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Cleaning of two mirrors in the first mirror unit using radiofrequency capacitively coupled plasma
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作者 Chenxue WANG Rong YAN +5 位作者 Yuming LIU Su XU Lei MU Wei ZHENG Rui DING Junling CHEN 《Plasma Science and Technology》 SCIE EI CAS CSCD 2024年第9期165-171,共7页
First mirror(FM)cleaning,using radio frequency(RF)plasma,has been proposed to recover FM reflectivity in nuclear fusion reactors such as the International Thermonuclear Experimental Reactor(ITER).To investigate the in... First mirror(FM)cleaning,using radio frequency(RF)plasma,has been proposed to recover FM reflectivity in nuclear fusion reactors such as the International Thermonuclear Experimental Reactor(ITER).To investigate the influence of simultaneous cleaning of two mirrors on mirror cleaning efficiency and uniformity,experiments involving single-mirror cleaning and dual-mirror cleaning were conducted using RF capacitively coupled plasma in the laboratory.For the test and simultaneous cleaning of two mirrors,the FM and second mirror(SM),both measuring 110 mm×80 mm,were placed inside the first mirror unit(FMU).They were composed of 16 mirror samples,each with a dimension of 27.5 mm×20 mm.These mirror samples consist of a titanium-zirconium-molybdenum alloy substrate,a 500 nm Mo intermediate layer and a 30 nm Al_(2)O_(3) surface coating as a proxy for Be impurities.The cleaning of a single first mirror(SFM)and the simultaneous cleaning of the FM and SM(DFM and DSM)lasted for 9 h using Ar plasma at a pressure of 1 Pa.The total reflectivity of mirror samples on the DSM did not fully recover and varied with location,with a self-bias of−140 V.With a self-bias of−300 V,the total reflectivity of mirror samples on the SFM and DFM was fully recovered.The energy dispersive spectrometer results demonstrated that the Al_(2)O_(3) coating had been completely removed from these mirror samples.However,the mass loss of each mirror sample on the SFM and DFM before and after cleaning varied depending on its location,with higher mass loss observed for mirror samples located in the corners and lower loss for those in the center.Compared with SM cleaning,the simultaneous cleaning of two mirrors reduced the difference between the highest and lowest mass loss.Furthermore,this mass loss for the mirror samples of the DFM facing the DSM was increased.This indicated that mirror samples cleaned face to face in the FMU simultaneously could influence each other,highlighting the need for special attention in future studies. 展开更多
关键词 first mirror unit dual-mirror cleaning REFLECTIVITY sputtering rate
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Fuzzy Proportional Integral Derivative control of a voice coil actuator system for adaptive deformable mirrors
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作者 Ziqiang Cui Heng Zuo +4 位作者 Weikang Qiao Hao Li Fujia Du Yifan Wang Jinrui Guo 《Astronomical Techniques and Instruments》 CSCD 2024年第3期179-186,共8页
Research on adaptive deformable mirror technology for voice coil actuators(VCAs)is an important trend in the development of large ground-based telescopes.A voice coil adaptive deformable mirror contains a large number... Research on adaptive deformable mirror technology for voice coil actuators(VCAs)is an important trend in the development of large ground-based telescopes.A voice coil adaptive deformable mirror contains a large number of actuators,and there are problems with structural coupling and large temperature increases in their internal coils.Additionally,parameters of the traditional proportional integral derivative(PID)control cannot be adjusted in real-time to adapt to system changes.These problems can be addressed by introducing fuzzy control methods.A table lookup method is adopted to replace real-time calculations of the regular fuzzy controller during the control process,and a prototype platform has been established to verify the effectiveness and robustness of this process.Experimental tests compare the control performance of traditional and fuzzy proportional integral derivative(Fuzzy-PID)controllers,showing that,in system step response tests,the fuzzy control system reduces rise time by 20.25%,decreases overshoot by 78.24%,and shortens settling time by 67.59%.In disturbance rejection experiments,fuzzy control achieves a 46.09%reduction in the maximum deviation,indicating stronger robustness.The Fuzzy-PID controller,based on table lookup,outperforms the standard controller significantly,showing excellent potential for enhancing the dynamic performance and disturbance rejection capability of the voice coil motor actuator system. 展开更多
关键词 Adaptive optics Deformable mirror Voice coil actuator Fuzzy control
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Development of aperiodic multilayer mirrors operated at W-Lβline for plasma diagnostics application
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作者 Ze‑Hua Yang Jing‑Tao Zhu +7 位作者 Zhong‑Liang Li Hong‑Xin Luo Shang‑Yu Si Yun‑Ping Zhu Li Zhao Kuan Ren Feng Wang Rong‑Qing Yi 《Nuclear Science and Techniques》 SCIE EI CAS CSCD 2023年第11期77-84,共8页
Multilayer interference mirrors play a pivotal role in spectroscopic diagnostic systems,which probe electron temperature and density during inertial confinement fusion processes.In this study,aperiodic Mo/B_(4)C multi... Multilayer interference mirrors play a pivotal role in spectroscopic diagnostic systems,which probe electron temperature and density during inertial confinement fusion processes.In this study,aperiodic Mo/B_(4)C multilayer mirrors of varied thick-nesses were investigated for X-ray plasma diagnostics at the 9.67-keV W-Lβline.The thickness distribution of the aperiodic multilayers was designed using the first Bragg diffraction condition and then optimized through a simplex algorithm to realize a narrow bandwidth and consistent spectral response.To enhance spectral accuracy,further refinements were undertaken by matching the grazing incidence X-ray reflectivity data with actual structural parameters.X-ray reflectivity measurements from the SSRF synchrotron radiation facility on the optimized sample showed a reflectivity of 29.7±2.6%,flat-band range of 1.3 keV,and bandwidth of 1.7 keV,making it suitable for high-temperature plasma diagnostics.The study explored the potential of predicting the 9.67 keV reflectivity spectrum using the fitting data from the grazing incidence X-ray reflectivity curves at 8.05 keV.Additionally,the short-term thermal stability of an aperiodic multilayer was assessed using temperature-dependent in situ X-ray measurements.Shifts in the reflectivity spectrum during annealing were attributed to interdiffusion and interfacial relaxation.The research team recommends the aperiodic Mo/B_(4)C multilayer mirror for operations below 300℃. 展开更多
关键词 X-ray multilayer mirror Aperiodic multilayer Flat response Sputtering deposition Synchrotron radiation
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STRUCTURE OF BLACK PATINA ON THE ANCIENT BRONZE MIRRORS 被引量:1
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作者 马肇曾 杜凌 +2 位作者 方春英 尹秀兰 金莲姬 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 1996年第2期126+121-126,共7页
X-ray diffaction analysis(XRDA)data of the black or brown patina on the surfaces of eight kinds of bronze mirror samples show 4 or 5 broad diffuse peaks which corresponding to almost the same 20 angle, while their mat... X-ray diffaction analysis(XRDA)data of the black or brown patina on the surfaces of eight kinds of bronze mirror samples show 4 or 5 broad diffuse peaks which corresponding to almost the same 20 angle, while their matixes does not.These results indicate that those diffuse peaks were produced by the SnO2, microcrystals of 3  ̄5 nm size contained in the black or brown patina.The matrix of unearthed black patina bronze mirror numbered 223, gives strong XRDA diffraction peaks, indicating that there are a large amounts of non-oxidized bronze alloy particles surrounded by SnO2,which shows that the black patinas are not wholly metallic oxides (mainly SnO2),there are also a lot of original alloys of different sizes in grain in the patina.The bright-field image of the black patina sample gives the same result. 展开更多
关键词 black patina on ancient bronze mirrors SnO2 microcrystal metallic corrosion
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Mirrors and Puppets:Melanie’s Growing Pains in The Magic Toyshop
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作者 朱茜 《海外英语》 2020年第16期245-247,共3页
Two important motifs of The Magic Toyshop,mirrors and puppets,are highly symbolic.They,especially mirrors,play an important role in revealing the theme of Melanie’s growing pains at the cusp of adulthood.From narciss... Two important motifs of The Magic Toyshop,mirrors and puppets,are highly symbolic.They,especially mirrors,play an important role in revealing the theme of Melanie’s growing pains at the cusp of adulthood.From narcissistic proclivities to first“sexual”transgression,from falling victim to Uncle Philip’s manipulation to rebellion against him with her“hero”Finn,the hero⁃ine went through one hardship after another,gradually grew out of her reflection in the mirror and entered the adult world. 展开更多
关键词 mirrors Puppets Melanie The Magic Toyshop
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A Statistical Method for Characterizing CMOS Process Fluctuations in Subthreshold Current Mirrors 被引量:2
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作者 张雷 余志平 贺祥庆 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第1期82-87,共6页
A novel method to characterize CMOS process fluctuations in subthreshold current mirrors (SCM) is reported. The proposed model is succinct in methodology and calculation complexity compared with previous statistical... A novel method to characterize CMOS process fluctuations in subthreshold current mirrors (SCM) is reported. The proposed model is succinct in methodology and calculation complexity compared with previous statistical models. However,it provides favorable estimations of CMOS process fluctuations on the SCM circuit, which makes it promising for engineering applications. The model statistically abstracts physical parameters, which depend on the IC process, into random variables with certain mean values and standard deviations, while aggregating all the random impacts into a discrete martingale. The correctness of the proposed method is experimentally verified on an SCM circuit implemented in an SMIC 0.18μm CMOS 1P6M mixed signal process with a conversion factor of 100 in an input range from 100pA to lμA. The pro- posed theory successfully predicts - 10% of die-to-die fluctuation measured in the experiment, and also suggests the -lmV of threshold voltage standard deviation over a single die,which meets the process parameters suggested by the design kit from the foundry. The deviations between calculated probabilities and measured data are less than 8%. Meanwhile, pertinent suggestions concerning high fluctuation tolerance subthreshold analog circuit design are also made and discussed. 展开更多
关键词 CMOS process fluctuations subthreshold current mirror random variable PROBABILITY discrete martingale
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A slope-based decoupling algorithm to simultaneously control dual deformable mirrors in a woofer–tweeter adaptive optics system 被引量:3
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作者 Tao Cheng Wenjin Liu +2 位作者 Boqing Pang Ping Yang Bing Xu 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第7期248-256,共9页
We propose a slope-based decoupling algorithm to simultaneously control the dual deformable mirrors (DMs) in a woofer-tweeter adaptive optics system. This algorithm can directly use the woofer's response matrix mea... We propose a slope-based decoupling algorithm to simultaneously control the dual deformable mirrors (DMs) in a woofer-tweeter adaptive optics system. This algorithm can directly use the woofer's response matrix measured from a Shack-Hartmann wave-front sensor to construct a slope-based orthogonal basis, and then selectively distribute the large- amplitude low-order aberration to woofer DM and the remaining aberration to tweeter DM through the slope-based orthogonal basis. At the same moment, in order to avoid the two DMs generating opposite compensation, a constraint matrix used to reset tweeter control vector is convenient to be calculated with the slope-based orthogonal basis. Numeral simulation demonstrates that this algorithm has a good performance to control the adaptive optics system with dual DMs simultaneously. Compared with the typical decoupling algorithm, this algorithm can take full use of the compensation ability of woofer DM and release the stroke of tweeter DM to compensate high-order aberration. More importantly, it does not need to measure the accurate shape of tweeter's influence function and keeps better performance of restraining the coupling error with the continuous-dynamic aberration. 展开更多
关键词 dual deformable mirrors decoupling algorithm adaptive optics
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Effects of deposition temperature on optical properties of MgF2 over-coated Al mirrors in the VUV 被引量:1
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作者 Chun Guo Bin-Cheng Li +1 位作者 Ming-Dong Kong Da-Wei Lin 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第11期349-353,共5页
Both long-term environmental durability and high reflectance of protected-Al mirrors are of great importance for developing the optical instruments in the vacuum ultraviolet(VUV) applications. In this paper, the depen... Both long-term environmental durability and high reflectance of protected-Al mirrors are of great importance for developing the optical instruments in the vacuum ultraviolet(VUV) applications. In this paper, the dependence of spectral property and environmental durability of MgF2 over-coated Al mirrors using a 3-step method on deposition temperature of the outermost MgF2 layer are investigated in detail. Optics(reflectance), structure(surface morphology and crystalline), and environmental durability(humidity test) are characterized and discussed. The results show that both optical and moistureresistant properties of MgF2 over-coated Al mirrors are dependent on MgF2 deposition temperature, and the optimal deposition temperature for the outermost MgF2 layer should be between 250℃ and 300℃ for MgF2 over-coated Al mirrors to have both reasonably high reflectance in the VUV spectral range and high moisture resistance for long lifetime applications. 展开更多
关键词 protected-Al mirrors reflectance VACUUM ULTRAVIOLET MGF2
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Formation of Black Patina on Bronze Mirrors Caused by Multiphenol
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作者 MA Zhaozeng JIN Lianji YIN Xiulan (Applied Science School, USTB, Beijing 100083, China) 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 1997年第2期43-46,共4页
Hot solution of hydroquinone is oxidized by air forming quinone and quinhydrone, both of which have weak oxidizeability, enabling to oxidize metals on the surface of bronze mirror samples forming black and brilliant p... Hot solution of hydroquinone is oxidized by air forming quinone and quinhydrone, both of which have weak oxidizeability, enabling to oxidize metals on the surface of bronze mirror samples forming black and brilliant patina. SEM and electron micro probe analysis show that Cu content is lower than that of the original alloy due to Cu loss; Sn content is higher than the original alloy in patina. This indicates that humic acid is not the substance resulting in making black patina on the bronze mirror surface, but the black patina which produced from hydroquinone solution absence of Si, Al and Mg. 展开更多
关键词 bronze mirrors black patina multiphenol metallic corrosion
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Formation of Black Patina on Bronze Mirrors Caused by Humic Acid
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作者 MA Zhaozeng JIN Lianji YIN Xiulan (Applied Science School, USTB, Beijing 100083, China) 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 1997年第2期38-42,共5页
The formation of black patina caused by soil humic acid under different conditions has been studied,and the black, grey and brown shiny surfaces prepared in laboratory have been analysed. The formation of tin-rich shi... The formation of black patina caused by soil humic acid under different conditions has been studied,and the black, grey and brown shiny surfaces prepared in laboratory have been analysed. The formation of tin-rich shiny black surface on mirrors was the product of the soil corrosion of the bronze mirrors. It is formed by reaction between the alloy and the humic acid in soil, and leaching of copper and lead oxides through a long period of time when the mirrors were buried under the ground. A dense cormsion-resistallt layer on the bronze mirrors consisted predominantly of stannic oxide. 展开更多
关键词 bronze mirrors black patina humic acid soil corrosion
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Influence of low temperature on the surface deformation of deformable mirrors
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作者 尤俊成 官春林 周虹 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第5期215-223,共9页
The two factors which influence the low temperature performance of deformable mirrors(DMs) are the piezoelectric stroke of the actuators and the thermally induced surface deformation of the DM. A new theory was prop... The two factors which influence the low temperature performance of deformable mirrors(DMs) are the piezoelectric stroke of the actuators and the thermally induced surface deformation of the DM. A new theory was proposed to explain the thermally induced surface deformation of the DM: because the thermal strain between the actuators and the base leads to an additional moment according to the theory of plates, the base will be bent and the bowing base will result in an obvious surface deformation of the facesheet. The finite element method(FEM) was used to prove the theory. The results showed that the thermally induced surface deformation is mainly caused by the base deformation which is induced by the coefficient of thermal expansion(CTE) mismatching; when the facesheet has similar CTE with the actuators, the surface deformation of the DM would be smoother. Then an optimized DM design was adopted to reduce the surface deformation of the DMs at low temperature. The low temperature tests of two 61-element discrete PZT actuator sample deformable mirrors and the corresponding optimized DMs were conducted to verify the simulated results. The results showed that the optimized DMs perform well. 展开更多
关键词 mirrors thermally actuator piezoelectric verify explain interferometer compensate hollow Diameter
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Effects of dispersion and filtering induced by periodic multilayer mirrors reflection on attosecond pulses
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作者 林承友 尹亮 +2 位作者 陈淑静 陈朝阳 丁迎春 《Chinese Physics B》 SCIE EI CAS CSCD 2016年第9期567-572,共6页
Using temporal and spectral methods,the effects of dispersion and filtering induced by Mo/Si multilayer mirrors reflection on incident attosecond pulses were studied.First,two temporal parameters,the pulse broadening ... Using temporal and spectral methods,the effects of dispersion and filtering induced by Mo/Si multilayer mirrors reflection on incident attosecond pulses were studied.First,two temporal parameters,the pulse broadening factor,and the energy loss factor,were defined to evaluate the effects of dispersion and filtering.Then,by analyzing these temporal parameters,we investigated and compared the dispersion and filtering effects on attosecond pulses.In addition,we explored the origins of pulse broadening and energy loss by analyzing the spectral and temporal characteristics of periodic Mo/Si multilayer mirrors.The results indicate that the filtering effect induced by Mo/Si multilayer mirrors reflection is the dominant reason for pulse broadening and energy loss. 展开更多
关键词 extreme ultraviolet region multilayer mirrors attosecond pulse pulse broadening
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Influence of Long-Term Plasma Irradiation on Metallic First Mirrors in HT-7 Tokamak 被引量:1
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作者 汤春江 李仁红 陈俊凌 《Plasma Science and Technology》 SCIE EI CAS CSCD 2008年第4期412-415,共4页
The first mirror (FM) samples made of polycrystal (PC) stainless steel (SS), molybdenum (Mo) and tungsten (W) were mounted at different locations in HT-7 tokamak to investigate the surface modifications caus... The first mirror (FM) samples made of polycrystal (PC) stainless steel (SS), molybdenum (Mo) and tungsten (W) were mounted at different locations in HT-7 tokamak to investigate the surface modifications caused by erosion and deposition. The optical transmission characteristics of first mirror samples were measured by a spectrophotometer. It was found that different irradiation environment had different influences on the first mirror surfaces, especially with wave antenna nearby. In addition, the erosion made the reflectivity of FM degrade to some extents as a whole. But the deposition on the mirror influences more than erosion does. Comparing the mirrors of SS, W and Mo, irradiated in the same environment, the W-mirror had the least changes in reflectivity with regularity, while the SS-mirror had most serious changes. 展开更多
关键词 first mirror REFLECTIVITY surface modification plasma HT-7
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Scheme for Entangling Two Distant Cavity Mirrors 被引量:1
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作者 ZHENG Shi-Biao 《Communications in Theoretical Physics》 SCIE CAS CSCD 2008年第4期925-927,共3页
A scheme is presented for the generation of entangled states for two cavity mirrors. In the scheme each mirror initially in a vacuum state interacts with a weak coherent field, resulting in a photon-number dependent k... A scheme is presented for the generation of entangled states for two cavity mirrors. In the scheme each mirror initially in a vacuum state interacts with a weak coherent field, resulting in a photon-number dependent kick. The detection of a photon leaking from the cavities collapses the two mirrors to an entangled state. 展开更多
关键词 entangled state cavity mirror coherent field
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Numerical model of the influence function of deformable mirrors based on Bessel Fourier orthogonal functions 被引量:1
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作者 Shun Li Sijiong Zhang 《Research in Astronomy and Astrophysics》 SCIE CAS CSCD 2014年第11期1504-1510,共7页
A numerical model is presented to simulate the influence function of de- formable mirror actuators. The numerical model is formed by Bessel Fourier orthog- onal functions, which are constituted of Bessel orthogonal fu... A numerical model is presented to simulate the influence function of de- formable mirror actuators. The numerical model is formed by Bessel Fourier orthog- onal functions, which are constituted of Bessel orthogonal functions and a Fourier basis. A detailed comparison is presented between the new Bessel Fourier model, the Zernike model, the Gaussian influence function and the modified Gaussian influence function. Numerical experiments indicate that the new numerical model is easy to use and more accurate compared with other numerical models. The new numerical model can be used for describing deformable mirror performances and numerical simulations of adaptive optics systems. 展开更多
关键词 INSTRUMENTATION adaptive optics -- deformable mirror
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Cleaning of HT-7 Tokamak Exposed First Mirrors by Radio Frequency Magnetron Sputtering Plasma
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作者 鄢容 陈俊凌 +2 位作者 陈龙威 丁锐 朱大焕 《Plasma Science and Technology》 SCIE EI CAS CSCD 2014年第12期1158-1162,共5页
The stainless steel (SS) first mirror pre-exposed in the deposition-dominated envi- ronment of the HT-7 tokamak was cleaned in the newly built radio frequency (RF) magnetron sputtering plasma device. The depositio... The stainless steel (SS) first mirror pre-exposed in the deposition-dominated envi- ronment of the HT-7 tokamak was cleaned in the newly built radio frequency (RF) magnetron sputtering plasma device. The deposition layer on the FM surface formed during the exposure was successfully removed by argon plasma with a RF power of about 80 W and a gas pressure of 0.087 Pa for 30 min. The total reflectivity of the mirrors was recovered up to 90% in the wavelength range of 300-800 nm, while the diffuse reflectivity showed a little increase, which was attributed to the increase of surface roughness in sputtering, and residual contaminants. The FMs made from single crystal materials could help to achieve a desired recovery of specular reflectivity in the future. 展开更多
关键词 radio frequency plasma sputtering first mirror CLEANING
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Laser beam shaping with magnetic fluid-based liquid deformable mirrors
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作者 吴智政 张柱 +4 位作者 孔祥会 吴君秋 王韬 刘梅 谢少荣 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第7期81-88,共8页
A new controllable laser beam shaping technique is demonstrated, where a magnetic fluid-based liquid deformable mirror is proposed to redistribute the laser phase profile and thus change the propagation property of th... A new controllable laser beam shaping technique is demonstrated, where a magnetic fluid-based liquid deformable mirror is proposed to redistribute the laser phase profile and thus change the propagation property of the beam. The mirror is driven by an inner miniature actuator array along with a large outer actuator. The inner actuator array is used for deforming the magnetic fluid surface, while the outer actuator is used to linearize the fluid surface response and amplify the magnitude of the deflection. In comparison to other laser beam shaping techniques, this technique offers the advantages such as simplicity, low cost, large shape deformation, and high adaptability. Based on a fabricated prototype of the liquid deformable mirror, an experimental AO system was set up to produce a desired conical surface shape that shaped the incident beam into a Bessel beam. The experimental results show the effectiveness of the proposed technique for laser beam shaping. 展开更多
关键词 laser beam shaping magnetic fluid deformable mirror Bessel beam
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Deposition Mitigation of the First Mirrors Exposed in EAST with Metal and Carbon Mixed Wall Materials
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作者 鄢容 陈俊凌 +1 位作者 陈龙威 朱大焕 《Plasma Science and Technology》 SCIE EI CAS CSCD 2014年第9期885-889,共5页
In order to investigate the effect of aperture geometry on deposition mitigation, stainless steel (SS) first mirrors (FMs) were fixed on the holders of protective aperture geometry with different depth-diameter ra... In order to investigate the effect of aperture geometry on deposition mitigation, stainless steel (SS) first mirrors (FMs) were fixed on the holders of protective aperture geometry with different depth-diameter ratios (DDRs) and exposed in the deposition dominated environment of EAST. A baffle was used during the wall conditioning. The surface properties and reflectivity of the FMs were characterized before and after exposure. It is shown that using aperture geometry and a baffle can effectively mitigate the impurities deposition. The degradation of the surface and specular reflectivity of the FMs is reduced with the increase of DDRs in the range of 0 to 2. The main contaminated elements in a low-Z and high-Z mixed wall materials environment were still carbon and oxygen. 展开更多
关键词 deposition mitigation specular reflectivity first mirror EAST
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Fabrication of Hinged Mirrors Using a Strain-Driven Self-Assembly Method on a GaAs Substrate
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作者 ZHOU Yan WANG Hai-Long +2 位作者 MA Chuan-He GONG Qian FENG Song-Lin 《Chinese Physics Letters》 SCIE CAS CSCD 2011年第7期298-300,共3页
Hinged mirror arrays are widely utilized for display applications and optical communication.They can be fabricated by an self-assembly technique using the strain in lattice-mismatched epitaxial layers.A multilayer str... Hinged mirror arrays are widely utilized for display applications and optical communication.They can be fabricated by an self-assembly technique using the strain in lattice-mismatched epitaxial layers.A multilayer structure including a strain-compensated layer,a digital alloy sacrificial layer and a strain bilayer,is grown by molecular-beam epitaxy.Self-assembly hinged mirrors on a GaAs substrate have been successfully fabricated by photolithography and selective etching.The hinge fabrication method with a strain bilayer is simple and flexible.Structures formed by multiple hinged plates will enable the self-assembly of more complex three-dimensional microstructures. 展开更多
关键词 ALLOY MIRROR enable
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Design of Ultra-Precision CNC Grinding Machine and Its Application in Machining Large Aspheric Mirrors
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作者 Bin Li Huiying Zhao +1 位作者 Jianpu Xi Dongxu Ren 《Journal of Harbin Institute of Technology(New Series)》 EI CAS 2015年第2期61-66,共6页
Large aspheric mirrors are needed for the remote sensing and ground based telescope optical systems,these mirrors are made of hard and brittle materials which require ultra-precision grinding process to guarantee the ... Large aspheric mirrors are needed for the remote sensing and ground based telescope optical systems,these mirrors are made of hard and brittle materials which require ultra-precision grinding process to guarantee the high profile accuracy and machining efficiency. The ultra-precision aspheric CNC grinding machine( UAG900) is presented by this paper,as well as its grinding capability. The hydrostatic bearings of high accuracy and stiffness are adopted by the linear and rotary motions to guarantee the mirror accuracy,material removal rate and subsurface damage. Disk type grinding wheel with arc edge is used. The material removal rate can be up to 360 mm3/ min to guarantee the machining efficiency during rough grinding using D180 diamond grinding wheel while the fine grinding is performed using D15 grinding wheel. It indicates that the grinding wheel radius measuring error is proportional to the profile error induced by the grinding path. The grinding step size is better to be 0. 01 mm for the reduction of the grinding movement accelerations and program length. The grinding path is planned and expressed based on the grinding mode according to the mirror shape. One540 mm×450 mm× 100 mm zerodur mirror is ground and re-ground using the measuring data acquired by the Leitz CMM. The final surface accuracy of P-V value is less than 5 μm after compensation grinding. 展开更多
关键词 ULTRA-PRECISION large aspheric mirror compensation grinding
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