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聚酰亚胺LB膜真空热解制备β-SiC膜的STM观察 被引量:1
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作者 金邦坤 丛树昕 何平笙 《高等学校化学学报》 SCIE EI CAS CSCD 北大核心 2002年第9期1826-1828,共3页
The surface morphologies of polyimide LB film and the SiC film pyrolyzed from polyimide LB film were studied with STM technique. The results show that molecular chains of polyimide LB film are highly oriented in certa... The surface morphologies of polyimide LB film and the SiC film pyrolyzed from polyimide LB film were studied with STM technique. The results show that molecular chains of polyimide LB film are highly oriented in certain scale, the SiC film keeps the similar regular structure to that of polyimide LB film, suggesting that the SiC formation reaction proceeds on the basis of the lattice of polyimide molecules. 展开更多
关键词 聚酰亚胺 LB 真空热解 制备 β-sic膜 扫描隧道显微镜 表面形态结构 碳化硅
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