PAP, is thus proposed for the measurement of electron density.

STEM朗奇图和电子束斑模拟插件

在扫描透射电子显微镜(STEM)中,实现原子级分辨率的关键在于精确的像差校正,这通常依赖于朗奇图的测量和优化。对于STEM的新手而言,理解和优化朗奇图是一项极具挑战性的任务,往往需要长时间的实践积累才能掌握。本研究介绍了一种朗奇图及电子束斑模拟分析插件,用户可直接调整各种像差参数(包括像散、球差、慧差等),实时观察这些参数变化如何影响朗奇图,从而更直观地理解各种像差对朗奇图和电子束斑的影响。此外,插件还提供focus wobble功能,动态显示不同焦距下的朗奇图和电子束斑,模拟实际实验过程中在正焦附近循环调焦时的朗奇图和电子束斑。该插件不仅为初学者理解像差方程提供了直观图像演示,进而更加便捷和迅速地掌握球差校正电镜的调节和使用,也为研究人员提供了一种展示像差方程、朗奇图和电子束斑的图形化工具。