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Online asymmetry estimation for whole angle mode coriolis vibratory gyroscopes by high frequency injection 被引量:1
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作者 Xiang-rui Meng Chong Li Yu-chen Wang 《Defence Technology(防务技术)》 SCIE EI CAS CSCD 2023年第6期314-325,共12页
The whole angle mode gyroscope(WAMG)is considered to be the next generation architecture,but it is suffered from the asymmetry errors to conduct real products.This paper proposes a novel high frequency injection based... The whole angle mode gyroscope(WAMG)is considered to be the next generation architecture,but it is suffered from the asymmetry errors to conduct real products.This paper proposes a novel high frequency injection based approach for the error parameters online identification for the WAMG.The significance is that it can separate physical and error fingerprints to enable online calibration.The nonlinear WAMG dynamics are discretized to meet the requirement of numerical precision and computation efficiency.The optimized estimation methods are then constructed and compared to track asymmetry error parameters continuously.In the validation part,its results firstly prove that the proposed scheme can accurately identify constant asymmetry parameters with an overall tracking error of less than 1 ppm and the extreme numerical convergence can reach 10^(-12)ppm.Under the dynamic asymmetry variation condition,the root mean square errors(RMSE)indicate that the tracking accuracy can reach the level of10^(-3),which shows the robustness of the proposed scheme.In summary,the proposed method can effectively estimate the WAMG asymmetry errors online with satisfied performance and practical values. 展开更多
关键词 Rate-integrating gyroscope(RIG) Whole angle mode gyroscope(WAMG) Coriolis vibrating gyroscope(CVG) Online calibration Online identification Online estimation
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Dynamic characteristics of resonant gyroscopes study based on the Mathieu equation approximate solution 被引量:2
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作者 樊尚春 李艳 +2 位作者 郭占社 李晶 庄海涵 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第5期58-65,共8页
Dynamic characteristics of the resonant gyroscope are studied based on the Mathieu equation approximate solution in this paper.The Mathieu equation is used to analyze the parametric resonant characteristics and the ap... Dynamic characteristics of the resonant gyroscope are studied based on the Mathieu equation approximate solution in this paper.The Mathieu equation is used to analyze the parametric resonant characteristics and the approximate output of the resonant gyroscope.The method of small parameter perturbation is used to analyze the approximate solution of the Mathieu equation.The theoretical analysis and the numerical simulations show that the approximate solution of the Mathieu equation is close to the dynamic output characteristics of the resonant gyroscope.The experimental analysis shows that the theoretical curve and the experimental data processing results coincide perfectly,which means that the approximate solution of the Mathieu equation can present the dynamic output characteristic of the resonant gyroscope.The theoretical approach and the experimental results of the Mathieu equation approximate solution are obtained,which provides a reference for the robust design of the resonant gyroscope. 展开更多
关键词 resonant gyroscopes dynamic characteristics Mathieu equation approximate solution
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Influence of flexible solar arrays on vibration isolation platform of control moment gyroscopes 被引量:9
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作者 Yao Zhang Jing-Rui Zhang Shi-Jie Xu 《Acta Mechanica Sinica》 SCIE EI CAS CSCD 2012年第5期1479-1487,共9页
A high-performance vibration isolation platform (VIP) has been developed for a cluster of control moment gyroscopes (CMGs). CMGs have long been used for satellite attitude control. In this paper, the influence of ... A high-performance vibration isolation platform (VIP) has been developed for a cluster of control moment gyroscopes (CMGs). CMGs have long been used for satellite attitude control. In this paper, the influence of flexible solar arrays on a passive multi-strut VIP of CMGs for a satellite is analyzed. The reasonable parameters design of flexi- ble solar arrays is discussed. Firstly, the dynamic model of the integrated satellite with flexible solar arrays, the VIP and CMGs is conducted by Newton-Euler method. Then based on reasonable assumptions, the transmissibility matrix of the VIP is derived. Secondly, the influences of the flexible solar arrays on both the performance of the VIP and the stability of closed-loop control systems are analyzed in detail. The parameter design limitation of these solar arrays is discussed. At last, by selecting reasonable parameters for both the VIP and flexible solar arrays, the attitude stabilization performance with vibration isolation system is predicted via simulation. 展开更多
关键词 Control moment gyroscope Vibration isolationplatform Attitude control Ultra quiet platform
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Finite-time stabilization of uncertain non-autonomous chaoticgyroscopes with nonlinear inputs 被引量:3
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作者 M.P.AGHABABA H.P.AGHABABA 《Applied Mathematics and Mechanics(English Edition)》 SCIE EI 2012年第2期155-164,共10页
Gyroscopes are one of the most interesting and everlasting nonlinear nonautonomous dynamical systems that exhibit very complex dynamical behavior such as chaos. In this paper, the problem of robust stabilization of th... Gyroscopes are one of the most interesting and everlasting nonlinear nonautonomous dynamical systems that exhibit very complex dynamical behavior such as chaos. In this paper, the problem of robust stabilization of the nonlinear non-autonomous gyroscopes in a given finite time is studied. It is assumed that the gyroscope system is perturbed by model uncertainties, external disturbances, and unknown parameters. Besides, the effects of input nonlinearities are taken into account. Appropriate adaptive laws are proposed to tackle the unknown parameters. Based on the adaptive laws and the finite-time control theory, discontinuous finite-time control laws are proposed to ensure the finite-time stability of the system. The finite-time stability and convergence of the closed-loop system are analytically proved. Some numerical simulations are presented to show the efficiency of the proposed finite-time control scheme and to validate the theoretical results. 展开更多
关键词 non-autonomous chaotic gyroscope finite-time control nonlinear input uncertainty unknown parameter
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Model predictive control of rigid spacecraft with two variable speed control moment gyroscopes 被引量:3
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作者 Pengcheng WU Hao WEN +1 位作者 Ti CHEN Dongping JIN 《Applied Mathematics and Mechanics(English Edition)》 SCIE EI CSCD 2017年第11期1551-1564,共14页
In this paper, an attitude maneuver control problem is investigated for a rigid spacecraft using an array of two variable speed control moment gyroscopes (VSCMGs) with gimbal axes skewed to each other. A mathematica... In this paper, an attitude maneuver control problem is investigated for a rigid spacecraft using an array of two variable speed control moment gyroscopes (VSCMGs) with gimbal axes skewed to each other. A mathematical model is constructed by taking the spacecraft and the gyroscopes together as an integrated system, with the coupling interaction between them considered. To overcome the singular issues of the VSCMGs due to the conventional torque-based method, the first-order derivative of gimbal rates and the second-order derivative of the rotor spinning velocity, instead of the gyroscope torques, are taken as input variables. Moreover, taking external disturbances into account, a feedback control law is designed for the system based on a method of nonlinear model predictive control (NMPC). The attitude maneuver can be realized fast and smoothly by using the proposed controller in this paper. 展开更多
关键词 integrated system variable speed control moment gyroscope (VSCMG) nonlinear model predictive control (NMPC)
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Design and Fabrication of MEMS Gyroscopes on the Silicon-on-insulator Substrate with Decoupled Oscillation Modes 被引量:1
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作者 XIE Jianbing YUAN Weizheng CHANG Honglong 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2010年第1期16-20,共5页
The mode coupling is a major factor to affect the precision of the micro electromechanical systems(MEMS) gyroscope. Currently, many MEMS gyroscopes with separate oscillation modes for drive and detection have been d... The mode coupling is a major factor to affect the precision of the micro electromechanical systems(MEMS) gyroscope. Currently, many MEMS gyroscopes with separate oscillation modes for drive and detection have been developed to decrease the mode coupling, but the gyroscope accuracy can not satisfy the high-precision demand well. Therefore, high performance decoupled MEMS gyroscopes is still a hot topic at present. An innovative design scheme for a MEMS gyroscope is designed, and in this design, the inertial mass is divided into three parts including the inner mass, the outer mass and the main frame mass. The masses are supported and separated by a set of mutually orthogonal beams to decouple their movements. Moreover, the design is modelled by multi-port-element network(MuPEN) method and the simulation results show that the mode coupling of the gyroscope between driving and sensing mode was eliminated effectively. Furthermore, we proposed a new silicon-on-insulator(SOI) process to fabricate the gyroscope. The scale factor of the fabricated gyroscope is 8.9 mV/((~)os) and the quality factor(Q-factor) is as high as 600 at atmosphere pressure, and then, the resonant frequency, scale factor and bias drift has been test. Process and test results show that the proposed MEMS gyroscope are effective for decrease mode coupling, furthermore, it can achieve a high performance at atmosphere pressure. Furthermore, the MEMS gyroscope can achieve a high performance at atmosphere pressure. The research can be taken as good advice for the design and fabrication of MEMS gyroscope, meanwhile, it also provides technical support for speeding up of MEMS gyroscope industrialization. 展开更多
关键词 micro electromechanical systems(MEMS) GYROSCOPE SILICON-ON-INSULATOR decoupled oscillation modes
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A Low-Noise Readout Circuit for Gyroscopes
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作者 Guanshi Wang Xiaowei Liu Changchun Dong 《Journal of Harbin Institute of Technology(New Series)》 EI CAS 2015年第5期42-45,共4页
In order to suppress the noise of gyroscopes,the method based on lock-in amplifier and capacitor matching of the low-noise readout circuit is proposed. Firstly,the principle to suppress the noise by lock-in amplifier ... In order to suppress the noise of gyroscopes,the method based on lock-in amplifier and capacitor matching of the low-noise readout circuit is proposed. Firstly,the principle to suppress the noise by lock-in amplifier is analyzed,and the noise model of front end is proposed. Secondly,the noise optimization for the charge amplifier is presented according to the noise model of front end. Finally,a readout circuit is constructed by this approach. The measurement results show that the parasitic capacitance of front end is 18 p F,and the noise at resonant frequency( 4 k Hz) is 133 n V / Hz1 / 2,and the overall bias stability is 30° /h,and the noise level is 0. 003° /( s·Hz1 / 2). The noise of the gyroscope with the low-noise readout by this method is suppressed effectively. 展开更多
关键词 LOW-NOISE noise optimization charge amplifier GYROSCOPE READOUT
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Temperature compensation method for low cost three-axis MEMS digital angular rate gyroscopes
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作者 涂海峰 刘莉 《Journal of Beijing Institute of Technology》 EI CAS 2016年第1期28-34,共7页
In recent years,a large number of small volume,low cost micro electro mechanical systems(MEMS)digital three-axis angular rate gyroscopes have been developed and widely used in civil and military fields.However,these... In recent years,a large number of small volume,low cost micro electro mechanical systems(MEMS)digital three-axis angular rate gyroscopes have been developed and widely used in civil and military fields.However,these kinds of gyroscopes have poor performances in initial zero-bias,temperature drift,In-Run bias stability,bias repeatability,etc.,their output errors need to be compensated before being used.Based on a lot of experiments,the temperature drift and the initial zero-bias are the major error sources in the MEMS gyroscopes output data.Due to the poor repeatability of temperature drift,the temperature compensation coefficients need to be recalculated every time before using.In order to recalculate parameters of the temperature compensation model quickly,a 1st-order polynomial model of temperature is established,then a forgetting factor recursive least squares estimator will be adopted to identify the model parameters in real time.Static and dynamic experimental data shows that this method removed/compensated the temperature drift and initial zero-bias from the output of the gyroscopes effectively. 展开更多
关键词 MEMS sensors angular rate gyroscope least squares temperature compensation
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Quasi-anti-parity–time-symmetric single-resonator micro-optical gyroscope with Kerr nonlinearity
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作者 耿靖童 徐书逸 +4 位作者 靳婷 丁舒林 杨柳 王颖 张勇刚 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第1期436-440,共5页
Parity–time(PT) and quasi-anti-parity–time(quasi-APT) symmetric optical gyroscopes have been proposed recently which enhance Sagnac frequency splitting. However, the operation of gyroscopes at the exceptional point(... Parity–time(PT) and quasi-anti-parity–time(quasi-APT) symmetric optical gyroscopes have been proposed recently which enhance Sagnac frequency splitting. However, the operation of gyroscopes at the exceptional point(EP) is challenging due to strict fabrication requirements and experimental uncertainties. We propose a new quasi-APT-symmetric micro-optical gyroscope which can be operated at the EP by easily shifting the Kerr nonlinearity. A single resonator is used as the core sensitive component of the quasi-APT-symmetric optical gyroscope to reduce the size, overcome the strict structural requirements and detect small rotation rates. Moreover, the proposed scheme also has an easy readout method for the frequency splitting. As a result, the device achieves a frequency splitting 10~5 times higher than that of a classical resonant optical gyroscope with the Earth's rotation. This proposal paves the way for a new and valuable method for the engineering of micro-optical gyroscopes. 展开更多
关键词 optical gyroscopes quasi-anti-parity–time(quasi-APT)symmetric system exceptional point(EP) the Kerr nonlinearity
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A D-optimal Multi-position Calibration Method for Dynamically Tuned Gyroscopes 被引量:5
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作者 FU Li ZHU Yongquan WANG Lingling WANG Xinling 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2011年第2期210-218,共9页
This paper presents a novel experimental design to greatly improve the calibration accuracy of the acceleration-insensitive bias and the acceleration-sensitive bias of the dynamically tuned gyroscopes(DTGs).In order... This paper presents a novel experimental design to greatly improve the calibration accuracy of the acceleration-insensitive bias and the acceleration-sensitive bias of the dynamically tuned gyroscopes(DTGs).In order to reduce experimental cost,the D-optimal criteria with constraints are constructed.The turntable positions and the number of test points are chosen to build D-optimal experimental designs.The D-optimal experimental designs are tested by multi-position calibration experiment for tactical-grade DTGs.Test results show that,with the same cost,the fit uncertainty is reduced by about 50% by using the D-optimal 8-position experimental procedure,compared to using a defacto standard experimental procedure in ANSI/IEEE Std 813-1988.Furthermore,the new experimental procedure almost achieves optimal accuracy with only 12-position which is half the cost of the widely adopted 24-position experimental procedure for achieving optimal accuracy. 展开更多
关键词 optimization methods CALIBRATION gyroscopes error compensation design for testability
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Decentralized adaptive sliding mode control of a space robot actuated by control moment gyroscopes 被引量:5
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作者 Jia Yinghong Xu Shijie 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2016年第3期688-703,共16页
An adaptive sliding mode control (ASMC) law is proposed in decentralized scheme for trajectory tracking control of a new concept space robot. Each joint of the system is a free ball joint capable of rotating with th... An adaptive sliding mode control (ASMC) law is proposed in decentralized scheme for trajectory tracking control of a new concept space robot. Each joint of the system is a free ball joint capable of rotating with three degrees of freedom (DOF). A cluster of control moment gyroscopes (CMGs) is mounted on each link and the base to actuate the system. The modified Rodrigues parameters (MRPs) are employed to describe the angular displacements, and the equations of motion are derived using Kane's equations. The controller for each link or the base is designed sep- arately in decentralized scheme. The unknown disturbances, inertia parameter uncertainties and nonlinear uncertainties are classified as a "lumped" matched uncertainty with unknown upper bound, and a continuous sliding mode control (SMC) law is proposed, in which the control gain is tuned by the improved adaptation laws for the upper bound on norm of the uncertainty. A gen- eral amplification function is designed and incorporated in the adaptation laws to reduce the control error without conspicuously increasing the magnitude of the control input. Uniformly ultimate boundedness of the closed loop system is proved by Lyapunov's method. Simulation results based on a three-link system verify the effectiveness of the proposed controller. 展开更多
关键词 Adaptation law Ball joint Control moment gyroscopes Sliding mode control Space robot Trajectory tracking
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Er-doped fiber ring laser gyroscopes operating in continuous waves 被引量:3
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作者 钱景仁 苏觉 +1 位作者 王许旭 朱冰 《Chinese Optics Letters》 SCIE EI CAS CSCD 2007年第4期229-231,共3页
A direction related polarizer was inserted into a ring laser cavity to eliminate one of the two eigen-modes as well as spatial hole burning of the gain medium in a bidirectional Er-doped fiber ring laser. Thus, a fibe... A direction related polarizer was inserted into a ring laser cavity to eliminate one of the two eigen-modes as well as spatial hole burning of the gain medium in a bidirectional Er-doped fiber ring laser. Thus, a fiber ring laser gyroscope (FRLG) operating in continuous wave was demonstrated. A beat signal of over 30-dB noise was observed and a good linear relation between the beat frequency shift and cavity rotation rate was obtained. 展开更多
关键词 Continuous wave lasers Fiber lasers gyroscopes
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Gyroscope Dynamic Balance Counterweight Prediction Based on Multi-Head ResGAT Networks
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作者 Wuyang Fan Shisheng Zhong 《Computer Modeling in Engineering & Sciences》 SCIE EI 2024年第6期2525-2555,共31页
The dynamic balance assessment during the assembly of the coordinator gyroscope significantly impacts the guidance accuracy of precision-guided equipment.In dynamic balance debugging,reliance on rudimentary counterwei... The dynamic balance assessment during the assembly of the coordinator gyroscope significantly impacts the guidance accuracy of precision-guided equipment.In dynamic balance debugging,reliance on rudimentary counterweight empirical formulas persists,resulting in suboptimal debugging accuracy and an increased repetition rate.To mitigate this challenge,we present a multi-head residual graph attention network(ResGAT)model,designed to predict dynamic balance counterweights with high precision.In this research,we employ graph neural networks for interaction feature extraction from assembly graph data.An SDAE-GPC model is designed for the assembly condition classification to derive graph data inputs for the ResGAT regression model,which is capable of predicting gyroscope counterweights under small-sample conditions.The results of our experiments demonstrate the effectiveness of the proposed approach in predicting dynamic gyroscope counterweight in its assembly process.Our approach surpasses current methods in mitigating repetition rates and enhancing the assembly efficiency of gyroscopes. 展开更多
关键词 GYROSCOPE COUNTERWEIGHT ASSEMBLY small-sample ResGAT repetition rate
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Design of the low-loss waveguide coil for interferometric integrated optic gyroscopes 被引量:1
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作者 Yao Fei Tianshu Yang +4 位作者 Zhaofeng Li Wen Liu Xiaodong Wang Wanhua Zheng Fuhua Yang 《Journal of Semiconductors》 EI CAS CSCD 2017年第4期73-77,共5页
With the development of manufacturing technology,the propagation loss of the planar waveguide is getting lower and lower,and the shot-noise-limited sensitivity of an HOG will be greatly improved.When the propagation l... With the development of manufacturing technology,the propagation loss of the planar waveguide is getting lower and lower,and the shot-noise-limited sensitivity of an HOG will be greatly improved.When the propagation loss is getting lower,improper coupling-out waveguide in the waveguide coil may lead to non-ignorable bending loss and crosstalk because of the small radius of curvature and X-junction.In this paper,different couplingout waveguides have been designed.After calculation and optimization by the beam propagation method,we found the proper coupling-out waveguide having relatively low propagation loss,which can improve the sensitivity of the HOG. 展开更多
关键词 gyroscopes Sagnac effect planar waveguides integrated optics
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The effect of parasitic charge on the output stability of MEMS gyroscopes
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作者 Nan Liu Yan Su +4 位作者 Xin Tong Guowei Han Chaowei Si Zhaofeng Li Jin Ning 《Journal of Semiconductors》 EI CAS CSCD 2018年第8期47-52,共6页
Output voltage drifting was observed in MEMS gyroscopes. Other than the quadrature error, frequency mismatch and quality factor, the dielectric parasitic charge was thought to be a major determinant. We studied the me... Output voltage drifting was observed in MEMS gyroscopes. Other than the quadrature error, frequency mismatch and quality factor, the dielectric parasitic charge was thought to be a major determinant. We studied the mechanism and variation of the parasitic charge in the MEMS gyroscopes, and analyzed the effect of the parasitic charge on the output stability. This phenomenon was extremely obvious in the Pyrex encapsulated MEMS gyroscopes. Due to the DC voltage required for the electrostatic actuation, the parasitic charge in the dielectric layer would accumulate and induce a residual voltage. This voltage had an impact on the resonant frequency of the gyroscopes, so as to affect the output stability. The theoretical studies were also confirmed by our experimental results. It was shown that the parasitic charge was harmful to the output stability of MEMS gyroscopes. 展开更多
关键词 dielectric parasitic charge micro-electro-mechanical system(MEMS) gyroscopes frequency drift DC voltage
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Effect of ^(60)Co-gamma radiation on the random walk error of interferometric fiber optic gyroscopes 被引量:4
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作者 JIN Jing WANG XueQin +1 位作者 SONG NingFang ZHANG ChunXi 《Science China(Technological Sciences)》 SCIE EI CAS 2010年第11期3056-3060,共5页
Two ^(60)Co-gamma radiation experiments were launched to explore the radiation effect on optical components and interferometric fiber optic gyroscope (IFOG). In optical components radiation experiment, the result show... Two ^(60)Co-gamma radiation experiments were launched to explore the radiation effect on optical components and interferometric fiber optic gyroscope (IFOG). In optical components radiation experiment, the result showed that polarization-maintaining (PM) fiber coil loss was the most affected parameter in all the RWC (random walk coefficient) related parameters, compared with the weak sensitivity of other components parameters. In the IFOG radiation experiment, the RWC performance degradation was found to be almost due to an increase of the PM fiber attenuation. Based on the experiment result, a RWC prediction model in radiation, which is obtained by embedding PM fiber loss expression into the RWC model, was built following a power law of dose and dose rate. An IFOG RWC in space radiation environment was predicted from radiation dose and dose rate by the RWC prediction model. This RWC value calculated from test data is fully accorded to the RWC value predicted from radiation dose. 展开更多
关键词 fiber optic gyroscope radiation effects random walk fiber loss
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A low-noise high-linearity interface ASIC for MEMS gyroscopes 被引量:3
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作者 方然 鲁文高 +4 位作者 王冠男 陶婷婷 张雅聪 陈中建 于敦山 《Journal of Semiconductors》 EI CAS CSCD 2013年第12期109-114,共6页
This paper presents a continuous-time analog interface ASIC for use in MEMS gyroscopes. A charge sensitive amplifier with a chopper stabilization method is adopted to suppress the low-frequency noise. In order to canc... This paper presents a continuous-time analog interface ASIC for use in MEMS gyroscopes. A charge sensitive amplifier with a chopper stabilization method is adopted to suppress the low-frequency noise. In order to cancel the effect caused by the gyroscope capacitive mismatch, a mismatch auto-compensation circuit is imple- mented. The gain and phase shift of the drive closed loop is controlled separately by an auto gain controller and an adjustable phase shifter. The chip is fabricated in a 0.35 μm CMOS process. The test of the chip is performed with a vibratory gyroscope, and the measurement shows that the noise floor is 0.003°/s√Hz, and the measured drift stability is 43°/h. Within -300 to 300°/s of rotation rate input range, the non-linearity is less than 0.1%. 展开更多
关键词 capacitive interface circuit MEMS gyroscope low noise ASIC
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Resonant pitch and roll silicon gyroscopes with sub-micron-gap slanted electrodes:Breaking the barrier toward high-performance monolithic inertial measurement units 被引量:4
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作者 Haoran Wen Anosh Daruwalla Farrokh Ayazi 《Microsystems & Nanoengineering》 EI CSCD 2017年第1期332-340,共9页
This paper presents the design,fabrication,and characterization of a novel high quality factor(Q)resonant pitch/roll gyroscope implemented in a 40μm(100)silicon-on-insulator(SOI)substrate without using the deep react... This paper presents the design,fabrication,and characterization of a novel high quality factor(Q)resonant pitch/roll gyroscope implemented in a 40μm(100)silicon-on-insulator(SOI)substrate without using the deep reactive-ion etching(DRIE)process.The featured silicon gyroscope has a mode-matched operating frequency of 200 kHz and is the first out-of-plane pitch/roll gyroscope with electrostatic quadrature tuning capability to fully compensate for fabrication non-idealities and variation in SOI thickness.The quadrature tuning is enabled by slanted electrodes with sub-micron capacitive gaps along the(111)plane created by an anisotropic wet etching.The quadrature cancellation enables a 20-fold improvement in the scale factor for a typical fabricated device.Noise measurement of quadrature-cancelled mode-matched devices shows an angle random walk(ARW)of 0.63°√h^(−1) and a bias instability of 37.7°h^(−1),partially limited by the noise of the interface electronics.The elimination of silicon DRIE in the anisotropically wet-etched gyroscope improves the gyroscope robustness against the process variation and reduces the fabrication costs.The use of a slanted electrode for quadrature tuning demonstrates an effective path to reach high-performance in future pitch and roll gyroscope designs for the implementation of single-chip high-precision inertial measurement units(IMUs). 展开更多
关键词 anisotropic wet etching MEMS resonant pitch/roll gyroscope quadrature cancellation slanted electrode
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Substrate-decoupled,bulk-acoustic wave gyroscopes:Design and evaluation of next-generation environmentally robust devices 被引量:3
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作者 Diego E.Serrano Mohammad F.Zaman +6 位作者 Amir Rahafrooz Peter Hrudey Ron Lipka Duane Younkin Shin Nagpal Ijaz Jafri Farrokh Ayazi 《Microsystems & Nanoengineering》 EI 2016年第1期239-248,共10页
This paper reports on a new type of high-frequency mode-matched gyroscope with significantly reduced dependencies on environmental stimuli such as temperature,vibration,and shock.A novel stress-isolation system is use... This paper reports on a new type of high-frequency mode-matched gyroscope with significantly reduced dependencies on environmental stimuli such as temperature,vibration,and shock.A novel stress-isolation system is used to effectively decouple an axis-symmetric bulk-acoustic wave(BAW)vibratory gyro from its substrate,minimizing the effect that external sources of error have on the offset and scale factor of the device.Substrate-decoupled(SD)BAW gyros with a resonance frequency of 4.3 MHz and Q values near 60000 were implemented using the high aspect ratio poly and single-crystal silicon(HARPSS)process to achieve ultra-narrow capacitive gaps.Wafer-level packaged sensors were interfaced with a customized application-specific integrated circuit(ASIC)to achieve low variations in the offset across temperature(±26°s^(−1) from−40 to 85℃),supreme random-vibration immunity(0.012°s^(−1) gRMS−1)and excellent shock rejection.With a scale factor of 800μV(°s^(−1))^(−1),the SD-BAW gyro system attains a large full-scale range(±1250°s^(−1))with a non-linearity of less than 0.07%.A measured angle-random walk(ARW)of 0.39°/√h and a bias instability of 10.5°h^(−1) are dominated by the thermal and flicker noise of the integrated circuit(IC),respectively.Additional measurements using external electronics show bias-instability values as low as 3.5°h−1,which are limited by feed-through signals coupled from the drive loop to the sense channel,which can be further reduced through proper re-routing of the gyroscope pin-out configuration. 展开更多
关键词 Bulk-acoustic wave environmental stability MEMS gyroscope support loss vibration rejection
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Experimental optimization of an erbium-doped super-fluorescent fiber source for fiber optic gyroscopes
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作者 常金龙 谭满清 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2011年第10期62-66,共5页
Double-pass forward and double-pass backward erbium-doped super-fluorescent fiber sources(EDSFSs) were combined in one configuration.A 980 nm laser diode pumped the same erbium-doped fiber from both directions using... Double-pass forward and double-pass backward erbium-doped super-fluorescent fiber sources(EDSFSs) were combined in one configuration.A 980 nm laser diode pumped the same erbium-doped fiber from both directions using a coupler as a power splitter.The double-pass configuration was achieved by coating the fiber end face.Firstly,an optimal fiber length was found to obtain a high stability of output light wavelength with pump power, and then 1530/1550 nm wavelength division multiplexing was used for spectrum planarization,which expanded the bandwidth to more than 22 nm.The final step was a test of temperature stability.The results show that the rate of the central wavelength change kept to below 3.5 ppm/℃in the range of -40 to 60℃and 1-2 ppm/℃in the range of 20-30℃.Considering all the three factors of the fiber optic gyro applications,we selected 80 mA as the pump current,in which case the central wavelength temperature instability was calculated as 2.70 ppm/℃, 3 dB bandwidth 22.85 nm,spectral flatness 0.2 dB,output power 5.17 mW and power efficiency up to 9.92%.This experimental result has a significant reference value to the selection of devices and proper design of ED-SFSs for the application of high-precision fiber optic gyroscopes. 展开更多
关键词 erbium-doped super-fluorescent fiber source central wavelength stability pump from both directions spectrum planarization coating on the fiber end high-precision fiber optic gyroscope
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