Abrasive is the one of key influencing factors during chemical mechanical polishing（CMP） process. Currently, α-Alumina （α-Al2O3） particle, as a kind of abrasive, has been widely used in CMP slurries, but their h...Abrasive is the one of key influencing factors during chemical mechanical polishing（CMP） process. Currently, α-Alumina （α-Al2O3） particle, as a kind of abrasive, has been widely used in CMP slurries, but their high hardness and poor dispersion stability often lead to more surface defects. After being polished with composite particles, the surface defects of work pieces decrease obviously. So the composite particles as abrasives in slurry have been paid more attention. In order to reduce defect caused by pure α-Al2O3 abrasive, α-alumina-g-polystyrene sulfonic acid （α-Al2O3-g-PSS） composite abrasive was prepared by surface graft polymerization. The composition, structure and morphology of the product were characterized by Fourier transform infrared spectroscopy（FTIR）, X-ray photoelectron spectroscopy（XPS）, time-of-flight secondary ion mass spectroscopy（TOF-SIMS）, and scanning electron microscopy（SEM）, respectively. The results show that polystyrene sulfonic acid grafts onto α-Al2O3, and has well dispersibility. Then, the chemical mechanical polishing performances of the composite abrasive on glass substrate were investigated with a SPEEDFAM-16B-4M CMP machine. Atomic force microscopy（AFM） images indicate that the average roughness of the polished glass substrate surface can be decreased from 0.835 nm for pure α-Al2O3 abrasive to 0.583 nm for prepared α-Al2O3-g-PSS core-shell abrasive. The research provides a new and effect way to improve the surface qualities during CMP.展开更多
The precursors with NiCO3·2Ni（OH）2·2H2O, Fe2O3·nH2O coated alumina microspheres were prepared by the aqueous heterogeneous precipitation using metal salts, ammonium bicarbonate and α-Al2O3 micropowde...The precursors with NiCO3·2Ni（OH）2·2H2O, Fe2O3·nH2O coated alumina microspheres were prepared by the aqueous heterogeneous precipitation using metal salts, ammonium bicarbonate and α-Al2O3 micropowders as the starting materials. Magnetic metal Ni, α-Fe coated alumina, core-shell structural microspheres were successfully obtained by thermal reduction of the precursors at 700℃ for 2h, respectively. Powders of the precursors and the resultant metal （Ni, α-Fe） coated alumina micropowders were characterized by scanning electron microscopy, energy dispersive spectroscopy and X-ray diffraction. The results show that optimized precipitation parameters are concentration of alumina micropowders of 15g/L, rate of adding reactants of 5mL/min and pH value of 7.5. And under the optimized conditions, the spherical precursors without aggregations or agglomerations are obtained, then transferred into Ni, α-Fe coated alumina microspheres by thermal reduction. It is possible to adjust metal coating thicknesses and fabricate a multilayer structured metal/ceramics, core-shell microspherical powder materials.展开更多
A pH-responsive ceramic composite membrane was prepared by chemical graft polymerization of acrylic acid (AA) onto the KH-570 modified α-alumina membrane. The influence of monomer concentration on the gating characte...A pH-responsive ceramic composite membrane was prepared by chemical graft polymerization of acrylic acid (AA) onto the KH-570 modified α-alumina membrane. The influence of monomer concentration on the gating characteristics of the pH-responsive membrane was investigated. The FT-IR spectrum, contact angle and water filtration rate of the membrane were measured. The monomer concentration was found to have a remarkable effect on the pH-response coefficient and the water filtration rate. In addition, the grafted membrane exhibited fast and reversible response to the pH change in the external solution.展开更多
The solvothermal preparations of α alumina and boehmite crystallites have been investigated, and the effects of solvothermal conditions such as reactive medium and temperature on the phase, crystallization morphology...The solvothermal preparations of α alumina and boehmite crystallites have been investigated, and the effects of solvothermal conditions such as reactive medium and temperature on the phase, crystallization morphology and size of the crystallites have been discussed. The calculation of the stability energies of the growth units of the crystallites has been performed based on the model of anion coordinate polyhedron’s growth unit. The results could explain the formation mechanisms of the crystallites.展开更多
基金supported by National Natural Science Foundation of China (Grant No. 60773080, Grant No. 90923016)Innovation Program of Shanghai Municipal Education Commission, China (Grant No. 09ZZ86)Leading Academic Discipline Project of Shanghai Municipal Education Commission, China (Grant No. J50102)
文摘Abrasive is the one of key influencing factors during chemical mechanical polishing（CMP） process. Currently, α-Alumina （α-Al2O3） particle, as a kind of abrasive, has been widely used in CMP slurries, but their high hardness and poor dispersion stability often lead to more surface defects. After being polished with composite particles, the surface defects of work pieces decrease obviously. So the composite particles as abrasives in slurry have been paid more attention. In order to reduce defect caused by pure α-Al2O3 abrasive, α-alumina-g-polystyrene sulfonic acid （α-Al2O3-g-PSS） composite abrasive was prepared by surface graft polymerization. The composition, structure and morphology of the product were characterized by Fourier transform infrared spectroscopy（FTIR）, X-ray photoelectron spectroscopy（XPS）, time-of-flight secondary ion mass spectroscopy（TOF-SIMS）, and scanning electron microscopy（SEM）, respectively. The results show that polystyrene sulfonic acid grafts onto α-Al2O3, and has well dispersibility. Then, the chemical mechanical polishing performances of the composite abrasive on glass substrate were investigated with a SPEEDFAM-16B-4M CMP machine. Atomic force microscopy（AFM） images indicate that the average roughness of the polished glass substrate surface can be decreased from 0.835 nm for pure α-Al2O3 abrasive to 0.583 nm for prepared α-Al2O3-g-PSS core-shell abrasive. The research provides a new and effect way to improve the surface qualities during CMP.
文摘The precursors with NiCO3·2Ni（OH）2·2H2O, Fe2O3·nH2O coated alumina microspheres were prepared by the aqueous heterogeneous precipitation using metal salts, ammonium bicarbonate and α-Al2O3 micropowders as the starting materials. Magnetic metal Ni, α-Fe coated alumina, core-shell structural microspheres were successfully obtained by thermal reduction of the precursors at 700℃ for 2h, respectively. Powders of the precursors and the resultant metal （Ni, α-Fe） coated alumina micropowders were characterized by scanning electron microscopy, energy dispersive spectroscopy and X-ray diffraction. The results show that optimized precipitation parameters are concentration of alumina micropowders of 15g/L, rate of adding reactants of 5mL/min and pH value of 7.5. And under the optimized conditions, the spherical precursors without aggregations or agglomerations are obtained, then transferred into Ni, α-Fe coated alumina microspheres by thermal reduction. It is possible to adjust metal coating thicknesses and fabricate a multilayer structured metal/ceramics, core-shell microspherical powder materials.
基金Supported by the National Natural Science Foundation of China(Grant No.20776067)Natural Science Research Foundation of Jiangsu Education Office(Grant Nos.07KJA15012and05KJB530009)
文摘A pH-responsive ceramic composite membrane was prepared by chemical graft polymerization of acrylic acid (AA) onto the KH-570 modified α-alumina membrane. The influence of monomer concentration on the gating characteristics of the pH-responsive membrane was investigated. The FT-IR spectrum, contact angle and water filtration rate of the membrane were measured. The monomer concentration was found to have a remarkable effect on the pH-response coefficient and the water filtration rate. In addition, the grafted membrane exhibited fast and reversible response to the pH change in the external solution.
文摘The solvothermal preparations of α alumina and boehmite crystallites have been investigated, and the effects of solvothermal conditions such as reactive medium and temperature on the phase, crystallization morphology and size of the crystallites have been discussed. The calculation of the stability energies of the growth units of the crystallites has been performed based on the model of anion coordinate polyhedron’s growth unit. The results could explain the formation mechanisms of the crystallites.
